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1. 发明专利

DE69630509D1 未知
公开(公告)号：DE69630509D1
公开(公告)日：2003-12-04
申请号：DE69630509
申请日：1996-08-08
申请人： EBARA CORP
发明人： WATANABE KATSUHIDE , KANEMITSU YOICHI , HAGA TAKAHIDE , YANO KENICHI , MIZUNO TAKAYUKI , KATAMURA RYUTA
IPC分类号： F16F15/02 , F16F15/03 , F16F15/00
摘要： A magnetically levitated vibration damping apparatus includes a table (11) having a flat board of a magnetic material, an electromagnetic actuator (12) for applying magnetic attractive forces to the flat board to levitate the table (11), a displacement sensor (14) for detecting relative displacement between the flat board and the electromagnetic actuator (12), an acceleration sensor (13) for detecting absolute acceleration of the table (11), and a control system (15) for controlling a current supplied to the electromagnetic actuator (12) based on signals from the displacement sensor (14) and the acceleration sensor (13) according to a first control rule for controlling a gap (Z) between the flat board and the electromagnetic actuator (12) based on the signal from the acceleration sensor (13) and a second control rule for controlling vibrations of the table (11) based on the signal from the acceleration sensor (13), the second control rule including stability control (15) of relative displacement of the table (11).

2. 发明公开

EP0789160A3 Magnetically levitated vibration damping apparatus 失效
标题翻译：磁悬浮减振装置
公开(公告)号：EP0789160A3
公开(公告)日：1998-07-08
申请号：EP96112788
申请日：1996-08-08
申请人： EBARA CORP , KAJIMA CORP
发明人： WATANABE KATSUHIDE , KANEMITSU YOICHI , HAGA TAKAHIDE , YANO KENICHI , MIZUNO TAKAYUKI , KATAMURA RYUTA
IPC分类号： F16F15/02 , F16F15/03 , F16F15/00
CPC分类号： F16F15/02 , F16F15/03
摘要： A magnetically levitated vibration damping apparatus includes a table (11) having a flat board of a magnetic material, an electromagnetic actuator (12) for applying magnetic attractive forces to the flat board to levitate the table (11), a displacement sensor (14) for detecting relative displacement between the flat board and the electromagnetic actuator (12), an acceleration sensor (13) for detecting absolute acceleration of the table (11), and a control system (15) for controlling a current supplied to the electromagnetic actuator (12) based on signals from the displacement sensor (14) and the acceleration sensor (13) according to a first control rule for controlling a gap (Z) between the flat board and the electromagnetic actuator (12) based on the signal from the acceleration sensor (13) and a second control rule for controlling vibrations of the table (11) based on the signal from the acceleration sensor (13), the second control rule including stability control (15) of relative displacement of the table (11).

3. 发明专利

DE69630509T2 未知
公开(公告)号：DE69630509T2
公开(公告)日：2004-08-12
申请号：DE69630509
申请日：1996-08-08
申请人： EBARA CORP
发明人： WATANABE KATSUHIDE , KANEMITSU YOICHI , HAGA TAKAHIDE , YANO KENICHI , MIZUNO TAKAYUKI , KATAMURA RYUTA
IPC分类号： F16F15/02 , F16F15/03 , F16F15/00
摘要： A magnetically levitated vibration damping apparatus includes a table (11) having a flat board of a magnetic material, an electromagnetic actuator (12) for applying magnetic attractive forces to the flat board to levitate the table (11), a displacement sensor (14) for detecting relative displacement between the flat board and the electromagnetic actuator (12), an acceleration sensor (13) for detecting absolute acceleration of the table (11), and a control system (15) for controlling a current supplied to the electromagnetic actuator (12) based on signals from the displacement sensor (14) and the acceleration sensor (13) according to a first control rule for controlling a gap (Z) between the flat board and the electromagnetic actuator (12) based on the signal from the acceleration sensor (13) and a second control rule for controlling vibrations of the table (11) based on the signal from the acceleration sensor (13), the second control rule including stability control (15) of relative displacement of the table (11).

