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1. 发明授权

US06710681B2 Thin film bulk acoustic resonator (FBAR) and inductor on a monolithic substrate and method of fabricating the same 失效
标题翻译：单片基板上的薄膜体声波谐振器（FBAR）和电感器及其制造方法
公开(公告)号：US06710681B2
公开(公告)日：2004-03-23
申请号：US09906581
申请日：2001-07-13
申请人： Domingo A. Figueredo , Richard C. Ruby , Yury Oshmyansky , Paul Bradley
发明人： Domingo A. Figueredo , Richard C. Ruby , Yury Oshmyansky , Paul Bradley
IPC分类号： H03H954
CPC分类号： H03H9/0542 , H03H9/542 , H04R17/00 , Y10T29/42 , Y10T29/4902 , Y10T29/49155
摘要： An apparatus having both a resonator and an inductor fabricated on a single substrate and a method of fabricating the apparatus are disclosed. The apparatus includes a resonator and an inductor that is connected to the resonator. Both the resonator and the inductor are fabricated over their respective cavities to produce a high Q-factor filter circuit.
摘要翻译：公开了一种具有制造在单个基板上的谐振器和电感器的装置以及制造该装置的方法。该装置包括连接到谐振器的谐振器和电感器。谐振器和电感都在其各自的空腔上制造，以产生高Q因子滤波器电路。

2. 发明授权

US06714102B2 Method of fabricating thin film bulk acoustic resonator (FBAR) and FBAR structure embodying the method 有权
标题翻译：制造薄膜体声共振器（FBAR）的方法和体现该方法的FBAR结构
公开(公告)号：US06714102B2
公开(公告)日：2004-03-30
申请号：US09798496
申请日：2001-03-01
申请人： Richard C. Ruby , Paul Bradley , Yury Oshmyansky , Domingo A. Figueredo
发明人： Richard C. Ruby , Paul Bradley , Yury Oshmyansky , Domingo A. Figueredo
IPC分类号： H03H900
CPC分类号： H03H3/02
摘要： A method for fabricating an acoustic resonator, for example a Thin Film Bulk Acoustic Resonators (FBAR), on a substrate. A depression is etched and filled with sacrificial material. The FBAR is fabricated on the substrate spanning the depression, the FBAR having an etch hole. The depression may include etch channels in which case the FBAR may include etch holes aligned with the etch channels. A resonator resulting from the application of the technique is suspended in air and includes at least one etch hole and may include etch channels.
摘要翻译：一种用于在衬底上制造声共振器的方法，例如薄膜体声波谐振器（FBAR）。蚀刻凹陷并填充牺牲材料。 FBAR制造在跨越凹陷的衬底上，FBAR具有蚀刻孔。凹陷可以包括蚀刻通道，在这种情况下，FBAR可以包括与蚀刻通道对准的蚀刻孔。由施加该技术产生的共振器悬浮在空气中并且包括至少一个蚀刻孔，并且可以包括蚀刻通道。

3. 发明授权

US6153114A Thin-film printhead device for an ink-jet printer 有权
标题翻译：用于喷墨打印机的薄膜打印头装置
公开(公告)号：US6153114A
公开(公告)日：2000-11-28
申请号：US212501
申请日：1998-12-15
申请人： Domingo A. Figueredo , David R. Thomas , Mark A. Buonanno
发明人： Domingo A. Figueredo , David R. Thomas , Mark A. Buonanno
IPC分类号： B41J2/14 , B41J2/16 , B41J2/04 , G11B5/127
CPC分类号： B41J2/14129 , B41J2/1603 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1646
摘要： The present invention provides an ink-jet printhead substructure highly thermally efficient and greatly simplified in both the method of manufacture and resulting structure. The printhead substructure of the present invention comprises a resistor formed on an insulated substrate, a single conductor layer that provides both the conductive bonding interconnect pads and the conductive traces for the substructure, a passivation layer and a cavitation barrier. The resistor, passivation layer and cavitation barrier may comprise a single graded layer. The graded thin-film structure provides the resistor, passivation and cavitation barrier components without creating abrupt layer interfaces thereby, improving printhead reliability and durability. Fabrication of the printhead substructure of the present invention requires only two or three lithographic masks and a minimized number of sputter source materials.
摘要翻译：本发明在制造方法和结构的结构中提供了高度热效率且大大简化的喷墨打印头底座。本发明的打印头子结构包括形成在绝缘基板上的电阻器，提供导电接合互连焊盘和用于子结构的导电迹线，钝化层和空化屏障的单导体层。电阻器，钝化层和空化屏障可以包括单个梯度层。分级薄膜结构提供电阻器，钝化和气蚀屏障部件，而不产生突变层界面，从而提高打印头的可靠性和耐用性。本发明的打印头子结构的制造仅需要两个或三个光刻掩模和最少数量的溅射源材料。

