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1. 发明授权

US07199384B2 Inductively-driven light source for lithography 有权
标题翻译：用于光刻的感应驱动光源
公开(公告)号：US07199384B2
公开(公告)日：2007-04-03
申请号：US10888955
申请日：2004-07-09
申请人： Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
发明人： Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
IPC分类号： H01J35/00
CPC分类号： G03F7/70033 , B82Y10/00 , H05G2/003
摘要： An apparatus for producing light includes a chamber that has a plasma discharge region and that contains an ionizable medium. The apparatus also includes a magnetic core that surrounds a portion of the plasma discharge region. The apparatus also includes a pulse power system for providing at least one pulse of energy to the magnetic core for delivering power to a plasma formed in the plasma discharge region. The plasma has a localized high intensity zone.
摘要翻译：一种用于制造光的装置包括具有等离子体放电区域并且包含可电离介质的室。该设备还包括围绕等离子体放电区域的一部分的磁芯。该装置还包括脉冲功率系统，用于向磁芯提供至少一个能量脉冲以将功率传递到等离子体放电区域中形成的等离子体。等离子体具有局部高强度区域。

2. 发明授权

US07948185B2 Inductively-driven plasma light source 有权
标题翻译：电感驱动等离子光源
公开(公告)号：US07948185B2
公开(公告)日：2011-05-24
申请号：US11653065
申请日：2007-01-12
申请人： Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow , Ron Collins
发明人： Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow , Ron Collins
IPC分类号： H05B31/26
CPC分类号： H05G2/003 , H05G2/005
摘要： An apparatus for producing light includes a chamber that has a plasma discharge region and that contains an ionizable medium. The apparatus also includes a magnetic core that surrounds a portion of the plasma discharge region. The apparatus also includes a pulse power system for providing at least one pulse of energy to the magnetic core for delivering power to a plasma formed in the plasma discharge region that forms a secondary circuit of a transformer. The plasma has a localized high intensity zone.
摘要翻译：一种用于制造光的装置包括具有等离子体放电区域并且包含可电离介质的室。该装置还包括围绕等离子体放电区域的一部分的磁芯。该装置还包括用于向磁芯提供至少一个能量脉冲的脉冲功率系统，用于将功率传递到形成在等离子体放电区域中的等离子体，其形成变压器的次级电路。等离子体具有局部高强度区域。

3. 发明授权

US07307375B2 Inductively-driven plasma light source 有权
标题翻译：电感驱动等离子光源
公开(公告)号：US07307375B2
公开(公告)日：2007-12-11
申请号：US10888795
申请日：2004-07-09
申请人： Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
发明人： Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
IPC分类号： H01J19/42
CPC分类号： H01J65/048 , H05G2/003
摘要： An apparatus for producing light includes a chamber that has a plasma discharge region and that contains an ionizable medium. The apparatus also includes a magnetic core that surrounds a portion of the plasma discharge region. The apparatus also includes a pulse power system for providing at least one pulse of energy to the magnetic core for delivering power to a plasma formed in the plasma discharge region. The plasma has a localized high intensity zone.
摘要翻译：一种用于制造光的装置包括具有等离子体放电区域并且包含可电离介质的室。该设备还包括围绕等离子体放电区域的一部分的磁芯。该装置还包括脉冲功率系统，用于向磁芯提供至少一个能量脉冲以将功率传递到等离子体放电区域中形成的等离子体。等离子体具有局部高强度区域。

4. 发明授权

US07183717B2 Inductively-driven light source for microscopy 有权
标题翻译：用于显微镜的感应驱动光源
公开(公告)号：US07183717B2
公开(公告)日：2007-02-27
申请号：US10888434
申请日：2004-07-09
申请人： Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
发明人： Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
IPC分类号： H01B31/26
CPC分类号： H05G2/003
摘要： An apparatus for producing light includes a chamber that has a plasma discharge region and that contains an ionizable medium. The apparatus also includes a magnetic core that surrounds a portion of the plasma discharge region. The apparatus also includes a pulse power system for providing at least one pulse of energy to the magnetic core for delivering power to a plasma formed in the plasma discharge region. The plasma has a localized high intensity zone.
摘要翻译：一种用于制造光的装置包括具有等离子体放电区域并且包含可电离介质的室。该装置还包括围绕等离子体放电区域的一部分的磁芯。该装置还包括脉冲功率系统，用于向磁芯提供至少一个能量脉冲以将功率传递到等离子体放电区域中形成的等离子体。等离子体具有局部高强度区域。

