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1. 发明授权

US08723117B2 Switchable multi perspective detector, optics therefor and method of operating thereof 有权
标题翻译：可切换多透视检测器及其操作方法
公开(公告)号：US08723117B2
公开(公告)日：2014-05-13
申请号：US13543593
申请日：2012-07-06
申请人： Stefan Lanio , Gerald Schönecker , Dieter Winkler
发明人： Stefan Lanio , Gerald Schönecker , Dieter Winkler
IPC分类号： H01J37/26
CPC分类号： H01J37/09 , H01J37/147 , H01J37/244 , H01J2237/0453 , H01J2237/04756 , H01J2237/24465 , H01J2237/24592 , H01J2237/2817
摘要： A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first inner aperture opening and the at least one outer aperture opening.
摘要翻译：描述了用于检测信号光束的二次带电粒子检测装置。该装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中主动检测区域由间隙（G）分开，粒子光学器件被配置用于将信号光束分离成信号光束的第一部分并进入信号光束的至少一个第二部分，并且被配置为聚焦信号光束的第一部分和信号光束的至少一个第二部分。颗粒光学器件包括孔板和孔板中的至少第一内孔开口和孔板中的至少一个第二径向外孔开口，其中孔板被配置为偏置到围绕第一内孔的一个电位孔开口和至少一个外孔开口。

2. 发明授权

US08963083B2 Switchable multi perspective detector, optics therefore and method of operating thereof 有权
标题翻译：可切换多视角检测器，光学器件及其操作方法
公开(公告)号：US08963083B2
公开(公告)日：2015-02-24
申请号：US13960393
申请日：2013-08-06
申请人： Matthias Firnkes , Stefan Lanio , Gerald Schönecker , Dieter Winkler
发明人： Matthias Firnkes , Stefan Lanio , Gerald Schönecker , Dieter Winkler
IPC分类号： H01J37/26 , H01J37/21 , H01J37/10 , H01J37/147
CPC分类号： H01J37/21 , H01J37/10 , H01J37/147 , H01J37/244 , H01J2237/24592
摘要： A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the first aperture opening has a concave shaped portion, particularly wherein the first aperture opening has a pincushion shape.
摘要翻译：描述了用于检测信号光束的二次带电粒子检测装置。该装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中主动检测区域由间隙（G）分开，粒子光学器件被配置用于将信号光束分离成信号光束的第一部分并进入信号光束的至少一个第二部分，并且被配置为聚焦信号光束的第一部分和信号光束的至少一个第二部分。颗粒光学器件包括孔板和孔板中的至少第一内孔开口和孔板中的至少一个第二径向外孔开口，其中第一孔口具有凹形部分，特别地其中第一孔开口有枕形。

3. 发明授权

US08563927B2 Shielding member having a charge control electrode, and a charged particle beam apparatus 有权
标题翻译：具有充电控制电极的屏蔽部件和带电粒子束装置
公开(公告)号：US08563927B2
公开(公告)日：2013-10-22
申请号：US13196778
申请日：2011-08-02
申请人： Dieter Winkler , Stefan Lanio
发明人： Dieter Winkler , Stefan Lanio
IPC分类号： G21K7/00 , G01N23/04
CPC分类号： H01J37/09 , H01J2237/0206 , H01J2237/026 , H01J2237/28
摘要： A shielding member for a charged particle beam apparatus includes a conductive substrate; and a through hole extending through the conductive substrate. The conductive substrate is comprised of a material having a specific electrical resistivity in a range from about 106 Ωcm to about 1012 Ωcm.
摘要翻译：带电粒子束装置的屏蔽构件包括导电基板; 以及延伸穿过导电基板的通孔。导电衬底由具有约106Ω·cm至约1012Ω·cm范围内的特定电阻率的材料构成。

