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1. 发明申请

WO0237526A9 ELECTRON BEAM APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE COMPRISING THE APPARATUS 审中-公开
标题翻译：电子束装置及制造包含该装置的半导体装置的方法
公开(公告)号：WO0237526A9
公开(公告)日：2002-08-08
申请号：PCT/JP0109629
申请日：2001-11-02
申请人： EBARA CORP , NIPPON KOGAKU KK
发明人： NAKASUJI MAMORU , SATAKE TOHRU , WATANABE KENJI , MURAKAMI TAKESHI , NOJI NOBUHARU , SOBUKAWA HIROSI , KARIMATA TSUTOMU , YOSHIKAWA SHOJI , KIMBA TOSHIFUMI , OOWADA SHIN , SAITO MUTSUMI , HAMASHIMA MUNEKI , TAKAGI TORU , KIHARA NAOTO , NISHIMURA HIROSHI
IPC分类号： G01N23/225 , G01Q30/06 , H01J37/06 , H01J37/073 , H01J37/18 , H01J37/20 , H01J37/22 , H01J37/244 , H01J37/28 , H01J37/29 , H01L21/027 , H01L21/66
CPC分类号： H01J37/185 , G01N23/225 , G01N23/2251 , H01J37/06 , H01J37/073 , H01J37/20 , H01J37/222 , H01J37/244 , H01J37/28 , H01J2237/082 , H01J2237/202 , H01J2237/20228 , H01J2237/204 , H01J2237/22 , H01J2237/24564 , H01J2237/2806 , H01J2237/2816 , H01J2237/2817
摘要： An electron beam apparatus for evaluating a sample face which comprises a primary electro-optical system irradiating the sample with primary electron beams, a detection system, and a secondary electro-optical system directing the secondary electron beam generated from the sample face by irradiation with the primary electron beam to the detection system. The electron beam apparatus is characterized by comprising a multi-beam generator included in the primary electro-optical system to generate electrons emitted from an electron gun as primary electron beams, a scanning deflector included in the primary electro-optical system to scan the sample simultaneously with the primary electron beams, an objective lens included in common in the primary electro-optical system and the secondary electro-optical system to irradiate the sample with decelerated primary electron beams and to accelerate the secondary electron beams emitted from the irradiated point on the sample with the primary electron beams, a secondary electron beam separator included in the primary and secondary electro-optical systems to deflect the secondary electron beams passing through the objective lens from the primary electro-optical system to the secondary electro- optical system, a magnifying lens of at least one stage included in the secondary electro-optical lens to magnify the deflected secondary electron beams, and detectors included in the detection system and provided in accordance with the secondary electron beams for the secondary electro-optical system to detect secondary electron beams.
摘要翻译：一种电子束装置，用于评估样品面，该样品面包括用一次电子束照射样品的主电光系统，检测系统和二次电子光学系统，该样品面通过照射一次电子束到检测系统。电子束装置的特征在于包括：包含在主电光系统中的多束发生器，用于产生从电子枪发射的电子作为主电子束;包括在主电光系统中的扫描偏转器，用于同时扫描样品利用一次电子束在主电子光学系统和二次电子光学系统中共同包括的物镜照射具有减速的一次电子束的样品并且加速从样品上的照射点发射的二次电子束利用主电子束，包括在初级和次级电光系统中的次级电子束分离器，将通过物镜的次级电子束从初级电光系统偏转到次级电光系统，放大镜头包括在次级电光学透镜中的至少一个级的大小被偏转的二次电子束以及包括在检测系统中并且根据用于二次电子光学系统的二次电子束提供的检测器来检测二次电子束。

2. 发明公开

EP3076182A4 WASHING/DRYING DEVICE, SCREENING DEVICE, WASHING/DRYING METHOD, AND SCREENING METHOD 审中-公开
标题翻译： WASCH- / TROCKNERVORRICHTUNG，SIEBVORRICHTUNG，WASCH- / TROCKNUNGSVERFAHREN UND SIEBVERFAHREN
公开(公告)号：EP3076182A4
公开(公告)日：2017-08-09
申请号：EP14866476
申请日：2014-11-25
申请人： NIPPON KOGAKU KK
发明人： ISAMI TADAO , HAMASHIMA MUNEKI , UEDA TAKEHIKO
IPC分类号： G01N35/02 , B01L99/00 , G01N33/53 , G01N35/00 , G01N35/04 , G01N37/00
CPC分类号： G01N35/04 , B01L99/00 , B01L2300/0819 , B01L2300/0829 , G01N33/53 , G01N33/54386 , G01N35/00 , G01N35/00029 , G01N35/02 , G01N35/1002 , G01N2035/00158 , G01N2035/0437
摘要： There is a possibility that an arrangement of a cleaning device and a drying device may result in an inefficient usage of a space for an installation. A cleaning and drying apparatus 30 for a plate including a biochip is provided with: a cleaning device 310 that is configured to clean the plate 60; and a drying device 320 that is configured to dry the plate 60, the drying device 320 is arranged above the cleaning device 310.
摘要翻译：清洁装置和干燥装置的布置有可能导致安装空间的低效使用。用于包括生物芯片的板的清洁和干燥装置30设置有：清洁装置310，其被构造成清洁板60; 以及构造成干燥板60的干燥装置320，干燥装置320布置在清洁装置310上方。

