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    • 4. 发明授权
    • Precision passive circuit structure
    • 精密无源电路结构
    • US07566946B2
    • 2009-07-28
    • US11865432
    • 2007-10-01
    • Douglas D. CoolbaughHayden C. Cranford, Jr.Terence B. HookAnthony K. Stamper
    • Douglas D. CoolbaughHayden C. Cranford, Jr.Terence B. HookAnthony K. Stamper
    • H01C10/00
    • H01L27/0802H01L23/5256H01L2924/0002H01L2924/00
    • A circuit having a precision passive circuit element, such as a resistor or a capacitor, with a target value of an electrical parameter is fabricated on a substrate with a plurality of independent parallel-connected passive circuit elements. The plurality of passive circuit elements are designed to have a plurality of values of the electrical parameter which are spaced or offset at or around the target value of the electrical parameter, such as three circuit elements with one having a value at the target value, one having a value above the target value, and one having a value below the target value. Each passive circuit element also has a fuse in series therewith. A reference calibration structure is also fabricated, which can be a passive circuit element having the target value of the electrical parameter, in a reference area of the substrate under the same conditions and at the same time as fabrication of the plurality of passive circuit elements. The actual component value of the reference calibration structure is then measured, and based upon the measurement a single precision passive element of the plurality of parallel passive circuit elements is selected by blowing the fuses of, and thus deselecting, the other independent parallel connected passive circuit elements.
    • 在具有多个独立并联无源电路元件的基板上制造具有目标值为电参数的精密无源电路元件(例如电阻器或电容器)的电路。 多个无源电路元件被设计为具有电参数的多个值,其在电参数的目标值处或周围被间隔或偏移,例如具有值在目标值的三个电路元件,一个 具有高于目标值的值,并且具有低于目标值的值。 每个无源电路元件还具有与其串联的保险丝。 还可以在相同条件下的基板的参考区域中以及在制造多个无源电路元件的同时,制造参考校准结构,其可以是具有电参数的目标值的无源电路元件。 然后测量参考校准结构的实际分量值,并且基于测量,多个并联无源电路元件中的单精度无源元件通过吹入另一个独立并联无源电路的熔丝并因此取消选择来选择 元素。
    • 5. 发明授权
    • Structure and method for providing precision passive elements
    • 提供精密无源元件的结构和方法
    • US07300807B2
    • 2007-11-27
    • US10709109
    • 2004-04-14
    • Douglas D CoolbaughHayden C. Cranford, Jr.Terence B. HookAnthony K. Stamper
    • Douglas D CoolbaughHayden C. Cranford, Jr.Terence B. HookAnthony K. Stamper
    • H01L21/66
    • H01L27/0802H01L23/5256H01L2924/0002H01L2924/00
    • A circuit having a precision passive circuit element, such as a resistor or a capacitor, with a target value of an electrical parameter is fabricated on a substrate with a plurality of independent parallel-connected passive circuit elements. The plurality of passive circuit elements are designed to have a plurality of values of the electrical parameter which are spaced or offset at or around the target value of the electrical parameter, such as three circuit elements with one having a value at the target value, one having a value above the target value, and one having a value below the target value. Each passive circuit element also has a fuse in series therewith. A reference calibration structure is also fabricated, which can be a passive circuit element having the target value of the electrical parameter, in a reference area of the substrate under the same conditions and at the same time as fabrication of the plurality of passive circuit elements. The actual component value of the reference calibration structure is then measured, and based upon the measurement a single precision passive element of the plurality of parallel passive circuit elements is selected by blowing the fuses of, and thus deselecting, the other independent parallel connected passive circuit elements.