5. 发明授权

US08173986B2 Laser-heated infrared source 有权
标题翻译：激光加热红外线源
公开(公告)号：US08173986B2
公开(公告)日：2012-05-08
申请号：US12847468
申请日：2010-07-30
申请人： William M. Holber , Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
发明人： William M. Holber , Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
IPC分类号： G01N21/00 , G01N21/35 , G01J3/10
CPC分类号： G01J3/108 , Y10S430/145
摘要： Described are infrared light sources and methods for generating infrared radiation. The infrared light source includes a source of laser radiation, a target and an enclosure. The target is positioned in a path of an output region of the source of laser radiation. The target includes an absorbing material that absorbs radiation at a wavelength within the lasing spectrum of the source of laser radiation and converts the absorbed radiation into thermal energy. The enclosure defines a cavity that includes the target. The enclosure includes an infrared reflecting film on a side that defines the cavity.
摘要翻译：描述了用于产生红外辐射的红外光源和方法。红外光源包括激光辐射源，靶和外壳。目标位于激光辐射源的输出区域的路径中。目标包括吸收激光辐射源的激光光谱内的波长的辐射的吸收材料，并将吸收的辐射转换成热能。外壳定义了包含目标的空腔。外壳包括在限定空腔的一侧的红外反射膜。

6. 发明授权

US08143790B2 Method for inductively-driven plasma light source 有权
标题翻译：电感驱动等离子体光源的方法
公开(公告)号：US08143790B2
公开(公告)日：2012-03-27
申请号：US11930856
申请日：2007-10-31
申请人： Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
发明人： Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
IPC分类号： H01J7/24
CPC分类号： H01J65/048 , H05G2/003
摘要： A method for producing light includes introducing an ionizable medium for generating a plasma into a chamber. The method also includes applying at least one pulse of energy to a magnetic core that surrounds a portion of a plasma discharge region within the chamber such that the magnetic core delivers power to the plasma which forms a secondary of a transformer according to Faraday's law of induction. The plasma has a localized high intensity zone.
摘要翻译：制造光的方法包括将用于产生等离子体的可离子化介质引入室中。该方法还包括将至少一个能量脉冲施加到围绕室内的等离子体放电区域的一部分的磁芯的磁芯，使得磁芯根据法拉第的感应定律将功率传递到形成变压器次级的等离子体。等离子体具有局部高强度区域。

7. 发明申请

US20110127450A1 Laser-Heated Infrared Source 有权
标题翻译：激光加热红外源
公开(公告)号：US20110127450A1
公开(公告)日：2011-06-02
申请号：US12847468
申请日：2010-07-30
申请人： William M. Holber , Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
发明人： William M. Holber , Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
IPC分类号： G01J3/10
CPC分类号： G01J3/108 , Y10S430/145
摘要： Described are infrared light sources and methods for generating infrared radiation. The infrared light source includes a source of laser radiation, a target and an enclosure. The target is positioned in a path of an output region of the source of laser radiation. The target includes an absorbing material that absorbs radiation at a wavelength within the lasing spectrum of the source of laser radiation and converts the absorbed radiation into thermal energy. The enclosure defines a cavity that includes the target. The enclosure includes an infrared reflecting film on a side that defines the cavity.
摘要翻译：描述了用于产生红外辐射的红外光源和方法。红外光源包括激光辐射源，靶和外壳。目标位于激光辐射源的输出区域的路径中。目标包括吸收激光辐射源的激光光谱内的波长的辐射的吸收材料，并将吸收的辐射转换成热能。外壳定义了包含目标的空腔。外壳包括在限定空腔的一侧的红外反射膜。

