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1. 发明申请

WO0247139A3 METHODE OF FORMING A COPPER FILM ON A SUBSTRATE 审中-公开
标题翻译：在基材上形成铜膜的方法
公开(公告)号：WO0247139A3
公开(公告)日：2004-01-15
申请号：PCT/JP0110590
申请日：2001-12-04
申请人： EBARA CORP , KONDO FUMIO , MISHIMA KOJI , TANAKA AKIRA , SUZUKI YOKO , TOGAWA TETSUJI , INOUE HIROAKI
发明人： KONDO FUMIO , MISHIMA KOJI , TANAKA AKIRA , SUZUKI YOKO , TOGAWA TETSUJI , INOUE HIROAKI
IPC分类号： B65G49/07 , B24B37/04 , B24B49/16 , C23C18/16 , C25D5/00 , C25D5/50 , C25D7/12 , H01L21/00 , H01L21/02 , H01L21/288 , H01L21/304 , H01L21/3205 , H01L21/321 , H01L21/673 , H01L21/677 , H01L21/768 , H01L23/52 , B24B7/22
CPC分类号： H01L21/67161 , B24B37/005 , B24B37/042 , B24B37/245 , B24B37/345 , B24B41/061 , B24B49/16 , C23C18/1632 , C23C18/1653 , C25D7/123 , H01L21/02074 , H01L21/02087 , H01L21/0209 , H01L21/288 , H01L21/2885 , H01L21/3212 , H01L21/67167 , H01L21/67173 , H01L21/67184 , H01L21/67219 , H01L21/6723 , H01L21/67393 , H01L21/67396 , H01L21/67772 , H01L21/7684 , H01L21/76843 , H01L21/76849 , H01L21/76864 , H01L21/76873 , H01L21/76874 , H01L21/76877
摘要： A substrate processing method comprising steps for forming a copper film on a surface of a substrate. These steps includes the step of filling a first metal in the trenches so as to form a plated film of the first metal on an entire surface of the substrate by electroplating, wherein the electromagnetic field is adjusted by the virtual anode so that differences of thickness of the plated film between the central portion and the peripheral portion of the substrate being minimized, and polishing and removing the plated film by pressing the substrate to the polishing surface, wherein the pressures pressing the substrate to the polishing surface at a central portion and a peripheral portion are adjusted.
摘要翻译：一种基板处理方法，包括在基板的表面上形成铜膜的步骤。这些步骤包括在沟槽中填充第一金属以便通过电镀在基板的整个表面上形成第一金属的镀膜的步骤，其中电磁场由虚拟阳极调节，使得厚度差异基板的中心部分和周边部分之间的镀膜最小化，并且通过将基板压在研磨表面上来研磨和去除镀膜，其中将基板压在抛光表面的压力在中心部分和周边部分进行调整。

2. 发明申请

WO1994001354A1 MAGNETICALLY LEVITATED CARRYING APPARATUS 审中-公开
标题翻译： MAGNETICALLY LEVIDATED携带装置
公开(公告)号：WO1994001354A1
公开(公告)日：1994-01-20
申请号：PCT/JP1993000930
申请日：1993-07-06
申请人： EBARA CORPORATION , MORI, Satoshi , MATSUMURA, Masao , KANEMITSU, Yoichi , YOSHIOKA, Takeshi , KAJIYAMA, Masaaki , KONDO, Fumio , SHIRAO, Yuji , EGUCHI, Masato , SHINOZAKI, Hiroyuki , IKEDA, Yukio , HIROSE, Masayoshi , NAKANIWA, Masaru , KIMURA, Norio , USUI, Katsuaki , AOKI, Katsuyuki
发明人： EBARA CORPORATION
IPC分类号： B65G54/02
CPC分类号： H01L21/67167 , C23C14/042 , H01L21/67184 , H01L21/67709 , H01L21/67736
摘要： In a tunnel which is kept in a high-vacuum or filled with a highly clean atmosphere, a carrying truck (3) is moved by an electromagnetic levitation system. Electromagnets (4) for electromagnetically levitate the carrying truck (3) which travels in the tunnel (1) in a noncontact way and carries semiconductor waters, electromagnets (6) constituting a linear motor for driving the carrying truck (3), and displacement sensors (8) for sensing the levitation quantity of the carrying truck (3) in the tunnel (1) are provided outside the tunnel (1). Thereby, gases are not produced and the semiconductor wafers (22) are not contaminated. Also, when the carrying truck (3) changes the traveling direction by 90 at a branch part where two tracks intersect at right angles in the tunnel (1), the electromagnets (4) are provided in parallel with the respective tracks and are so controlled that the excitation levels of the electromagnets (4) are changed gradually. Thereby, the traveling direction of the carrying truck (3) can be changed smoothly without contact of the truck with the inner wall of the tunnel (1) and the semiconductor wafers (22) are prevented from being damaged by collisions, etc.
摘要翻译：在保持在高真空或充满高度清洁的气氛的隧道中，搬运车（3）由电磁悬浮系统移动。电磁体（4）用于以非接触方式电磁悬浮在隧道（1）内运送的运载车（3），并承载半导体水，构成用于驱动运载车（3）的线性电动机的电磁体（6）和位移传感器在隧道（1）外部设置用于感测在隧道（1）中的运载车辆（3）的悬浮量的传感器（8）。由此，不产生气体，半导体晶片（22）不被污染。此外，当搬运车（3）在隧道（1）中两条轨道以直角相交的分支部分将行驶方向改变90°时，电磁体（4）设置成与各轨迹平行并被控制电磁铁（4）的激发电平逐渐变化。因此，可以平稳地改变搬运车（3）的行进方向，而不会使卡车与隧道（1）的内壁接触，并且防止半导体晶片（22）被碰撞等损坏。

3. 发明专利

JPS5591417A HOOD FOR TRUCK 失效
公开(公告)号：JPS5591417A
公开(公告)日：1980-07-11
申请号：JP16565778
申请日：1978-12-29
申请人： KONDO FUMIO
发明人： KONDOU FUMIO
IPC分类号： B60J7/12
摘要： PURPOSE:To facilitate the use and folding of a truck hood by making the hood with possibility to expand and be folded by such a construction that the hood frame moves on the rail provided at the rear body's side wall and a running mechanism is provided at the rear hood frame. CONSTITUTION:Rotation of a chain 19 operated by a handle 24, or a chain 27 actuates rotation of a sprocket 18, and its engagement with a chain in a rail 3 moves the rearmost hood frame 10b to the back part of the rear body 1 as well as pulls the intersecting lever 15 backward. All intersecting levers 15 become open simultaneously thereby, and hood frames 10, 10b move backward with an equal pitch, and then the rearmost hood frame 10b stops at the stopper provided at the rear end of the rail 3, giving the hood frames 10, 10b the most stretched state with a constant interval. A canvas is set over it and the assembly shall be mounted. At the time of folding, the rearmost lever 10b shall be advanced as opposite process to the one for stretching, and the intersecting lever 15 shall be lapped over the front part of the folding rear body 1.

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