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1. 发明申请

WO2012064633A3 NANOSCALE PHOTOLITHOGRAPHY 审中-公开
标题翻译：纳米级光刻
公开(公告)号：WO2012064633A3
公开(公告)日：2012-08-09
申请号：PCT/US2011059532
申请日：2011-11-07
申请人： DOW CORNING , UNIV MICHIGAN , FU PENG-FEI , GUO LINGJIE JAY , MOYER ERIC SCOTT , PINA-HERNANDEZ CARLOS
发明人： FU PENG-FEI , GUO LINGJIE JAY , MOYER ERIC SCOTT , PINA-HERNANDEZ CARLOS
IPC分类号： G03F7/00 , G03F7/16 , G03F7/40
CPC分类号： B05D1/36 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/165 , G03F7/405 , Y10T428/24479 , Y10T428/24612
摘要： A simple and practical method that can reduce the feature size of a patterned structure bearing surface hydroxyl groups is described. The patterned structure can be obtained by any patterning technologies, such as photo-lithography, e-beam lithography, nano-imprinting lithography. The method includes: (1) initially converting the hydroxyl or silanol-rich surface into an amine-rich surface with the treatment of an amine agent, preferably a cyclic compound; (2) coating an epoxy material on the top of the patterned structure; (3) forming an extra layer when applied heat via a surface-initiated polymerization; (4) applying an amine coupling agent to regenerate the amine-rich surface; (5) coating an epoxy material on the top of the patterned structure to form the next layer; (6) repeating step 4 and 5 to form multiple layers; This method allows the fabrication of feature sizes of various patterns and contact holes that are difficult to reach by conventional lithographic methods.
摘要翻译：描述了一种简单且实用的方法，其可以减小承载表面羟基的图案化结构的特征尺寸。图案化结构可以通过任何图案化技术获得，例如光刻，电子束光刻，纳米压印光刻。该方法包括：（1）通过处理胺试剂，优选环状化合物，将羟基或富含硅烷醇的表面初始转化成富胺表面; （2）在图案化结构的顶部涂布环氧树脂材料; （3）当通过表面引发的聚合反应加热时形成额外的层; （4）施加胺偶联剂以再生富胺表面; （5）在图案化结构的顶部涂布环氧材料以形成下一层; （6）重复步骤4和5以形成多个层; 该方法允许制造通过常规光刻方法难以达到的各种图案和接触孔的特征尺寸。

2. 发明申请

WO2006083284A3 A MATERIAL COMPOSITION FOR NANO- AND MICRO-LITHOGRAPHY 审中-公开
标题翻译：一种用于纳米和微米光刻的材料组合物
公开(公告)号：WO2006083284A3
公开(公告)日：2007-08-16
申请号：PCT/US2005019340
申请日：2005-06-01
申请人： DOW CORNING , UNIV MICHIGAN , FU PENG-FEI , GUO LINGJIE JAY , CHENG XING
发明人： FU PENG-FEI , GUO LINGJIE JAY , CHENG XING
IPC分类号： G03F7/00 , G03F7/038 , G03F7/075
CPC分类号： G03F7/0382 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/038 , G03F7/0755 , Y10T428/31612
摘要： A material composition, which is used as a liquid resist, includes a first component comprising a monomer portion and at least one cationically polymerizable functional group, and a crosslinker reactive with the first component and comprising at least three cationically polymerizable functional groups. The material composition also includes a cationic photoinitiator. Upon exposure to UV light, the material composition crosslinks via cure to form a cured resist film that is the reaction product of the first component, the crosslinker, and the cationic photoinitiator. An article includes a substrate layer and a resist layer formed on the substrate layer from the material composition.
摘要翻译：用作液体抗蚀剂的材料组合物包括包含单体部分和至少一种阳离子可聚合官能团的第一组分和与第一组分反应并包含至少三个可阳离子聚合的官能团的交联剂。该材料组合物还包括阳离子光引发剂。在暴露于紫外光下时，材料组合物通过固化交联以形成固化的抗蚀剂膜，其是第一组分，交联剂和阳离子光引发剂的反应产物。一种制品包括从该材料组合物形成在基底层上的基底层和抗蚀剂层。

