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1. 发明授权

US06800862B2 Ion implanting apparatus and ion implanting method 有权
标题翻译：离子注入装置和离子注入方法
公开(公告)号：US06800862B2
公开(公告)日：2004-10-05
申请号：US10314117
申请日：2002-12-09
申请人： Takao Matsumoto , Kohichi Orihira , Kazuhiro Nakao , Mitsunori Nakamura
发明人： Takao Matsumoto , Kohichi Orihira , Kazuhiro Nakao , Mitsunori Nakamura
IPC分类号： B01D5444
CPC分类号： H01J37/3171 , H01J2237/304
摘要： The ion implanting apparatus is provided with a control device which controls the operating state thereof in a period during which ion implantation is not carried out for a substrate in the state in any mode selected from the above (a) twilight mode in which the flow rate of the raw gas supplied to an ion source and the power supplied from a plasma producing power source are reduced to values capable of keeping plasma production in the ion source, (b) magnet-off mode in which in addition to the state in the twilight mode, the outputs from an energy separating magnet power source, scanning magnet power source and beam paralleling magnet power source are stopped, and (c) shut-down mode in which the supply of the raw gas is stopped and the outputs from the power sources are stopped.
摘要翻译：离子注入装置设置有控制装置，该控制装置在从上述（a）暮光模式中选择的任何模式的状态下对基板进行离子注入的时间段期间控制其操作状态，其中流量提供给离子源的原料气体和从等离子体产生电源供给的功率被降低到能够在离子源中保持等离子体生成的值，（b）除了暮色状态之外的磁体断开模式停止从能量分离磁体电源，扫描磁体电源和光束平行磁体电源的输出，以及（c）原料气体的供给停止的停止模式和电源的输出被停止

2. 发明授权

US06777673B2 Ion trap mass spectrometer 有权
标题翻译：离子阱质谱仪
公开(公告)号：US06777673B2
公开(公告)日：2004-08-17
申请号：US10034459
申请日：2001-12-28
申请人： Huan-Cheng Chang , Wen-Ping Peng , Yong Cai , Shan-Jen Kuo
发明人： Huan-Cheng Chang , Wen-Ping Peng , Yong Cai , Shan-Jen Kuo
IPC分类号： B01D5444
CPC分类号： H01J49/424 , G01N15/1459 , G01N15/1463 , H01J49/0404 , H01J49/165
摘要： A mass spectrometer that includes an ion source, an ion trap, and a light detection module. The ion trap has two end-cap electrodes and a ring electrode. The ring electrode is positioned relative to the end-cap electrodes to confine a charged particle from the ion source within a confinement region when an audio frequency voltage having a first amplitude is applied between the ring electrode and the two end-cap electrodes. The charged particle is ejected from the ion trap when the audio frequency voltage increases to a second amplitude. The light detection module includes a light source that illuminates the ejected particle and a light detector that detects light scattered from the ejected particle.
摘要翻译：一种包括离子源，离子阱和光检测模块的质谱仪。离子阱具有两个端盖电极和环形电极。当在环形电极和两个端盖电极之间施加具有第一幅度的音频电压时，环形电极相对于端帽电极定位，以将来自离子源的带电粒子限制在约束区域内。当音频电压增加到第二幅度时，带电粒子从离子阱中排出。光检测模块包括照射喷射的颗粒的光源和检测从喷出的颗粒散射的光的光检测器。

3. 发明授权

US06803563B2 Method and apparatus for monitoring the quality of lubricant 失效
标题翻译：用于监测润滑剂质量的方法和装置
公开(公告)号：US06803563B2
公开(公告)日：2004-10-12
申请号：US10737243
申请日：2003-12-16
申请人： Edwin Becker , Mark Zundel
发明人： Edwin Becker , Mark Zundel
IPC分类号： B01D5444
CPC分类号： G01N27/622 , G01N33/2888
摘要： A method and apparatus are provided for monitoring the quality of lubricant that is in a gear mechanism or machine that contains effective materials. A sample of the lubricant or of the vapor that escapes from the lubricant is withdrawn from the gear mechanism or machine. The sample is conveyed to an ion mobility spectrometer, where materials present in the vapor phase above the lubricant are analyzed. The change of the content and of the type of the analyzed materials in the sample is utilized as the actual condition for the aging of the lubricant.
摘要翻译：提供了一种用于监测在包含有效材料的齿轮机构或机器中的润滑剂的质量的方法和装置。润滑剂或从润滑剂逸出的蒸汽的样品从齿轮机构或机器中排出。将样品输送到离子迁移谱仪，分析润滑剂上方气相中存在的物质。将样品中分析材料的含量和类型的变化用作润滑剂老化的实际条件。