3. 发明公开

EP2648405A4 IMAGING ELEMENT AND IMAGING DEVICE 审中-公开
标题翻译：图元与图像设备
公开(公告)号：EP2648405A4
公开(公告)日：2014-07-30
申请号：EP11845487
申请日：2011-11-29
申请人： NIPPON KOGAKU KK
发明人： SHIBAZAKI KIYOSHIGE , HAMASHIMA MUNEKI , MORI SUSUMU , SUZUKI SATOSHI
IPC分类号： H04N5/369 , H01L27/14 , H04N9/07 , H04N13/02
CPC分类号： H04N13/0285 , H01L27/14621 , H01L27/14623 , H01L27/14629 , H04N13/0225 , H04N13/0257
摘要： In order to acquire an image having a plurality of parallaxes, it is necessary to prepare a corresponding number of complex image capturing systems. To solve this problem, provided is an image capturing element comprising photoelectric converting elements that are arranged two-dimensionally and photoelectrically convert incident light into an electric signal; aperture masks that correspond one-to-one with the photoelectric converting elements; and color filters that correspond one-to-one with the photoelectric converting elements. Among n adjacent photoelectric converting elements, where n is an integer no less than three, apertures of the aperture masks corresponding to at least three of the photoelectric converting elements are included within each pattern of a color filter pattern formed from at least two types of the color filters that respectively pass different wavelength bands, and are positioned to respectively pass light from different partial regions within a cross-sectional region of the incident light, and photoelectric converting element groups that are each formed of the n photoelectric converting elements are arranged in series.

4. 发明公开

EP2975404A4 BIOCHIP FIXING METHOD, BIOCHIP FIXING DEVICE, AND SCREENING METHOD FOR BIOMOLECULE ARRAY 审中-公开
标题翻译：生物芯片FIXING过程中，生物薄片固定装置和筛选方法，生物分子-ARRAY
公开(公告)号：EP2975404A4
公开(公告)日：2016-11-23
申请号：EP14764358
申请日：2014-03-14
申请人： NIPPON KOGAKU KK
发明人： UEDA TAKEHIKO , HAYASHI YUTAKA , ISAMI TADAO , HAMASHIMA MUNEKI
IPC分类号： G01N33/53 , B01J19/00 , B01L3/00 , G01N35/02 , G01N37/00
CPC分类号： B01J19/0046 , B01J2219/00711 , B01L3/508 , B01L2200/12 , B01L2300/0819 , G01N35/04 , G01N2035/00158 , G01N2035/0493
摘要： A biochip fixing method includes: arranging a biochip on an object with a predetermined material interposed therebetween; and irradiating the predetermined material with energy waves via the object to fix the biochip to the object.

5. 发明公开

EP3028764A4 PLATE, PRODUCTION METHOD FOR PLATE, BIOCHIP OBSERVATION METHOD, AND SCREENING METHOD 审中-公开
标题翻译： PLATTE，HERSTELLUNGSVERFAHRENFÜRPLATTE，BIOCHIPBEOBACHTUNGSVERFAHREN UND SCREENING-VERFAHREN
公开(公告)号：EP3028764A4
公开(公告)日：2017-06-07
申请号：EP14832896
申请日：2014-07-31
申请人： NIPPON KOGAKU KK
发明人： ISAMI TADAO , HAMASHIMA MUNEKI , UEDA TAKEHIKO , HAYASHI YUTAKA
IPC分类号： B01L3/00 , B01L9/00 , B29C65/00 , B29C65/08 , C12M1/00 , C12M1/32 , G01N21/03 , G01N21/25 , G01N33/50 , G01N35/02
CPC分类号： B01L9/52 , B01L3/5085 , B01L2200/025 , B01L2200/0689 , B01L2200/12 , B01L2300/044 , B01L2300/0829 , B01L2300/0848 , B01L2300/0887 , B01L2300/168 , B29C65/08 , B29C66/112 , B29C66/114 , B29C66/30221 , B29C66/30223 , B29C66/5346 , B29C66/71 , B29C66/73366 , B29C66/73921 , C12M23/12 , G01N21/03 , G01N21/253 , B29K2023/38 , B29K2025/06 , B29K2033/08 , B29K2033/12 , B29K2069/00
摘要： This plate (100) is provided with a board (130) having a first surface, and partitioned member (120) in which a plurality of partitions are formed by dividing walls (22). Gaps (28) are formed to the first surface side between neighboring dividing walls (22). The ends of the dividing walls (22) at the gap (28) side have welded portions welded to the first surface of the board (130), the board (130) and the partitioned member (120) being welded at the welded portions.
摘要翻译：该板100设置有具有第一表面的板130和通过分隔壁22形成有多个分隔件的分隔构件120。间隙（28）形成于相邻分隔壁（22）之间的第一表面侧。在间隙（28）侧的分隔壁（22）的端部具有焊接到板（130）的第一表面的焊接部分，板（130）和分隔构件（120）在焊接部分被焊接。

