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1. 发明专利

JP2017509147A 耐拡散性静電クランプ审中-公开
公开(公告)号：JP2017509147A
公开(公告)日：2017-03-30
申请号：JP2016549251
申请日：2015-01-30
申请人：ヴァリアンセミコンダクターイクイップメントアソシエイツインコーポレイテッド , ヴァリアンセミコンダクターイクイップメントアソシエイツインコーポレイテッド , インテグリスインコーポレーテッドEntegris, Inc. , インテグリスインコーポレーテッドEntegris, Inc.
发明人：ケーストーンデール , ケーストーンデール , クックリチャード , クックリチャード , クアンリンイ , クアンリンイ , ジーブレイクジュリアン , ジーブレイクジュリアン , ストーンリュドミラ , ストーンリュドミラ
IPC分类号： H01L21/683
CPC分类号： C23C16/50 , C23C28/042 , C23C28/044 , H01L21/6831 , H02N13/00
摘要：一実施形態において、静電クランプを製造する方法は、絶縁本体を形成するステップと、前記絶縁本体の上に電極を形成するステップと、前記電極の上に積層を堆積するステップとを含み、前記積層は原子層堆積(ALD)を用いて堆積された酸化アルミニウム層を備える。

2. 发明专利

JP2014037276A Fluid distribution method and device 有权
标题翻译：流体分配方法和装置
公开(公告)号：JP2014037276A
公开(公告)日：2014-02-27
申请号：JP2013236120
申请日：2013-11-14
申请人： Entegris Inc , インテグリス・インコーポレーテッド
发明人： LEYS JOHN A , HENNEN JOHN M , JOHNSON MICHAEL L
IPC分类号： B65D83/00 , B67D7/60 , B65D77/04 , B67D7/02 , B67D99/00
CPC分类号： B67D7/0255 , B65D83/0055 , B67D2001/0828 , Y10T29/49826
摘要： PROBLEM TO BE SOLVED: To provide a bag-in-bag assembly in a bottle formed by a flexible distribution container including a distribution connector.SOLUTION: A distribution container is positioned adjacent to one or a plurality of flexible pressure containers, or held therebetween. The flexible pressure container has an independent inlet/outlet passage passing through a second connector. A bag-in-bag assembly can be subsequently placed in a storage container with the connector fitted thereto to approach on the storage container. A fluid is introduced into (the plurality of) pressure containers so that the liquid is extracted from the distribution container by pressure enough to push out the liquid through a distribution connector. A molding distribution head may be connected to the bag-in-bag in a bottle by using a cam operating device for simultaneously fixing a pressurization, ventilation and fluid extract coupling. A key code system may be used, and a multipurpose key code ring is changed for enabling key coding for the storage container to be adapted only to a specific distribution head.
摘要翻译：要解决的问题：在由包括分配连接器的柔性分配容器形成的瓶子中提供袋式包装组件。解决方案：分配容器邻近一个或多个柔性压力容器定位或保持在其间。柔性压力容器具有通过第二连接器的独立的入口/出口通道。袋式包装组件随后可以放置在其中安装有连接器的存储容器中以接近储存容器。将流体引入（多个）压力容器中，使得液体通过足以通过分配连接器推出液体的压力从分配容器中提取。成型分配头可以通过使用用于同时固定加压，通风和流体提取物联接的凸轮操作装置连接到瓶中的袋中。可以使用密钥代码系统，并且改变多用途密钥代码环以使存储容器的密钥编码仅适用于特定分配头。

