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    • 3. 发明申请
    • Combination patterning for magnetic head deposited shield and magnetic head made thereby
    • 由此形成磁头沉积屏蔽和磁头的组合图案
    • US20060171082A1
    • 2006-08-03
    • US11047956
    • 2005-01-31
    • April Hixson-Goldsmith
    • April Hixson-Goldsmith
    • G11B5/33G11B5/127
    • G11B5/3967G11B5/3163G11B5/3912Y10S29/016Y10T29/49032Y10T29/49041
    • A method for fabricating a non-electroplated shield using combination patterning and devices formed thereby are disclosed. The method includes depositing a metal layer, such as CZT, removing substantially 75% of the metal layer during a first phase using at least a first removal process and removing a remaining portion of the metal layer during a second phase using at least a second removal process. The first removal process may include depositing a first patterning layer, removing substantially 75% of the metal layer by ion-mill or similar technology and stripping the first patterning layer away. The second removal process may include depositing a second patterning layer and removing the remaining portion of the metal layer using a wet-etch or other etch process and removing the second patterning layer. The deposited metal layer may have a thickness up to several μm and the edges of the shield exhibit a unique step pattern that is visible in a cross-section view of the shield.
    • 公开了一种使用组合图案化制造非电镀屏蔽的方法以及由此形成的器件。 该方法包括沉积诸如CZT的金属层,在第一阶段期间使用至少第一去除工艺去除基本上75%的金属层,并且在第二阶段期间使用至少第二次去除来除去金属层的剩余部分 处理。 第一去除方法可以包括沉积第一图案化层,通过离子磨或类似技术去除大体上75%的金属层,并剥离第一图案化层。 第二去除过程可以包括沉积第二图案化层并使用湿蚀刻或其它蚀刻工艺去除金属层的剩余部分并去除第二图案形成层。 沉积的金属层可以具有多达几个母体的厚度,并且屏蔽件的边缘呈现在屏蔽件的横截面视图中可见的唯一的台阶图案。