会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 6. 发明申请
    • PIEZO ELEMENT FOR SENSOR POWER SUPPLY
    • 压电元件传感器电源
    • WO2008017537A3
    • 2008-05-08
    • PCT/EP2007055868
    • 2007-06-14
    • BOSCH GMBH ROBERTREICHENBACH RALFBUCK THOMAS
    • REICHENBACH RALFBUCK THOMAS
    • B60C23/04
    • B60C23/0411G01L9/0022H02N2/18
    • The invention relates to a circuit module, particularly a tire sensor module, at least comprising: a substrate (2a, 2b), on, or in which at least one component (6, 11, 12, 13) is attached, a piezo element (3), having at least one clamping region (3a, 3b) and at least one oscillating region (3b, 3a), wherein the piezo element (3) is clamped in its clamping region (3a, 3b) at the substrate, or at means attached to the substrate, and its oscillating region (3b, 3a) is received in an oscillating manner, contact points (10) provided at the piezo element (3) for reducing a piezo voltage, and a power supply circuit (12, 13), which receives the piezo voltage generated by the piezo element (3), and which serves as a voltage source for the power supply of the circuit module (1). Preferably, the piezo element (3) is clamped between two substrate elements (2a, 2b), which form at least one cavity (5), in which the at least one oscillating region (3b, 3a) of the piezo element (3) is displaceably received, and is limited in its oscillation.
    • 本发明涉及一种电路模块,特别是Reifensensor-模块,至少包括:一个基底(2A,2B)安装其上或其中的至少一个部件(6,11,12,13),压电元件(3) 包括至少一个夹紧区域(3A,3B)和至少一个振荡区域(图3b,图3a),其特征在于,压电元件(3)在它的夹持区域(3A,3B)被夹持到所述基片或附着到衬底的装置,和 是振荡区域(图3b,3a)的摆动加入,所提供的压电元件(3)触点(10),用于接受压电电压的上,并且压电元件的电源电路(12,13)(3) 接收所产生的压电电压,并作为在电路模块(1)的电力供应的电压源。 优选地,压电元件(3)的至少两个基板构件之间(2A,2B)被夹紧,形成所述至少一个腔体(5),其中所述至少一个振荡区域中的压电元件的(图3b,图3a)(3)可被偏转 加入,并在其位移的限制。
    • 7. 发明申请
    • MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING THE SAME
    • 微机械结构与方法研究
    • WO2009132891A2
    • 2009-11-05
    • PCT/EP2009052970
    • 2009-03-13
    • BOSCH GMBH ROBERTBUCK THOMASSTUMBER MICHAEL
    • BUCK THOMASSTUMBER MICHAEL
    • B81C1/00
    • B81C1/00158B81B2201/016B81B2201/0264B81C1/00666H01H59/0009
    • The invention relates to a method for producing micromechanical components, wherein a substrate (1) having at least one metal layer (3, 6, 7, 7') and a sacrificial layer (5, 5') comprising SiGe are structured and the sacrificial layer (5, 5') is at least partially removed by etching with a fluorine-containing compound such as ClF3, the substrate (1) which carries the sacrificial layer (5, 5') and the metal layer (3, 6, 7, 7') being tempered at a temperature of = 100 °C to = 400 °C prior to the sacrificial layer (5, 5') being etched. The material of the metal layer (3, 6, 7, 7') can comprise aluminum. The invention further relates to a micromechanical component which comprises a metal layer (3, 6, 7, 7'), the material of the metal layer having a polycrystalline structure and = 90% of the crystallites having a size of = 1 µm to = 100 µm. The invention also relates to the use of said micromechanical components as pressure sensors, high-frequency switches or as varactor.
    • 一种用于制备微机械部件,方法,其中在衬底(1),具有至少一个金属层(3,6,7,7“)和硅锗全面牺牲层(5,5”)被构造并且进一步其中(牺牲层5,5 ),基板(1),其中所述牺牲层(5,5“)和所述金属层(3,6“)是通过用含氟化合物如ClF 3的至少部分之前再次蚀刻所述牺牲层(5,5蚀刻,其特征在于,除去” ,7,7“)携带,在= 100°C = 400℃的温度下进行退火。 金属层(3,6,7,7“)的材料可以包括铝。 本发明还涉及一种微机械部件,其包括金属层(3,6,7,7“),其中,所述金属层中存在的多晶微观结构和材料,其中,= 90%的微晶的尺寸= 1微米到= 100微米 和使用这种微机械的作为压力传感器,高频开关或变容二极管。