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    • 9. 发明申请
    • Nitride semiconductor vertical cavity surface emitting laser
    • 氮化物半导体垂直腔表面发射激光器
    • US20070036186A1
    • 2007-02-15
    • US11203699
    • 2005-08-15
    • Scott CorzineDavid Bour
    • Scott CorzineDavid Bour
    • H01S5/00
    • H01S5/0424B82Y20/00H01S5/18341H01S5/18369H01S5/18383H01S5/20H01S5/34333H01S2304/12
    • In one aspect, a VCSEL includes a base region that has a vertical growth part laterally adjacent a first optical reflector and a lateral growth part that includes nitride semiconductor material vertically over at least a portion of the first optical reflector. An active region has at least one nitride semiconductor quantum well vertically over at least a portion of the lateral growth part of the base region and includes a first dopant of a first electrical conductivity type. A contact region includes a nitride semiconductor material laterally adjacent the active region and a second dopant of a second electrical conductivity type opposite the first electrical conductivity type. A second optical reflector is vertically over the active region and forms with the first optical reflector a vertical optical cavity overlapping at least a portion of the at least one quantum well of the active region. A method of fabricating a VCSEL also is described.
    • 在一个方面,VCSEL包括具有垂直生长部分的横向邻近于第一光学反射器的基底区域和在第一光学反射体的至少一部分上方垂直包括氮化物半导体材料的横向生长部分。 有源区域在基极区域的横向生长部分的至少一部分上垂直地具有至少一个氮化物半导体量子阱,并且包括第一导电类型的第一掺杂物。 接触区域包括横向邻近有源区的氮化物半导体材料和与第一导电类型相反的第二导电类型的第二掺杂剂。 第二光学反射器垂直于有源区域并且与第一光学反射器形成垂直的光学腔,其与有源区的至少一个量子阱的至少一部分重叠。 还描述了制造VCSEL的方法。