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    • 1. 发明专利
    • Support bar for substrate cassettes
    • 支撑棒用于基材CASSETTES
    • JP2005340480A
    • 2005-12-08
    • JP2004156755
    • 2004-05-26
    • E I Du Pont De Nemours & CoNippon Oil Corpイー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニーE.I.Du Pont De Nemours And Company新日本石油株式会社
    • UCHIDA DAISUKETAKEMURA SHINICHIAOYANAGI KENICHICHEN YI-KUANGTAKAHASHI TOSHIYUKI
    • B65D85/48B65D85/86H01L21/673H01L21/68
    • H01L21/67343B65D85/48
    • PROBLEM TO BE SOLVED: To improve operability by suppressing the weight increase of a substrate cassette whose dimensions are increased, so as to reduce the vibration of substrates when carrying the substrates in/out. SOLUTION: The substrate cassette 1 comprises end supports 2 for supporting the ends of the substrates 4 to be housed on both of the side surfaces of a substrate carry-in port A; and support bars 3 which are fixed on the side of the opposing surface of the substrate carry-in port, which have free ends on the side of the carry-in port, which are arranged in a line or a plurality of lines in a vertical direction, and which support a part between the support parts 2 of the housed substrates 4. Thus, the substrate cassette 1 houses the plurality of sheets of substrates 4 in a horizontal posture, in a vertical direction and by multiple steps. The support bars 3 are formed of carbon fiber reinforced composite material containing high-elasticity carbon fiber of 490 to 950 GPa modulus of elongation by ≥30% by its volume ratio. The support bars 3 are desirably formed in the state of a hollow pipe, and are more desirably tapered so as to thin the side of their tips. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了通过抑制尺寸增大的基板盒的重量增加来提高可操作性,从而当携带基板进/出时减小基板的振动。 解决方案:基板盒1包括用于支撑基板4的端部以容纳在基板输入端口A的两个侧表面上的端部支撑件2; 以及支撑杆3,其固定在基板输入口的相对表面的侧面上,该输送端口在输入端口侧具有自由端,它们以垂直方式排列成一行或多条线 方向,并且其支撑在容纳基板4的支撑部分2之间的一部分。因此,基板盒1以垂直方向和多个台阶的水平姿势容纳多张基板4。 支撑杆3由含有490〜950GPa伸长率的高弹性碳纤维的碳纤维增强复合材料以体积比计≥30%的方式形成。 支撑杆3期望地形成为中空管的状态,并且更理想地是锥形以便使其尖端的一侧变薄。 版权所有(C)2006,JPO&NCIPI
    • 3. 发明专利
    • Liquid level following type defoaming apparatus
    • 液体水平以下类型的缺陷装置
    • JP2007222721A
    • 2007-09-06
    • JP2006044248
    • 2006-02-21
    • Nippon Oil Corp新日本石油株式会社
    • TAKAHASHI TOSHIYUKIENDO MIKIOHIRAYAMA TAKAYUKI
    • B01D19/02
    • PROBLEM TO BE SOLVED: To allow a foam sucking/eliminating device to rise and fall following the level variation of liquid in a tank with simple structure, in a liquid level following type defoaming apparatus provided with the foam sucking/eliminating device sucking foam generated on the liquid level in the tank storing liquid.
      SOLUTION: This defoaming apparatus comprises a float 5 floating in the tank 1 storing liquid 7 by buoyancy of the liquid 7 therein; the foam sucking/eliminating device 6 sucking foam generated on the liquid level in the tank 1 from a suction port 8 into the device to defoam, and discharging defoamed liquid into the tank 1; an assembly 25 having the foam sucking/eliminating device 6 attached to the float 5; and support mechanisms 2, 3, 4 vertically supporting the assembly 25 in relation to the tank 1 and allowing the foam sucking/eliminating device 6 to rise or fall following the level variation of the liquid 7 in the tank 1.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了允许泡沫吸附/消除装置随着具有简单结构的罐中的液体的液面变化而上升和下降,在设置有泡沫吸取/去除装置的液面跟随型消泡装置中 储罐液体中液面上产生泡沫。 解决方案:该消泡装置包括浮子5,浮子5通过液体7在其中的浮力而储存在贮存液体7中; 泡沫吸取装置6将在罐1中的液面上产生的泡沫从吸入口8吸入装置中消泡,并将消泡液排放到罐1中; 具有安装在浮子5上的泡沫抽吸装置6的组件25; 以及相对于罐1垂直地支撑组件25的支撑机构2,3,4,并且允许泡沫吸入/消除装置6随着罐1中的液体7的水平变化而升高或降低。版权所有: (C)2007,JPO&INPIT