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    • 3. 发明申请
    • ROTARY SPEED SENSOR
    • 旋转速率传感器
    • WO2008128728A8
    • 2010-01-28
    • PCT/EP2008003153
    • 2008-04-18
    • EADS DEUTSCHLAND GMBHCONTI TEMIC MICROELECTRONICROSE MATTHIASAIKELE MATTHIASBAUER KARINSEIDEL HELMUT
    • ROSE MATTHIASAIKELE MATTHIASBAUER KARINSEIDEL HELMUT
    • G01C19/56
    • G01C19/5621
    • The invention relates to a rotary speed sensor (100) comprising a tuning fork-shaped oscillator (30) having a first electrically conductive prong (11 a) and a second electrically conductive prong (11 b) located at a distance therefrom, wherein the first prong (11 a) and the second prong (11 b) are connected to each other via a base (12). The rotary speed sensor (100) further comprises a web (21) connecting the base (12) to an electrically conductive substrate (1), and a readout device (20) for detecting vibrations of the oscillator (30), wherein the oscillator (30) has a uniform potential and is electrically insulated from one or more excitation electrodes (14) arranged adjacent to the prongs (11 a, 11 b), in order to allow electrostatic excitation between the prongs (11 a, 11 b) and the excitation electrodes (14). The rotary speed sensor has a simple design and is simple to control and read.
    • 偏航率传感器(100)包括的音叉振荡器(30),具有第一导电插脚(11)和布置在所述第二导电插脚(11 B),其中所述第一齿(11)和所述第二叉头(距离 经由基座12)图11(b)被连接在一起。 此外,旋转速度传感器(100)包括一个腹板(21),该基部(12)与用于检测所述振荡器(30)的振荡的导电基片(1),读出单元(20)连接,所述振荡器(30) 具有均匀的电势和一个或多个相邻的尖头(11,11B),其设置激励电极(14)电绝缘,所述尖齿之间的静电激励(11 A,11 b)和激励电极(14),以 允许。 旋转率传感器构造简单,以驱动和读取。