4. 发明授权

US08481958B2 Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens 有权
标题翻译：使用复合透镜的多轴透镜，光束系统以及复合透镜的制造方法
公开(公告)号：US08481958B2
公开(公告)日：2013-07-09
申请号：US12856152
申请日：2010-08-13
申请人： Stefan Lanio
发明人： Stefan Lanio
IPC分类号： G21K5/04
CPC分类号： H01J37/141 , H01J2237/0453 , H01J2237/04922 , H01J2237/141
摘要： A lens system for a plurality of charged particle beams comprises a lens body with a first pole piece, a second pole piece and a plurality of lens openings for the respective charged particle beams; a common excitation coil arranged around the plurality of lens openings for providing a respective first magnetic flux to the lens openings; and a compensation coil arranged between the lens openings for providing a respective second magnetic flux to at least some of the lens openings so as to compensate for an asymmetry of the first magnetic flux.
摘要翻译：用于多个带电粒子束的透镜系统包括具有第一极靴，第二极靴和用于各个带电粒子束的多个透镜开口的透镜体; 布置在所述多个透镜开口周围的公共激励线圈，用于向所述透镜开口提供相应的第一磁通量; 以及补偿线圈，布置在透镜开口之间，用于向至少一些透镜开口提供相应的第二磁通量，以便补偿第一磁通量的不对称性。

5. 发明授权

US07439500B2 Analyzing system and charged particle beam device 有权
标题翻译：分析系统和带电粒子束装置
公开(公告)号：US07439500B2
公开(公告)日：2008-10-21
申请号：US11384044
申请日：2006-03-17
申请人： Juergen Frosien , Stefan Lanio
发明人： Juergen Frosien , Stefan Lanio
IPC分类号： H01J37/244 , H01J37/05 , H01J49/48 , G01R31/305
CPC分类号： H01J37/05 , G01R31/305 , H01J37/244 , H01J49/488 , H01J2237/24465 , H01J2237/24475 , H01J2237/2448 , H01J2237/26
摘要： The present invention relates to an analyzing system with improved detection scheme and a charged particle beam device comprising the same. The analyzing system for analyzing a beam of charged particles has a divider to divide the beam of charged particles according to their energies into a low energy beam and a high energy beam; a front detector for detecting the high energy beam; and at least one reverse detector for detecting the low energy beam. The divider is positioned between the front detector and the at least one reverse detector and the front detector and/or the at least one reverse detector are segmented.
摘要翻译：本发明涉及具有改进的检测方案的分析系统和包括该分析系统的带电粒子束装置。用于分析带电粒子束的分析系统具有分隔器，用于将带电粒子束根据其能量分成低能量束和高能量束; 用于检测高能束的前检测器; 以及用于检测低能量束的至少一个反向检测器。分隔器位于前检测器和至少一个反向检测器之间，并且前分辨器和/或至少一个反向检测器被分段。

6. 发明申请

US20080135786A1 ADJUSTABLE APERTURE ELEMENT FOR PARTICLE BEAM DEVICE, METHOD OF OPERATING AND MANUFACTURING THEREOF 审中-公开
标题翻译：颗粒光束装置的可调光孔元件，其工作方法及其制造方法
公开(公告)号：US20080135786A1
公开(公告)日：2008-06-12
申请号：US11923438
申请日：2007-10-24
申请人： Stefan Lanio , Reinhold Schmitt
发明人： Stefan Lanio , Reinhold Schmitt
IPC分类号： G21K1/04
CPC分类号： H01J37/09 , H01J2237/0455 , H01J2237/0458
摘要： A charged particle beam device is provided. The device includes an emitter for emitting a charged particle beam in a propagation direction essentially along an optical axis of the charged particle beam device, an aperture arrangement within the charged particle beam device. The aperture arrangement includes a first aperture element having a recess of the first aperture element, the first aperture element being movable in a first direction and with respect to the optical axis, a second aperture element having a recess of the second aperture element, the second aperture element being movable in essentially the first direction and with respect to the optical axis, a holder for holding the first aperture element and the second aperture element, a motion element adapted to move the first aperture element and the second aperture element with respect to the optical axis, and wherein the first aperture element and the second aperture element are displaced with respect to each other along the propagation direction, wherein the first aperture element and the second aperture element are movable in the first direction such that the recess of the first aperture element and the recess of the second aperture element form an aperture opening of a variable size.
摘要翻译：提供带电粒子束装置。该装置包括用于沿基本上沿着带电粒子束装置的光轴的传播方向发射带电粒子束的发射器，在带电粒子束装置内的孔布置。所述孔布置包括具有所述第一孔元件的凹部的第一孔元件，所述第一孔元件可在第一方向上相对于所述光轴移动，第二孔元件具有所述第二孔元件的凹部，所述第二孔元件孔元件可在基本上在第一方向上相对于光轴移动，用于保持第一孔眼元件和第二孔眼元件的保持器，适于相对于第一孔眼元件和第二孔元件移动第一孔眼元件和第二孔眼元件的运动元件光轴，并且其中所述第一孔眼元件和所述第二孔眼元件沿着所述传播方向相对于彼此移位，其中所述第一孔眼元件和所述第二孔眼元件可沿所述第一方向移动，使得所述第一孔径的凹部元件，并且第二孔元件的凹部形成可变尺寸的开口。

