专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06520727B1 Modular sorter 失效
标题翻译：模块化分拣机
公开(公告)号：US06520727B1
公开(公告)日：2003-02-18
申请号：US09547829
申请日：2000-04-12
申请人： Daniel Babbs , Timothy Ewald , Matthew Coady , William J. Fosnight
发明人： Daniel Babbs , Timothy Ewald , Matthew Coady , William J. Fosnight
IPC分类号： B65G4907
CPC分类号： H01L21/67271 , H01L21/67775 , H01L21/67778 , Y10S414/139
摘要： A modular sorter is disclosed in which modular sections maybe easily added and removed to add and remove load port assemblies as required by a particular wafer fabrication run. In one embodiment, a modular sorter according to the present invention include a two-wide modular section defining a minienvironment for the sorter, a wafer handling robot a pair of aligners and a centralized controller. The modular section of this embodiment includes a pair of side-by-side load port assemblies for receiving a container or open cassette and presenting the cassette to the minienvironment of the sorter for processing of the wafers therein. The present invention further includes a removable end panel. When it is desired to add additional modular sections to the sorter, the end panel is removed and replaced by a connector frame. The connector frame allows additional modular sections, including either one load port assembly or two load port assemblies, to be attached to the original modular section. All of the power and control components for the modular sections are preferably located in the centralized controller. Upon attachment of the additional modular section, the power and signal connections for the additional section are plugged into the controller. The controller then recognizes the additional section and changes the overall operation scheme to now operate as a three-wide sorter or a four-wide sorter.
摘要翻译：公开了一种模块化分选机，其中可以容易地添加和移除模块化部分，以根据特定的晶片制造运行的要求添加和移除负载端口组件。在一个实施例中，根据本发明的模块化分拣机包括限定分拣机的微型环境的双宽模块部分，晶片处理机器人，一对对准器和集中式控制器。该实施例的模块化部分包括一对并排负载端口组件，用于接收容器或打开的盒，并将盒呈现到分类器的最小环境中，用于处理其中的晶片。本发明还包括可移除端板。当需要向分拣机添加额外的模块化部分时，端面板被移除并由连接器框架代替。连接器框架允许附加模块化部分，包括一个装载端口组件或两个装载端口组件，以连接到原始模块化部分。模块化部件的所有功率和控制部件优选地位于集中式控制器中。在附加模块化部分的附件中，附加部分的电源和信号连接插入控制器。然后，控制器识别附加部分，并将整体操作方案改变为现在作为三宽分选机或四宽分选机运行。

2. 发明授权

US06326755B1 System for parallel processing of workpieces 有权
标题翻译：工件并行加工系统
公开(公告)号：US06326755B1
公开(公告)日：2001-12-04
申请号：US09547551
申请日：2000-04-12
申请人： Daniel Babbs , Timothy Ewald , Matthew Coady , Jae Kim
发明人： Daniel Babbs , Timothy Ewald , Matthew Coady , Jae Kim
IPC分类号： B25J922
CPC分类号： B25J18/04 , B25J9/042 , H01L21/67766
摘要： A dual paddle end effector robot is disclosed which is capable of parallel processing of workpieces. The end effector includes a lower paddle rotatably coupled to an end of the distal link, and an upper paddle rotatably coupled to the lower paddle. The lower paddle supports a drive assembly capable of rotating the upper paddle with respect to the lower paddle. In one embodiment of the present invention, the dual paddle end effector robot may be used within a wafer sorter to perform parallel processing of workpieces on a pair of aligners within the sorter. In such an embodiment, the robot may first acquire a pair of workpieces from adjacent shelves within the workpiece cassette. After withdrawing from the cassette, the respective paddles on the end effector may fan out and transfer the wafers to the chucks of the respective aligners. After processing of the workpieces on the aligners is complete, the fanned end effector paddles may re acquire the workpieces, the upper paddle may return to its home position located directly over the lower paddle, and then return the processed workpieces to their original cassette or to a new cassette. Parallel processing of workpieces in this fashion provides significantly greater throughput than in conventional wafer sorter systems. Throughput may be improved still further by providing buffering locations for the workpieces at the respective aligners.
摘要翻译：公开了一种能够并行处理工件的双桨式末端执行器机器人。末端执行器包括可旋转地联接到远侧连杆的端部的下桨，以及可旋转地联接到下桨的上桨。下桨支撑能够使上桨相对于下桨旋转的驱动组件。在本发明的一个实施例中，双桨式末端执行器机器人可以在晶片分拣机内使用，以在分拣机内的一对对准器上执行工件的并行处理。在这样的实施例中，机器人可以首先从工件盒内的相邻货架获取一对工件。在从盒子退出之后，端部执行器上的各个叶片可以扇出并将晶片传送到各个对准器的卡盘。在对准器上的工件处理完成之后，扇形末端执行器桨叶可以重新获取工件，上部桨叶可以返回到位于下部桨叶正下方的原始位置，然后将经处理的工件返回到其原始盒子或一个新的盒子。以这种方式并行处理工件比传统的晶片分选机系统提供显着更大的生产量。通过在相应的对准器处为工件提供缓冲位置，可以进一步改善生产量。

3. 发明授权

US09020617B2 Scalable motion control system 有权
标题翻译：可扩展运动控制系统
公开(公告)号：US09020617B2
公开(公告)日：2015-04-28
申请号：US13011970
申请日：2011-01-24
申请人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
发明人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
IPC分类号： G05B15/00 , G05B13/02 , G05B19/18 , G05B19/418 , G05B19/414
CPC分类号： G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要： A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
摘要翻译：控制系统包括具有主控制器的集群架构，包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分，以及包括由主控制器控制的集群控制器的分布式控制部分。集群控制器控制一个或多个第二个遥控器的活动。第一和第二遥控器中的每一个被用于驱动一个或多个轴。

