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    • 4. 发明授权
    • Method for forming CU-thin film
    • 形成CU薄膜的方法
    • US06194316B1
    • 2001-02-27
    • US09368901
    • 1999-08-06
    • Masaaki OdaNobuya ImazekiHiroyuki YamakawaHirohiko Murakami
    • Masaaki OdaNobuya ImazekiHiroyuki YamakawaHirohiko Murakami
    • H01L2144
    • H01L21/76877H01L21/288
    • A method for forming a Cu-thin film includes the steps of coating a dispersion containing Cu-containing ultrafine particles individually dispersed therein on a semiconductor substrate having recessed portions, such as wiring grooves, via holes or contact holes, which have an aspect ratio ranging from 1 to 30; firing the coated semiconductor substrate in an atmosphere which can decompose organic substances present in the dispersion, but never oxidizes Cu to form a Cu-thin film on the substrate; then removing the Cu-thin film on the substrate except for that present in the recessed portions to thus level the surface of the substrate and to form the Cu-thin film in the recessed portions. The method permits the complete embedding or filling of the recessed portions of LSI substrates having a high aspect ratio with a Cu-thin film and thus permits the formation of a conductive, uniform and fine pattern, and further requires a low processing cost.
    • 形成Cu-薄膜的方法包括以下步骤:将具有单独分散在其中的含有Cu的超细颗粒的分散体涂覆在具有纵向比例范围的诸如布线槽,通孔或接触孔的凹部的半导体基板上 从1到30; 在可分解存在于分散体中的有机物质的气氛中焙烧涂覆的半导体衬底,但不会氧化Cu以在衬底上形成Cu-薄膜; 然后除去凹陷部分中存在的基板上的Cu薄膜,从而使基板的表面平坦化,并在凹部中形成Cu-薄膜。 该方法允许用Cu薄膜完全嵌入或填充具有高纵横比的LSI基板的凹陷部分,从而允许形成导电,均匀和精细的图案,并且还需要较低的处理成本。
    • 8. 发明授权
    • Communication navigation system
    • 通讯导航系统
    • US06542816B1
    • 2003-04-01
    • US09714868
    • 2000-11-17
    • Yasuo ItoNaoki GoraiTakashi SugawaraSatoshi KitanoHiroyuki Yamakawa
    • Yasuo ItoNaoki GoraiTakashi SugawaraSatoshi KitanoHiroyuki Yamakawa
    • G08G1123
    • G01C21/32G01C21/3492G01C21/3629
    • A communication navigation system, wherein a navigation apparatus requests a recommended route guidance data to a information center and guides a user of the navigation apparatus to a destination by using the recommended route guidance data received from the information center. In this present invention, the navigation apparatus transmits version data of road data held in the navigation apparatus at the request to the information center. The information center prepares a guidance data of recommended route using latest road data held in the information center, and transmits the data to the navigation apparatus. When the information center transmits the guidance data, the information center selects the type of data of the road links along the recommended route, in the guidance data, by comparing the version data received from the navigation apparatus and the version data of each road link along the recommended route. If each data of road links along the recommended route is considered to be contained in the road data held in the navigation apparatus, the information center transmits the only data which enable to specify the road link from the road data held in the navigation apparatus. On the hand, if each data of road links is considered not to be contained in the road data held in the navigation apparatus, the information center transmits whole data of the road link. Therefore, the navigation apparatus can generate the route guidance data by extracting road link data, from its own road data, corresponding to the road link specified by transmitted data and by reconstructing road link data using transmitted data.
    • 一种通信导航系统,其中导航装置向信息中心请求推荐的路线引导数据,并通过使用从信息中心接收到的推荐路线引导数据将导航装置的用户引导到目的地。在本发明中,导航 装置根据请求向信息中心发送保存在导航装置中的道路数据的版本数据。 信息中心使用信息中心中保存的最新道路数据准备推荐路线的指导数据,并将数据发送到导航装置。 当信息中心发送指导数据时,信息中心通过比较从导航装置接收的版本数据和每个道路链路的版本数据沿着推荐路线选择引导数据中的道路链路的数据类型 推荐路线。 如果沿着推荐路线的道路连接的每个数据被认为包含在导航装置中保存的道路数据中,则信息中心从保存在导航装置中的道路数据中发送能够指定道路链接的唯一数据。 另外,如果道路连接的数据被认为不包含在导航装置所保持的道路数据中,则信息中心发送道路链路的全部数据。 因此,导航装置可以通过从其自己的道路数据中提取对应于由发送数据指定的道路链路的道路数据,并且使用发送的数据重建道路链路数据,来生成路线引导数据。