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    • 3. 发明申请
    • FLUID EJECTION USING MEMS COMPOSITE TRANSDUCER
    • 使用MEMS复合传感器的流体喷射
    • US20120268513A1
    • 2012-10-25
    • US13089542
    • 2011-04-19
    • James D. HuffmanChristopher N. DelametterDavid P. Trauernicht
    • James D. HuffmanChristopher N. DelametterDavid P. Trauernicht
    • B41J29/38B41J2/045
    • B41J2/14427B41J2/14201B41J2/14282B41J2/14314
    • A method of ejecting a drop of fluid includes providing a fluid ejector. The fluid ejector includes a substrate, a MEMS transducing member, a compliant membrane, walls, and a nozzle. The substrate includes a cavity and a fluidic feed. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member, A second portion of the compliant membrane being anchored to the substrate. Walls define a chamber that is fluidically connected to the fluidic feed. At least the second portion of the MEMS transducing member is enclosed within the chamber. A quantity of fluid is supplied to the chamber through the fluidic feed. An electrical pulse is applied to the MEMS transducing member to eject a drop of fluid through the nozzle.
    • 喷射液滴的方法包括提供流体喷射器。 流体喷射器包括基板,MEMS转换构件,柔性膜,壁和喷嘴。 衬底包括空腔和流体进料。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS转导构件。柔性膜的第二部分被锚固到基底上。 壁限定了流体连接到流体进料的室。 至少MEMS转换构件的第二部分被封闭在腔室内。 通过流体进料将一定量的流体供应到腔室。 电脉冲被施加到MEMS转换构件以通过喷嘴喷射一滴液体。
    • 4. 发明授权
    • Continuous ink jet printer with micro-valve deflection mechanism and method of making same
    • 具有微阀偏转机构的连续喷墨打印机及其制作方法
    • US06796641B2
    • 2004-09-28
    • US10229357
    • 2002-08-26
    • John A. LebensChristopher N. DelametterDavid P. Trauernicht
    • John A. LebensChristopher N. DelametterDavid P. Trauernicht
    • B41J2109
    • B41J2/03B41J2/09B41J2/105B41J2002/032B41J2202/16B41J2202/22
    • A continuous inkjet printer in which a continuous ink stream is deflected at the printhead nozzle bore without the need for charged deflection plates or tunnels. The printhead includes a primary ink delivery channel which delivers a primary flow of pressurized ink through an ink staging chamber to the nozzle bore to create an undeflected ink stream from the printhead. A secondary ink delivery channel adjacent to the primary channel is controlled by a thermally actuated valve to selectively create a lateral flow of pressurized ink into the primary flow thereby causing the emitted ink stream to deflect in a direction opposite to the direction from which the secondary ink stream impinges the primary ink stream in the ink staging chamber. A method of fabricating the printhead includes layering of the thermally actuated valve over the secondary ink delivery channel formed in a silicon substrate and creating the ink staging chamber over the delivery channels with sacrificial material which is later removed through the nozzle bore etched into the chamber wall formed over the sacrificial material.
    • 连续喷墨打印机,其中连续墨水流在打印头喷嘴孔处偏转,而不需要带电偏转板或隧道。 打印头包括主要的墨水输送通道,其将加压油墨的一次流通过墨水分级室输送到喷嘴孔,以产生来自打印头的未偏转的墨水流。 邻近主要通道的次要油墨输送通道由热致动阀控制,以选择性地产生加压油墨的侧向流入主流,从而使排出的油墨流沿与二次油墨的方向相反的方向偏转 液流撞击墨水分级室中的主墨水流。 制造打印头的方法包括在形成在硅衬底中的辅助墨水输送通道上层叠热致动阀,并且通过牺牲材料在输送通道上产生墨水分级室,该牺牲材料随后通过蚀刻到腔壁中的喷嘴孔去除 形成在牺牲材料上。
    • 6. 发明授权
    • Continuous ink jet printer with micro-valve deflection mechanism and method of making same
    • 具有微型阀偏转机构的连续喷墨打印机及其控制方法
    • US06695440B2
    • 2004-02-24
    • US10229207
    • 2002-08-26
    • John A. LebensChristopher N. DelametterDavid P. Trauernicht
    • John A. LebensChristopher N. DelametterDavid P. Trauernicht
    • B41J2095
    • B41J2/03B41J2/09B41J2/105B41J2002/032B41J2202/16B41J2202/22
    • A continuous inkjet printer in which a continuous ink stream is deflected at the printhead nozzle bore without the need for charged deflection plates or tunnels. The printhead includes a primary ink delivery channel which delivers a primary flow of pressurized ink through an ink staging chamber to the nozzle bore to create an undeflected ink stream from the printhead. A secondary ink delivery channel adjacent to the primary channel is controlled by a thermally actuated valve to selectively create a lateral flow of pressurized ink into the primary flow thereby causing the emitted ink stream to deflect in a direction opposite to the direction from which the secondary ink stream impinges the primary ink stream in the ink staging chamber. A method of fabricating the printhead includes layering of the thermally actuated valve over the secondary ink delivery channel formed in a silicon substrate and creating the ink staging chamber over the delivery channels with sacrificial material which is later removed through the nozzle bore etched into the chamber wall formed over the sacrificial material.
