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1. 发明申请

WO2008106622A2 PURGE SYSTEM FOR A SUBSTRATE CONTAINER 审中-公开
标题翻译：用于基底容器的灌装系统
公开(公告)号：WO2008106622A2
公开(公告)日：2008-09-04
申请号：PCT/US2008/055388
申请日：2008-02-28
申请人： ENTEGRIS, INC. , TIEBEN, Anthony, Mathius , HALBMAIER, David, L. , KOLBOW, Steven, P.
发明人： TIEBEN, Anthony, Mathius , HALBMAIER, David, L. , KOLBOW, Steven, P.
IPC分类号： C25F1/00
CPC分类号： H01L21/67353 , H01L21/67017 , H01L21/67359 , H01L21/67386 , H01L21/67393 , Y10S414/14
摘要： A purging station with a substrate container receiving zone having at least one upwardly extending purging nozzle. The nozzle has a circular engaging lip. The substrate container has support means for at least one substrate and a purge port assembly that includes an externally facing sealing flange facing downward from the container. The sealing flange has a central aperture and a cantilevered flange portion that engages with the circular engaging lip of the nozzle. The weight of the substrate container on the nozzle carried by the canilevered portion of the flange causes bending of the flange for a resilient soft seal.
摘要翻译：具有基板容器接收区域的清洗站具有至少一个向上延伸的清洗喷嘴。喷嘴具有圆形的接合唇缘。衬底容器具有用于至少一个衬底和吹扫口组件的支撑装置，该清洗口组件包括面向下从容器向外的密封凸缘。密封凸缘具有中心孔和与喷嘴的圆形接合唇接合的悬臂凸缘部分。由凸缘的装载部分承载的喷嘴上的基底容器的重量导致凸缘的弯曲，用于弹性软密封。

2. 发明申请

WO2005102872A2 SUBSTRATE CONTAINER WITH FLUID-SEALING FLOW PASSAGEWAY 审中-公开
标题翻译：具有流体密封流动通道的基座容器
公开(公告)号：WO2005102872A2
公开(公告)日：2005-11-03
申请号：PCT/US2005/013261
申请日：2005-04-18
申请人： ENTEGRIS, INC. , TIEBEN, Anthony, Mathius , LYSTAD, John , HALBMAIER, David, L.
发明人： TIEBEN, Anthony, Mathius , LYSTAD, John , HALBMAIER, David, L.
IPC分类号： B65D85/30
CPC分类号： H01L21/67017 , H01L21/67126 , H01L21/67379 , H01L21/67389 , H01L21/67393 , H01L21/67769
摘要： A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure.
摘要翻译：衬底容器包括外壳和形成在外壳中的进入结构，并且通过外壳提供流体进入到基底容器的内部。进入结构包括开口和内表面。索环位于接近结构的内表面上。

3. 发明申请

WO2005102870A2 WAFER CONTAINER DOOR WITH PARTICULATE COLLECTING STRUCTURE 审中-公开
标题翻译：具有颗粒收集结构的水箱门
公开(公告)号：WO2005102870A2
公开(公告)日：2005-11-03
申请号：PCT/US2005/013162
申请日：2005-04-18
申请人： ENTEGRIS, INC. , TIEBEN, Anthony, Mathius , LYSTAD, John , HALBMAIER, David, L.
发明人： TIEBEN, Anthony, Mathius , LYSTAD, John , HALBMAIER, David, L.
IPC分类号： B65D85/00
CPC分类号： H01L21/67373 , H01L21/67393 , Y10S206/832
摘要： A substrate container having an enclosure with an access opening for inserting and removing substrates into an interior of the enclosure and a door chassis that is configured to selectively enclose the opening, the door chassis comprising a first wall having a peripheral wall extending therefrom. The substrate container includes a latch mechanism that is operably coupled with the chassis, the latch mechanism configured to operably secure the chassis to the opening. The door of the substrate container includes a texture particle capture region wherein particles generated by the latch mechanism and elsewhere are captured by the particle capture region.
摘要翻译：一种具有外壳的基板容器，该外壳具有用于将基板插入和移除到外壳内部的进入开口，以及构造成选择性地封闭开口的门底板，所述门框架包括具有从其延伸的周壁的第一壁。基板容器包括与底盘可操作地联接的闩锁机构，闩锁机构构造成将底盘可操作地固定到开口。基板容器的门包括纹理颗粒捕获区域，其中由闩锁机构和其他地方产生的颗粒被颗粒捕获区域捕获。

