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    • 6. 发明授权
    • Method of fabricating planar regions in an integrated circuit
    • 在集成电路中制造平面区域的方法
    • US5742095A
    • 1998-04-21
    • US752749
    • 1996-11-20
    • Frank Randolph BryantRobert Louis Hodges
    • Frank Randolph BryantRobert Louis Hodges
    • H01L21/76H01L21/28H01L21/314H01L21/32H01L21/762H01L21/768H01L23/522H01L29/51H01L29/78H01L23/58
    • H01L21/28176H01L21/28202H01L21/3145H01L21/32H01L21/76216H01L29/513H01L29/518
    • A method is provided for forming a planar surface of a semiconductor integrated circuit, and an integrated circuit formed according to the same. A gate oxide layer is formed over a silicon substrate. A first polysilicon layer is formed over the gate oxide layer and a nitride layer is formed over the first polysilicon layer. The first polysilicon and nitride layers are then patterned and etched to form an opening which exposes a portion of the gate oxide layer. An oxidation step is then performed to form a field oxide region in the opening. The field oxide region is formed to a thickness having an upper surface substantially planar with an upper surface of the first polysilicon layer. The nitride layer is then removed and the gate oxide and first polysilicon layers are patterned and etched to form a gate electrode and an interconnect. A silicide or other conductive layer, such as a second polysilicon layer, may be formed over the remaining first polysilicon regions and a portion of the field oxide layer to connect the gate and interconnect since the upper surface of the first polysilicon layer is substantially planar with the upper surface of the field oxide region and does not cross over the field oxide region.
    • 提供一种用于形成半导体集成电路的平面的方法和根据该集成电路形成的集成电路。 在硅衬底上形成栅氧化层。 在栅极氧化物层上形成第一多晶硅层,在第一多晶硅层上形成氮化物层。 然后对第一多晶硅和氮化物层进行构图和蚀刻,以形成露出栅极氧化物层的一部分的开口。 然后进行氧化步骤以在开口中形成场氧化物区域。 场氧化物区域形成为具有与第一多晶硅层的上表面大致平坦的上表面的厚度。 然后去除氮化物层,并对栅极氧化物和第一多晶硅层进行图案化和蚀刻以形成栅电极和互连。 可以在剩余的第一多晶硅区域和场氧化物层的一部分上形成硅化物或其它导电层,例如第二多晶硅层,以连接栅极和互连,因为第一多晶硅层的上表面基本上是平面的, 场氧化物区域的上表面并且不与场氧化物区域交叉。
    • 8. 再颁专利
    • Structure for transistor devices in an SRAM cell
    • SRAM单元中晶体管器件的结构
    • USRE40579E1
    • 2008-11-25
    • US09694051
    • 2000-10-20
    • Frank Randolph BryantTsiu Chiu Chan
    • Frank Randolph BryantTsiu Chiu Chan
    • H01L29/76H01L29/94H01L31/00
    • An SRAM memory cell having first and second transfer gate transistors. The first transfer gate transistor includes a first source/drain connected to a bit line and the second transfer gate transistor has a first source/drain connected to a complement bit line. Each transfer gate transistor has a gate connected to a word line. The SRAM memory cell also includes first and second pull-down transistors configured as a storage latch. The first pull-down transistor has a first source/drain connected to a second source/drain of said first transfer gate transistor; the second pull-down transistor has a first source/drain connected to a second source/drain of said second transfer gate transistor. Both first and second pull-down transistors have a second source/drain connected to a power supply voltage node. The first and second transfer gate transistors each include a gate oxide layer having a first thickness, and the first and second pull-down transistors each include a gate oxide layer having a second thickness, wherein and the first thickness is different from the second thickness.
    • 一种具有第一和第二传输门晶体管的SRAM存储单元。 第一传输门晶体管包括连接到位线的第一源极/漏极,第二传输门晶体管具有连接到补码位线的第一源极/漏极。 每个传输门晶体管具有连接到字线的栅极。 SRAM存储单元还包括被配置为存储锁存器的第一和第二下拉晶体管。 第一下拉晶体管具有连接到所述第一传输栅极晶体管的第二源极/漏极的第一源极/漏极; 所述第二下拉晶体管具有连接到所述第二传输栅极晶体管的第二源极/漏极的第一源极/漏极。 第一和第二下拉晶体管都具有连接到电源电压节点的第二源极/漏极。 第一和第二传输门晶体管各自包括具有第一厚度的栅极氧化物层,并且第一和第二下拉晶体管各自包括具有第二厚度的栅极氧化物层,其中第一厚度不同于第二厚度。
    • 10. 发明授权
    • Integrated circuit transistor having drain junction offset
    • 具有漏极结偏移的集成电路晶体管
    • US5729036A
    • 1998-03-17
    • US523366
    • 1995-09-05
    • Frank Randolph BryantRobert Louis Hodges
    • Frank Randolph BryantRobert Louis Hodges
    • H01L21/336H01L29/786H01L29/76
    • H01L29/66757H01L29/78624
    • A method for fabricating an integrated circuit transistor begins with forming a gate electrode over an insulating layer grown on a conductive layer. Sidewall spacers are formed alongside vertical edges of the gate electrode and a mask is applied to a drain region. A relatively fast-diffusing dopant is then implanted into a source region in the conductive layer. Thereafter, the mask is removed and the drain region is implanted with a relatively slow-diffusing dopant. Finally, the conductive layer is annealed, causing the relatively fast-diffusing dopant to diffuse beneath the source sidewall spacer to a location approximately beneath the vertical edge of the source side of the gate electrode, and causing the relatively slow-diffusing dopant to extend beneath the drain sidewall spacer a lesser distance, so that the drain junction is laterally spaced from underneath the gate electrode. Due to the difference in diffusion rates between the relatively slow-diffusing dopant and the relatively fast-diffusing dopant, a transistor having a drain junction offset is formed.
    • 制造集成电路晶体管的方法开始于在导电层上生长的绝缘层上形成栅电极。 侧壁间隔物沿着栅电极的垂直边缘形成,并且掩模施加到漏极区域。 然后将相对快速扩散的掺杂​​剂注入到导电层中的源极区域中。 此后,去除掩模,并用较慢扩散的掺杂​​剂注入漏区。 最后,导电层被退火,导致相对快速扩散的掺杂​​剂在源侧壁间隔物下方扩散到栅电极的源极侧的垂直边缘附近的位置,并使相对较慢的扩散掺杂剂在下面延伸 漏极侧壁间隔较小的距离,使得漏极结与栅极下方横向间隔开。 由于相对较慢扩散的掺杂​​剂和相对快速扩散的掺杂​​剂之间的扩散速率的差异,形成具有漏极结偏移的晶体管。