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1. 发明申请

WO2020194267A1 METHOD AND APPARARUS FOR PRINTING A PERIODIC PATTERN WITH A VARYING DUTY CYCLE 审中-公开
公开(公告)号：WO2020194267A1
公开(公告)日：2020-10-01
申请号：PCT/IB2020/052954
申请日：2020-03-27
申请人： EULITHA A.G. , CLUBE, Francis , AMREIN, Andreas , LEBUGLE, Maxime , SOLAK, Harun , WANG, Li
发明人： CLUBE, Francis , AMREIN, Andreas , LEBUGLE, Maxime , SOLAK, Harun , WANG, Li
IPC分类号： G03F7/20 , G02B5/18
摘要： A method for forming a surface-relief grating with a desired spatial variation of duty cycle in a layer of photoresist, which method comprises providing a first mask (31) bearing a high-resolution grating of linear features (32), arranging said first mask at a first distance from a substrate (33), providing a second mask (28) bearing a variable-transmission grating of opaque and transparent linear features (27) that has a designed spatial variation of duty cycle, arranging said second mask at a distance before the first mask such that the linear features of the variable-transmission grating are orthogonal to the linear features of the high-resolution grating, illuminating the second mask while varying the first distance according to displacement Talbot lithography and also displacing the second mask at an angle to its linear features such that there is substantially no component of modulation with the period of the variable-transmission grating in the energy density distribution that exposes the photoresist.

2. 发明申请

WO2017103817A1 METHODS AND SYSTEMS FOR PRINTING ARRAYS OF FEATURES 审中-公开
标题翻译：用于印刷特征阵列的方法和系统
公开(公告)号：WO2017103817A1
公开(公告)日：2017-06-22
申请号：PCT/IB2016/057623
申请日：2016-12-14
申请人： EULITHA A.G. , CLUBE, Francis , SOLAK, Harun
发明人： CLUBE, Francis , SOLAK, Harun
IPC分类号： G03F7/20
CPC分类号： G03F7/70408 , G03F7/7035
摘要： A method for printing a desired periodic pattern into a photosensitive layer on a substrate, which includes providing a mask bearing a periodic pattern whose period is a multiple of that of the desired pattern, disposing the substrate in proximity to the mask, providing at least one beam for illuminating said mask pattern to generate a transmitted light-field described by a Talbot distance, exposing the layer to time-integrated intensity distributions in a number of sub-exposures by illuminating the mask pattern with the at least one beam while changing the separation between substrate and mask by at least a certain fraction of, and less than, the Talbot distance, configuring the illumination or the substrate relative to the mask for the different sub-exposures so that the layer is exposed to the same time-integrated intensity distributions that are mutually laterally offset by a certain distance and in a certain direction.
摘要翻译：一种用于将期望的周期性图案印刷到衬底上的光敏层中的方法，该方法包括提供承载其周期是期望图案的周期的倍数的周期性图案的掩膜，将衬底布置在邻近提供至少一束用于照亮所述掩模图案的光束，以产生由Talbot距离描述的透射光场，通过用所述掩模图案照亮所述掩模图案，将所述层暴露于多次子曝光中的时间积分强度分布至少一个光束，同时将基板和掩模之间的间隔改变Talbot距离的至少一小部分，并且小于Talbot距离，将照明或基板相对于用于不同子曝光的掩模配置成使得该层被曝光到相同的时间积分强度分布，这些分布在一定距离和特定方向上相互横向偏移。