4. 发明授权

US06828713B2 Resonator with seed layer 有权
标题翻译：谐振器与种子层
公开(公告)号：US06828713B2
公开(公告)日：2004-12-07
申请号：US10209624
申请日：2002-07-30
申请人： Paul D. Bradley , Donald Lee , Domingo A. Figueredo
发明人： Paul D. Bradley , Donald Lee , Domingo A. Figueredo
IPC分类号： H01L4108
CPC分类号： H03H9/173 , H03H3/02 , H03H9/02141 , H03H9/02149 , H03H2003/021 , Y10T29/42
摘要： A thin-film resonator having a seed layer and a method of making the same are disclosed. The resonator is fabricated having a seed layer to assist in the fabrication of high quality piezoelectric layer for the resoantor. The resonator has the seed layer, a bottom electrode, piezoelectric layer, and a top electrode. The seed layer is often the same material as the piezoelectric layer such as Aluminum Nitride (AlN).
摘要翻译：公开了具有种子层的薄膜谐振器及其制造方法。制造具有种子层的谐振器，以帮助制造用于再生剂的高质量压电层。谐振器具有种子层，底部电极，压电层和顶部电极。种子层通常与诸如氮化铝（AlN）的压电层相同。

5. 发明授权

US06286939B1 Method of treating a metal surface to increase polymer adhesion 失效
标题翻译：处理金属表面以增加聚合物粘合力的方法
公开(公告)号：US06286939B1
公开(公告)日：2001-09-11
申请号：US08938786
申请日：1997-09-26
申请人： Gregory T. Hindman , Domingo A. Figueredo , Ronald L. Enck
发明人： Gregory T. Hindman , Domingo A. Figueredo , Ronald L. Enck
IPC分类号： B41J205
CPC分类号： B41J2/14129 , B41J2202/03
摘要： A thermal ink jet printhead that includes a thin film substrate including a plurality of thin film layers, a plurality of ink firing heater resistors defined in the plurality of thin film layers, a patterned tantalum layer disposed on said plurality of thin film layers, a barrier adhesion layer disposed on the patterned tantalum layer, an ink barrier layer disposed over the barrier adhesion layer, and respective ink chambers formed in the ink barrier layer over respective thin film resistors, each chamber formed by a chamber opening in barrier layer, the barrier adhesion layer more particularly comprises a tantalum nitride layer or a deposited tantalum, carbon, fluorine, and oxygen containing layer that is formed pursuant to exposure of the patterned tantalum layer to a plasma that includes a fluorinated hydrocarbon such as carbon tetrafluoride (CF4), fluoroform (CHF3), hexafluoroethane (C2F6), difluoromethane (CH2F2), pentafluoroethane (C2HF5), tetraf luoroethane (C2H2F4), or octafluorobutene (C4F8).
摘要翻译：一种热喷墨打印头，其包括具有多个薄膜层的薄膜基板，多个薄膜层中限定的多个喷墨加热电阻器，设置在所述多个薄膜层上的图案化钽层，设置在图案化的钽层上的粘合层，设置在阻挡粘附层上的油墨阻挡层和在各个薄膜电阻器上形成在油墨阻挡层中的各个油墨室，每个室由阻挡层中的开口形成，层更具体地包括氮化钽层或沉积的钽，碳，氟和含氧层，其是通过将图案化的钽层暴露于等离子体而形成的，所述等离子体包括氟化烃如四氟化碳（CF 4），氟代（ CHF3），六氟乙烷（C2F6），二氟甲烷（CH2F2），五氟乙烷（C2HF5），四氟乙烷（C2H2F4）或八氟鲁本（C4F8）。

