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1. 发明授权

US07621437B2 Brazed structural assembly and associated system and method for manufacture 有权
标题翻译：钎焊结构装配及相关系统及制造方法
公开(公告)号：US07621437B2
公开(公告)日：2009-11-24
申请号：US11059287
申请日：2005-02-16
申请人： David S. Nansen , Marc R. Matsen , Terry L. Smith , William R. Herb , Ronald W. Brown , Lee C. Firth
发明人： David S. Nansen , Marc R. Matsen , Terry L. Smith , William R. Herb , Ronald W. Brown , Lee C. Firth
IPC分类号： B23K1/002 , B23K1/00 , B23K3/00
CPC分类号： B64C1/06 , B64C2001/0072 , B64C2001/0081 , Y02T50/43
摘要： A structural assembly and an associated system and method for manufacture are provided. The structural assembly includes an elongate member and a first connector member that is connected to an end of the elongate member by a braze joint. A second connector member can be connected to an end of the elongate member opposite the first connector by another braze joint. The elongate member is formed of a metal matrix composite material that includes a plurality of fibers of a reinforcement material disposed in a metal matrix. Each connector member is formed of a material that is dissimilar to the material of the elongate member. The braze joints can be formed by selectively heating the braze material, e.g., with an inductive coil that extends circumferentially around only a portion of the structural assembly.
摘要翻译：提供了一种结构组件及相关系统和制造方法。结构组件包括细长构件和通过钎焊接头连接到细长构件的端部的第一连接器构件。第二连接器构件可以通过另一个钎焊接头连接到与第一连接器相对的细长构件的端部。细长构件由金属基质复合材料形成，该金属基复合材料包括多个设置在金属基体中的增强材料的纤维。每个连接器构件由与细长构件的材料不同的材料形成。可以通过选择性地加热钎焊材料来形成钎焊接头，例如用仅围绕结构组件的一部分周向延伸的感应线圈。

2. 发明授权

US06184608B2 Polymer microactuator array with macroscopic force and displacement 有权
公开(公告)号：US06184608B2
公开(公告)日：2001-02-06
申请号：US09223368
申请日：1998-12-29
申请人： Cleopatra Cabuz , Robert D. Horning , William R. Herb
发明人： Cleopatra Cabuz , Robert D. Horning , William R. Herb
IPC分类号： H02N100
CPC分类号： H02N1/006 , Y10T29/42
摘要： A microactuator array device, which includes a plurality of generally parallel thin flexible polymer sheets bonded together in a predetermined pattern to form an array of unit cells on at least one layer. Thin conductive and dielectric films are deposited on the sheets to form a plurality of electrodes associated with the array of unit cells. A source of electric potential operably connects the electrodes, whereby electrostatic forces are generated most intensely proximate the point where the gap between the sheets is smallest. Inlets and outlets for each cell permit displacement of fluid during generation of the electrostatic forces. In a preferred embodiment, the plurality of sheets forms a stack of layers of arrays of unit cells. The layers are configured such that bi-directional activation is caused by pairs of actuators working opposite each other. At least one of every pair of the sheets may be preformed into corrugations or into flaps to provide a predetermined mechanical bias between the pairs, or the sheets may form curved portions by an applied load to provide a displacement between the pairs. The sheets are preferably from about 1 &mgr;m to about 100 &mgr;m thick and the cells preferably have an individual displacement of from about 5 &mgr;m to about 200 &mgr;m.