8. 发明授权

US07238266B2 Method and apparatus for fluorine generation and recirculation 有权
标题翻译：用于氟发生和再循环的方法和装置
公开(公告)号：US07238266B2
公开(公告)日：2007-07-03
申请号：US10313516
申请日：2002-12-06
申请人： Donald K. Smith , Matthew M. Besen , William M. Holber , Stephen F. Horne
发明人： Donald K. Smith , Matthew M. Besen , William M. Holber , Stephen F. Horne
IPC分类号： C25B9/08 , B01D61/46 , C25B1/24 , B01D61/44
CPC分类号： B01J19/088 , B01J2219/00164 , B01J2219/0894 , C01B7/20
摘要： The invention relates to apparatus and methods for generating and recycling fluorine. The applicants recognized that a fluorine separator, used either alone or in combination with a plasma generator can produce sufficient quantities of fluorine at its point of use for thin film processing. The fluorine separator can take the form of a condenser, a membrane separation device, a fluorine ion conductor comprising a solid electrolyte, or a combination of the foregoing. In some embodiments, reaction products comprising fluorine are passed to the fluorine separator. In other embodiments, separated fluorine is passed, either alone or in conjunction with additional feed stock comprising fluorine, to a plasma generator. The fluorine separator allows fluorine to be recycled and waste products to be eliminated from the system.
摘要翻译：本发明涉及氟的生成和再循环的设备和方法。申请人认识到，单独使用或与等离子体发生器组合使用的氟分离器可以在其用于薄膜处理的点处产生足够量的氟。氟分离器可以是冷凝器，膜分离装置，包含固体电解质的氟离子导体或其组合的形式。在一些实施方案中，包含氟的反应产物通过氟分离器。在其它实施方案中，分离的氟单独地或与另外的含氟原料结合使用到等离子体发生器。氟分离器允许氟被再循环并且废物从系统中消除。

9. 发明授权

US06781119B2 Ion storage system 有权
标题翻译：离子存储系统
公开(公告)号：US06781119B2
公开(公告)日：2004-08-24
申请号：US10017766
申请日：2001-12-14
申请人： Donald K. Smith , Stephen F. Horne , Matthew M. Besen
发明人： Donald K. Smith , Stephen F. Horne , Matthew M. Besen
IPC分类号： B01D5444
CPC分类号： H01J49/424 , G01M3/202 , H01J49/422 , H01J49/427
摘要： An ion storage system is described that includes an ion trap that defines a volume for storing a plurality of ions. A radio frequency (RF) generator is electromagnetically coupled to the volume defined by the ion trap. The RF generator generates an RF electrical field that stores the plurality of ions in the ion trap. A switching device terminates the RF electrical field, which ejects the plurality of ions from the ion trap. An ion detector detects at least a portion of the plurality of ions that are ejected from the ion trap.
摘要翻译：描述了一种离子存储系统，其包括限定用于存储多个离子的体积的离子阱。射频（RF）发生器与由离子阱限定的体积电磁耦合。 RF发生器产生将多个离子存储在离子阱中的RF电场。开关装置终止RF电场，其从离子阱排出多个离子。离子检测器检测从离子阱排出的多个离子的至少一部分。

10. 发明授权

US06687635B2 Apparatus and method for compensated sensor output 有权
标题翻译：补偿传感器输出的装置和方法
公开(公告)号：US06687635B2
公开(公告)日：2004-02-03
申请号：US10170861
申请日：2002-06-13
申请人： Stephen F. Horne , Philip J. Maiorana , Santhi E. Mathew , Leonid Mindlin , Claudia J. Quigley , Eric R. Taranto , Donald K. Smith
发明人： Stephen F. Horne , Philip J. Maiorana , Santhi E. Mathew , Leonid Mindlin , Claudia J. Quigley , Eric R. Taranto , Donald K. Smith
IPC分类号： G06F1314
CPC分类号： G01D3/022
摘要： A compensated sensor includes a sensor, a relatively fast feedthrough path, and a relatively slow compensation path. The relatively fast feedthrough path includes a summer and output circuitry, such as a summing amplifier. The relatively slow compensation path includes circuitry that produces one or more correction factors for such sensor deficiencies as temperature dependency, or nonlinearity effects, for example. These one or more correction factors are fed to the summer for summing with the uncompensated sensor output. Additionally, the output of the output circuitry (e.g., summing amplifier), is fed back to the compensation circuitry where it is compared to a compensated sensor output developed by the compensation circuitry. The difference between the compensated sensor signal developed in the compensation circuitry and the output signal fed back to the compensation circuitry is also provided to the summer for summing with the one or more correction factors and the uncompensated sensor output.
摘要翻译：补偿传感器包括传感器，相对快速的馈通路径和相对较慢的补偿路径。相对较快的馈通路径包括加法器和输出电路，例如求和放大器。相对较慢的补偿路径包括产生例如温度依赖性或非线性效应等传感器缺陷的一个或多个校正因子的电路。这些一个或多个校正因子被馈送到夏天以与未补偿的传感器输出相加。另外，输出电路（例如，求和放大器）的输出被反馈到补偿电路，在该补偿电路中，与补偿电路开发的补偿传感器输出进行比较。在补偿电路中产生的补偿传感器信号和反馈到补偿电路的输出信号之间的差异也被提供给加法器以与一个或多个校正因子和未补偿的传感器输出相加。

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