专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO02093622A3 SUBSTRATE TRANSPORT CONTAINER 审中-公开
标题翻译：基础运输集装箱
公开(公告)号：WO02093622A3
公开(公告)日：2003-05-30
申请号：PCT/JP0204724
申请日：2002-05-16
申请人： EBARA CORP
发明人： TANAKA AKIRA , SUZUKI YOKO , KISHI TAKASHI
IPC分类号： B65D85/86 , B01D53/26 , H01L21/673 , H01L21/00
CPC分类号： H01L21/67393
摘要： This invention provides a substrate transport container for use, for example, in the process of manufacturing integrated circuits of less than 0.13 mm line width, to enable to hold the level of contaminants in the interior of the container for at least particles, acidic gases, basic gases, organic substances and humidity at controlled low levels, and having the size and structure to be compatible with automated semiconductor manufacturing plants. The container is provided with a door (1) for loading and unloading substrates on a surface of a container main body and is constructed so as to hold the substrates inside the container main body at a given distance of separation, wherein air conditioning apparatuses for reducing the levels of particulate and gaseous contaminants, are disposed roughly symmetrically on the container main body (6).
摘要翻译：本发明提供了一种用于例如在制造小于0.13mm线宽的集成电路的过程中使用的衬底输送容器，以便能够将容器内部的污染物水平保持在至少颗粒，酸性气体，基本气体，有机物质和控制低水平的湿度，并具有与自动化半导体制造工厂兼容的尺寸和结构。容器设置有用于在容器主体的表面上装载和卸载基板的门（1），并且被构造成将基板保持在容器主体内部给定的间隔距离，其中用于减小颗粒和气体污染物的水平大致对称地设置在容器主体（6）上。

2. 发明申请

WO0247139A3 METHODE OF FORMING A COPPER FILM ON A SUBSTRATE 审中-公开
标题翻译：在基材上形成铜膜的方法
公开(公告)号：WO0247139A3
公开(公告)日：2004-01-15
申请号：PCT/JP0110590
申请日：2001-12-04
申请人： EBARA CORP , KONDO FUMIO , MISHIMA KOJI , TANAKA AKIRA , SUZUKI YOKO , TOGAWA TETSUJI , INOUE HIROAKI
发明人： KONDO FUMIO , MISHIMA KOJI , TANAKA AKIRA , SUZUKI YOKO , TOGAWA TETSUJI , INOUE HIROAKI
IPC分类号： B65G49/07 , B24B37/04 , B24B49/16 , C23C18/16 , C25D5/00 , C25D5/50 , C25D7/12 , H01L21/00 , H01L21/02 , H01L21/288 , H01L21/304 , H01L21/3205 , H01L21/321 , H01L21/673 , H01L21/677 , H01L21/768 , H01L23/52 , B24B7/22
CPC分类号： H01L21/67161 , B24B37/005 , B24B37/042 , B24B37/245 , B24B37/345 , B24B41/061 , B24B49/16 , C23C18/1632 , C23C18/1653 , C25D7/123 , H01L21/02074 , H01L21/02087 , H01L21/0209 , H01L21/288 , H01L21/2885 , H01L21/3212 , H01L21/67167 , H01L21/67173 , H01L21/67184 , H01L21/67219 , H01L21/6723 , H01L21/67393 , H01L21/67396 , H01L21/67772 , H01L21/7684 , H01L21/76843 , H01L21/76849 , H01L21/76864 , H01L21/76873 , H01L21/76874 , H01L21/76877
摘要： A substrate processing method comprising steps for forming a copper film on a surface of a substrate. These steps includes the step of filling a first metal in the trenches so as to form a plated film of the first metal on an entire surface of the substrate by electroplating, wherein the electromagnetic field is adjusted by the virtual anode so that differences of thickness of the plated film between the central portion and the peripheral portion of the substrate being minimized, and polishing and removing the plated film by pressing the substrate to the polishing surface, wherein the pressures pressing the substrate to the polishing surface at a central portion and a peripheral portion are adjusted.
摘要翻译：一种基板处理方法，包括在基板的表面上形成铜膜的步骤。这些步骤包括在沟槽中填充第一金属以便通过电镀在基板的整个表面上形成第一金属的镀膜的步骤，其中电磁场由虚拟阳极调节，使得厚度差异基板的中心部分和周边部分之间的镀膜最小化，并且通过将基板压在研磨表面上来研磨和去除镀膜，其中将基板压在抛光表面的压力在中心部分和周边部分进行调整。