    • 在具有多个独立并联无源电路元件的基板上制造具有目标值为电参数的精密无源电路元件(例如电阻器或电容器)的电路。 多个无源电路元件被设计为具有电参数的多个值,其在电参数的目标值处或周围被间隔或偏移,例如具有值在目标值的三个电路元件,一个 具有高于目标值的值,并且具有低于目标值的值。 每个无源电路元件还具有与其串联的保险丝。 还可以在相同条件下的基板的参考区域中以及在制造多个无源电路元件的同时,制造参考校准结构,其可以是具有电参数的目标值的无源电路元件。 然后测量参考校准结构的实际分量值,并且基于测量,多个并联无源电路元件中的单精度无源元件通过吹入另一个独立并联无源电路的熔丝并因此取消选择来选择 元素。
    • 6. 发明授权
    • Protection against charging damage in hybrid orientation transistors
    • 在混合取向晶体管中防止充电损坏
    • US07928513B2
    • 2011-04-19
    • US12317310
    • 2008-12-22
    • Terence B. HookAnda C. MocutaJeffrey W. SleightAnthony K. Stamper
    • Terence B. HookAnda C. MocutaJeffrey W. SleightAnthony K. Stamper
    • H01L27/12
    • H01L21/84H01L21/823807H01L21/823878H01L27/0251H01L27/0629H01L27/1203H01L27/1207
    • A chip can include a CMOS structure having a bulk device disposed in a first region of a semiconductor substrate in conductive communication with an underlying bulk region of the substrate, the first region and the bulk region having a first crystal orientation. An SOI device is disposed in a semiconductor-on-insulator (“SOI”) layer separated from the bulk region of the substrate by a buried dielectric layer, the SOI layer having a different crystal orientation from the first crystal orientation. In one example, the bulk device includes a p-type field effect transistor (“PFET”) and the SOI device includes an n-type field effect transistor (“NFET”) device. Alternatively, the bulk device can include an NFET and the SOI device can include a PFET. When the SOI device has a gate conductor in conductive communication with a gate conductor of the bulk device, charging damage can occur to the SOI device, except for the presence of diodes in reverse-biased conductive communication with the bulk region. The diodes are operable to conduct a discharge current to the bulk region when either a voltage on the gate conductor or a voltage on the source or drain region of the SOI device exceeds a diode's breakdown voltage.
    • 芯片可以包括CMOS结构,其具有设置在半导体衬底的第一区域中的体器件,其与衬底的下面的体区域导电连通,第一区域和体区具有第一晶体取向。 SOI器件设置在绝缘体上半导体(“SOI”)层中,其通过掩埋电介质层与衬底的本体区域分离,SOI层具有与第一晶体取向不同的晶体取向。 在一个示例中,体器件包括p型场效应晶体管(“PFET”),并且SOI器件包括n型场效应晶体管(“NFET”)器件。 或者,体器件可以包括NFET,并且SOI器件可以包括PFET。 当SOI器件具有与本体器件的栅极导体导通的栅极导体时,除了存在与体区域反向偏置导电连通的二极管之外,SOI器件可能发生充电损坏。 当栅极导体上的电压或SOI器件的源极或漏极区域上的电压超过二极管的击穿电压时,二极管可操作以将放电电流传导到体区。
    • 7. 发明授权
    • Method of providing protection against charging damage in hybrid orientation transistors
    • 在混合取向晶体管中提供防止充电损坏的方法
    • US07879650B2
    • 2011-02-01
    • US12002807
    • 2007-12-19
    • Terence B. HookAnda C. MocutaJeffrey W. SleightAnthony K. Stamper
    • Terence B. HookAnda C. MocutaJeffrey W. SleightAnthony K. Stamper
    • H01L21/8238
    • H01L21/84H01L21/823807H01L21/823878H01L27/0251H01L27/0629H01L27/1203H01L27/1207
    • In a method of fabricating a CMOS structure, a bulk device can be formed in a first region in conductive communication with an underlying bulk region of the substrate. A first gate conductor may overlie the first region. An SOI device can be formed which has a source drain conduction path in a SOI layer, i.e., a semiconductor layer that is separated from the bulk region by a buried dielectric region. The crystal orientations of the SOI layer and the bulk region can be different. A first diode can be formed in a second region of the substrate in conductive communication with the bulk region. The first diode may be connected in a reverse-biased orientation to a first gate conductor above the SOI layer, such that a voltage on the gate conductor that exceeds the breakdown voltage can be discharged through the first diode to the bulk region of the substrate. A second diode may be formed in a third region of the substrate in conductive communication with the bulk region. The second diode may be connected in a reverse-biased orientation to a source region or a drain region of an NFET.