4. 发明申请

US20110118855A1 SCALABLE MOTION CONTROL SYSTEM 有权
标题翻译：可调节运动控制系统
公开(公告)号：US20110118855A1
公开(公告)日：2011-05-19
申请号：US13011970
申请日：2011-01-24
申请人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
发明人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
IPC分类号： G05B13/04
CPC分类号： G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要： A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
摘要翻译：控制系统包括具有主控制器的集群架构，包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分，以及包括由主控制器控制的集群控制器的分布式控制部分。集群控制器控制一个或多个第二个遥控器的活动。第一和第二遥控器中的每一个被用于驱动一个或多个轴。

5. 发明申请

US20070009345A1 Load port module 有权
标题翻译：加载端口模块
公开(公告)号：US20070009345A1
公开(公告)日：2007-01-11
申请号：US11178836
申请日：2005-07-11
申请人： Daniel Hall , Glenn Sindledecker , Matthew Coady , Marcello Trolio , Michael Spinazola
发明人： Daniel Hall , Glenn Sindledecker , Matthew Coady , Marcello Trolio , Michael Spinazola
IPC分类号： B65H1/00 , C23F1/00 , H01L21/306 , C23C16/00
CPC分类号： H01L21/67775 , B65G47/34 , H01L21/67265 , H01L21/67379 , H01L21/67772 , H01L2924/0002 , H01L2924/00
摘要： A substrate loading device having a frame, a cassette support, and a user interface. The frame is connected to a substrate processing apparatus. The frame has a transport opening through which substrates are transported between the device and processing apparatus. The cassette support is connected to the frame for holding at least one substrate holding cassette. The user interface is arranged for inputting information, and is mounted to the frame so that the user interface is integral with the frame.
摘要翻译：具有框架，盒支架和用户界面的基板装载装置。框架连接到基板处理装置。框架具有输送开口，基板通过该输送开口在装置和处理装置之间传送。盒支撑件连接到框架，用于保持至少一个基板保持盒。用户界面被布置用于输入信息，并且被安装到框架，使得用户界面与框架一体。

6. 发明申请

US20070010898A1 Scalable motion control system 有权
标题翻译：可扩展运动控制系统
公开(公告)号：US20070010898A1
公开(公告)日：2007-01-11
申请号：US11178615
申请日：2005-07-11
申请人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
发明人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
IPC分类号： G05B19/18
CPC分类号： G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要： A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
摘要翻译：控制系统包括具有主控制器的集群架构，包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分，以及包括由主控制器控制的集群控制器的分布式控制部分。集群控制器控制一个或多个第二个遥控器的活动。第一和第二遥控器中的每一个被用于驱动一个或多个轴。

7. 发明授权

US07904182B2 Scalable motion control system 有权
标题翻译：可扩展运动控制系统
公开(公告)号：US07904182B2
公开(公告)日：2011-03-08
申请号：US11178615
申请日：2005-07-11
申请人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
发明人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
IPC分类号： G05B15/00 , G05B19/418 , G05B19/18 , G06F19/00 , G06K9/00 , B05C11/00
CPC分类号： G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要： A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
摘要翻译：控制系统包括具有主控制器的集群架构，包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分，以及包括由主控制器控制的集群控制器的分布式控制部分。集群控制器控制一个或多个第二个遥控器的活动。第一和第二遥控器中的每一个被用于驱动一个或多个轴。

8. 发明申请

US20050265814A1 Substrate handling system for aligning and orienting substrates during a transfer operation 有权
标题翻译：基板处理系统，用于在转移操作期间对准和定向基板
公开(公告)号：US20050265814A1
公开(公告)日：2005-12-01
申请号：US11045545
申请日：2005-01-28
申请人： Matthew Coady
发明人： Matthew Coady
IPC分类号： B66C23/00 , H01L21/68 , H01L21/687
CPC分类号： H01L21/68 , H01L21/68707
摘要： A system is provided for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is increased. The system includes a robotic arm for moving a wafer from one station to a destination station, and an end-effector connected to an end of the robotic arm for receiving the wafer. The end-effector includes a mechanism for gripping the wafer, a direct drive motor for rotating the wafer gripping mechanism, and at least one sensor for sensing the location and orientation of the wafer. A control processor is provided for calculating the location of the center and the notch of the wafer based on measurements by the sensor(s). Then, the control processor generates an alignment signal for rotating the wafer gripping mechanism so that the wafer is oriented at a predetermined position on the end-effector while the robotic arm is moving to another station.
摘要翻译：提供了一种用于在自动晶片处理过程中感测，定向和传输晶片的系统，其减少了颗粒和污染物的产生，从而提高了晶片产量。该系统包括用于将晶片从一个站移动到目的地站的机器人臂，以及连接到机器人臂的端部用于接收晶片的端部执行器。末端执行器包括用于夹持晶片的机构，用于旋转晶片夹持机构的直接驱动马达以及用于感测晶片的位置和取向的至少一个传感器。提供了一种控制处理器，用于基于传感器的测量来计算晶片的中心和凹口的位置。然后，控制处理器产生用于旋转晶片夹持机构的对准信号，使得当机器人臂移动到另一个站时，晶片定向在末端执行器上的预定位置。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式