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    • 8. 发明专利
    • Support bar for substrate cassettes
    • 支撑棒用于基材CASSETTES
    • JP2005340480A
    • 2005-12-08
    • JP2004156755
    • 2004-05-26
    • E I Du Pont De Nemours & CoNippon Oil Corpイー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニーE.I.Du Pont De Nemours And Company新日本石油株式会社
    • UCHIDA DAISUKETAKEMURA SHINICHIAOYANAGI KENICHICHEN YI-KUANGTAKAHASHI TOSHIYUKI
    • B65D85/48B65D85/86H01L21/673H01L21/68
    • H01L21/67343B65D85/48
    • PROBLEM TO BE SOLVED: To improve operability by suppressing the weight increase of a substrate cassette whose dimensions are increased, so as to reduce the vibration of substrates when carrying the substrates in/out. SOLUTION: The substrate cassette 1 comprises end supports 2 for supporting the ends of the substrates 4 to be housed on both of the side surfaces of a substrate carry-in port A; and support bars 3 which are fixed on the side of the opposing surface of the substrate carry-in port, which have free ends on the side of the carry-in port, which are arranged in a line or a plurality of lines in a vertical direction, and which support a part between the support parts 2 of the housed substrates 4. Thus, the substrate cassette 1 houses the plurality of sheets of substrates 4 in a horizontal posture, in a vertical direction and by multiple steps. The support bars 3 are formed of carbon fiber reinforced composite material containing high-elasticity carbon fiber of 490 to 950 GPa modulus of elongation by ≥30% by its volume ratio. The support bars 3 are desirably formed in the state of a hollow pipe, and are more desirably tapered so as to thin the side of their tips. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了通过抑制尺寸增大的基板盒的重量增加来提高可操作性,从而当携带基板进/出时减小基板的振动。 解决方案:基板盒1包括用于支撑基板4的端部以容纳在基板输入端口A的两个侧表面上的端部支撑件2; 以及支撑杆3,其固定在基板输入口的相对表面的侧面上,该输送端口在输入端口侧具有自由端,它们以垂直方式排列成一行或多条线 方向,并且其支撑在容纳基板4的支撑部分2之间的一部分。因此,基板盒1以垂直方向和多个台阶的水平姿势容纳多张基板4。 支撑杆3由含有490〜950GPa伸长率的高弹性碳纤维的碳纤维增强复合材料以体积比计≥30%的方式形成。 支撑杆3期望地形成为中空管的状态,并且更理想地是锥形以便使其尖端的一侧变薄。 版权所有(C)2006,JPO&NCIPI