3. 发明专利

JP2013229630A Wafer enclosure with door 有权
标题翻译：带门的散热器外壳
公开(公告)号：JP2013229630A
公开(公告)日：2013-11-07
申请号：JP2013146684
申请日：2013-07-12
申请人： Entegris Inc , インテグリス・インコーポレーテッド
发明人： MIKKELSEN KIRK J , ADAMS MICHAEL S , BORES GREG , WISEMAN BRIAN S
IPC分类号： B65D85/86 , H01L21/673
CPC分类号： H01L21/67373
摘要： PROBLEM TO BE SOLVED: To provide a door for a wafer enclosure which enables a front panel to be fixed to side walls without using a metal fastener and is sealable.SOLUTION: A door (36) has an enclosure (56) including a front panel (180), a rear panel (105), and four side walls (55) forming a peripheral part. Each side wall (55) has multiple grooves, and a latch mechanism has a rotary member (80) coupled to multiple latch portions (62) that may extend from the side walls (55). The front panel (180) is removable and has an outer end part including multiple return stoppers (184) respectively integrated with the spring members (186). The return stoppers (184) engage with the multiple grooves extending outward toward the peripheral part and provided on the side walls (55) to catch the side walls.
摘要翻译：要解决的问题：提供一种用于晶片外壳的门，其能够将前面板固定到侧壁而不使用金属紧固件并且是可密封的。解决方案：门（36）具有外壳（56），其包括前面板（180），后面板（105）和形成周边部分的四个侧壁（55）。每个侧壁（55）具有多个凹槽，并且闩锁机构具有联接到可从侧壁（55）延伸的多个闩锁部分（62）的旋转构件（80）。前面板（180）是可拆卸的并且具有包括分别与弹簧构件（186）整体形成的多个返回挡块（184）的外端部分。返回挡块（184）与向周边部分向外延伸的多个槽接合并设置在侧壁（55）上以抓住侧壁。

4. 发明专利

JP2012071607A Multilayer porous membrane and process 审中-公开
标题翻译：多层多孔膜和工艺
公开(公告)号：JP2012071607A
公开(公告)日：2012-04-12
申请号：JP2011236072
申请日：2011-10-27
申请人： Entegris Inc , インテグリス・インコーポレーテッド
发明人： YEN LARRY , PATEL RAJNIKANT B
IPC分类号： B32B5/18 , B32B27/30 , B32B27/32 , C08J9/12
CPC分类号： B29C67/202 , B01D67/0018 , B01D67/003 , B01D69/02 , B01D69/12 , B01D71/26 , B01D2323/12 , B01D2323/18 , B01D2325/022 , B01D2325/42 , B29C47/0021 , B29C47/065 , B29C47/145 , B29C47/38 , B29C47/56 , B29K2023/0683 , B29K2105/04 , B29K2105/251 , B29K2995/0088 , B29L2009/00 , B29L2031/755 , Y10T428/24942 , Y10T428/2495 , Y10T428/24996 , Y10T428/249961 , Y10T428/249979 , Y10T428/24998 , Y10T428/249981 , Y10T428/31913
摘要： PROBLEM TO BE SOLVED: To provide a multilayer porous membrane formed of an extrudable polymer.SOLUTION: A multilayer microporous polymeric membrane includes at least two porous layers of a polymer material. The membrane has a lacy open pore, and the layers forms an integral porous bulk matrix. The polymer material of each layer is independently selected from a group consisting of polyethylene, ultrahigh molecular weight polyethylene (UHMW-PE); polypropylene; poly (tetrafluoroethylene-co-perfluoroalkylvinyl ether) where alkyl is propyl, methyl or mixtures thereof, (PFA); poly(tetrafluoroethylene-co-hexafluoropropylene) (FEP); and mixtures thereof. At least two layers of the microporous polymeric membrane have different average pore size.
摘要翻译：要解决的问题：提供由可挤出聚合物形成的多层多孔膜。解决方案：多层微孔聚合物膜包括至少两个聚合物材料的多孔层。膜具有开口的开孔，并且这些层形成整体的多孔体矩阵。各层的聚合物材料独立地选自聚乙烯，超高分子量聚乙烯（UHMW-PE）; 聚丙烯; 聚（四氟乙烯 - 共 - 全氟烷基乙烯基醚），其中烷基是丙基，甲基或其混合物（PFA）; 聚（四氟乙烯 - 共 - 六氟丙烯）（FEP）; 及其混合物。至少两层微孔聚合物膜具有不同的平均孔径。版权所有（C）2012，JPO＆INPIT

