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1. 发明公开

EP0789160A3 Magnetically levitated vibration damping apparatus 失效
标题翻译：磁悬浮减振装置
公开(公告)号：EP0789160A3
公开(公告)日：1998-07-08
申请号：EP96112788
申请日：1996-08-08
申请人： EBARA CORP , KAJIMA CORP
发明人： WATANABE KATSUHIDE , KANEMITSU YOICHI , HAGA TAKAHIDE , YANO KENICHI , MIZUNO TAKAYUKI , KATAMURA RYUTA
IPC分类号： F16F15/02 , F16F15/03 , F16F15/00
CPC分类号： F16F15/02 , F16F15/03
摘要： A magnetically levitated vibration damping apparatus includes a table (11) having a flat board of a magnetic material, an electromagnetic actuator (12) for applying magnetic attractive forces to the flat board to levitate the table (11), a displacement sensor (14) for detecting relative displacement between the flat board and the electromagnetic actuator (12), an acceleration sensor (13) for detecting absolute acceleration of the table (11), and a control system (15) for controlling a current supplied to the electromagnetic actuator (12) based on signals from the displacement sensor (14) and the acceleration sensor (13) according to a first control rule for controlling a gap (Z) between the flat board and the electromagnetic actuator (12) based on the signal from the acceleration sensor (13) and a second control rule for controlling vibrations of the table (11) based on the signal from the acceleration sensor (13), the second control rule including stability control (15) of relative displacement of the table (11).

2. 发明专利

DE69631362D1 未知
公开(公告)号：DE69631362D1
公开(公告)日：2004-02-26
申请号：DE69631362
申请日：1996-10-02
申请人： EBARA CORP
发明人： WATANABE KATSUHIDE , KANEMITSU YOICHI , HAGA TAKAHIDE , SUZUKI MAMORU
IPC分类号： F16F15/023 , F16F15/03
摘要： A vibration damping apparatus has a vibration-isolating table for placing an object thereon which is to be isolated from vibrations, an air spring mounted on an installation floor and supporting the vibration-isolating table for attenuating vibrations from the installation floor, an air pressure controller for controlling an air pressure of the air spring, a displacement sensor for detecting a relative displacement between the vibration-isolating table and the installation floor and supplying a signal indicative of the detected relative displacement to the air pressure controller, and a spring element acting between the vibration-isolating table and the installation floor for positioning the vibration-isolating table horizontally. An electromagnet is disposed between the vibration-isolating table and the installation floor for actively attenuating vibrations of the vibration-isolating table. The vibration damping apparatus is operated to position the vibration-isolating table horizontally by means of the spring elements, and vertically by means of the air spring.

3. 发明专利

DE69630509D1 未知
公开(公告)号：DE69630509D1
公开(公告)日：2003-12-04
申请号：DE69630509
申请日：1996-08-08
申请人： EBARA CORP
发明人： WATANABE KATSUHIDE , KANEMITSU YOICHI , HAGA TAKAHIDE , YANO KENICHI , MIZUNO TAKAYUKI , KATAMURA RYUTA
IPC分类号： F16F15/02 , F16F15/03 , F16F15/00
摘要： A magnetically levitated vibration damping apparatus includes a table (11) having a flat board of a magnetic material, an electromagnetic actuator (12) for applying magnetic attractive forces to the flat board to levitate the table (11), a displacement sensor (14) for detecting relative displacement between the flat board and the electromagnetic actuator (12), an acceleration sensor (13) for detecting absolute acceleration of the table (11), and a control system (15) for controlling a current supplied to the electromagnetic actuator (12) based on signals from the displacement sensor (14) and the acceleration sensor (13) according to a first control rule for controlling a gap (Z) between the flat board and the electromagnetic actuator (12) based on the signal from the acceleration sensor (13) and a second control rule for controlling vibrations of the table (11) based on the signal from the acceleration sensor (13), the second control rule including stability control (15) of relative displacement of the table (11).

