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1. 发明申请

WO2008128728A8 ROTARY SPEED SENSOR 审中-公开
标题翻译：旋转速率传感器
公开(公告)号：WO2008128728A8
公开(公告)日：2010-01-28
申请号：PCT/EP2008003153
申请日：2008-04-18
申请人： EADS DEUTSCHLAND GMBH , CONTI TEMIC MICROELECTRONIC , ROSE MATTHIAS , AIKELE MATTHIAS , BAUER KARIN , SEIDEL HELMUT
发明人： ROSE MATTHIAS , AIKELE MATTHIAS , BAUER KARIN , SEIDEL HELMUT
IPC分类号： G01C19/56
CPC分类号： G01C19/5621
摘要： The invention relates to a rotary speed sensor (100) comprising a tuning fork-shaped oscillator (30) having a first electrically conductive prong (11 a) and a second electrically conductive prong (11 b) located at a distance therefrom, wherein the first prong (11 a) and the second prong (11 b) are connected to each other via a base (12). The rotary speed sensor (100) further comprises a web (21) connecting the base (12) to an electrically conductive substrate (1), and a readout device (20) for detecting vibrations of the oscillator (30), wherein the oscillator (30) has a uniform potential and is electrically insulated from one or more excitation electrodes (14) arranged adjacent to the prongs (11 a, 11 b), in order to allow electrostatic excitation between the prongs (11 a, 11 b) and the excitation electrodes (14). The rotary speed sensor has a simple design and is simple to control and read.
摘要翻译：偏航率传感器（100）包括的音叉振荡器（30），具有第一导电插脚（11）和布置在所述第二导电插脚（11 B），其中所述第一齿（11）和所述第二叉头（距离经由基座12）图11（b）被连接在一起。此外，旋转速度传感器（100）包括一个腹板（21），该基部（12）与用于检测所述振荡器（30）的振荡的导电基片（1），读出单元（20）连接，所述振荡器（30）具有均匀的电势和一个或多个相邻的尖头（11，11B），其设置激励电极（14）电绝缘，所述尖齿之间的静电激励（11 A，11 b）和激励电极（14），以允许。旋转率传感器构造简单，以驱动和读取。

2. 发明申请

WO2004026759A3 METHOD FOR PRODUCING INSULATION STRUCTURES 审中-公开
标题翻译：制造绝缘结构的方法
公开(公告)号：WO2004026759A3
公开(公告)日：2004-12-23
申请号：PCT/DE0303049
申请日：2003-09-12
申请人： CONTI TEMIC MICROELECTRONIC , AIKELE MATTHIAS , ENGELHARDT ALBERT , FREY MARCUS , HARTMANN BERNHARD , SEIDEL HELMUT
发明人： AIKELE MATTHIAS , ENGELHARDT ALBERT , FREY MARCUS , HARTMANN BERNHARD , SEIDEL HELMUT
IPC分类号： B81C1/00
CPC分类号： B81C1/00698 , B81B2201/0235 , B81B2203/033 , B81C2201/0178
摘要： The invention relates to methods for producing insulation structures for micromechanical sensors according to a monocrystalline surface technique. According to known methods, silicon structures defined by deep trenches are etched and the lower side thereof facing the substrate is exposed by a release etch step. The filling of said trenches with a dielectrically insulating material, such as silicon dioxide, enables the silicon structure to be solidly clutched on three sides. The invention is based on the fact that instead of filling trenches, thin-walled silicon is converted into an electrically non-conductive material. This can be carried out, for example, by means of thermal oxidation of narrow silicon sections previously exposed by trenches. In a minimal configuration, two trenches (holes) must be etched per section with the desired structural depth. The interlying silicon section must be narrow enough to be able to be fully thermally oxidised.
摘要翻译：本发明涉及用于制造单晶表面技术中的微机械传感器的绝缘结构的方法。在已知的方法中，由深沟槽沟槽限定的硅结构通过释放 - 蚀刻步骤被蚀刻并且在其底侧上暴露于衬底。随后，用诸如二氧化硅的介电绝缘材料填充这些沟槽，导致通过三面单侧开口Umklammerung牢固地锚固具有填充沟槽的硅结构。本发明的基本思想是将薄壁硅转变成不导电材料而不是填入沟槽中。这可以例如通过先前由沟槽暴露的窄硅网的热氧化来实现。在最小配置中，每个条纹的两个沟槽（孔）必须用所需的纹理深度进行蚀刻。插入的硅棒必须足够窄，才能被热完全氧化。