6. 发明公开

EP2876482A4 OPTICAL ELEMENT, OPTICAL DEVICE, MEASUREMENT DEVICE, AND SCREENING DEVICE 审中-公开
标题翻译：光学元件的光学设备，测量装置和筛分装置
公开(公告)号：EP2876482A4
公开(公告)日：2016-04-13
申请号：EP13820496
申请日：2013-07-09
申请人： NIPPON KOGAKU KK
发明人： MORI SUSUMU , SAITO TOMOYA , UEDA TAKEHIKO , HAMASHIMA MUNEKI , YOSHINO KUNIHIKO , KATO MASANOBU
IPC分类号： G02B21/06 , G01B11/00 , G01N21/27 , G01N21/64 , G02B5/26 , G02B5/28 , G02B21/16 , G02B27/10
CPC分类号： G02B5/22 , G01N21/64 , G01N21/6458 , G02B5/285 , G02B21/16 , G02B27/1006
摘要： An optical element includes a separation section that can separate incident light according to a wavelength. The separation section has an optical characteristic in which incident light in a first wavelength band is reflected, incident light in a second wavelength band is transmitted, and incident light in a third wavelength band is partially transmitted and partially reflected.

7. 发明专利

JPS59210312A Pattern position detector 失效
标题翻译：图案位置检测器
公开(公告)号：JPS59210312A
公开(公告)日：1984-11-29
申请号：JP8546083
申请日：1983-05-16
申请人： Nippon Kogaku Kk
发明人： HAMASHIMA MUNEKI
IPC分类号： G01B15/00 , H01J37/28 , H01J37/304
CPC分类号： H01J37/28 , H01J37/3045
摘要： PURPOSE:To detect a pattern position accurately and automatically at a high speed by obtaining time-series pattern information by a moving means which is independent of a scanner at an invariably prescribed position in the scanning track of an energy beam. CONSTITUTION:The horizontal scanning signal HS and vertical scanning signal VS from a scanning signal generating circuit 11 are applied to a scanning coil 4, and consequently an electron beam EB makes a raster scan in a sample WP. The detection signal A of a detector 7 is inputted to a brightness modulating circuit 16 to form an image SEM of the sample WP synchronously with the scanning of the electron beam EB. The horizontal scanning signal HS from an OSC11 is compared with a reference voltage Vr1, and a pulse signal B is outputted when they coincide with each other and inputted as a signal for cursor display to the brightness modulating circuit 16. The voltage of the detection signal A is smoothed by an integral smoothing circuit 22, whose signal C is compared with a slice voltage Vr2 by a comparator 23. When the signal C is larger, a gate signal D is outputted, and measuring operation starts at the rising of th signal D and ends at the falling.
摘要翻译：目的：通过在能量束的扫描轨迹中的不变的规定位置处独立于扫描仪的移动装置获得时间序列图案信息来高速地精确和自动地检测图案位置。构成：扫描信号发生电路11的水平扫描信号HS和垂直扫描信号VS被施加到扫描线圈4，因此电子束EB在样本WP中进行光栅扫描。检测器7的检测信号A被输入到亮度调制电路16，以与扫描电子束EB同步地形成样本WP的图像SEM。将来自OSC11的水平扫描信号HS与参考电压Vr1进行比较，并且当它们彼此一致时输出脉冲信号B，并将其作为用于光标显示的信号输入到亮度调制电路16.检测信号的电压 A由积分平滑电路22平滑，积分平滑电路22的信号C通过比较器23与片电压Vr2进行比较。当信号C较大时，输出栅极信号D，并且在信号D的上升开始测量操作并以坠落结束。