4. 发明专利

JPH06147260A ELECTROMAGNETIC ACTUATOR FOR MAGNETIC LEVITATION TYPE VIBRATION ELIMINATING DEVICE 失效
公开(公告)号：JPH06147260A
公开(公告)日：1994-05-27
申请号：JP29474792
申请日：1992-11-04
申请人： KAJIMA CORP , EBARA CORP
发明人： MIZUNO TAKAYUKI , IIDA MASATO , KOSHIDA HIROSHI , NAGAYA YOSHIO , MIDORIKAWA HIROSHI , MINEMURA ATSUO , NAKANO TATSUJI
IPC分类号： E04F15/18 , F16F15/03
摘要： PURPOSE:To improve a vibration eliminating effect through the increase of a gap between a stator and a rotor and to reduce the volume of a control electromagnet. CONSTITUTION:An electromagnet 2 for levitation is installed on a stator 1 and a gap C is set relatively large between a stator 1 and a rotor 10. A magnetic damper E is installed between the stator 1 and the rotor 10, and at the same time a coil spring 14 being an elasticity means is provided to center the rotor 10.

5. 发明专利

JPH09112628A MAGNETIC LEVITATION VIBRATION RESISTANT DEVICE 失效
公开(公告)号：JPH09112628A
公开(公告)日：1997-05-02
申请号：JP21198896
申请日：1996-07-23
申请人： EBARA CORP , KAJIMA CORP
发明人： WATANABE KAZUHIDE , KANEMITSU YOICHI , HAGA NAOHIDE , YANO KENICHI , MIZUNO TAKAYUKI , KATAMURA RIYUUTA
IPC分类号： F16F15/02 , F16F15/03 , G05D19/02 , H01L21/02
摘要： PROBLEM TO BE SOLVED: To remove vibrations satisfactorily even in vertical direction. SOLUTION: A magnetic levitation vibration resistant device is composed of a table equipped with a flat plate made of a magnetic substance and an electromagnetic actuator 12 which exerts a magnetic attraction force to the flat plate and suspends the table afloat, wherein the arrangement includes a displacement sensor 14 to measure the relative displacement between the surface of flat plate and the magnetic pole face of the electromagnet, an acceleration sensor 13 to measure the absolute acceleration of the table, and a control device 15 to control the energizing current for the electromagnet on the basis of the signals given by the sensors. The control device 15 works according to two control laws, i.e., the control law to be used in controlling the gap between the surface of the flat plate and the magnetic pole face of the elecromagnet and control law to be used in controlling the vibration on the basis of the signal given by the acceleration sensor 13, wherein the stability control for the relative displacement of the table is included in the latter, i.e., the control law for controlling the vibration.

6. 发明专利

JPH06294444A VIBRATION RESISTING DEVICE 失效
公开(公告)号：JPH06294444A
公开(公告)日：1994-10-21
申请号：JP10628293
申请日：1993-04-07
申请人： EBARA CORP , KAJIMA CORP
发明人： WATANABE KAZUHIDE , KANEMITSU YOICHI , SATO KAZUKI , YANO KENICHI , MIZUNO TAKAYUKI
IPC分类号： E04F15/18 , F16F15/03
摘要： PURPOSE:To provide a vibration resisting device of a compact structure, which has sufficient vibration resisting effect under a non-contact condition against vibration of large horizontal amplitude by using a permanent magnet instead of a horizontal electromagnet, and which can respond to wide vibration range from very small vibration to earthquake. CONSTITUTION:A device is provided with a vibration resisting board floor plate 1 for loading a device, for which vibration is to be avoided, a magnetic substance 3 fixed to the vibration resisting board floor plate 1, a levitating electromagnet 4 fixed to the setting floor side for supporting the magnetic substance 3 by magnetic force under a non-contact condition, and a displacement sensor for detecting relative displacement in the gap between magnetic substance 3 fixed to the vibration resisting board floor plate 1 and the levitating electromagnet 4 fixed to the setting floor side. In the vibration resisting device consisting of a controller 7 provided with a control circuit for controlling the electromagnet 4 to levitate the vibration resisting board floor plate 1 by the signal of the displacement sensor 5, a permanent magnet 11 fixed to the vibration resisting board floor plate 1 and a permanent magnet 12 fixed to the floor side are opposed to one another so that the polarities are reverse. Repulsive force is generated between the opposed surfaces, and the vibration resisting board floor plate 1 can be supported non-contact even in the horizontal direction.

