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    • 6. 发明申请
    • LIGHT EMITTING DIODE USING ZINC OXIDE-BASED ELECTRODES AND A FABRICATION METHOD THEREOF
    • 使用基于氧化锌的电极的发光二极管及其制造方法
    • WO2010036030A3
    • 2010-07-01
    • PCT/KR2009005434
    • 2009-09-23
    • KWANGJU INST SCI & TECHPARK SEONG-JUPARK TAE-YOUNGOH MIN-SUKCHOI YONG-SUKKANG JANG-WON
    • PARK SEONG-JUPARK TAE-YOUNGOH MIN-SUKCHOI YONG-SUKKANG JANG-WON
    • H01L33/40
    • H01L33/42H01L33/22H01L33/32H01L2933/0091
    • Disclosed are a light emitting diode using zinc oxide-based electrodes with improved electrical properties and a fabrication method thereof. In one embodiment of the present invention, a light emitting diode comprises a luminous structure having a first semiconductor layer, an active layer and a second semiconductor layer disposed sequentially on a base substrate; and a current spreading layer disposed on an upper face of the luminous structure, the current spreading layer having a zinc oxide-based thin film and zinc oxide-based nanorods protruding from the zinc oxide-based thin film. Furthermore, a fabrication method of a light emitting diode comprises the steps of: forming a luminous structure having a first semiconductor layer, an active layer and a second semiconductor layer disposed sequentially on a base substrate; and forming a current spreading layer on an upper face of the luminous structure by a MOCVD growth method to form a zinc oxide-based thin film and zinc oxide-based nanorods protruding from the zinc oxide-based thin film.
    • 公开了一种使用具有改进的电性能的氧化锌基电极的发光二极管及其制造方法。 在本发明的一个实施例中,发光二极管包括具有依次设置在基底基板上的第一半导体层,有源层和第二半导体层的发光结构; 以及配置在发光体的上表面的电流扩散层,所述电流扩散层具有氧化锌系薄膜和从所述氧化锌系薄膜突出的氧化锌系纳米棒。 此外,发光二极管的制造方法包括以下步骤:形成具有依次设置在基底基板上的第一半导体层,有源层和第二半导体层的发光体; 通过MOCVD生长法在发光体的上面形成电流扩散层,形成从氧化锌系薄膜突出的氧化锌系薄膜和氧化锌系纳米棒。