3. 发明申请

WO2014147562A3 METHODS AND SYSTEMS FOR PRINTING PERIODIC PATTERNS 审中-公开
标题翻译：用于印刷周期性图案的方法和系统
公开(公告)号：WO2014147562A3
公开(公告)日：2014-09-25
申请号：PCT/IB2014/059949
申请日：2014-03-18
申请人： EULITHA A.G. , CLUBE, Francis , SOLAK, Harun , DAIS, Christian
发明人： CLUBE, Francis , SOLAK, Harun , DAIS, Christian
IPC分类号： G03F7/20
摘要： A method for printing a periodic pattern of features into a photosensitive layer, which includes providing a mask bearing a periodic pattern, providing a substrate bearing the photosensitive layer, arranging the substrate substantially parallel to the mask, forming a beam of collimated monochromatic light for illuminating said mask pattern so that the light-field transmitted by the mask forms Talbot image planes separated by a Talbot distance, and performing N sub- exposures of the mask with said beam and changing the separation between sub-exposures so that the relative separation during the ith sub-exposure with respect to that during the first sub-exposure is given by (m i + n i /N) times the Talbot distance, and exposing the mask pattern to the same energy density of illumination for each sub-exposure, wherein the period is selected in relation to the wavelength so that only the zeroth and first diffraction orders are transmitted by the mask.
摘要翻译：一种用于将特征的周期性图案印刷到感光层中的方法，该方法包括提供承载周期性图案的掩模，提供承载感光层的基板，将基板布置为基本平行于掩模，形成用于照射所述掩模图案的准直单色光束，使得由掩模透射的光场形成以Talbot距离分开的Talbot图像平面，并且利用所述光束执行掩模的N次曝光并且改变子像素之间的间隔，以使第i次曝光期间的相对分离度相对于第一次曝光期间的相对分离度由（m×i + n×i / N）倍给出 Talbot距离，并且将掩模图案暴露于对于每个子曝光相同的照射能量密度，其中相对于波长选择该周期，使得只有掩膜透射第零和第一衍射级。

4. 发明申请

WO2019202551A1 METHODS AND SYSTEMS FOR PRINTING LARGE PERIODIC PATTERNS BY OVERLAPPING EXPOSURE FIELDS 审中-公开
公开(公告)号：WO2019202551A1
公开(公告)日：2019-10-24
申请号：PCT/IB2019/053239
申请日：2019-04-18
申请人： EULITHA A.G. , CLUBE, Francis , SOLAK, Harun
发明人： CLUBE, Francis , SOLAK, Harun
IPC分类号： G03F7/20
摘要： A method for printing a periodic pattern of linear features into a photosensitive layer which includes providing a mask bearing a pattern of linear features, arranging the substrate parallel to the mask, generating an elongated beam for illuminating the mask with a range of angles of incidence in a plane parallel to the linear features and with a uniform power per incremental distance along the length of the beam except at its ends where the power per incremental distance falls to zero according to first and second profiles over a fall-off distance, scanning said beam in first and second sub-exposures to print first and second parts of the desired pattern such that the first and second parts overlap by the fall-off distance, wherein the first and second profiles are selected so that their summation across the fall-off distance produces a uniform power per incremental distance.

5. 发明申请

WO2012164539A1 PRINTING PERIODIC PATTERNS USING MULTIPLE LASERS 审中-公开
标题翻译：使用多个激光打印周期性图案
公开(公告)号：WO2012164539A1
公开(公告)日：2012-12-06
申请号：PCT/IB2012/052778
申请日：2012-06-01
申请人： EULITHA A.G. , SOLAK, Harun , CLUBE, Francis , DAIS, Christian
发明人： SOLAK, Harun , CLUBE, Francis , DAIS, Christian
IPC分类号： G03F7/20
CPC分类号： G03F7/70075 , G03F7/70408
摘要： A method for printing a periodic pattern (19) of features into a photosensitive layer (21), which method includes providing a mask (18) bearing a mask pattern, providing a substrate (20) bearing the layer, arranging the substrate parallel to the mask, providing a number of lasers (1) having a plurality of peak wavelengths, forming from said light a beam for illuminating the mask with a spectral distribution of exposure dose and a degree of collimation, illuminating the mask with said beam such that the light of each wavelength transmitted by the mask pattern forms a range of transversal intensity distributions between Talbot planes and exposes the photosensitive layer to an image component, wherein the separation and spectral distribution are arranged so that the superposition of said components is equivalent to an average of the range of transversal intensity distributions formed by light of one wavelength and the collimation is arranged so that the features are resolved.
摘要翻译：一种用于将特征的周期性图案（19）印刷到感光层（21）中的方法，该方法包括提供具有掩模图案的掩模（18），提供承载该层的基底（20），将基底平行于掩模，提供多个具有多个峰值波长的激光器（1），从所述光线形成用于以曝光剂量的光谱分布和准直程度照射所述掩模的光束，用所述光束照射所述掩模，使得所述光由掩模图案传输的每个波长形成Talbot平面之间的横向强度分布范围，并将感光层暴露于图像分量，其中分离和光谱分布被布置成使得所述组件的叠加等价于布置由一个波长的光和准直形成的横向强度分布的范围，使得特征被解决。