3. 发明申请

WO2006132672A3 A METHOD OF NANOPATTERNING, A CURED RESIST FILM USE THEREIN, AND AN ARTICLE INCLUDING THE RESIST FILM 审中-公开
标题翻译：纳米材料的方法，其固化膜的使用方法和包括耐腐蚀膜的文章
公开(公告)号：WO2006132672A3
公开(公告)日：2007-11-29
申请号：PCT/US2005043278
申请日：2005-11-30
申请人： DOW CORNING , UNIV MICHIGAN , FU PENG-FEI , GUO LINGJIE JAY
发明人： FU PENG-FEI , GUO LINGJIE JAY
IPC分类号： G03F7/00 , C09D183/04 , G03F7/075
CPC分类号： G03F7/0755 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0045 , G03F7/0757 , Y10T428/24802 , Y10T428/31663
摘要： A method of nanopatterning includes the steps of providing the resist film (12) and forming the pattern in the resist film (12). The resist film (12) includes an organosilicone compound having at least two vinyl groups, an organosilicone crosslinker different from the organosilicone compound, a catalyst, and a catalyst inhibitor. The cured resist film (12) includes the reaction product of the organosilicone compound having at least two vinyl groups and the organosilicone crosslinker different from the organosilicone compound, in the presence of the catalyst and the catalyst inhibitor. The article (10) includes a substrate (14), and the cured resist film (12) is disposed on the substrate (14). Due to the presence of the catalyst inhibitor in the resist film (12), the resist film (12) may be manipulated for hours at room temperature without curing. At the same time, the resist film (12) cures in a sufficiently short period of time to be commercially valuable.
摘要翻译：纳米图案的方法包括提供抗蚀剂膜（12）并在抗蚀剂膜（12）中形成图案的步骤。抗蚀膜（12）包括具有至少两个乙烯基的有机硅化合物，不同于有机硅酮化合物的有机硅氧烷交联剂，催化剂和催化剂抑制剂。固化的抗蚀剂膜（12）包括在催化剂和催化剂抑制剂的存在下，具有至少两个乙烯基的有机硅氧烷化合物和不同于有机硅氧烷化合物的有机硅氧烷交联剂的反应产物。制品（10）包括基板（14），并且固化的抗蚀剂膜（12）设置在基板（14）上。由于抗蚀剂膜（12）中存在催化剂抑制剂，所以抗蚀剂膜（12）可以在室温下操作数小时而不固化。同时，抗蚀剂膜（12）在足够短的时间内固化成商业价值。

4. 发明申请

WO2011150231A4 PHOTONIC CRYSTAL-METALLIC STRUCTURES AND APPLICATIONS 审中-公开
标题翻译：光子晶体金属结构与应用
公开(公告)号：WO2011150231A4
公开(公告)日：2012-06-07
申请号：PCT/US2011038177
申请日：2011-05-26
申请人： UNIV MICHIGAN , GUO YUNBO , NORRIS THEODORE B , BAKER JAMES R , GUO LINGJIE JAY , WALTER NILS G
发明人： GUO YUNBO , NORRIS THEODORE B , BAKER JAMES R , GUO LINGJIE JAY , WALTER NILS G
IPC分类号： G02B26/02
CPC分类号： G02B5/008 , B82Y20/00 , G02B1/005 , Y10S977/70
摘要： A photonic crystal-metallic (PCM) structure receives an input light signal from a light source. The PCM structure includes a metal structure and a photonic crystal structure disposed adjacent the metal structure. The photonic crystal structure is configured to receive the input light signal such that the input light signal excites surface plasmons of the metallic structure and such that the input light signal is internally reflected within the photonic crystal structure.
摘要翻译：光子晶体金属（PCM）结构接收来自光源的输入光信号。 PCM结构包括邻近金属结构设置的金属结构和光子晶体结构。光子晶体结构被配置为接收输入光信号，使得输入光信号激发金属结构的表面等离子体，并且使得输入光信号在光子晶体结构内部被反射。