4. 发明申请

WO2007038504A2 RETICLE POD 审中-公开
标题翻译： RETIME POD
公开(公告)号：WO2007038504A2
公开(公告)日：2007-04-05
申请号：PCT/US2006/037465
申请日：2006-09-27
申请人： ENTEGRIS, INC. , KOLBOW, Steven, P. , MCMULLEN, Kevin , TIEBEN, Anthony, M. , KUSZ, Matthew , ANDERSEN, Christian , WANG, Huaping , CISEWSKI, Michael , JOHNSON, Michael, L. , HALBMAIER, David, L. , LYSTAD, John
发明人： KOLBOW, Steven, P. , MCMULLEN, Kevin , TIEBEN, Anthony, M. , KUSZ, Matthew , ANDERSEN, Christian , WANG, Huaping , CISEWSKI, Michael , JOHNSON, Michael, L. , HALBMAIER, David, L. , LYSTAD, John
IPC分类号： B65D85/48
CPC分类号： B65D85/48 , G03F1/66 , H01L21/67353 , H01L21/67359 , H01L21/67383 , H01L21/67386
摘要： A container that provides support structure and environmental control means including, for example, minimal contact with a wafer or reticle contained therein that cooperates with wafer or reticle to provide a diffusion barrier mitigates against particles settling on a face of the wafer or reticle. The container includes a base having a flat, polished surface with protrusions upon which the wafer or reticle rests. The protrusions are of a geometry, such as a sphere, that imparts minimum contact with the wafer or reticle and suspends the wafer or reticle over the base, providing a gap therebetween. The gap isolates the wafer or reticle from the flat, polished surface of the base, but is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. Diffusion filters provide pressure equalization without filter media. Moveable reticle pins on the top cover provide reticle restraint. Dual containment pod embodiment provides further isolation and protection.
摘要翻译：提供支撑结构和环境控制装置的容器包括例如与其中包含的晶片或掩模版的最小接触，该晶片或掩模版与晶片或掩模版配合以提供扩散阻挡层减轻沉降在表面上的微粒晶圆或十字线。该容器包括具有平坦的抛光表面的基座，该抛光表面具有突起，晶片或标线片置于该突起上。突起具有几何形状，例如球体，其赋予与晶圆或掩模版的最小接触并且将晶圆或掩模版悬挂在基体上，从而在其间提供间隙。该间隙将晶片或光罩与基座的平坦抛光表面隔离开，但其尺寸被设计为抑制颗粒向间隙中的迁移，从而防止晶片或光罩的敏感表面被污染。扩散过滤器提供压力均衡，无需过滤介质。顶盖上的可移动十字线针脚提供十字线约束。双遏制吊舱实施例提供了进一步的隔离和保护。

