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    • 8. 发明授权
    • Curved slit valve door
    • 弯曲的狭缝阀门
    • US07575220B2
    • 2009-08-18
    • US10867100
    • 2004-06-14
    • Yoshiaki TanaseBilly C. LeungGregory S. LewisDavid E. Berkstresser
    • Yoshiaki TanaseBilly C. LeungGregory S. LewisDavid E. Berkstresser
    • F16K25/00
    • F16K51/02F16K1/2261F16K1/24
    • Embodiments of an apparatus for sealing a substrate transfer passage in a chamber are provided. In one embodiment, an apparatus for sealing a substrate transfer passage in a chamber includes an elongated door member having a convex sealing face and a backside. In another embodiment, a chamber having an apparatus for sealing a substrate transfer passage is provided that includes a chamber body having an interior volume, at least one substrate access defined through the chamber body configured to allow passage of a large area substrate therethrough, and a door member having a convex sealing face moveable between a first position that covers the substrate transfer port and a second position clear of the substrate transfer port. In yet another embodiment, the chamber body may be a load lock chamber.
    • 提供了用于密封腔室中的基底输送通道的装置的实施例。 在一个实施例中,用于密封腔室中的衬底传送通道的设备包括具有凸密封面和背面的细长门构件。 在另一个实施例中,提供了具有用于密封基板传送通道的设备的室,其包括具有内部容积的室主体,通过室主体限定的至少一个基板通路,其被构造成允许大面积基板通过其中, 门构件具有可在覆盖衬底传送端口的第一位置和离开衬底传送端口的第二位置之间移动的凸形密封面。 在另一个实施例中,室主体可以是装载锁定室。