6. 发明申请

WO2012004745A1 A METHOD AND APPARATUS FOR PRINTING A PERIODIC PATTERN WITH LARGE DEPTH OF FOCUS 审中-公开
标题翻译：用于打印大量深度聚焦的周期性图案的方法和装置
公开(公告)号：WO2012004745A1
公开(公告)日：2012-01-12
申请号：PCT/IB2011/052977
申请日：2011-07-05
申请人： EULITHA A.G. , CLUBE, Francis , DAIS, Christian , SOLAK, Harun
发明人： CLUBE, Francis , DAIS, Christian , SOLAK, Harun
IPC分类号： G03F7/20
CPC分类号： G03F7/70408 , G03B27/54 , G03F7/70325 , G03F7/7035
摘要： A method for printing a desired pattern into a photosensitive layer that includes providing a mask bearing a pattern of linear features that are parallel to a first direction, arranging the layer parallel to and separated from said mask, generating substantially monochromatic light and illuminating the mask pattern with said light over a range of angles substantially in a plane parallel to said first direction, whereby the light of each angle of illumination transmitted by the mask forms a range of transversal intensity distributions between Talbot planes and forms a light-field component at the layer, and the superposition of said components prints the desired pattern, wherein the range of angles is selected in relation to the wavelength, the separation and the period so that the superposition of said components is substantially equivalent to an average of the range of transversal intensity distributions formed by light at one of the angles.
摘要翻译：一种用于将期望图案印刷到感光层中的方法，包括提供具有平行于第一方向的线性特征图案的掩模，将该层与所述掩模平行并分离，产生基本上单色的光并照亮掩模图案其中所述光基本上在平行于所述第一方向的平面中的一定范围的角度上，由掩模透射的每个照明角度的光在Talbot平面之间形成横向强度分布的范围，并在该层形成光场分量并且所述组件的叠加打印期望的图案，其中相对于波长，分离和周期选择角度范围，使得所述部件的叠加基本上等于横向强度分布范围的平均值由光在其中一个角度形成。

7. 发明申请

WO2012049638A1 METHOD AND APPARATUS FOR PRINTING PERIODIC PATTERNS 审中-公开
标题翻译：打印周期模式的方法和装置
公开(公告)号：WO2012049638A1
公开(公告)日：2012-04-19
申请号：PCT/IB2011/054509
申请日：2011-10-12
申请人： EULITHA A.G. , SOLAK, Harun , CLUBE, Francis , DAIS, Christian
发明人： SOLAK, Harun , CLUBE, Francis , DAIS, Christian
IPC分类号： G03F7/20
CPC分类号： G03F7/7035 , G03F7/70408
摘要： A method for printing a pattern of features including the steps of providing a substrate having a recording layer disposed thereon, providing a mask bearing a periodic pattern of features, arranging the substrate parallel to the mask and with a separation having an initial value, providing an illumination system for illuminating the mask with an intensity of monochromatic light to generate a transmitted light-field for exposing the recording layer, and illuminating the mask for an exposure time whilst changing the separation by a distance having a desired value and with a rate of change of separation, wherein at least one of the rate of change of separation and the intensity of light are varied during the change of separation, whereby the mask is illuminated by an energy density per incremental change of separation that varies over said distance.
摘要翻译：一种用于印刷特征图案的方法，包括以下步骤：提供具有设置在其上的记录层的基底，提供具有周期性图案特征的掩模，将基底平行于掩模并且具有初始值的分离，用于以单色光的强度照亮掩模的照明系统以产生用于曝光记录层的透射光场，并且在将分离改变具有期望值的距离和变化率的同时将曝光时间照亮曝光时间的分离，其中在分离改变期间分离变化率和光强度中的至少一个变化，由此每隔增加的间隔变化的能量密度照射所述掩模，所述能量密度在所述距离上变化。

8. 发明申请

WO2012095795A3 METHOD AND SYSTEM FOR PRINTING HIGH-RESOLUTION PERIODIC PATTERNS 审中-公开
公开(公告)号：WO2012095795A3
公开(公告)日：2012-07-19
申请号：PCT/IB2012/050128
申请日：2012-01-10
申请人： EULITHA A.G. , CLUBE, Francis , SOLAK, Harun
发明人： CLUBE, Francis , SOLAK, Harun
IPC分类号： G03F7/20
摘要： A method for printing a desired periodic pattern, which includes providing a mask bearing a pattern of features having a period, providing a substrate bearing a photosensitive layer, arranging the substrate with a separation from the mask, generating collimated light with a wavelength and an intensity, at least the former of which may be temporally varied to deliver a spectral distribution of energy density, illuminating the mask pattern with said light whilst varying at least its wavelength so as to deliver a spectral distribution of energy density, such that the light-field transmitted by the mask is instantaneously composed of a range of transversal intensity distributions between Talbot planes, and whereby the layer is exposed to a time-integrated intensity distribution that prints the desired pattern, wherein the separation, spectral distribution and period are arranged so that the time-integrated intensity distribution corresponds to an average of the range of transversal intensity distributions.