7. 发明专利

JPH06241275A DAMPING DEVICE 失效
公开(公告)号：JPH06241275A
公开(公告)日：1994-08-30
申请号：JP2519893
申请日：1993-02-15
申请人： KAJIMA CORP , EBARA CORP
发明人： MIZUNO TAKAYUKI , YANO KENICHI , NAKANO TATSUJI , KANEMITSU YOICHI , WATANABE KAZUHIDE
IPC分类号： E04F15/18 , F16C32/04 , F16F15/03
摘要： PURPOSE:To improve a damping effect in enlarging a clearance between a stator and a movable part as well as to use a control electromagnet for flotation alone. CONSTITUTION:A floating electromagnet 2 is installed in a stator 1, while a clearance C between this stator 1 and a movable part 10 is formed into being relatively larger, and a magnetic damper E is installed in space between the stator 1 and the movable part 10, while a coil spring 14 or an elastic means centering the movable part 10 is installed in this device, and further a horizontal controlling permanent magnet 3 is installed in addition.

8. 发明专利

JPH06137375A MAGNETIC LEVITATION SYSTEM VIBRATION RESISTANT DEVICE FOR VERTICAL TYPE STRUCTURE 失效
公开(公告)号：JPH06137375A
公开(公告)日：1994-05-17
申请号：JP29145892
申请日：1992-10-29
申请人： KAJIMA CORP , EBARA CORP
发明人： KATAMURA TATSUHIRO , TAKANO MIKIO , TSUKAMOTO NOBUYUKI , ANDO HIROSHI , OGAWA YASUO , MIZUNO TAKAYUKI , OSHIO MAKOTO
IPC分类号： F16C32/04 , F16F15/02 , F16F15/03
摘要： PURPOSE:To eliminate micro-vibration from the ground surface by arranging a levitating electromagnet opposed to upper and lower surfaces of a lowermost flange, a gap sensor, magnetic dampers opposed to upper and lower surfaces of the other flange in a fixing body housing a pillar body having flanges in an arranged clearance, and driving the electromagnet and the dampers according to a sensor signal. CONSTITUTION:When vibration is generated, a vertical direction controller 21 detects relative displacement of a distance between an upper surface of an annular groove lid and a flange part 2d according to a signal of a gap sensor 13, and determines a control current to adjust intensity of a magnetic field of a levitating electromagnet 12 according to the displacement, and drives the levitating electromagnet 12, and changes levitating force to an assembly body A, and eliminates vibration from the ground surface G. Horizontal direction controllers 20a-c detect absolute acceleration of the assembly body A according to signals of acceleration sensors 3a-c, and determine a control current to adjust intensity of magnetic fields of magnetic dampers 14a-c according to the acceleration, and drive electromagnets of the magnetic dampers 14a-c, and generate damping force, and prevent rocking.

9. 发明专利

JPH06137376A MAGNETIC LEVITATION SYSTEM VIBRATION ELIMINATION DEVICE FOR VERTICAL TYPE STRUCTURE 失效
公开(公告)号：JPH06137376A
公开(公告)日：1994-05-17
申请号：JP29147392
申请日：1992-10-29
申请人： KAJIMA CORP , EBARA CORP
发明人： KATAMURA TATSUHIRO , MIURA YOSHIKATSU , IIDA MASATO , NAGAYA YOSHIO , UENO KAORU , MIZUNO TAKAYUKI , OSHIO MAKOTO
IPC分类号： F16C32/04 , F16F15/02 , F16F15/03
摘要： PURPOSE:To eliminate micro-vibration from the ground surface by arranging a levitating electromagnet opposed to upper and lower surfaces of a flange of a pillar body, a vertical gap sensor, controlling electromagnets opposed to acceleration sensors of the pillar body and a horizontal gap sensor on a fixing body housing the pillar body in an arranged clearance, and driving the electromagnets according to sensor signals. CONSTITUTION:When vibration is generated, a vertical direction controller 21 detects relative displacement of a distance between an upper surface of an annular groove 11 and a flange part 2 according to a signal of a gap sensor 13, and determines a control current to adjust intensity of a magnetic field of a levitating electromagnet 12 according to the displacement, and eliminates vibration from the ground surface G to an assembly body A by driving the levitating electromagnet. Horizontal direction controllers 20a-c detect absolute acceleration of the assembly body A according to signals of acceleration sensors 3a-c, and detect relative displacement according to signals of gas sensors 15a-c, and determine a control current to adjust intensity of magnetic fields of controlling electromagnets 14a-c according to the acceleration and the displacement, and prevent rocking by driving the controlling electromagnets 14a-c.

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