7. 发明授权

US07335894B2 High current density particle beam system 有权
标题翻译：高电流密度粒子束系统
公开(公告)号：US07335894B2
公开(公告)日：2008-02-26
申请号：US11274608
申请日：2005-11-15
申请人： Juergen Frosien , Stefan Lanio , Gerald Schoenecker , Alan D. Brodie , David A. Crewe
发明人： Juergen Frosien , Stefan Lanio , Gerald Schoenecker , Alan D. Brodie , David A. Crewe
IPC分类号： H01J37/244
CPC分类号： H01J37/05 , H01J37/244 , H01J37/28 , H01J2237/24485
摘要： The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter forming a potential is provided, whereby charged particles of the charged particles beam are redirected at the potential-saddle depending on the energy of the charged articles.
摘要翻译：本发明涉及带电粒子单元，用于对带电粒子束的带电粒子进行偏转和能量选择。由此，提供用于使带电粒子束偏转和聚焦并形成电位的能量滤波器的双重聚焦扇区单元，由此带电粒子束的带电粒子根据带电物品的能量在电位鞍上被重定向。

8. 发明授权

US06232601B1 Dynamically compensated objective lens-detection device and method 失效
标题翻译：动态补偿物镜检测装置及方法
公开(公告)号：US06232601B1
公开(公告)日：2001-05-15
申请号：US09274665
申请日：1999-03-23
申请人： Reinhold Schmitt , Jürgen Frosien , Stefan Lanio , Gerald Schonecker
发明人： Reinhold Schmitt , Jürgen Frosien , Stefan Lanio , Gerald Schonecker
IPC分类号： H01J37145
CPC分类号： H01J37/21 , H01J37/28
摘要： The invention relates to a charged particle beam device and a method for inspecting a specimen, comprising a source for generating a charged particle beam, an objective lens with an optical axis for focussing said charged particle beam on a specimen, which consists of a magnetic lens and a superimposed electrostatic lens having at least two electrodes, deflection means for deflecting said charged particle beam on said specimen and detector means for detecting charged particles released at said specimen. The invention is further characterized by control means co-acting with said deflection means and one of the electrodes of the electrostatic lens for applying a dynamic voltage to said electrode, the amount of the voltage being dependent on the distance of said charged particle beam from said optical axis at the specimen, in order to increase the efficiency of detecting said charged particles released at image areas being located on the specimen with distance from the optical axis.
摘要翻译：本发明涉及一种带电粒子束装置和一种用于检查样本的方法，包括用于产生带电粒子束的源，具有用于将所述带电粒子束聚焦在样本上的光轴的物镜，该物镜由磁性透镜以及具有至少两个电极的叠加的静电透镜，用于使所述带电粒子束偏转在所述样本上的偏转装置和用于检测在所述样本上释放的带电粒子的检测器装置。本发明的特征还在于与所述偏转装置和静电透镜的一个电极共同作用的控制装置，用于向所述电极施加动态电压，所述电压的量取决于所述带电粒子束与所述电极的距离以提高在与光轴的距离处位于样品上的图像区域处释放的带电粒子的检测效率。