9. 发明申请

WO2012085845A1 SYSTEM AND METHOD FOR PRODUCTION OF NANOSTRUCTURES OVER LARGE AREAS 审中-公开
标题翻译：用于生产大面积纳米结构的系统和方法
公开(公告)号：WO2012085845A1
公开(公告)日：2012-06-28
申请号：PCT/IB2011/055827
申请日：2011-12-20
申请人： EULITHA A.G. , SOLAK, Harun , CLUBE, Francis
发明人： SOLAK, Harun , CLUBE, Francis
IPC分类号： G03F7/20
CPC分类号： G03F7/201 , G03F7/70408
摘要： A method and apparatus for printing a pattern of periodic features into a photosensitive layer, including the steps of providing a substrate bearing the layer, providing a mask, arranging the substrate such that it has a tilt angle with respect to the substrate in a first plane orthogonal thereto, providing collimated light for illuminating the mask pattern so as to generate a transmitted light-field composed of a range of transversal intensity distributions between Talbot planes separated by a Talbot distance, and so that said transmitted light-field has an intensity envelope in the first plane, illuminating the mask with said light whilst displacing the substrate relative to the mask in a direction parallel to the first plane and to the substrate, wherein the tilt angle and the intensity envelope are arranged so that the layer is exposed to an average of the range of transversal intensity distributions.
摘要翻译：一种用于将周期性特征图案印刷到感光层中的方法和装置，包括以下步骤：提供承载该层的基底，提供掩模，布置基底，使得其在第一平面中相对于基底具有倾斜角提供用于照亮掩模图案的准直光，以产生由Talbot距离分离的Talbot平面之间的横向强度分布范围组成的透射光场，并且使得所述透射光场具有强度包络所述第一平面，用所述光照亮所述掩模，同时沿平行于所述第一平面的方向相对于所述掩模移位所述基板和所述基板，其中所述倾斜角度和所述强度包络被布置成使得所述层暴露于平均值的横向强度分布范围。

10. 发明申请

WO2015056191A1 POLARIZER AND A METHOD FOR FORMING THE SAME 审中-公开
标题翻译：偏振器及其形成方法
公开(公告)号：WO2015056191A1
公开(公告)日：2015-04-23
申请号：PCT/IB2014/065338
申请日：2014-10-15
申请人： EULITHA A.G. , SOLAK, Harun , WANG, Li
发明人： SOLAK, Harun , WANG, Li
IPC分类号： G02B5/18 , G02B5/30
CPC分类号： G02B5/3058 , G02B5/1809
摘要： A method for manufacturing a bi-layer wire-grid polarizer, which method includes forming a periodic pattern of alternating and parallel pre-formed lines and grooves on a surface of a substrate, depositing polarizing material onto the pattern to form a top wire of polarizing material having a first width on the top of each pre-formed line and a bottom wire of polarizing material having a second width on the bottom of each groove, each top wire and each of its neighbouring bottom wires having a lateral separation between them, and enlarging the lateral separation between each top wire and each of its neighbouring bottom wires by at least one of increasing the period of the periodic pattern and reducing the first and second widths of the respective top and bottom wires, whereby certain desired transmission and/or polarization properties of the bi-layer wire-grid polarizer are obtained.
摘要翻译：一种用于制造双层线栅偏振器的方法，该方法包括在衬底的表面上形成交替和平行的预制线和凹槽的周期性图案，将偏振材料沉积到图案上以形成极化的顶部线在每个预成形线的顶部具有第一宽度的材料和在每个凹槽的底部上具有第二宽度的偏振材料的底部线，每个顶部线及其每个相邻的底部线在它们之间具有横向间隔;以及通过增加周期性图案的周期并减小相应的顶部和底部线的第一和第二宽度中的至少一个来扩大每个顶部线及其每个相邻底部线之间的横向间隔，由此某些期望的透射和/或极化获得双层线栅偏振器的特性。

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