3. 发明授权

US5901939A Buckled actuator with enhanced restoring force 失效
标题翻译：具有增强的恢复力的带扣致动器
公开(公告)号：US5901939A
公开(公告)日：1999-05-11
申请号：US948336
申请日：1997-10-09
申请人： Cleopatra Cabuz , Thomas R. Ohnstein , William R. Herb
发明人： Cleopatra Cabuz , Thomas R. Ohnstein , William R. Herb
IPC分类号： F15B11/042 , F15C5/00 , F16K31/02
CPC分类号： F15C5/00 , F15B11/0426 , Y10S251/901
摘要： An electrostatic actuator device including a stationary support and a buckled, moveable support mounted to enter into contact with the stationary support. At least three electrodes are employed. The first is mounted on the moveable support and a second electrode is on the stationary support. A third electrode is mounted on one of the supports such that the electrodes are positioned to form two pairs of electrodes for electrostatic attraction therebetween. The electrodes are powered by a voltage supply to provide electrostatic attraction between pairs of electrodes and move them into electrostatic contact. The buckled electrode has a shape configured to transmit a restoring force to its portion in contact with stationary support upon application of voltage to another pair of electrodes. The preferred voltage provides a two phase driving force including a voltage to the first pair of electrode for a period of time in a cycle of operation and a voltage to the second pair of electrodes for a period of time in the same cycle, preferably with an interim period of time with no voltage applied after each application of voltage. Various arrangements of three or more electrodes are disclosed, as is the use of the actuator in a microvalve having at least one valve opening. A three way microvalve is also shown, as are two forms of two dimensional valve arrays.
摘要翻译：一种静电致动器装置，包括固定支撑件和安装成与固定支架接触的带扣的可移动支撑件。至少使用三个电极。第一个安装在可移动支撑件上，第二个电极位于固定支架上。第三电极安装在一个支撑件上，使得电极被定位成形成两对电极，用于在它们之间静电吸引。电极由电压供电，以在电极对之间提供静电吸引并将它们移动成静电接触。带扣电极的形状被配置为当向另一对电极施加电压时将恢复力传递到与固定支架接触的部分。优选的电压在相同的周期中提供包括电压到第一对电极一段时间的相位驱动力，并且在相同的周期内将电压提供给第二对电极一段时间，优选地为每次施加电压后，不施加电压的中间时间段。公开了三个或更多个电极的各种布置，以及致动器在具有至少一个阀开口的微型阀中的使用。还示出了三路微型阀，两种形式的二维阀阵列也是如此。

4. 发明授权

US06763723B1 Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators 失效
标题翻译：基于光激振荡器频率调制的光纤振动传感器
公开(公告)号：US06763723B1
公开(公告)日：2004-07-20
申请号：US09695584
申请日：2000-10-25
申请人： J. David Zook , William R. Herb , David W. Burns
发明人： J. David Zook , William R. Herb , David W. Burns
IPC分类号： C01H900
CPC分类号： G01P15/097 , G01P2015/0828
摘要： A sensor device for detecting vibration, including a laser light, a first optical fiber for transmitting the laser light, an oscillator to receive the transmitted laser light and reflect the light as a frequency modulated light; a second optical fiber to transmit the frequency modulated light; and a frequency modulated discriminator for receiving the frequency modulated light from the second optical fiber and producing a signal responsive of vibration of the oscillator. In a preferred embodiment, the frequency modulated discriminator further includes a frequency meter for determining the average number of cycles per unit time to provide a second signal responsive of the temperature of the oscillator. The optical fibers may be a pair of different fibers positioned for transmitting the laser light and the frequency modulated light respectively, or the same fiber positioned for transmitting both the laser light and the frequency modulated light.
摘要翻译：一种用于检测振动的传感器装置，包括激光，用于传输激光的第一光纤，用于接收所发射的激光并作为调频光反射的振荡器; 用于传输调频光的第二光纤; 以及频率调制鉴别器，用于接收来自第二光纤的调频光，并产生响应振荡器振动的信号。在优选实施例中，频率调制鉴别器还包括一个频率计，用于根据振荡器的温度确定每单位时间的平均循环次数以提供第二信号。光纤可以是分别用于透射激光和频率调制光的一对不同的光纤，或者相同的光纤被定位成用于透射激光和调频光。