5. 发明专利

JP2011082553A Wafer container with door actuated wafer restraint 有权
标题翻译：带门启动的水龙头限位器
公开(公告)号：JP2011082553A
公开(公告)日：2011-04-21
申请号：JP2010273607
申请日：2010-12-08
申请人： Entegris Inc , インテグリス・インコーポレーテッド
发明人： BURNS JOHN , FULLER MATTHEW A , KING JEFFERY J , FORBES MARTIN L , SMITH MARK V
IPC分类号： H01L21/673 , B65D51/26
CPC分类号： H01L21/67353 , B65D51/26 , B65D2251/04 , H01L21/67369 , H01L21/67373 , H01L21/67383
摘要： PROBLEM TO BE SOLVED: To alleviate shock that may cause wafer breakage.
SOLUTION: A container 10 holding a wafer includes a casing having an upper face 14, a bottom face 16, a pair of opposing faces 18 and 20, a rear face 22, and an opening front section defined by a door frame. A door 28 sealingly engages the door frame so as to close the opening front section. The container includes wafer restraint means having fixed-type wafer restraint means and operable wafer restraint means. The operable wafer restraint means can detachably position the door 28 against the door frame. When the door 28 leaves from the door frame, the door is positioned so that wafers can be inserted or removed to or from the container 10. When the door 28 is engaged with the door frame, since the wafers are restraineded in the container, the door is positioned so as to cooperate with the fixed-type wafer restraint means.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：减轻可能导致晶片破损的冲击。解决方案：保持晶片的容器10包括具有上表面14，底面16，一对相对面18和20，后表面22和由门框限定的开口前部的壳体。门28密封地接合门框，以封闭开口前部。容器包括具有固定型晶片约束装置和可操作的晶片限制装置的晶片约束装置。可操作的晶片约束装置可以将门28可拆卸地定位抵靠门框。当门28从门框离开时，门被定位成使得晶片可以从容器10插入或取出。当门28与门框接合时，由于晶片被限制在容器中，所以门被定位成与固定型晶片约束装置配合。版权所有（C）2011，JPO＆INPIT

6. 发明专利

JP2010176707A System and method for flow monitoring and control 有权
标题翻译：流量监测与控制系统与方法
公开(公告)号：JP2010176707A
公开(公告)日：2010-08-12
申请号：JP2010106809
申请日：2010-05-06
申请人： Entegris Inc , エンテグリース,インコーポレイテッド
发明人： BRODEUR CRAIG L , LAVERDIERE MARC , MCLOUGHLIN ROBERT F , NIERMEYER KARL J , SHYU JIEH-HWA
IPC分类号： G05D7/06 , G01F1/00 , G01F1/36
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/7761
摘要： PROBLEM TO BE SOLVED: To provide a flow control device that controls a flow rate using a single sensor. SOLUTION: A control device (30) includes: an inlet (32) for receiving a flow; an outlet (34) for directing a flow to other components of a flow system; a pressure loss element (36); a pressure sensor (38) located upstream from the pressure loss element (36) configured to measure an upstream pressure; a pressure sensor (40) located downstream from the pressure loss element (36) configured to measure a downstream pressure; a controller (42), which includes processor, memory and software instructions for determining a fluid flow rate for generating a valve control signal; and a valve (44), such as a butterfly valve and a hydraulically driven valve, responsive to the valve control signal to regulate fluid flow. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种使用单个传感器控制流量的流量控制装置。控制装置（30）包括：用于接收流动的入口（32）; 用于将流引导到流系统的其它部件的出口（34）; 压力损失元件（36）; 位于所述压力损失元件（36）上游的压力传感器（38），其构造成测量上游压力; 压力传感器（40）位于所述压力损失元件（36）的下游，被配置成测量下游压力; 控制器（42），其包括用于确定用于产生阀门控制信号的流体流速的处理器，存储器和软件指令; 以及响应于阀控制信号来调节流体流动的阀（44），例如蝶阀和液压驱动阀。版权所有（C）2010，JPO＆INPIT