4. 发明公开

EP1304499A4 VIBRATION ISOLATING DEVICE USING MAGNETIC LEVITATING DEVICE 审中-公开
标题翻译： SCH UN UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG
公开(公告)号：EP1304499A4
公开(公告)日：2005-02-02
申请号：EP01949958
申请日：2001-07-12
申请人： EBARA CORP
发明人： WATANABE KATSUHIDE , HAGA TAKAHIDE , KANEMITSU YOICHI
IPC分类号： F16F15/02 , F16F15/03 , G03F7/20 , G05D19/02 , H01L21/027
CPC分类号： G03F7/709 , F16F15/03 , G05D19/02
摘要： A vibration isolating device capable of stably supporting a vibration isolating table to surely insulate a vibration-protected device from an external vibration, comprising a the vibration isolating table (10), magnetic levitating devices (31) to (34) supporting the vibration isolating table (10) in the state of non-contact with the table and applying a control force to the table, displacement sensors (41) to (44) detecting the relative displacement amount of the vibration isolating table (10) relative to a foundation and outputting displacement signals, acceleration sensors (61) to (63) outputting acceleration signals when detecting the vibration of the foundation, and a controller (5), the controller further comprising a first control loop for positioning the vibration isolating table (10) relative to the foundation by providing a feedback of the displacement signals to the magnetic levitating devices (31) to (34) and a second control loop for suppressing the transmission of vibration from the foundation to the vibration isolating table (10) by providing a feed-forward of the acceleration signals to the magnetic levitating devices (31) to (34) after compensation.
摘要翻译：为了稳定地支撑防振台将隔振装置与外部振动隔离，防振装置包括防振台10; 磁悬浮装置31-34，用于不接触地支撑隔振台10并向其施加控制力; 位移传感器41-44，用于检测隔振台10相对于基座的相对位移量，以输出位移信号; 以及用于在检测到基础的振动时输出加速度信号的加速度传感器61-63。控制器5包括用于将位移信号反馈回磁悬浮装置31-34的第一控制回路，以确定隔振台10相对于地基的相对位置; 以及用于补偿加速度信号并将补偿的加速度信号向前馈送到磁悬浮装置31-34的第二控制回路，以抑制从地基传播到隔振台10的振动。

5. 发明专利

DE69630509T2 未知
公开(公告)号：DE69630509T2
公开(公告)日：2004-08-12
申请号：DE69630509
申请日：1996-08-08
申请人： EBARA CORP
发明人： WATANABE KATSUHIDE , KANEMITSU YOICHI , HAGA TAKAHIDE , YANO KENICHI , MIZUNO TAKAYUKI , KATAMURA RYUTA
IPC分类号： F16F15/02 , F16F15/03 , F16F15/00
摘要： A magnetically levitated vibration damping apparatus includes a table (11) having a flat board of a magnetic material, an electromagnetic actuator (12) for applying magnetic attractive forces to the flat board to levitate the table (11), a displacement sensor (14) for detecting relative displacement between the flat board and the electromagnetic actuator (12), an acceleration sensor (13) for detecting absolute acceleration of the table (11), and a control system (15) for controlling a current supplied to the electromagnetic actuator (12) based on signals from the displacement sensor (14) and the acceleration sensor (13) according to a first control rule for controlling a gap (Z) between the flat board and the electromagnetic actuator (12) based on the signal from the acceleration sensor (13) and a second control rule for controlling vibrations of the table (11) based on the signal from the acceleration sensor (13), the second control rule including stability control (15) of relative displacement of the table (11).

6. 发明专利

DE69724342T2 未知
公开(公告)号：DE69724342T2
公开(公告)日：2004-06-24
申请号：DE69724342
申请日：1997-06-23
申请人： EBARA CORP
发明人： HAGA TAKAHIDE , WATANABE KATSUHIDE
IPC分类号： F16F15/02 , F16F15/027 , F16F15/03
摘要： The object of the present invention is to provide a compact vibration cancellation apparatus based on a combination of air springs (11) and electromagnetic actuators (12) with smaller power capacity to enable the anti-vibration table (10) to be maintained in a level position even when the gravity of the anti-vibration table (10) moves over a large distance caused by a movement of the objective equipment (A) on the table. A vibration cancellation apparatus for isolating floor vibration or canceling vibration of the objective equipment (A) on a anti-vibration table (10) comprises: at least three displacement sensors (12), acceleration sensors (13), levitation position control means, vibration canceling control means, and air spring actuators (11) for supporting four corners of said anti-vibration table (10) by air pressure; wherein said air pressure in each of said air spring actuator (11) is controlled in response to a change of load weight which corresponds to a movement of gravity caused by movement of said objective equipment (A) on said anti-vibration table (10).

7. 发明专利

DE69631362T2 未知
公开(公告)号：DE69631362T2
公开(公告)日：2004-11-04
申请号：DE69631362
申请日：1996-10-02
申请人： EBARA CORP
发明人： WATANABE KATSUHIDE , KANEMITSU YOICHI , HAGA TAKAHIDE , SUZUKI MAMORU
IPC分类号： F16F15/023 , F16F15/03
摘要： A vibration damping apparatus has a vibration-isolating table for placing an object thereon which is to be isolated from vibrations, an air spring mounted on an installation floor and supporting the vibration-isolating table for attenuating vibrations from the installation floor, an air pressure controller for controlling an air pressure of the air spring, a displacement sensor for detecting a relative displacement between the vibration-isolating table and the installation floor and supplying a signal indicative of the detected relative displacement to the air pressure controller, and a spring element acting between the vibration-isolating table and the installation floor for positioning the vibration-isolating table horizontally. An electromagnet is disposed between the vibration-isolating table and the installation floor for actively attenuating vibrations of the vibration-isolating table. The vibration damping apparatus is operated to position the vibration-isolating table horizontally by means of the spring elements, and vertically by means of the air spring.