5. 发明授权

US06557419B1 Zero TCF thin film resonator 失效
标题翻译：零TCF薄膜谐振器
公开(公告)号：US06557419B1
公开(公告)日：2003-05-06
申请号：US08777652
申请日：1996-12-31
申请人： William R. Herb , David W. Burns , Daniel W. Youngner
发明人： William R. Herb , David W. Burns , Daniel W. Youngner
IPC分类号： G01B716
CPC分类号： B81B3/0072 , B81B2201/0271 , H03H9/02448 , H03H9/2463 , H03H9/2473
摘要： A multi-material resonant thin film beam for a micromechanical sensor having a zero temperature coefficient of frequency (TCF) which is the resonant frequency shift with temperature change. One of the materials may be polysilicon and the other material may be silicon nitride or silicon oxide. Each material has a different thermal coefficient of expansion. The proportion of the various materials is adjusted and the specific geometries are determined so that the TCF is zero. One embodiment is a microbeam composed of two polysilicon thin films with a silicon nitride thin film inserted between the polysilicon films. The thickness of the silicon nitride film may be adjusted to trim the TCF to zero. The film of nitride instead may be placed on one side of a polysilicon film to form a beam. Dual or multiple beam resonators likewise may be made with several materials. The nitride may be placed in the shank areas which join and secure the ends of the beams. Such zero TCF beams may be incorporated in microsensor structures for measuring pressure, temperature, strain and other parameters.
摘要翻译：一种用于微机械传感器的多材料谐振薄膜光束，其具有零温度频率系数（TCF），其是随着温度变化的谐振频率偏移。其中一种材料可以是多晶硅，另一种材料可以是氮化硅或氧化硅。每种材料具有不同的热膨胀系数。调整各种材料的比例，确定特定几何形状，使得TCF为零。一个实施例是由两个多晶硅薄膜组成的微束，其中氮化硅薄膜插入在多晶硅膜之间。可以调节氮化硅膜的厚度以将TCF修整为零。氮化物膜可以放置在多晶硅膜的一侧以形成光束。双或多束谐振器同样可以由几种材料制成。氮化物可以放置在连接并固定梁的端部的柄部区域中。这样的零TCF光束可以并入微传感器结构中，用于测量压力，温度，应变和其它参数。

6. 发明授权

US06246638B1 Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators 失效
标题翻译：基于光激振荡器频率调制的光纤振动传感器
公开(公告)号：US06246638B1
公开(公告)日：2001-06-12
申请号：US09281388
申请日：1999-03-30
申请人： J. David Zook , William R. Herb , David W. Burns
发明人： J. David Zook , William R. Herb , David W. Burns
IPC分类号： G02B600
CPC分类号： G01P15/097 , G01P2015/0828
摘要： A sensor device for detecting vibration, including a light source for providing a laser light, a first optical fiber connected to the source for transmitting the laser light, an oscillator positioned to receive the transmitted laser light and adapted to reflect the light as a frequency modulated light; a second optical fiber positioned to capture the frequency modulated light to transmit the frequency modulated light; and a frequency modulated discriminator for receiving the frequency modulated light from the second optical fiber and producing a signal responsive of vibration of the oscillator. In a preferred embodiment, the frequency modulated discriminator further includes a frequency meter for determining the average number of cycles per unit time to provide a second signal responsive of the temperature of the oscillator. The optical fibers may be a pair of different fibers positioned for transmitting the laser light and the frequency modulated light respectively, or the same fiber positioned for transmitting both the laser light and the frequency modulated light. In this latter embodiment, the device further includes a beam splitter to direct the frequency modulated light to the discriminator. The preferred oscillator includes a microchip having a microbeam mounted on a thin silicon cantilever such that deflection of the beam perpendicular to the plane of the microchip changes the tension in the microbeam to change its resonant frequency. Also preferred is a microbeam including a thin metal deposit to create a bimorph structure.
摘要翻译：一种用于检测振动的传感器装置，包括用于提供激光的光源，连接到用于传输激光的源的第一光纤，定位成接收所发射的激光并适于将光反射为频率调制的振荡器光; 第二光纤，定位成捕获调频光以发射调频光; 以及频率调制鉴别器，用于接收来自第二光纤的调频光，并产生响应振荡器振动的信号。在优选实施例中，频率调制鉴别器还包括一个频率计，用于根据振荡器的温度确定每单位时间的平均循环次数以提供第二信号。光纤可以是分别用于透射激光和频率调制光的一对不同的光纤，或者相同的光纤被定位成用于透射激光和调频光。在后一实施例中，该装置还包括一个分束器，用于将调频光引导到鉴别器。优选的振荡器包括具有安装在薄硅悬臂上的微束的微芯片，使得垂直于微芯片的平面的光束的偏转改变微束中的张力以改变其谐振频率。还优选的是包含薄金属沉积物以产生双压电晶片结构的微束。