5. 发明申请

WO2006108032A2 ENVIRONMENTAL CONTROL IN A RETICLE SMIF POD 审中-公开
标题翻译：一个虚拟SMIF POD环境控制
公开(公告)号：WO2006108032A2
公开(公告)日：2006-10-12
申请号：PCT/US2006/012636
申请日：2006-04-04
申请人： ENTEGRIS, INC. , HALBMAIER, David, L. , SIMPSON, Anthony , GOODWIN, William, M. , KISHKOVICH, Oleg, P. , KIELBASO, Tom , MANGANIELO, Frank
发明人： HALBMAIER, David, L. , SIMPSON, Anthony , GOODWIN, William, M. , KISHKOVICH, Oleg, P. , KIELBASO, Tom , MANGANIELO, Frank
IPC分类号： B03C3/00
CPC分类号： H01L21/67017 , H01L21/67353 , H01L21/67359 , H01L21/67386 , H01L21/67389 , H01L21/67393
摘要： The present invention provides a standardized mechanical interface (SMIF) reticle pod that is configured to provide a controlled environment for supporting a reticle wherein the controlled environment is maintained substantially free of crystal growth causing contaminants. Accordingly, there is provided a layered filter with filter elements capable of filtering particulates and adsorbing gaseous contaminants. The filter has an inwardly facing face generally planar shaped with a surface area that is substantially half or more of the area of the reticle face. The inwardly facing face is placed in close proximity to the reticle patterned surface and has an area that is a significant fraction of the reticle patterned surface area. The SMEF pod is also provided with a purge system configured to inject a very dry gas within the controlled environment to flush the controlled environment of contaminants as well as to regenerate the filter.
摘要翻译：本发明提供了一种标准化机械界面（SMIF）掩模版盒，其被配置为提供用于支撑掩模版的受控环境，其中所述受控环境基本上不含引起污染物的晶体生长。因此，提供了具有能够过滤颗粒并吸附气态污染物的过滤元件的层状过滤器。过滤器具有大致平面形状的面向内的面，其表面面积大致为掩模版面的面积的一半或更多。面向内的面被放置在靠近掩模版图案的表面，并且具有的面积是掩模版图案表面积的很大一部分。 SMEF舱还设有吹扫系统，其配置为在受控环境内喷射非常干燥的气体以冲洗受控环境的污染物以及再生过滤器。

6. 发明申请

WO2009079636A2 METHODS AND APPARATUSES FOR CONTROLLING CONTAMINATION OF SUBSTRATES 审中-公开
标题翻译：用于控制基质污染的方法和设备
公开(公告)号：WO2009079636A2
公开(公告)日：2009-06-25
申请号：PCT/US2008/087474
申请日：2008-12-18
申请人： ENTEGRIS, INC. , KISHKOVICH, Oleg, P. , HALBMAIER, David, L. , GRAYFER, Anatoly
发明人： KISHKOVICH, Oleg, P. , HALBMAIER, David, L. , GRAYFER, Anatoly
IPC分类号： B65H43/02
CPC分类号： H01L21/67769 , H01L21/67017
摘要： Components, systems, and methods for maintaining an extremely dry environment within substrate containers formed of polymers provides supplemental exterior gas washing of the substrate container to minimize permeation of moisture and oxygen through the polymer walls of the container and to control desorption of water entrapped in the polymer walls of the container.
摘要翻译：用于保持由聚合物形成的衬底容器内的非常干燥的环境的部件，系统和方法提供衬底容器的辅助外部气体洗涤以使湿气和氧气渗透通过容器的聚合物壁的渗透降至最低并且以控制包裹在容器聚合物壁中的水的解吸。

7. 发明申请

WO2015095357A1 A LOW ENERGY SEAL FOR A SUBSTRATE CARRIER 审中-公开
标题翻译：用于基板载体的低能量密封
公开(公告)号：WO2015095357A1
公开(公告)日：2015-06-25
申请号：PCT/US2014/070904
申请日：2014-12-17
申请人： ENTEGRIS, INC.
发明人： TIEBEN, Anthony, M. , WISEMAN, Brian , KOLBOW, Steven, P. , HALBMAIER, David, L. , LYSTAD, John
IPC分类号： H01L21/677 , H01L21/02
CPC分类号： H01L21/67376
摘要： A substrate carrier with a low energy seal. In various embodiments, the low energy seal provides a seal line between a housing assembly and a door assembly of the substrate carrier, the seal being actuated by a force that is less than the weight of the housing assembly. In some embodiments, the low energy seal can provide a low threshold pressure relief mechanism that vents gas from an interior chamber of the substrate carrier to ambient when the pressure of the chamber exceeds the ambient pressure. In various embodiments, a venting structure is formed on the low energy seal to provide pressure relief between the interior chamber and ambient during disengagement of the housing assembly from the door assembly.
摘要翻译：具有低能量密封的衬底载体。在各种实施例中，低能量密封件在壳体组件和基板载体的门组件之间提供密封线，该密封由小于壳体组件的重量的力致动。在一些实施例中，低能量密封件可以提供低阈值压力释放机构，当室的压力超过环境压力时，将气体从衬底载体的内部腔室排出到环境中。在各种实施例中，在低能量密封件上形成通气结构，以在壳体组件与门组件分离期间在内部室和环境之间提供压力释放。