9. 发明授权

US08816270B2 Octopole device and method for spot size improvement 有权
标题翻译：八极杆装置和点尺寸改进方法
公开(公告)号：US08816270B2
公开(公告)日：2014-08-26
申请号：US13663692
申请日：2012-10-30
申请人： Aleksandra Kramer , Stefan Lanio
发明人： Aleksandra Kramer , Stefan Lanio
IPC分类号： G01D18/00 , G21K1/093
CPC分类号： G21K1/093 , H01J37/153 , H01J2237/1532 , H01J2237/1534 , H01J2237/28
摘要： A method of compensating mechanical, magnetic and/or electrostatic inaccuracies in a scanning charged particle beam device is described. The method includes an alignment procedure, wherein the following steps are conducted: compensating 4-fold astigmatism with an element having at least 8-pole compensation capability, wherein the aligning and compensating steps of the alignment procedure act on a charged particle beam with beam dimensions in two orthogonal directions each of at least 50 μm and coaxially aligned with at least the element having at least the 8-pole compensation capability.
摘要翻译：描述了在扫描带电粒子束装置中补偿机械，磁性和/或静电不准确性的方法。该方法包括对准过程，其中进行以下步骤：用具有至少8极补偿能力的元件补偿4折像散，其中对准过程的对准和补偿步骤作用于具有束尺寸的带电粒子束在至少50μm的两个正交方向上，并且至少与具有至少8极补偿能力的元件同轴对准。

10. 发明申请

US20070257207A1 Charged Particle Beam Device with Aperture 有权
标题翻译：带孔径的带电粒子束装置
公开(公告)号：US20070257207A1
公开(公告)日：2007-11-08
申请号：US10576547
申请日：2004-10-19
申请人： Jurgen Frosien , Stefan Lanio , Helmut Banzhof
发明人： Jurgen Frosien , Stefan Lanio , Helmut Banzhof
IPC分类号： H01J37/09
CPC分类号： H01J37/09 , H01J2237/0455
摘要： The present invention relates to a charged particle beam device (1) for inspecting or structuring a specimen (3) comprising a charged particle beam source (5) to generate a charged particle beam (7), a focussing lens (9) to focus the charged particle beam (7) onto the specimen (3), and an aperture system (13) for defining an aperture (6) for the charged particle beam (7). The aperture system (13) includes a first member (20) to block a first portion (7a) of the charged particle beam (7) between the charged particle beam source (5) and the focussing lens (9), a second member (30) to block a second portion (7b) of the charged particle beam (7) between the charged particle beam source (5) and the focussing lens (9), first means (24) for moving the first member (20) to adjust the size of the blocked first portion (7a) of the charged particle beam (7), and second means (34) for moving the second member (30) independently from the first portion (7b). With such aperture system (13), it is possible to freely adjust the size of the aperture (6) and align it to the optical axis (8) during operation.
摘要翻译：本发明涉及一种用于检查或构造包括带电粒子束源（5）以产生带电粒子束（7）的样本（3）的带电粒子束装置（1），聚焦透镜（9）带电粒子束（7）到样品（3）上，以及孔径系统（13），用于限定带电粒子束（7）的孔（6）。孔径系统（13）包括阻挡带电粒子束源（5）和聚焦透镜（9）之间的带电粒子束（7）的第一部分（7a）的第一构件（20），第二构件（30）阻挡所述带电粒子束源（5）和所述聚焦透镜（9）之间的带电粒子束（7）的第二部分（7b），用于移动所述第一构件（20）的第一装置（24）以调节带电粒子束（7）的阻塞的第一部分（7a）的尺寸，以及用于独立于第一部分（7b）移动第二部件（30）的第二装置（34）。利用这种孔径系统（13），可以在操作期间自由地调整孔径（6）的尺寸并将其对准光轴（8）。

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