7. 发明授权

US06255758B1 Polymer microactuator array with macroscopic force and displacement 失效
标题翻译：聚合物微致动器阵列具有宏观力和位移
公开(公告)号：US06255758B1
公开(公告)日：2001-07-03
申请号：US09609726
申请日：2000-07-03
申请人： Cleopatra Cabuz , Robert D. Horning , William R. Herb
发明人： Cleopatra Cabuz , Robert D. Horning , William R. Herb
IPC分类号： H02N100
CPC分类号： H02N1/006 , Y10T29/42
摘要： A microactuator array device, which includes a plurality of generally parallel thin flexible polymer sheets bonded together in a predetermined pattern to form an array of unit cells on at least one layer. Thin conductive and dielectric films are deposited on the sheets to form a plurality of electrodes associated with the array of unit cells. A source of electric potential operably connects the electrodes, whereby electrostatic forces are generated most intensely proximate the point where the gap between the sheets is smallest. Inlets and outlets for each cell permit displacement of fluid during generation of the electrostatic forces. In a preferred embodiment, the plurality of sheets forms a stack of layers of arrays of unit cells. The layers are configured such that bi-directional activation is caused by pairs of actuators working opposite each other. At least one of every pair of the sheets may be preformed into corrugations or into flaps to provide a predetermined mechanical bias between the pairs, or the sheets may form curved portions by an applied load to provide a displacement between the pairs. The sheets are preferably from about 1 &mgr;m to about 100 &mgr;m thick and the cells preferably have an individual displacement of from about 5 &mgr;m to about 200 &mgr;m.
摘要翻译：一种微致动器阵列装置，其包括以预定图案结合在一起以在至少一个层上形成单元电池阵列的多个大致平行的薄柔性聚合物片。薄片导电和介电薄膜沉积在薄片上以形成与单元阵列阵列相关联的多个电极。电位源可操作地连接电极，由此静电力最强烈地产生在板之间的间隙最小的点附近。每个细胞的入口和出口允许在产生静电力期间排出流体。在优选实施例中，多个片材形成一组单元阵列阵列。这些层被配置成使得双向激活由彼此相对工作的成对的致动器引起。每对片材中的至少一个可以被预成形为波纹或折片以在对之间提供预定的机械偏置，或者片材可以通过施加的载荷形成弯曲部分，以在对之间提供位移。片材优选为约1μm至约100μm厚，并且细胞优选具有约5μm至约200μm的单个位移。

8. 发明授权

US06179586B2 Dual diaphragm, single chamber mesopump 有权
标题翻译：双隔膜，单室介孔泵
公开(公告)号：US06179586B2
公开(公告)日：2001-01-30
申请号：US09408651
申请日：1999-09-15
申请人： William R. Herb , J. David Zook , Cleopatra Cabuz
发明人： William R. Herb , J. David Zook , Cleopatra Cabuz
IPC分类号： F04B4300
CPC分类号： F04B43/043 , A61M5/14224 , A61M5/14276
摘要： A diaphragm pump, which is preferably electrostatically actuated, but which may be activated by other forces such as electromagnetic or piezoelectric actuation. The pump is formed by a pump body having a pump chamber formed therein. First and second diaphragms each having a set of valve holes in the diaphragm surface thereof are mounted in the chamber. Also provided are at least one inlet and at least one outlet port for communication with the pump chamber. The ports are positioned for sealing contact with the diaphragms at points that are not aligned with the holes in the diaphragms. A driver electrostatically actuates the diaphragms to cause diaphragm movement to a plurality of diaphragm positions to control flow of fluid through the pump. The first position is when the diaphragms are spaced from one another and from the ports to permit flow of fluid through the pump chamber. The second position is when the diaphragms are in diaphragm surface contact with the sets of holes mutually nonaligned to form a seal between the diaphragms. The third position is when a diaphragm is in diaphragm surface contact with the ports to form the sealing contact.
摘要翻译：隔膜泵优选是静电驱动的，但是可以通过诸如电磁或压电致动的其它力来激活。泵由具有形成在其中的泵室的泵体形成。在其隔膜表面中具有一组阀孔的第一和第二隔膜安装在腔室中。还设置有至少一个入口和至少一个用于与泵室连通的出口。端口被定位成在不与隔膜中的孔对准的点处与隔膜密封接触。驱动器静电地驱动隔膜以使隔膜移动到多个隔膜位置以控制通过泵的流体的流动。第一位置是当隔膜彼此间隔开并且从端口间隔开以允许流体流过泵室时。第二个位置是当隔膜与隔膜表面接触时，这些孔彼此不对齐，以形成隔膜之间的密封。第三个位置是当隔膜与隔膜表面接触时，形成密封接触。

