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    • 2. 发明授权
    • Detachable multiple splicing connector for light waveguides
    • 用于光波导的可拆卸多接头连接器
    • US5016972A
    • 1991-05-21
    • US473954
    • 1990-02-09
    • Helmut Schlaak
    • Helmut Schlaak
    • G02B6/36G02B6/38
    • G02B6/383G02B6/3636G02B6/3839G02B6/3885G02B6/389G02B6/3652G02B6/3692
    • A detachable multiple splicing connector for light waveguides comprises splicing halves (1, 2) formed by support parts (3, 4, 5, 6) mutually aligned with maximum precision by means of guide grooves (19, 20, 21) and corresponding guide parts (22, 23). The support parts (3, 4, 5, 6) have at least one guide groove (19, 20, 21) along one side and are mutually connected in such a way that the latter is freely accessible. Guide strips (22, 23) can be easily inserted in the guide grooves (19, 20, 21). The arrangement and design of the guide grooves and guide strips improves the precision of alignment. This detachable multiple splicing connector is useful for optical components with light waveguide connections, in particular for commutatable connections.
    • PCT No.PCT / DE88 / 00502 Sec。 371日期1990年2月9日 102(e)1990年2月9日PCT PCT 1988年8月11日PCT公布。 出版物WO89 / 01641 一种用于光波导的可拆卸多接头连接器包括通过引导槽(19,20)以最大精度相互对准的支撑部分(3,4,5,6)形成的拼接半部(1,2) ,21)和相应的引导部件(22,23)。 支撑部分(3,4,5,6)具有沿着一侧的至少一个引导槽(19,20,21),并且以这样的方式相互连接,使得后者可自由接近。 引导条(22,23)可以容易地插入引导槽(19,20,21)中。 引导槽和引导条的布置和设计提高了对准的精度。 这种可拆卸的多拼接连接器对于具有光波导连接的光学部件是有用的,特别是对于可换向连接。
    • 5. 发明授权
    • Micromechanical relay
    • 微机电继电器
    • US5673785A
    • 1997-10-07
    • US538367
    • 1995-10-03
    • Helmut SchlaakJoachim Schimkat
    • Helmut SchlaakJoachim Schimkat
    • H01H59/00H01H1/24
    • H01H59/0009H01H2001/0084H01H2059/0081
    • The micromechanical electrostatic relay has, on the one hand, a base substrate with base electrode and a base contact piece and, on the other hand, an armature substrate with an armature spring tongue that is etched free and curved away from the base substrate, and that has an armature electrode and an armature contact piece. When a control voltage is applied between the two electrodes, the spring tongue unrolls on the base substrate until it is stretched and causes the two contact pieces to touch. In order to obtain a high contacting force given an optimally large electrode area, the armature contact piece is arranged on a contact spring section that is cut free from the spring tongue via spring webs in the form of a sun wheel with spoke sections helically interengaging such that it is surrounded on all sides by the spring tongue.
    • 另一方面,微机电式静电继电器具有基底电极和基底接触片,另一方面具有电枢弹簧舌片的电枢基片,电枢弹簧舌片被自由地蚀刻而远离基底基板,以及 其具有电枢电极和电枢接触片。 当在两个电极之间施加控制电压时,弹簧舌片在基底基板上展开,直到其被拉伸并且使两个接触件接触。 为了获得给定最大电极面积的高接触力,电枢接触件被布置在接触弹簧部分上,该接触弹簧部分通过弹簧腹板以太阳轮的形式被切割而不受弹簧舌片的影响,轮辐部分螺旋地相互接合 它被春天的舌头包围在四面八方。
    • 7. 发明授权
    • Micromechanical relay having a hybrid drive
    • 具有混合驱动器的微机电继电器
    • US5666258A
    • 1997-09-09
    • US505312
    • 1995-08-17
    • Hans-Jurgen GevatterLothar KiesewetterJoachim SchimkatHelmut Schlaak
    • Hans-Jurgen GevatterLothar KiesewetterJoachim SchimkatHelmut Schlaak
    • H01H1/20H01H1/50H01H57/00H01H59/00
    • H01H57/00H01H59/0009H01H1/20H01H1/50H01H2001/0057H01H2001/0084H01H2057/006H01H2059/0081
    • A micromechanical relay is provided having a cantilevered armature (53) which is etched out from an armature substrate (52). The armature is in the form of a tongue, is elastically connected to the armature substrate, and forms an electrostatic drive with a base electrode (58) of a base substrate (51) located underneath. In addition, a piezo-layer (60) is provided on the armature (53). The piezo-layer (60) acts as a bending transducer and forms a supplemental actuator for a quick response time. When a voltage is applied to the electrodes of the armature (53), base substrate (51) and piezo-layer (60), the armature is attracted toward the base substrate and then rests over a large area on the base, closing at least one contact (55, 56). The different characteristics of the electrostatic actuator, on the one hand, and of the piezo-drive, on the other hand, are complementarily combined to provide a strong attraction force at the start of the armature movement, and a strong contact force is produced after the armature has been attracted.