3. 发明专利

DE60037480T2 未知
公开(公告)号：DE60037480T2
公开(公告)日：2008-12-11
申请号：DE60037480
申请日：2000-07-05
申请人： EBARA CORP
发明人： TANAKA AKIRA , OKUBO KAZUO , SUZUKI YOKO
IPC分类号： B65G49/00 , H01L21/00 , B65D85/00 , H01L21/673
摘要： A substrate transport container having a carrier box including a container body and a door hermetically sealably covering an opening provided in the front of the container body. Partitions form a circulating flow path in the carrier box. The circulating flow path has a flow path in which air flows toward substrates and a flow path in which air flows toward a fan. A substrate carrying section is disposed in the flow path in which air flows toward the substrates to carry the substrates in such a way that the principal surfaces of the substrates are approximately parallel to the flow path in which air flows toward the substrates. A particle removing filter and a gaseous impurity trapping filter are placed on the upstream side of the substrate carrying section in the flow path in which air flows toward the substrates. A fan motor for driving the fan is incorporated in the carrier box to form an air current for circulating through the circulating flow path.

4. 发明专利

DE60218652D1 未知
公开(公告)号：DE60218652D1
公开(公告)日：2007-04-19
申请号：DE60218652
申请日：2002-05-16
申请人： EBARA CORP
发明人： TANAKA AKIRA , SUZUKI YOKO , KISHI TAKASHI
IPC分类号： B65D85/86 , H01L21/00 , B01D53/26 , H01L21/673
摘要： This invention provides a substrate transport container for use, for example, in the process of manufacturing integrated circuits of less than 0.13 mm line width, to enable to hold the level of contaminants in the interior of the container for at least particles, acidic gases, basic gases, organic substances and humidity at controlled low levels, and having the size and structure to be compatible with automated semiconductor manufacturing plants. The container is provided with a door (1) for loading and unloading substrates on a surface of a container main body and is constructed so as to hold the substrates inside the container main body at a given distance of separation, wherein air conditioning apparatuses for reducing the levels of particulate and gaseous contaminants, are disposed roughly symmetrically on the container main body (6).

5. 发明专利

DE60218652T2 未知
公开(公告)号：DE60218652T2
公开(公告)日：2007-11-08
申请号：DE60218652
申请日：2002-05-16
申请人： EBARA CORP
发明人： TANAKA AKIRA , SUZUKI YOKO , KISHI TAKASHI
IPC分类号： B65D85/86 , H01L21/00 , B01D53/26 , H01L21/673
摘要： This invention provides a substrate transport container for use, for example, in the process of manufacturing integrated circuits of less than 0.13 mm line width, to enable to hold the level of contaminants in the interior of the container for at least particles, acidic gases, basic gases, organic substances and humidity at controlled low levels, and having the size and structure to be compatible with automated semiconductor manufacturing plants. The container is provided with a door (1) for loading and unloading substrates on a surface of a container main body and is constructed so as to hold the substrates inside the container main body at a given distance of separation, wherein air conditioning apparatuses for reducing the levels of particulate and gaseous contaminants, are disposed roughly symmetrically on the container main body (6).

6. 发明专利

DE60037480D1 未知
公开(公告)号：DE60037480D1
公开(公告)日：2008-01-31
申请号：DE60037480
申请日：2000-07-05
申请人： EBARA CORP
发明人： TANAKA AKIRA , OKUBO KAZUO , SUZUKI YOKO
IPC分类号： B65G49/00 , H01L21/00 , B65D85/00 , H01L21/673
摘要： A substrate transport container having a carrier box including a container body and a door hermetically sealably covering an opening provided in the front of the container body. Partitions form a circulating flow path in the carrier box. The circulating flow path has a flow path in which air flows toward substrates and a flow path in which air flows toward a fan. A substrate carrying section is disposed in the flow path in which air flows toward the substrates to carry the substrates in such a way that the principal surfaces of the substrates are approximately parallel to the flow path in which air flows toward the substrates. A particle removing filter and a gaseous impurity trapping filter are placed on the upstream side of the substrate carrying section in the flow path in which air flows toward the substrates. A fan motor for driving the fan is incorporated in the carrier box to form an air current for circulating through the circulating flow path.