9. 发明授权

US5808210A Thin film resonant microbeam absolute pressure sensor 失效
标题翻译：薄膜谐振微波绝对压力传感器
公开(公告)号：US5808210A
公开(公告)日：1998-09-15
申请号：US777651
申请日：1996-12-31
申请人： William R. Herb , David W. Burns
发明人： William R. Herb , David W. Burns
IPC分类号： G01L9/00 , G01C11/00
CPC分类号： G01L9/002
摘要： A micromechnical sensor having a polysilicon beam that is an integral part of the diaphragm resulting in a frequency of the beam that is a direct result of the pressure applied to the external surface of the diaphragm. Fabrication of this resonant microbeam sensor has no backside wafer processing, and involves a process and layout independent of wafer thickness for high yield and robustness. Both the diaphragm and resonant beam are formed from polysilicon. The sensor may have more than one resonant beam. The sensor beam or beams may be driven and sensed by electrical or optical mechanisms. For stress isolation, the sensor may be situated on a cantilevered single crystal silicon paddle. The sensor may be recessed on the isolating die for non-interfering interfacing with optical or electrical devices. The sensor die may be circular for ease in mounting with fiber optic components.
摘要翻译：一种微技术传感器，其具有作为隔膜的整体部分的多晶硅束，其导致直接由施加到隔膜的外表面的压力导致的光束的频率。这种谐振微束传感器的制造没有背面晶片处理，并且涉及与晶片厚度无关的工艺和布局，用于高产率和鲁棒性。膜片和谐振光束均由多晶硅形成。传感器可以具有多于一个谐振波束。传感器光束或光束可以由电或光学机构驱动和感测。对于应力隔离，传感器可以位于悬臂单晶硅片上。传感器可以凹入隔离管芯，用于与光学或电气设备的非干扰接口。传感器芯片可以是圆形的，以便于光纤部件的安装。

10. 发明授权

US5747705A Method for making a thin film resonant microbeam absolute 失效
标题翻译：制造薄膜共振微束绝对的方法
公开(公告)号：US5747705A
公开(公告)日：1998-05-05
申请号：US778375
申请日：1996-12-31
申请人： William R. Herb , David W. Burns
发明人： William R. Herb , David W. Burns
IPC分类号： G01L9/00 , H01L29/84 , G01L1/10
CPC分类号： G01L9/0019
摘要： A micromechnical sensor having a polysilicon beam that is an integral part of the diaphragm resulting in a frequency of the beam that is a direct result of the pressure applied to the external surface of the diaphragm. Fabrication of this resonant microbeam sensor has no backside wafer processing, and involves a process and layout independent of wafer thickness for high yield and robustness. Both the diaphragm and resonant beam are formed from polysilicon. The sensor may have more than one resonant beam. The sensor beam or beams may be driven and sensed by electrical or optical mechanisms. For stress isolation, the sensor may be situated on a cantilevered single crystal silicon paddle. The sensor may be recessed on the isolating die for non-interfering interfacing with optical or electrical devices.
摘要翻译：一种微技术传感器，其具有作为隔膜的整体部分的多晶硅束，其导致直接由施加到隔膜的外表面的压力导致的光束的频率。这种谐振微束传感器的制造没有背面晶片处理，并且涉及与晶片厚度无关的工艺和布局，用于高产率和鲁棒性。膜片和谐振光束均由多晶硅形成。传感器可以具有多于一个谐振波束。传感器光束或光束可以由电或光学机构驱动和感测。对于应力隔离，传感器可以位于悬臂单晶硅片上。传感器可以凹入隔离管芯，用于与光学或电气设备的非干扰接口。

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