    • 连续喷墨打印机,其中连续墨水流在打印头喷嘴孔处偏转,而不需要带电偏转板或隧道。 打印头包括主要的墨水输送通道,其将加压油墨的一次流通过墨水分级室输送到喷嘴孔,以产生来自打印头的未偏转的墨水流。 邻近主要通道的次要油墨输送通道由热致动阀控制,以选择性地产生加压油墨的侧向流入主流,从而使排出的油墨流沿与二次油墨的方向相反的方向偏转 液流撞击墨水分级室中的主墨水流。 制造打印头的方法包括在形成在硅衬底中的辅助墨水输送通道上层叠热致动阀,并且通过牺牲材料在输送通道上产生墨水分级室,该牺牲材料随后通过蚀刻到腔壁中的喷嘴孔去除 形成在牺牲材料上。
    • 8. 发明授权
    • Fluid ejector having an anisotropic surface chamber etch
    • 具有各向异性表面腔蚀刻的流体喷射器
    • US07836600B2
    • 2010-11-23
    • US11685259
    • 2007-03-13
    • James M. ChwalekJohn A. LebensChristopher N. DelametterDavid P. TrauernichtGary A. Kneezel
    • James M. ChwalekJohn A. LebensChristopher N. DelametterDavid P. TrauernichtGary A. Kneezel
    • B23P17/00B21D53/76B41J2/14B41J2/16
    • B41J2/1601B41J2/14137B41J2/1628B41J2/1629B41J2/1635B41J2/1637B41J2002/1437B41J2002/14467Y10T29/49401
    • A method of forming a fluid chamber and a source of fluid impedance includes providing a substrate having a surface; depositing a first material layer on the surface of the substrate, the first material layer being differentially etchable with respect to the substrate; removing a portion of the first material layer thereby forming a patterned first material layer and defining the fluid chamber boundary location; depositing a sacrificial material layer over the patterned first layer; removing a portion of the sacrificial material layer thereby forming a patterned sacrificial material layer and further defining the fluid chamber boundary location; depositing at least one additional material layer over the patterned sacrificial material layer; forming a hole extending from the at least one additional material layer to the sacrificial material layer, the hole being positioned within the fluid chamber boundary location; removing the sacrificial material layer in the fluid chamber boundary location by introducing an etchant through the hole; forming the fluid chamber by introducing an etchant through the hole; and forming a source of fluid impedance.
    • 形成流体室和流体阻抗源的方法包括提供具有表面的基底; 在所述衬底的表面上沉积第一材料层,所述第一材料层相对于所述衬底可差分蚀刻; 去除第一材料层的一部分,从而形成图案化的第一材料层并限定流体室边界位置; 在所述图案化的第一层上沉积牺牲材料层; 去除牺牲材料层的一部分,从而形成图案化的牺牲材料层并进一步限定流体室边界位置; 在图案化的牺牲材料层上沉积至少一个附加材料层; 形成从所述至少一个附加材料层延伸到所述牺牲材料层的孔,所述孔位于所述流体室边界位置内; 通过在孔中引入蚀刻剂来除去流体室边界位置中的牺牲材料层; 通过在孔中引入蚀刻剂来形成流体室; 并形成流体阻抗源。