3. 发明专利

DE102007018834A1 未知
公开(公告)号：DE102007018834A1
公开(公告)日：2008-10-23
申请号：DE102007018834
申请日：2007-04-20
申请人： EADS DEUTSCHLAND GMBH , CONTI TEMIC MICROELECTRONIC
发明人： ROSE MATTHIAS , AIKELE MATTHIAS , BAUER KARIN , SEIDEL HELMUT
IPC分类号： G01C19/56

4. 发明专利

DE102005045379A1 Rotary rate sensor for determining angular speed of article, has excitation oscillator with two prongs connected to base by bridge, which is arranged to displace excitation unit and prongs in lateral oscillation 未知
公开(公告)号：DE102005045379A1
公开(公告)日：2007-03-29
申请号：DE102005045379
申请日：2005-09-22
申请人： EADS DEUTSCHLAND GMBH , CONTI TEMIC MICROELECTRONIC
发明人： ROSE MATTHIAS , AIKELE MATTHIAS , BAUER KARIN , SEIDEL HELMUT
IPC分类号： G01C19/56
摘要： The sensor has an excitation oscillator (30) with two prongs (11a, 11b), which are connected with one another by a base (12). A bar (21) connects the base with a substrate (1). An excitation unit (14) excites the prongs in opposed lateral oscillation. The prongs move based on Coriolis force perpendicular to direction of lateral oscillation, by swiveling the sensor around an axis perpendicular to the axis of the bar. The prongs are connected to the base by a bridge (13), which is arranged to displace the excitation unit and the prongs in the lateral oscillation.

5. 发明专利

DE102005045378A1 Angular rate sensor for vehicle, has selection oscillator with tines that are arranged at distance and are connected with each other by base, where direct voltage is applied to excitation oscillator that is provided with electrodes 未知
公开(公告)号：DE102005045378A1
公开(公告)日：2007-03-29
申请号：DE102005045378
申请日：2005-09-22
申请人： EADS DEUTSCHLAND GMBH , CONTI TEMIC MICROELECTRONIC
发明人： ROSE MATTHIAS , AIKELE MATTHIAS , BAUER KARIN , SEIDEL HELMUT
IPC分类号： G01C19/56
摘要： The sensor has a selection oscillator (24) with tines (21a, 21b) that are arranged at a distance and connected with each other by a base (22). A bar (13) connects an excitation oscillator (11) with the base of the oscillator (24), and piezoelectric films (12a, 12b) are provided. The excitation (11) moves around a bar axis (15) during torsion oscillation, so that the base oscillates around the axis such that the tines are moved in a direction radial to the axis based on coriolis force. A direct voltage is applied to the oscillator (11) that is provided with electrodes.

6. 发明专利

AT332283T 未知
公开(公告)号：AT332283T
公开(公告)日：2006-07-15
申请号：AT03756438
申请日：2003-09-12
申请人： CONTI TEMIC MICROELECTRONIC
发明人： AIKELE MATTHIAS , ENGELHARDT ALBERT , FREY MARCUS , HARTMANN BERNHARD , SEIDEL HELMUT
IPC分类号： B81C1/00
摘要： Production of insulating structures comprises preparing a semiconductor substrate (11), forming trenches in the substrate with a bar lying between the trenches, converting the substrate material in the region of the trenches into an electrically insulating material up to the bar, and forming a functional structure (15) in the substrate material which is mechanically connected to the substrate via the converted substrate material.