8. 发明专利

JPS5919913A Focus controller 失效
标题翻译：聚焦控制器
公开(公告)号：JPS5919913A
公开(公告)日：1984-02-01
申请号：JP12994082
申请日：1982-07-26
申请人： Nippon Kogaku Kk
发明人： HAMASHIMA MUNEKI , MURAKAMI SHIGEO
IPC分类号： G03B13/36 , G02B7/36 , G02B7/38
CPC分类号： G02B7/36
摘要： PURPOSE:To widen the control range of a focus position and to improve precision by splitting reflected light into two pieces of luminous flux, guiding one to a photoelectric detector for front and rear out-of-focus detection and the other to a photoelectric detector for focusing detection, and increasing the image formation magnifiction of the focusing detection. CONSTITUTION:Luminous flux from a half-mirror 3 is aplit into two pieces of luminous flux; one piece of luminous flux is incident to a short-focus lens 9 through a mirror 8, and the other piece of luminous flux is incident to a long- focus lens 10. The luminous flux passed through the lens 9 reaches the center part of a charge coupled device CCD15 through a split surface 13a. Luminous flux reflected by a split surface 13a reaches the leftside part of the CCD15 and luminous flux passed through a lens 10 reaches the right-side part of the CCD15. The photodetection surface of a focusing detection area 15a is arranged at an expected focal plane when the focal point of an objective 5 coincides with a sample surface. Then, the image formation magnification of a photoelectric detector for a focusing surface is increased. Consequently, the control range of the focus position is widened and the precision is improved.
摘要翻译：目的：扩大对焦位置的控制范围，通过将反射光分成两束光通量来提高精度，将其引导到光电检测器进行前后离焦检测，另一种用于光电检测器聚焦检测，并增加聚焦检测的图像形成宏观。构成：半透镜3的光通量分为两片光通量; 一束光束通过反射镜8入射到短焦透镜9，另一束光通量入射到长焦聚焦透镜10.透过透镜9的光束到达中心部分电荷耦合器件CCD15通过分离表面13a。由分割面13a反射的光通量到达CCD15的左侧部分，通过透镜10的光束到达CCD15的右侧部分。当物镜5的焦点与样品表面重合时，聚焦检测区域15a的光电检测表面被布置在预期的焦平面处。然后，增加了用于聚焦表面的光电检测器的图像形成倍率。因此，聚焦位置的控制范围变宽，精度提高。

9. 发明专利

JPH0411802B2 失效
公开(公告)号：JPH0411802B2
公开(公告)日：1992-03-02
申请号：JP5150483
申请日：1983-03-29
申请人： NIPPON KOGAKU KK
发明人： MURAKAMI SHIGEO , HAMASHIMA MUNEKI
IPC分类号： G01B11/00 , G01B11/02 , G01B11/24 , G01B11/245 , G01B21/00 , G06T1/00 , G06T7/60

10. 发明专利

JPS61141449A Pattern position detector using laser beams 失效
标题翻译：使用激光束的图案位置检测器
公开(公告)号：JPS61141449A
公开(公告)日：1986-06-28
申请号：JP26403784
申请日：1984-12-14
申请人： Nippon Kogaku Kk
发明人： HAMASHIMA MUNEKI , KATO KINYA
IPC分类号： G03F9/00 , G03F7/20 , H01L21/027 , H01L21/66
CPC分类号： G03F7/70616 , G03F7/70625 , G03F7/70633
摘要： PURPOSE:To detect the position of a pattern with high resolution and high precision by scanning a pattern with a laser spot beam and separately obtaining 3 kinds of optical information; scattered light from the edge of the pattern, reflected light from the pattern, and fluorescent light from the pattern, at the same time, and detecting the position of the pattern. CONSTITUTION:The device is provided with an optical system for condensing laser beams into a minute spot light and irradiating it on a semiconductor wafer W, a scanning means 3 for relatively scanning the sample to be tested and the spot light, the first photoelectric detectors 10, 13 for receiving at least one of reflected light from the pattern, and scattered light produced from the border of the pattern (level difference edge) by the irradiation of the spot light, and the second photoelectric detector 24 for receiving fluorescent light or phosphorescence produced from the pattern by irradiation of the spot light. The position of the pattern is detected in accordance with the detection information of the first detectors 10, 13, and that of the second detector 24, and the information on the relative scanning position of the spot light.
摘要翻译：目的：通过用激光点光束扫描图案并分别获得3种光学信息，以高分辨率和高精度检测图案的位置; 来自图案的边缘的散射光，来自图案的反射光，以及来自图案的荧光，同时检测图案的位置。构成：该装置设置有用于将激光束聚光到微小的点光并将其照射在半导体晶片W上的光学系统，用于相对扫描被测试样品的扫描装置3和聚光灯，第一光电检测器10 13，用于从图案接收至少一个反射光，以及通过点光的照射从图案的边界（电平差边缘）产生的散射光，以及用于接收荧光或磷光的第二光电检测器24 从图案通过照射点光。根据第一检测器10,13的检测信息和第二检测器24的检测信息以及关于聚光的相对扫描位置的信息来检测图案的位置。

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