5. 发明申请

WO2011150231A3 PHOTONIC CRYSTAL-METALLIC STRUCTURES AND APPLICATIONS 审中-公开
标题翻译：光子晶体 - 金属结构和应用
公开(公告)号：WO2011150231A3
公开(公告)日：2012-04-05
申请号：PCT/US2011038177
申请日：2011-05-26
申请人： UNIV MICHIGAN , GUO YUNBO , NORRIS THEODORE B , BAKER JAMES R , GUO LINGJIE JAY , WALTER NILS G
发明人： GUO YUNBO , NORRIS THEODORE B , BAKER JAMES R , GUO LINGJIE JAY , WALTER NILS G
IPC分类号： G02B26/02
CPC分类号： G02B5/008 , B82Y20/00 , G02B1/005 , Y10S977/70
摘要： A photonic crystal-metallic (PCM) structure receives an input light signal from a light source. The PCM structure includes a metal structure and a photonic crystal structure disposed adjacent the metal structure. The photonic crystal structure is configured to receive the input light signal such that the input light signal excites surface plasmons of the metallic structure and such that the input light signal is internally reflected within the photonic crystal structure.
摘要翻译：光子晶体金属（PCM）结构接收来自光源的输入光信号。 PCM结构包括金属结构和与金属结构相邻设置的光子晶体结构。光子晶体结构被配置为接收输入光信号，使得输入光信号激发金属结构的表面等离子体激元并且使得输入光信号在光子晶体结构内部被内部反射。

6. 发明申请

WO2011139785A3 DISPLAY DEVICE HAVING PLASMONIC COLOR FILTERS AND PHOTOVOLTAIC CAPABILITIES 审中-公开
标题翻译：具有等离子色彩过滤器和照相能力的显示设备
公开(公告)号：WO2011139785A3
公开(公告)日：2012-04-12
申请号：PCT/US2011034174
申请日：2011-04-27
申请人： UNIV MICHIGAN , GUO LINGJIE JAY , XU TING
发明人： GUO LINGJIE JAY , XU TING
IPC分类号： G02B5/20 , G02F1/1335
CPC分类号： G02B5/288 , G02B5/008 , G02F1/133516 , G02F1/133533 , G02F1/13439 , G02F2001/13324 , G02F2203/10
摘要： A plasmonic optical spectrum filtering device is provided that filters electromagnetic waves by optical resonance, for example, by selective conversion between the free-space waves and spatially confined modes in plasmonic nano-resonators. Frequency-selective transmission and reflection spectra are engineered and can be used as spectrum filters for display and imaging applications. A thin film stack color filter is further disclosed, which can be designed to either function as a transmission color filter with efficiency twice that of conventional colorant based color filter; or as a reflective color filter for display devices (e.g., used in an energy harvesting reflective display). In other variations, a novel reflective colored display is viewable under direct sunlight, and can simultaneously harvest both incident light and generate electrical power. Methods of making such plamonic optical spectrum filtering devices are also provided.
摘要翻译：提供了等离子体激发光谱滤波装置，其通过光谐振来对电磁波进行滤波，例如通过在等离子体激元纳米谐振器中的自由空间波和空间限制模式之间的选择性转换。频率选择性传输和反射光谱被设计并且可以用作用于显示和成像应用的频谱滤波器。进一步公开了一种薄膜堆叠滤色器，其可以被设计成作为传统滤色器的功能，效率是传统的基于着色剂的滤色器的两倍; 或用作显示设备的反射滤色器（例如，用于能量收集反射显示器）。在其他变型中，新颖的反射彩色显示器可在直射的阳光下观看，并且可以同时收集入射光并产生电力。还提供了制造这种同谱光谱滤波装置的方法。