    • PCT No.PCT / DE94 / 00152 Sec。 371日期:1995年8月17日 102(e)日期1995年8月17日PCT 1994年2月14日PCT PCT。 第WO94 / 19819号公报 日期1994年8月1日提供了具有从电枢基板(52)蚀刻出的悬臂电枢(53)的微机电继电器。 衔铁呈舌状,弹性地连接到电枢基片上,并与位于下方的基底基片(51)的基极(58)形成静电驱动。 此外,在电枢(53)上设置压电层(60)。 压电层(60)用作弯曲换能器并形成用于快速响应时间的辅助致动器。 当向电枢(53),基底(51)和压电层(60)的电极施加电压时,电枢被吸引到基底衬底上,然后搁置在基底上的大面积上,至少闭合 一个联系人(55,56)。 另一方面,静电致动器和压电驱动的不同特征互补地组合,以在电枢运动开始时提供强烈的吸引力,并且在电枢运动开始之后产生强的接触力 电枢已被吸引。
    • 8. 发明授权
    • Micromechanical electrostatic relay with geometric discontinuity
    • 具有几何不连续性的微机电静电继电器
    • US5629565A
    • 1997-05-13
    • US538440
    • 1995-10-03
    • Helmut SchlaakHans-Juergen GevattterLothar KiesewetterJoachim Schimkat
    • Helmut SchlaakHans-Juergen GevattterLothar KiesewetterJoachim Schimkat
    • H01L21/302H01H59/00H01L21/3065H01L23/48H01L23/52H01L29/40
    • H01H59/0009H01H2059/0081
    • A micromechanical electrostatic relay has, on the one hand, a base substrate with a base electrode and a base contact piece and, on the other hand, an armature substrate with an armature spring tongue that is etched free and curved away from the base substrate and that has an armature contact piece. When a control voltage is present between the two electrodes, the spring tongue unrolls on the base substrate until it is stretched and causes the two contact pieces to touch. In order to prevent a creeping contacting and make the closing and opening of the contact abrupt, a geometric discontinuity is provided in the wedge-shaped air gap between the two electrodes. This discontinuity is formed by a partially curved, partially straight design of the spring tongue, by an offset of the beginning of the electrode relative to the spring attachment, and/or by an air gap between the spring attachment and the base electrode. The result is an unambiguous switching hysteresis with trip events when closing and opening the contact.
    • 另一方面,微机电静电继电器具有基底电极和基底接触片,另一方面具有电枢弹簧舌片的电枢基片,电枢弹簧舌片从基底衬底被自由蚀刻并弯曲, 具有电枢接触片。 当在两个电极之间存在控制电压时,弹簧舌片在基底基板上展开,直到其被拉伸并且使两个接触件接触。 为了防止蠕变接触并使接触件的闭合和打开突然,在两个电极之间的楔形气隙中提供几何不连续性。 这种不连续性由弹簧舌片的部分弯曲的,部分直线的设计,通过电极的开始相对于弹簧附件的偏移和/或通过弹簧附件和基底电极之间的空气间隙形成。 结果是关闭和打开触点时具有跳闸事件的明确的开关滞后。
    • 10. 发明授权
    • Micromechanical relay with transverse slots
    • 具有横向插槽的微机电继电器
    • US5635750A
    • 1997-06-03
    • US539012
    • 1995-10-03
    • Helmut SchlaakJoachim Schimkat
    • Helmut SchlaakJoachim Schimkat
    • H01L21/302H01H59/00H01L21/3065H01L29/82
    • B81B3/0072H01H59/0009B81B2201/014H01H2059/0081
    • A micromechanical electrostatic relay has a base substrate with a base electrode and a base contact piece. The relay also has an armature substrate with an armature spring tongue that curves away from the base substrate, and an armature electrode and an armature contact piece. When a control voltage is applied between the two electrodes, the spring tongue unrolls on the base substrate and thus closes the contact. The curvature of the spring tongue in the quiescent condition is produced by a coating with a compressive strain layer. In order to avoid undesired transverse arcs of the spring tongue, the compressive strain layer is subdivided into strips by slots in a longitudinal direction of the spring tongue. A tensile stress layer applied in surface-wide fashion over the strips and slots reinforces the compensation effect.
    • 微机电静电继电器具有基底,其具有基极和基部接触片。 继电器还具有电枢基板,电枢弹簧舌片远离基底基板,电枢电极和电枢接触片。 当在两个电极之间施加控制电压时,弹簧舌片在基底基板上展开,从而闭合触点。 在静止状态下的弹簧舌的曲率通过具有压缩应变层的涂层产生。 为了避免弹簧舌的不期望的横弧,压缩应变层通过弹簧舌的纵向方向上的狭缝细分成条带。 拉伸应力层以表面宽的方式施加在条和槽上加强了补偿效果。