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    • 9. 发明授权
    • Method and structure for processing thin film PV cells with improved temperature uniformity
    • 用于处理具有改善的温度均匀性的薄膜PV电池的方法和结构
    • US08398772B1
    • 2013-03-19
    • US12858342
    • 2010-08-17
    • Ashish TandonRobert D. WietingJurg SchmizbergerPaul Alexander
    • Ashish TandonRobert D. WietingJurg SchmizbergerPaul Alexander
    • C23C16/00C23C16/455C23C16/458
    • C23C14/18C23C14/586C23C14/5866
    • An apparatus for reactive thermal treatment of thin film photovoltaic devices includes a furnace tube including an inner wall extended from a first end to a second end. The apparatus further includes a gas supply device coupled to the second end and configured to fill one or more working gases into the furnace tube. Additionally, the apparatus includes a cover configured to seal the furnace tube at the first end and serve as a heat sink for the one or more working gases. Furthermore, the apparatus includes a fixture mechanically attached to the cover. The fixture is configured to load an array of substrates into the furnace tube as the cover seals the furnace tube. Moreover, the apparatus includes a crescent shaped baffle member disposed seamlessly at a lower portion of the inner wall for blocking a convection current of the one or more working gases cooled by the cover.
    • 一种用于薄膜光伏器件的反应热处理的设备包括:炉管,其包括从第一端延伸到第二端的内壁。 该装置还包括联接到第二端并被配置成将一种或多种工作气体填充到炉管中的气体供应装置。 另外,该装置包括盖子,其构造成在第一端处密封炉管,并且用作一个或多个工作气体的散热器。 此外,该装置包括机械地附接到盖的夹具。 夹具被配置为当盖子密封炉管时将基板阵列加载到炉管中。 此外,该装置包括一个新月形的挡板件,它可无缝地设置在内壁的下部,用于阻挡由盖冷却的一个或多个工作气体的对流。