8. 发明申请

WO2015066484A1 A MODULAR RETICLE POD SYSTEM 审中-公开
标题翻译：一个模块化的POD系统
公开(公告)号：WO2015066484A1
公开(公告)日：2015-05-07
申请号：PCT/US2014/063448
申请日：2014-10-31
申请人： ENTEGRIS, INC.
发明人： TIEBEN, Anthony, M. , WISEMAN, Brian , KOLBOW, Steve, P. , HALBMAIER, David, L. , LYSTAD, John
IPC分类号： H01L23/02
CPC分类号： H01L21/67359
摘要： A modular system for construction of reticle pods having door assemblies and cover assemblies. The modular system can accommodate cover portions of various and differing constructions within a common frame portion, thereby reducing tooling and inventory requirements. In one embodiment, the cover portion is fabricated from a polymer material. In another embodiment, the cover portion is fabricated from a metallic material and mates with a door assembly that has a metallic door panel, so that the resident reticle is within a metallic encapsulation for static dissipation and contaminant control. In various embodiments, a viewing window can be included with the cover portion to enable visual verification of the presence of a reticle within the pod assembly. Wash slots extending through the cover portion provide enhanced cleaning. A seal in the door assembly is in a groove open upwardly and downwardly.
摘要翻译：一种用于构建具有门组件和盖组件的标线盒的模块化系统。模块化系统可以容纳公共框架部分内的各种和不同结构的盖部分，从而减少工具和库存要求。在一个实施例中，盖部分由聚合物材料制成。在另一个实施例中，盖部分由金属材料制成并且与具有金属门板的门组件配合，使得驻留的掩模版位于用于静电耗散和污染物控制的金属封装内。在各种实施例中，可以在盖部分中包括观察窗口，以使得能够目视验证在该组件内的掩模版的存在。通过盖部分延伸的清洗槽提供增强的清洁。门组件中的密封件处于向上和向下开口的槽中。

9. 发明公开

EP2122014A2 PURGE SYSTEM FOR A SUBSTRATE CONTAINER 审中-公开
标题翻译：清洗系统衬底容器
公开(公告)号：EP2122014A2
公开(公告)日：2009-11-25
申请号：EP08731042.1
申请日：2008-02-28
申请人： Entegris, Inc.
发明人： TIEBEN, Anthony, Mathius , HALBMAIER, David, L. , KOLBOW, Steven, P.
IPC分类号： C25F1/00
CPC分类号： H01L21/67353 , H01L21/67017 , H01L21/67359 , H01L21/67386 , H01L21/67393 , Y10S414/14
摘要： A purging station with a substrate container receiving zone having at least one upwardly extending purging nozzle. The nozzle has a circular engaging lip. The substrate container has support means for at least one substrate and a purge port assembly that includes an externally facing sealing flange facing downward from the container. The sealing flange has a central aperture and a cantilevered flange portion that engages with the circular engaging lip of the nozzle. The weight of the substrate container on the nozzle carried by the canilevered portion of the flange causes bending of the flange for a resilient soft seal.

10. 发明公开

EP1737763A2 SUBSTRATE CONTAINER WITH FLUID-SEALING FLOW PASSAGEWAY 审中-公开
标题翻译：与FLUIDABDICHTENDEM流通基底容器
公开(公告)号：EP1737763A2
公开(公告)日：2007-01-03
申请号：EP05736974.6
申请日：2005-04-18
申请人： Entegris, Inc.
发明人： TIEBEN, Anthony, Mathius , LYSTAD, John , HALBMAIER, David, L.
IPC分类号： B65D85/30
CPC分类号： H01L21/67017 , H01L21/67126 , H01L21/67379 , H01L21/67389 , H01L21/67393 , H01L21/67769
摘要： A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure.

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