7. 发明申请

WO2004107045A2 METHODS OF CREATING PATTERNS ON SUBSTRATES AND ARTICLES OF MANUFACTURE RESULTING THEREFROM 审中-公开
标题翻译：基板上形成图案的方法及其制造方法
公开(公告)号：WO2004107045A2
公开(公告)日：2004-12-09
申请号：PCT/US2004016016
申请日：2004-05-21
申请人： AGENCY SCIENCE TECH & RES , UNIV MICHIGAN , BAO LIRONG , TAN LI , HUANG XUDONG , KONG YEN PENG , GUO LINGJIE JAY , PANG STELLA W , YEE ALBERT
发明人： BAO LIRONG , TAN LI , HUANG XUDONG , KONG YEN PENG , GUO LINGJIE JAY , PANG STELLA W , YEE ALBERT
IPC分类号： B05D3/10 , B29C33/00 , B44C1/165 , B44C3/08 , C03C17/30 , G03F20060101 , G03F7/00 , G03F
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y30/00 , B82Y40/00
摘要： Methods of creating patterns on substrates are presented, and articles of manufacture resulting therefrom. One method comprises applying a first surface energy modifier (18) to an applicator (16) to form a coating on the applicator; contacting the coating (18) with a receiving member (4), the receiving member having a topography, the coating only contacting and remaining on at least some protrusions (8); exposing the first modified receiving member (22) to a second surface energy modifier (21), thereby forming a second modified receiving member (24) having surface modified recesses; applying a composition (26) comprising a polymeric material to the second modified receiving member (24), the composition substantially conforming to the topography of the surface modified protrusion's (8) and the surface modified recesses; and contacting the composition-coated, surface modified protrusions with a substrate (11) for a time and under conditions sufficient to transfer the polymeric material (26) on protrusions to the substrate (11). Because the surface energy of the sidewalls is lower than that on the protrusions, polymer dewetting from the sidewalls is promoted, which makes the polymer film discontinuous along the edges of patterns. Therefore, inked polymer patterns from the protrusions of the mold show very smooth edges and smaller dimensions compared to that of the mold.
摘要翻译：呈现在基板上形成图案的方法以及由此产生的制品。一种方法包括将第一表面能量调节剂（18）施加到施用器（16）上以在施用器上形成涂层; 使所述涂层（18）与接收构件（4）接触，所述接收构件具有形貌，所述涂层仅接触并保留在至少一些突起（8）上; 将第一改进的接收构件（22）暴露于第二表面能量改性剂（21），从而形成具有表面改性凹槽的第二改进的接收构件（24）; 将包含聚合物材料的组合物（26）施加到第二改性接收构件（24）上，该组合物基本上符合表面改性突起（8）和表面改性凹槽的形貌; 并且使组合物涂覆的表面改性的突起与衬底（11）接触足以将突起上的聚合物材料（26）转移到衬底（11）上的时间和条件。由于侧壁的表面能低于突起上的表面能，因此促进了从侧壁的聚合物去湿，这使得聚合物膜沿着图案的边缘不连续。因此，与模具相比，来自模具的凸起的上色聚合物图案显示出非常光滑的边缘和更小的尺寸。

8. 发明申请

WO2012145677A3 SPECTRUM FILTERING FOR VISUAL DISPLAYS AND IMAGING HAVING MINIMAL ANGLE DEPENDENCE 审中-公开
标题翻译：用于视觉显示的光谱滤波和具有最小角度依赖性的成像
公开(公告)号：WO2012145677A3
公开(公告)日：2013-01-17
申请号：PCT/US2012034526
申请日：2012-04-20
申请人： UNIV MICHIGAN , GUO LINGJIE JAY , XU TING
发明人： GUO LINGJIE JAY , XU TING
IPC分类号： G02B5/20 , G02F1/1335
CPC分类号： G02F1/216 , G02B5/201 , G02B5/288 , G02F2001/133521 , G02F2001/213 , G02F2201/346 , G02F2202/30 , G02F2202/32
摘要： An optical spectrum filtering device, e.g., color filter, having reduced angle dependence is provided that comprises an interference filter assembly comprising a high refractive index dielectric material, such as a Fabry-Perot based resonator structure. The filter assembly is capable of transmitting a portion of an electromagnetic spectrum into the dielectric material to generate a filtered output with a predetermined range of wavelengths that displays minimal angle dependence, when viewed from a range of incidence angles ranging from normal (0) to 90. Methods of making minimal angle dependent optical spectrum filters and reducing angle dependence for such devices are also provided.
摘要翻译：提供了具有减小的角度依赖性的光谱滤波装置，例如滤色器，其包括包括高折射率介电材料的干涉滤光器组件，例如基于法布里 - 珀罗的谐振器结构。当从正常（0）到90度的入射角度范围内观察时，过滤器组件能够将电磁光谱的一部分传输到电介质材料中以产生具有显示最小角度依赖性的预定波长范围的滤波输出还提供了使最小角度相关的光谱滤波器和减小这种装置的角度依赖性的方法。