6. 发明授权

US5883650A Thin-film printhead device for an ink-jet printer 失效
标题翻译：用于喷墨打印机的薄膜打印头装置
公开(公告)号：US5883650A
公开(公告)日：1999-03-16
申请号：US568208
申请日：1995-12-06
申请人： Domingo A. Figueredo , David R. Thomas , Mark A. Buonanno
发明人： Domingo A. Figueredo , David R. Thomas , Mark A. Buonanno
IPC分类号： B41J2/14 , B41J2/16 , B41J2/05
CPC分类号： B41J2/14129 , B41J2/1603 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1646
摘要： The present invention provides an ink-jet printhead substructure highly thermally efficient and greatly simplified in both the method of manufacture and resulting structure. The printhead substructure of the present invention comprises a resistor formed on an insulated substrate, a single conductive layer that provides both the conductive bonding interconnect pads and the conductive traces for the substructure, a passivation layer and a cavitation barrier. The resistor, passivation layer and cavitation barrier may comprise a single graded layer. The graded thin-film structure provides the resistor, passivation and cavitation barrier components without creating abrupt layer interfaces thereby, improving printhead reliability and durability. Fabrication of the printhead substructure of the present invention requires only two or three lithographic masks and a minimized number of sputter source materials.
摘要翻译：本发明在制造方法和结构的结构中提供了高度热效率且大大简化的喷墨打印头底座。本发明的打印头子结构包括形成在绝缘基板上的电阻器，提供导电接合互连焊盘和用于子结构的导电迹线，钝化层和空化屏障的单个导电层。电阻器，钝化层和空化屏障可以包括单个梯度层。分级薄膜结构提供电阻器，钝化和气蚀屏障部件，而不产生突变层界面，从而提高打印头的可靠性和耐用性。本发明的打印头子结构的制造仅需要两个或三个光刻掩模和最少数量的溅射源材料。

7. 发明授权

US5093692A Tunnel diode detector for microwave frequency applications 失效
标题翻译：隧道二极管检测器用于微波频率应用
公开(公告)号：US5093692A
公开(公告)日：1992-03-03
申请号：US612152
申请日：1990-11-09
申请人： Chung-Yi Su , Sanehiko Kakihana , Domingo A. Figueredo
发明人： Chung-Yi Su , Sanehiko Kakihana , Domingo A. Figueredo
IPC分类号： H01L29/88
CPC分类号： H01L29/88
摘要： A tunnel diode is disclosed having a highly P-doped layer of indium gallium arsenide formed on a highly N-doped layer of indium gallium arsenide which is supported on a semi-insulating substrate of indium phosphide. In an alternative embodiment, a tunnel diode is disclosed which has a highly P-doped layer of indium gallium arsenide formed on a highly N-doped layer of indium gallium arsenide which is supported on an N-doped substrate.
摘要翻译：公开了一种隧道二极管，其具有形成在铟镓砷的高N掺杂层上的高P掺杂的砷化铟镓层，其被支撑在磷化铟的半绝缘衬底上。在替代实施例中，公开了一种隧道二极管，其具有形成在支撑在N掺杂衬底上的铟镓砷化物的高N掺杂层上的高掺杂砷化铟镓层。

8. 发明授权

US06758552B1 Integrated thin-film drive head for thermal ink-jet printer 失效
标题翻译：用于热喷墨打印机的集成薄膜驱动头
公开(公告)号：US06758552B1
公开(公告)日：2004-07-06
申请号：US08568209
申请日：1995-12-06
申请人： Domingo A. Figueredo
发明人： Domingo A. Figueredo
IPC分类号： B41J205
CPC分类号： B41J2/1628 , B41J2/14129 , B41J2/1603 , B41J2/1642 , B41J2/1646 , B41J2202/13 , H01L27/0738
摘要： A thin-film ink-jet drive head provides a MOSTFT (metal oxide semiconductor thin-film transistor) transistor, a resistor and the interconnect between the two electrical components, all comprised of the same, multi-functional thin-film layer. Differing portions of the multi-functional thin-film layer function as (1) heating resistors to propel ink droplets from the printhead (2) ink MOSTFT transistors to selectively drive (fire) the resistors, and (3) direct conductive pathways between the drive transistors and the resistors.
摘要翻译：薄膜喷墨驱动头提供MOSTFT（金属氧化物半导体薄膜晶体管）晶体管，电阻器和两个电气部件之间的互连，全部由相同的多功能薄膜层组成。多功能薄膜层的不同部分用作（1）加热电阻器以从打印头（2）墨水MOSTFT晶体管推动墨滴，以选择性地驱动（点燃）电阻器，以及（3）在驱动器之间引导导电通路晶体管和电阻。