    • 在制造CMOS结构的方法中,本体器件可以形成在与衬底的下面的主体区域导电连通的第一区域中。 第一栅极导体可以覆盖在第一区域上。 可以形成在SOI层中具有源极漏极传导路径的SOI器件,即通过掩埋电介质区域与本体区域分离的半导体层。 SOI层和体区的晶体取向可以不同。 第一二极管可以形成在衬底的与体区导电连通的第二区域中。 第一二极管可以以反向偏置的方式连接到SOI层上方的第一栅极导体,使得超过击穿电压的栅极导体上的电压可以通过第一二极管放电到衬底的主体区域。 第二二极管可以形成在衬底的与体区导电连通的第三区域中。 第二二极管可以以反向偏置的方式连接到NFET的源极区域或漏极区域。
    • 8. 发明授权
    • Protection against charging damage in hybrid orientation transistors
    • 在混合取向晶体管中防止充电损坏
    • US07492016B2
    • 2009-02-17
    • US11308513
    • 2006-03-31
    • Terence B. HookAnda C. MocutaJeffrey W. SleightAnthony K. Stamper
    • Terence B. HookAnda C. MocutaJeffrey W. SleightAnthony K. Stamper
    • H01L23/62
    • H01L21/84H01L21/823807H01L21/823878H01L27/0251H01L27/0629H01L27/1203H01L27/1207
    • A chip includes a CMOS structure having a bulk device disposed in a first region of a semiconductor substrate in conductive communication with an underlying bulk region of the substrate, the first region and the bulk region having a first crystal orientation. A SOI device is disposed in a semiconductor-on-insulator (“SOI”) layer separated from the bulk region of the substrate by a buried dielectric layer, the SOI layer having a different crystal orientation from the first crystal orientation. In one example, the bulk device includes a p-type field effect transistor (“PFET”) and the SOI device includes an n-type field effect transistor (“NFET”) device. Alternatively, the bulk device can include an NFET and the SOI device can include a PFET. When the SOI device has a gate conductor in conductive communication with a gate conductor of the bulk device, charging damage can occur to the SOI device, except for the presence of diodes in reverse-biased conductive communication with the bulk region. The diodes are operable to conduct a discharge current to the bulk region when either a voltage on the gate conductor or a voltage on the source or drain region of the SOI device exceeds a diode's breakdown voltage.
    • 芯片包括CMOS结构,其具有设置在半导体衬底的与衬底的下面的主体区域导电连通的第一区域中的本体器件,第一区域和主体区域具有第一晶体取向。 SOI器件设置在绝缘体上半导体(“SOI”)层中,该绝缘体绝缘体(“SOI”)层通过掩埋电介质层与衬底的主体区域分离,SOI层具有与第一晶体取向不同的晶体取向。 在一个示例中,体器件包括p型场效应晶体管(“PFET”),并且SOI器件包括n型场效应晶体管(“NFET”)器件。 或者,体器件可以包括NFET,并且SOI器件可以包括PFET。 当SOI器件具有与本体器件的栅极导体导通的栅极导体时,除了存在与体区域反向偏置导电连通的二极管之外,SOI器件可能发生充电损坏。 当栅极导体上的电压或SOI器件的源极或漏极区域上的电压超过二极管的击穿电压时,二极管可操作以将放电电流传导到体区。
    • 9. 发明申请
    • Protection against charging damage in hybrid orientation transistors
    • 在混合取向晶体管中防止充电损坏
    • US20090179269A1
    • 2009-07-16
    • US12317310
    • 2008-12-22
    • Terence B. HookAnda C. MocutaJeffrey W. SleightAnthony K. Stamper
    • Terence B. HookAnda C. MocutaJeffrey W. SleightAnthony K. Stamper
    • H01L27/12
    • H01L21/84H01L21/823807H01L21/823878H01L27/0251H01L27/0629H01L27/1203H01L27/1207
    • A chip can include a CMOS structure having a bulk device disposed in a first region of a semiconductor substrate in conductive communication with an underlying bulk region of the substrate, the first region and the bulk region having a first crystal orientation. An SOI device is disposed in a semiconductor-on-insulator (“SOI”) layer separated from the bulk region of the substrate by a buried dielectric layer, the SOI layer having a different crystal orientation from the first crystal orientation. In one example, the bulk device includes a p-type field effect transistor (“PFET”) and the SOI device includes an n-type field effect transistor (“NFET”) device. Alternatively, the bulk device can include an NFET and the SOI device can include a PFET. When the SOI device has a gate conductor in conductive communication with a gate conductor of the bulk device, charging damage can occur to the SOI device, except for the presence of diodes in reverse-biased conductive communication with the bulk region. The diodes are operable to conduct a discharge current to the bulk region when either a voltage on the gate conductor or a voltage on the source or drain region of the SOI device exceeds a diode's breakdown voltage.
    • 芯片可以包括CMOS结构,其具有设置在半导体衬底的第一区域中的体器件,其与衬底的下面的体区域导电连通,第一区域和体区具有第一晶体取向。 SOI器件设置在绝缘体上半导体(“SOI”)层中,其通过掩埋电介质层与衬底的本体区域分离,SOI层具有与第一晶体取向不同的晶体取向。 在一个示例中,体器件包括p型场效应晶体管(“PFET”),并且SOI器件包括n型场效应晶体管(“NFET”)器件。 或者,体器件可以包括NFET,并且SOI器件可以包括PFET。 当SOI器件具有与本体器件的栅极导体导通的栅极导体时,除了存在与体区域反向偏置导电连通的二极管之外,SOI器件可能发生充电损坏。 当栅极导体上的电压或SOI器件的源极或漏极区域上的电压超过二极管的击穿电压时,二极管可操作以将放电电流传导到体区。