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    • 8. 发明申请
    • Methods for electrochemical processing with pre-biased cells
    • 使用预偏置电池进行电化学处理的方法
    • US20070158207A1
    • 2007-07-12
    • US11326647
    • 2006-01-06
    • Jie DiaoRenhe JiaYou WangGerald AlonzoStan TsaiLakshmanan Karuppiah
    • Jie DiaoRenhe JiaYou WangGerald AlonzoStan TsaiLakshmanan Karuppiah
    • B23H3/00
    • B23H5/08B24B53/017C25F1/00C25F3/02
    • A method for electrochemically processing a substrate is provided. In one embodiment, the method includes performing a conditioning procedure on a processing pad having a plurality of process cells, energizing the process cells by applying a voltage to the conditioned processing pad, placing a substrate having at least a conductive layer disposed thereon on the energized pad, and removing at least a portion of the conductive layer in the energized process cells. In another embodiment, a method for polishing a substrate includes placing an unused conductive pad having a plurality of process cells on a platen of a processing system, breaking in the pad on the platen, energizing the process cells by applying a voltage to the broken-in pad, placing a substrate having at least a conductive layer disposed thereon on the energized pad, and removing at least a portion of the conductive layer in the energized cells.
    • 提供了一种用于电化学处理衬底的方法。 在一个实施例中,该方法包括在具有多个处理单元的处理垫上执行调节程序,通过向经调节的处理垫施加电压来激励处理单元,将其上布置有至少一个导电层的基板放置在通电 并且在通电的处理单元中去除导电层的至少一部分。 在另一个实施例中,用于抛光衬底的方法包括将具有多个处理单元的未使用的导电焊盘放置在处理系统的压板上,在压板上的焊盘中断开, 在衬垫中,将具有至少其上设置有导电层的衬底放置在通电焊盘上,以及去除通电电池中的至少一部分导电层。