9. 发明授权

US06441838B1 Method of treating a metal surface to increase polymer adhesion 失效
标题翻译：处理金属表面以增加聚合物粘合力的方法
公开(公告)号：US06441838B1
公开(公告)日：2002-08-27
申请号：US09765825
申请日：2001-01-19
申请人： Gregory T. Hindman , Domingo A. Figueredo , Ronald L. Enck
发明人： Gregory T. Hindman , Domingo A. Figueredo , Ronald L. Enck
IPC分类号： G01D928
CPC分类号： B41J2/1606 , B41J2/14129
摘要： A thermal ink jet printhead that includes a thin film substrate including a plurality of thin film layers, a plurality of ink firing heater resistors defined in the plurality of thin film layers, a patterned tantalum layer disposed on said plurality of thin film layers, a barrier adhesion layer disposed on the patterned tantalum layer, an ink barrier layer disposed over the barrier adhesion layer, and respective ink chambers formed in the ink barrier layer over respective thin film resistors, each chamber formed by a chamber opening in barrier layer, the barrier adhesion layer more particularly comprises a tantalum nitride layer or a deposited tantalum, carbon, fluorine, and oxygen containing layer that is formed pursuant to exposure of the patterned tantalum layer to a plasma that includes a fluorinated hydrocarbon such as carbon tetrafluoride (CF4), fluoroform (CHF3), hexafluoroethane (C2F6), difluoromethane (CH2F2), pentafluoroethane (C2HF5), tetrafluoroethane (C2H2F4), or octafluorobutene (C4F8).
摘要翻译：一种热喷墨打印头，其包括具有多个薄膜层的薄膜基板，多个薄膜层中限定的多个喷墨加热电阻器，设置在所述多个薄膜层上的图案化钽层，设置在图案化的钽层上的粘合层，设置在阻挡粘附层上的油墨阻挡层和在各个薄膜电阻器上形成在油墨阻挡层中的各个油墨室，每个室由阻挡层中的开口形成，层更具体地包括氮化钽层或沉积的钽，碳，氟和含氧层，其是通过将图案化的钽层暴露于等离子体而形成的，所述等离子体包括氟化烃如四氟化碳（CF 4），氟代（ CHF3），六氟乙烷（C2F6），二氟甲烷（CH2F2），五氟乙烷（C2HF5），四氟乙烷（C2H2F4）或八氟（C4F8）。

10. 发明授权

US5257005A Small value precision integrated circuit resistors 失效
标题翻译：小型精密集成电路电阻
公开(公告)号：US5257005A
公开(公告)日：1993-10-26
申请号：US931615
申请日：1992-08-18
申请人： Alan R. Desroches , Domingo A. Figueredo
发明人： Alan R. Desroches , Domingo A. Figueredo
IPC分类号： H01C17/00 , H01L27/08 , H01L29/8605 , H01C1/14 , H01C1/012
CPC分类号： H01L27/0802 , H01L29/8605
摘要： The effective parasitic end resistance of small-value precision integrated circuit resistors is reduced by providing N resistors connected in parallel and causing at least two of the resistors to share a terminal contact. The resulting integrated circuit resistor includes multiple terminal contacts of any number n greater than two. Of the n terminal contacts, N-1 terminal contacts are shared amongst said resistors. The parasitic end resistances are diminished by a factor equal to the number of resistors connected in parallel. By increasing the length of the active area of the N resistors by a factor equal to the number of the resistors, the desired resistance value remains undiminished. As a result, the parasitic end resistances may be made negligible compared to the desired resistance even for small value resistors.
摘要翻译：通过提供并联连接的N个电阻并使至少两个电阻器共享端子触点来减小小值精密集成电路电阻的有效寄生结束电阻。所得到的集成电路电阻器包括多于n个大于2的多个端子触点。在n个端子触点中，N-1个端子触点在所述电阻之间共享。寄生端电阻减小等于并联连接的电阻器数量的因子。通过将N个电阻器的有效面积的长度增加到等于电阻器数量的因子，期望的电阻值保持不变。结果，即使对于小值电阻器，寄生端电阻也可以与期望的电阻相比可忽略。

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