9. 发明申请

WO2012167076A2 NANOCHANNEL-GUIDED PATTERNING FOR POLYMERIC SUBSTRATES 审中-公开
标题翻译：用于聚合物基板的纳米通道导向图案
公开(公告)号：WO2012167076A2
公开(公告)日：2012-12-06
申请号：PCT/US2012040454
申请日：2012-06-01
申请人： UNIV MICHIGAN , OK JONG G , AHN SE HYUN , GUO LINGJIE JAY
发明人： OK JONG G , AHN SE HYUN , GUO LINGJIE JAY
IPC分类号： B82B3/00 , B29C59/04 , C08J5/00 , C23C14/24
CPC分类号： G03F7/0002 , B81B2207/056 , B81C1/0046 , B82Y10/00 , B82Y40/00 , C08J3/24 , C08J2300/24 , C08J2363/00 , G02B5/1809 , G02B5/1852 , G02B5/3058
摘要： Novel continuous high speed techniques are provided to fabricate high aspect-ratio microscale structures by using curable liquid materials on a deformable polymeric substrate by a mold-guided pattern formation process with a rigid mold. Methods comprise contacting a patterned surface of a rigid mold with a curable liquid material disposed on a moldable polymeric substrate. The patterned surface has one or more cavities defining at least one microscale feature, so that the curable liquid material flows into the cavity and the major surface is at least partially deformed during the contacting. The liquid is cured to form a cured polymer having the at least one microscale feature over the moldable polymeric substrate.
摘要翻译：提供了新的连续高速技术，以通过使用刚性模具的模具引导图案形成方法，在可变形聚合物基底上使用可固化液体材料来制造高纵横比微结构。方法包括将刚性模具的图案化表面与设置在可模制聚合物基底上的可固化液体材料接触。图案化表面具有限定至少一个微细特征的一个或多个空腔，使得可固化液体材料流入空腔中，并且主表面在接触期间至少部分变形。将液体固化以形成在可模制的聚合物基材上具有至少一个微观特征的固化的聚合物。

10. 发明申请

WO2005019798A2 BIOCHEMICAL SENSORS WITH MICRO-RESONATORS 审中-公开
标题翻译：生物化学传感器与微型共振器
公开(公告)号：WO2005019798A2
公开(公告)日：2005-03-03
申请号：PCT/US2004025942
申请日：2004-08-11
申请人： UNIV MICHIGAN , GUO LINGJIE JAY , CHAO CHUNG-YEN
发明人： GUO LINGJIE JAY , CHAO CHUNG-YEN
IPC分类号： G01N21/45 , G01N
CPC分类号： G01N21/7746 , A61B5/14532 , G01N21/45 , G01N2021/7716 , G01N2021/773 , G01N2021/7776 , G01N2021/7779
摘要： A biochemical sensor. The biochemical sensor includes a microcavity resonator including a sensing element defining a closed loop waveguide. The biochemical sensor is operable to detect a measurand by measuring a resonance shift in the microcavity resonator.
摘要翻译：生化传感器。生物化学传感器包括微腔谐振器，其包括限定闭环波导的感测元件。生物化学传感器可操作以通过测量微腔谐振器中的共振位移来检测被测量。

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