7. 发明专利

DE59912758D1 未知
公开(公告)号：DE59912758D1
公开(公告)日：2005-12-15
申请号：DE59912758
申请日：1999-03-18
申请人： CONTI TEMIC MICROELECTRONIC
发明人： SEIDEL HELMUT , AIKELE MATTHIAS , PRECHTEL ULRICH , NAGLER OLIVER , KUEHL KARL
IPC分类号： G01L1/10 , G01C19/56 , G01P15/097 , G01P15/10 , H01L29/84 , G01N27/00 , G01L9/00
摘要： A microsensor with a resonator structure, which is excited by first electrical signals to oscillate and emits second electrical signals in dependence on the measuring variable, wherein a heating element, supplied with at least one of the first electrical signals, is arranged on the resonator structure for the thermal excitations of oscillations. For the thermal excitation of lateral oscillations in a microsensor with a resonator structure, the microsensor is provided at one oscillating part of the resonator structure with at least two regions that are thermally separated by a zone with reduced heat conductance, and the heating element is arranged on one of the regions. This type of arrangements permits the excitation of the resonator structure to lateral oscillations if the heating element is supplied with corresponding current pulses. It is advantageous if a receiving element is arranged on at least one of the other regions to detect the oscillation amplitude.

8. 发明专利

DE10242661A1 Production of insulating structures used in the production of micromechanical sensors and in acceleration sensors for vehicle air bags comprises forming trenches in a substrate, and forming a functional structure in the substrate material 未知
公开(公告)号：DE10242661A1
公开(公告)日：2004-03-25
申请号：DE10242661
申请日：2002-09-13
申请人： CONTI TEMIC MICROELECTRONIC
发明人： AIKELE MATTHIAS , ENGELHARDT ALBERT , FREY MARCUS , HARTMANN BERNHARD , SEIDEL HELMUT
IPC分类号： B81C1/00 , H01L21/762
摘要： Production of insulating structures comprises preparing a semiconductor substrate (11), forming trenches in the substrate with a bar lying between the trenches, converting the substrate material in the region of the trenches into an electrically insulating material up to the bar, and forming a functional structure (15) in the substrate material which is mechanically connected to the substrate via the converted substrate material.

9. 发明专利

AT309546T 未知
公开(公告)号：AT309546T
公开(公告)日：2005-11-15
申请号：AT99915655
申请日：1999-03-18
申请人： CONTI TEMIC MICROELECTRONIC
发明人： SEIDEL HELMUT , AIKELE MATTHIAS , PRECHTEL ULRICH , NAGLER OLIVER , KUEHL KARL
IPC分类号： G01L1/10 , G01C19/56 , G01P15/097 , G01P15/10 , H01L29/84 , G01N27/00 , G01L9/00
摘要： A microsensor with a resonator structure, which is excited by first electrical signals to oscillate and emits second electrical signals in dependence on the measuring variable, wherein a heating element, supplied with at least one of the first electrical signals, is arranged on the resonator structure for the thermal excitations of oscillations. For the thermal excitation of lateral oscillations in a microsensor with a resonator structure, the microsensor is provided at one oscillating part of the resonator structure with at least two regions that are thermally separated by a zone with reduced heat conductance, and the heating element is arranged on one of the regions. This type of arrangements permits the excitation of the resonator structure to lateral oscillations if the heating element is supplied with corresponding current pulses. It is advantageous if a receiving element is arranged on at least one of the other regions to detect the oscillation amplitude.

10. 发明专利

DE19812773C2 未知
公开(公告)号：DE19812773C2
公开(公告)日：2002-11-14
申请号：DE19812773
申请日：1998-03-24
申请人： CONTI TEMIC MICROELECTRONIC , DAIMLER CHRYSLER AG
发明人： SEIDEL HELMUT , AIKELE MATTHIAS , PRECHTEL ULRICH , NAGLER OLIVER , KUEHL KARL
IPC分类号： G01L1/10 , G01C19/56 , G01P15/097 , G01P15/10 , H01L29/84 , B06B1/00 , G01P15/00
摘要： A microsensor with a resonator structure, which is excited by first electrical signals to oscillate and emits second electrical signals in dependence on the measuring variable, wherein a heating element, supplied with at least one of the first electrical signals, is arranged on the resonator structure for the thermal excitations of oscillations. For the thermal excitation of lateral oscillations in a microsensor with a resonator structure, the microsensor is provided at one oscillating part of the resonator structure with at least two regions that are thermally separated by a zone with reduced heat conductance, and the heating element is arranged on one of the regions. This type of arrangements permits the excitation of the resonator structure to lateral oscillations if the heating element is supplied with corresponding current pulses. It is advantageous if a receiving element is arranged on at least one of the other regions to detect the oscillation amplitude.

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