4. 发明授权

US06797945B2 Piezoelectric charged droplet source 有权
标题翻译：压电带电液滴源
公开(公告)号：US06797945B2
公开(公告)日：2004-09-28
申请号：US10113956
申请日：2002-03-29
申请人： William Travis Berggren , Michael Scott Westphall , Mark Andrew Scalf , Lloyd Michael Smith
发明人： William Travis Berggren , Michael Scott Westphall , Mark Andrew Scalf , Lloyd Michael Smith
IPC分类号： B01D5444
CPC分类号： H01J49/0454 , H01J49/167
摘要： The invention provides devices, device configurations and methods for improved sensitivity, detection level and efficiency in mass spectrometry particularly as applied to biological molecules, including biological polymers, such as proteins and nucleic acids. Specifically, the invention relates to charged droplet sources and their use as ion sources and as components in ion sources. In addition, devices of this invention allow mass spectral analysis of a single charged droplet. Further, the charged droplet sources and ion sources of this invention can be combined with any charge particle detector or mass analyzer, but are a particularly benefit when used in combination with a time of flight mass spectrometer.
摘要翻译：本发明提供用于提高质谱的灵敏度，检测水平和效率的装置，装置配置和方法，特别是应用于包括生物聚合物如蛋白质和核酸的生物分子。具体地，本发明涉及带电液滴源及其作为离子源和离子源中的组分的用途。此外，本发明的装置允许单个带电液滴的质谱分析。此外，本发明的带电液滴源和离子源可以与任何电荷粒子检测器或质量分析器组合，但是当与飞行时间质谱仪结合使用时是特别有益的。

5. 发明授权

US06781119B2 Ion storage system 有权
标题翻译：离子存储系统
公开(公告)号：US06781119B2
公开(公告)日：2004-08-24
申请号：US10017766
申请日：2001-12-14
申请人： Donald K. Smith , Stephen F. Horne , Matthew M. Besen
发明人： Donald K. Smith , Stephen F. Horne , Matthew M. Besen
IPC分类号： B01D5444
CPC分类号： H01J49/424 , G01M3/202 , H01J49/422 , H01J49/427
摘要： An ion storage system is described that includes an ion trap that defines a volume for storing a plurality of ions. A radio frequency (RF) generator is electromagnetically coupled to the volume defined by the ion trap. The RF generator generates an RF electrical field that stores the plurality of ions in the ion trap. A switching device terminates the RF electrical field, which ejects the plurality of ions from the ion trap. An ion detector detects at least a portion of the plurality of ions that are ejected from the ion trap.
摘要翻译：描述了一种离子存储系统，其包括限定用于存储多个离子的体积的离子阱。射频（RF）发生器与由离子阱限定的体积电磁耦合。 RF发生器产生将多个离子存储在离子阱中的RF电场。开关装置终止RF电场，其从离子阱排出多个离子。离子检测器检测从离子阱排出的多个离子的至少一部分。

6. 发明授权

US06441369B1 Tandem time-of-flight mass spectrometer with improved mass resolution 有权
公开(公告)号：US06441369B1
公开(公告)日：2002-08-27
申请号：US09712882
申请日：2000-11-15
申请人： Marvin L. Vestal , Stephen C. Gabeler
发明人： Marvin L. Vestal , Stephen C. Gabeler
IPC分类号： B01D5444
CPC分类号： H01J49/40 , H01J49/004
摘要： A tandem time-of-flight mass spectrometer is described. The spectrometer includes a pulsed source of ions that focuses a packet of ions substantially within a predetermined mass-to-charge ratio range onto a focal plane in a flight path of the ions. An ion selector receives the focused packet of ions and selects ions substantially within the predetermined mass-to-charge ratio range and rejects substantially all other ions. An ion fragmentor that fragments a fraction of the selected ions is positioned in the flight path of the selected ions. A pulsed ion accelerator that accelerates the selected ions and fragments thereof is positioned in a flight path of the selected ions and fragments thereof after the ion fragmentor. An electrode is positioned in the flight path of the accelerated selected ions and fragments thereof after the pulsed ion accelerator. In operation, the electrode is biased with a time varying bias voltage that increases the energy of the fragments relative to the selected ions.

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