7. 发明专利

JP2009038047A Liquid vaporization apparatus 审中-公开
标题翻译：液体蒸发装置
公开(公告)号：JP2009038047A
公开(公告)日：2009-02-19
申请号：JP2006122148
申请日：2006-04-26
申请人： Entegris Inc , インテグリス・インコーポレーテッド
发明人： OYASHIKI YASUSHI , HARAGUCHI SEIJI
IPC分类号： H01L21/027 , G03F7/20
CPC分类号： C23C16/4481
摘要： PROBLEM TO BE SOLVED: To solve the problem of mixing of mist in a liquid vapor fed to a semiconductor process by the use of a single vaporization apparatus.
SOLUTION: The liquid vaporization apparatus, which achieves contact of a liquid with a carrier gas to thereby attain vaporization, comprises: a vaporization section (13) fitted with porous membranes in an air tight housing (3); a mist separation section (14) partitioned by a bulkhead (11) from the vaporization section (13) and fitted with filter materials (27, 31, 43); a liquid inlet (26) for feeding of the liquid to a liquid flow channel on the upstream of the porous membranes; a gas inlet (23) for feeding of the carrier gas to a gas flow channel on the downstream of the porous membranes; a connection passageway passing through the bulkhead (11) on the outlet side of the gas flow channel and making communication to the upstream side of the filter materials (27, 33, 43) to draw out the vapor resulting from vaporization by contact of the liquid having permeated the porous membranes with the carrier gas from the gas flow channel to the upstream side (15) of the separation section (13); and vapor outlets (29, 35) for drawing out the vapor having mist removed therefrom from the downstream side of the filter materials (27, 33, 43).
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：为了解决通过使用单一蒸发装置将进入半导体工艺的液体蒸气中的雾混合的问题。解决方案：实现液体与载体气体接触从而实现蒸发的液体蒸发装置包括：在气密壳体（3）中装有多孔膜的蒸发部分（13）; 由隔板（11）与蒸发部分（13）分隔并配有过滤材料（27,31,43）的雾分离部分（14）; 液体入口（26），用于将液体供给到多孔膜上游的液体流动通道; 用于将载气供给到多孔膜下游的气体流路的气体入口（23）连接通道，其穿过所述气体流动通道的出口侧上的所述隔板（11）并与所述过滤材料（27,33,43）的上游侧连通，以通过所述液体接触而抽出蒸发产生的蒸汽已经将载气从气流通道渗透到分离段（13）的上游侧（15）的多孔膜; 以及蒸气出口（29,35），用于从所述过滤材料（27,33,43）的下游侧抽出从其中除去的雾的蒸气。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP2009034603A Filter unit 审中-公开
标题翻译：过滤器单元
公开(公告)号：JP2009034603A
公开(公告)日：2009-02-19
申请号：JP2007200787
申请日：2007-08-01
申请人： Entegris Inc , インテグリス・インコーポレーテッド
发明人： TAKAHASHI JUNYA
IPC分类号： B01D63/00 , B01D29/07 , B01D63/14
摘要： PROBLEM TO BE SOLVED: To provide a filter unit which can increase an air filtering performance to a bottom channel in the filter unit of the type that a liquid to be filtered is flowed into the central part inside channel, the bottom channel, and the side channel in turn.
SOLUTION: The filter unit 1 has a constitution that: a central part of a filter member 11 is divided into the central part inside channel 40 connected to an entrance 31 and a central part outside channel 43 connected to an exit 32; the bottom channel 41 is formed between the bottom of the filter member 11 and the bottom of a housing 20, and the side channel 42 is formed between the side of the filter member 11 and the side of the housing 20; and the liquid to be filtered introduced from the entrance 31 is flowed from the central part inside channel 40 to the bottom channel 41, next, into the side channel 42, and therefrom to the central part outside channel 43, and is filtered passing through the filter member in such a manner. The filter unit 1 is characterized in that an upper wall surface 41a of the bottom channel 41 is connected to the wall surface 40a of the central part inside channel 40 at
摘要翻译：要解决的问题：为了提供一种过滤器单元，其可以使过滤器单元中的底部通道的空气过滤性能增加，使得待过滤的液体流入中心部分内部通道，底部通道，和侧通道。过滤器单元1具有以下结构：过滤构件11的中心部分被分成连接到入口31的中间部分内部通道40和连接到出口32的中心部分外部通道43; 底部通道41形成在过滤构件11的底部和壳体20的底部之间，并且侧通道42形成在过滤构件11的侧面和壳体20的侧面之间; 并且从入口31引入的被过滤的液体从内部通道40的中心部分流到底部通道41，接着进入侧部通道42，从而从通道43的中心部分流出，并通过过滤器构件。过滤器单元1的特征在于，底部通道41的上壁表面41a以<90°连接到中心部分内部通道40的壁表面40a，并且在整个区域上相对于水平面倾斜。版权所有（C）2009，JPO＆INPIT