7. 发明公开

EP1343202A4 DEVICE, CONTAINER, AND METHOD FOR TRANSFERRING SUBSTRATE 审中-公开
标题翻译： COMPONENT，集装箱和方法转移衬底
公开(公告)号：EP1343202A4
公开(公告)日：2009-01-21
申请号：EP01999971
申请日：2001-12-03
申请人： EBARA CORP
发明人： SUZUKI YOKO , TANAKA AKIRA , KISHI TAKASHI
IPC分类号： F24F3/16 , H01L21/00 , H01L21/02 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67366 , H01L21/67017 , H01L21/67379 , H01L21/67393 , H01L21/67396 , H01L21/67772 , H01L21/67775
摘要： A container and a method for transferring a substrate; the container for transferring the substrate formed mainly of a material with a water absorption of 0.1% or less and used for receiving and storing or transferring the substrate suitably in a production process for semiconductor chip formed by the combination of copper wiring with, so-called, low permittivity insulation film of 3 or less in permittivity, comprising a container body, a door capable of closing the container body, and a conductive part coming into contact directly or indirectly with the substrate and allowing static electricity to lead to the outside thereof; the method for transferring the substrate between a plurality of processes, comprising the steps of taking the substrate into the transfer container from the atmosphere of a first process, circulating the gas selectively excluding at least one of moisture, particulate matter, and chemical substances intermittently or continuously in the container to keep exposing the substrate to the gas, and leading the substrate from the container to a second process.

8. 发明专利

JP2003093825A GAS REMOVING METHOD AND GAS REMOVING FILTER 审中-公开
公开(公告)号：JP2003093825A
公开(公告)日：2003-04-02
申请号：JP2001298411
申请日：2001-09-27
申请人： EBARA CORP
发明人： TANAKA AKIRA , SUZUKI YOKO , KISHI TAKASHI
IPC分类号： B01D53/02 , B01D53/04 , G01N27/04 , G01N30/00
摘要： PROBLEM TO BE SOLVED: To provide a gas removing filter unnecessary to measure the concentration of gas, detecting the consumption amount of the ion exchange group of an ion exchanger in a short time and capable of simply detecting an adsorption residual amount, and a use method therefor. SOLUTION: The gas removing filter is equipped with ion exchangers 12 and 13 for adsorbing gas and a pair of the electric resistance measuring electrodes 15 and 15 arranged to the ion exchangers 12 and 13.

9. 发明专利

JPH10174839A EXCHANGE TIME DETERMINATION METHOD OF CHEMICAL FILTER FOR CLEANING AIR 失效
公开(公告)号：JPH10174839A
公开(公告)日：1998-06-30
申请号：JP33845696
申请日：1996-12-18
申请人： EBARA CORP
发明人： FUJIWARA KUNIO , SUZUKI YOKO
IPC分类号： B01D53/34 , B01D46/00 , B01D53/04 , B01D53/58 , B01D53/81 , B01J47/12
摘要： PROBLEM TO BE SOLVED: To determine an exchange time with a change of a color tone due to a reaction with a subject gas without destroying or contacting by depositing a metallic ion on a filter material using an ion exchanger. SOLUTION: In the metallic ion deposited on the filter material, the color tone is changed by allowing the metallic ion to contact with a gas to be adsorbed, and especially the color tone change due to a complex formation is large, and the metallic ion is selected preferably among inexpensive copper, nickel and cobalt. A depositing amount of the metallic ion may be in the lowest degree capable of detecting the color tone change. The gas to be adsorbed is ammonia, trimethylamine, hydrogen chloride, etc. A strongly acidic cation exchanger containing a sulfon group, a weakly acidic cation exchanger containing a carboxyl group, etc., are applied as the ion exchanger. In addition to this, a graft polymer produced by a radiation-induced graft polymerizing method is preferable. The color tone change is detected with a naked eye when a concn. of the subject gas is high, but the exchange time is determined by using a measuring instrument such as color difference meter at low concn. region.

10. 发明专利

JP2003224182A ABNORMALITY DETECTING DEVICE FOR SUBSTRATE CARRYING CONTAINER 审中-公开
公开(公告)号：JP2003224182A
公开(公告)日：2003-08-08
申请号：JP2002018753
申请日：2002-01-28
申请人： EBARA CORP
发明人： KIMURA NORIO , OHASHI TOMONORI , TANAKA AKIRA , SUZUKI YOKO
IPC分类号： G01N31/22 , B65D85/86 , B65G49/00 , G01N21/78 , H01L21/02 , H01L21/673 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide an abnormality detecting device for a substrate carrying container which can detect a gaseous contaminant being abnormally present in the atmosphere in the substrate carrying container in such a case. SOLUTION: Provided are the container which carries a substrate and a sensor which detects the gaseous contaminant present in the container. The sensor is equipped with PH paper which discolors with the gaseous contaminant and an optical sensor which detects its discoloration. COPYRIGHT: (C)2003,JPO

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式