8. 发明专利

DE69724342D1 未知
公开(公告)号：DE69724342D1
公开(公告)日：2003-10-02
申请号：DE69724342
申请日：1997-06-23
申请人： EBARA CORP
发明人： HAGA TAKAHIDE , WATANABE KATSUHIDE
IPC分类号： F16F15/02 , F16F15/027 , F16F15/03
摘要： The object of the present invention is to provide a compact vibration cancellation apparatus based on a combination of air springs (11) and electromagnetic actuators (12) with smaller power capacity to enable the anti-vibration table (10) to be maintained in a level position even when the gravity of the anti-vibration table (10) moves over a large distance caused by a movement of the objective equipment (A) on the table. A vibration cancellation apparatus for isolating floor vibration or canceling vibration of the objective equipment (A) on a anti-vibration table (10) comprises: at least three displacement sensors (12), acceleration sensors (13), levitation position control means, vibration canceling control means, and air spring actuators (11) for supporting four corners of said anti-vibration table (10) by air pressure; wherein said air pressure in each of said air spring actuator (11) is controlled in response to a change of load weight which corresponds to a movement of gravity caused by movement of said objective equipment (A) on said anti-vibration table (10).

9. 发明公开

EP1703577A4 METHOD OF OPERATING FUEL CELL SYSTEM AND FUEL CELL SYSTEM 审中-公开
标题翻译：用于操作燃料电池系统及燃料电池系统
公开(公告)号：EP1703577A4
公开(公告)日：2011-01-26
申请号：EP04820308
申请日：2004-12-10
申请人： EBARA CORP
发明人： SU QINGQUAN , HORIE TOSHIHIRO , ANDO MASAKI , HAGA TAKAHIDE
IPC分类号： C01B3/38 , H01M8/04 , C01B3/48 , C10K3/00 , C10K3/04 , H01M8/06
CPC分类号： H01M8/04955 , C01B3/384 , C01B3/48 , C01B2203/0233 , C01B2203/0283 , C01B2203/044 , C01B2203/047 , C01B2203/066 , C01B2203/0811 , C01B2203/0822 , C01B2203/0827 , C01B2203/1047 , C01B2203/1058 , C01B2203/1604 , C01B2203/1619 , C01B2203/169 , C01B2203/1695 , C10K3/00 , C10K3/04 , H01M8/04022 , H01M8/04223 , H01M8/04373 , H01M8/04776 , H01M8/0491 , H01M8/0612 , H01M8/0618 , H01M8/0668 , Y02P20/128
摘要： To provide a fuel cell power generation system which has no assist combustion system and thus is simple in structure and a method for starting the fuel cell power generation system and controlling the operation of the fuel cell power generation system, in order to provide a fuel cell power generation system which operates stably with a high reliability. In a fuel cell power generation system having a reforming section 5 for reforming a raw material fuel m to produce reformate r; a combustion section 4 for burning the raw material fuel to heat the reforming section; carbon monoxide reduction section 6 and 7 for reducing the content of carbon monoxide in the reformate to produce carbon monoxide reduced gas g; and a fuel cell 30 which uses the carbon monoxide reduced gas as fuel gas, the raw material fuel is supplied to the combustion section to heat the reforming section to a predetermined temperature, supply of the raw material fuel to the combustion section is stopped, the raw material fuel is supplied to the reforming section to produce reformate, the reformate is introduced into the carbon monoxide reduction section to heat the carbon monoxide reduction section, and the carbon monoxide reduced gas generated in the carbon monoxide reduction section is introduced into the fuel cell to generate electric power.

10. 发明公开

EP1071097A4 STAGE POSITIONING DEVICE 审中-公开
标题翻译：设备定位的板
公开(公告)号：EP1071097A4
公开(公告)日：2007-07-25
申请号：EP98954803
申请日：1998-11-24
申请人： EBARA CORP
发明人： WATANABE KATSUHIDE , SATOH ICHIJU , HAGA TAKAHIDE , JOUNO YOSHINORI
IPC分类号： G12B5/00 , G01B11/00 , G03B27/42 , G03F7/20 , H02K7/09
CPC分类号： G03F7/70758 , G03F7/70716 , G03F7/70816 , Y10S977/839
摘要： A stage positioning device enabling a fine and stable positioning operation, comprising a stage (11) on which a sample (W) to which a beam (B) is applied, is placed, actuators (12a, 12b, 12c and 12d) which support the stage (11) in a noncontact and levitated state and control its movement, a first sensor (13) which measures relative displacement between the stage (11) and actuators (12a, 12b, 12c and 12d), a second sensor (36) which measures a relative displacement between an actual beam (B) application position and a target beam application position on the sample and a controller (15) which controls the movement of the stage so as to reduce the relative displacement detected by the sensor (36), wherein the stage is a magnetically levitated stage consisting of a levitation unit which has a table part on which the sample is placed and side plates hanging down from the outer circumference of the table part and a fixed unit which has the actuators which supports the levitation unit with the magnetic forces of magnets and, at the same time, controls the position of the levitation unit, and the fixed unit is covered with the table part and side plates of the levitation unit.

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