9. 发明专利

JP2007111572A Functionalized membrane, and filtration material and filter element using the same 审中-公开
标题翻译：功能化膜，过滤材料和过滤元件
公开(公告)号：JP2007111572A
公开(公告)日：2007-05-10
申请号：JP2004161204
申请日：2004-05-31
申请人： Entegris Inc , インテグリス・インコーポレーテッド
发明人： NOMURA YOSHISHIRO
IPC分类号： B01D69/02 , B01D63/00 , B01D63/06 , B01D63/14 , B01D65/00 , B01D67/00 , B01D69/00 , B01D71/26 , B01D71/34 , B01D71/36 , B01D71/68
CPC分类号： B01D63/061 , B01D63/067 , B01D65/003 , B01D67/0088 , B01D69/00
摘要： PROBLEM TO BE SOLVED: To form a filter element without heating a porous hydrophobic resin membrane having been subjected to a functionalizing treatment such as conversion to a hydrophilic material; and to provide a structure capable of being degassed with ease.
SOLUTION: There are provided: a filtration membrane prepared by subjecting a functionalizing treatment, such as conversion to a hydrophilic material, to a porous hydrophobic resin membrane, except for prescribed both salvage portions in the width direction thereof; a filtration material manufactured by bending a pile of the filtration membrane with a support net for supporting the whole of both surfaces into a pleat form, and sealing the side end portions, to thereby form into an endless cylindrical article; and a filter element manufactured by supporting the filtration material with a porous inside core and a porous outside sleeve, and the resultant article adhering to an end cap with heat.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：在不加热已经进行官能化处理如转换成亲水性材料的多孔疏水性树脂膜的情况下形成过滤元件; 并且提供能够容易地脱气的结构。解决方案：提供：除了在其宽度方向上规定的两个救助部分之外，通过将官能化处理如亲水性材料的转化进行到多孔疏水性树脂膜而制备的过滤膜; 过滤材料通过将整个两个表面支撑成褶状的支撑网弯曲过滤膜的一堆而制成，并且密封侧端部，从而形成环形圆筒状的制品; 以及通过用多孔内芯和多孔外套筒支撑过滤材料制造的过滤元件，并且所得制品用热附着在端盖上。版权所有（C）2007，JPO＆INPIT

10. 发明公开

KR20180019732A 그라프팅된 폴리술폰 멤브레인 审中-公开
标题翻译：接枝聚砜膜
公开(公告)号：KR20180019732A
公开(公告)日：2018-02-26
申请号：KR20187002087
申请日：2015-11-19
申请人： ENTEGRIS INC
发明人： JABER JAD ALI , GJOKA ALKETA , LY SAKSATHA
IPC分类号： B01D71/68 , B01D67/00 , B01D69/02 , B01D71/78
CPC分类号： B01D71/68 , B01D67/0093 , B01D69/02 , B01D71/78 , B01D2323/02 , B01D2323/30 , B01D2323/345 , B01D2323/36 , B01D2323/385 , B01D2325/14 , B01D2325/16
摘要： 폴리술폰멤브레인의표면상에단량체가그라프팅되어폴리술폰멤브레인이개질된다. 폴리술폰멤브레인을그라프팅용액과접촉시키고멤브레인을전형적으로자외선스펙트럼영역내의전자기방사선에노출시킴으로써폴리술폰멤브레인을그라프팅할수 있다. 그라프팅되는단량체는전형적으로음이온성또는양이온성이다. 그라프팅된멤브레인은불순물, 예컨대양으로및 음으로하전된입자를액체로부터여과하는데 사용될수 있다. 음이온성멤브레인은음으로하전된불순물의개선된여과를제공하고, 양이온성멤브레인은양으로하전된불순물의개선된여과를제공한다.
摘要翻译：将单体接枝到聚砜膜的表面上以改性聚砜膜。聚砜膜可通过使聚砜膜与接枝溶液接触并将膜暴露于电磁辐射（通常在紫外光谱范围内）而接枝。待接枝的单体通常是阴离子或阳离子的。接枝膜可用于从液体中过滤杂质，例如带正电和带负电的颗粒。阴离子膜提供改进的带负电杂质的过滤，并且阳离子膜提供改进的带正电杂质的过滤。

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