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    • 3. 发明申请
    • METHOD OF MANUFACTURING INKJET PRINTHEAD
    • 制造喷墨打印机的方法
    • US20100051580A1
    • 2010-03-04
    • US12428808
    • 2009-04-23
    • Jong-Seok KimYong-Seop YoonMoon-Chul LeeYong-Won JeongDong-Sik ShimHyung Choi
    • Jong-Seok KimYong-Seop YoonMoon-Chul LeeYong-Won JeongDong-Sik ShimHyung Choi
    • B44C1/22B41J2/015
    • B41J2/1603B41J2/1628B41J2/1631B41J2/1639
    • A method of manufacturing an inkjet printhead includes forming a chamber layer having multiple ink chambers on a substrate. A sacrificial layer is formed and is configured to fill a space associated with the ink chambers on the chamber layer. A nozzle layer is formed on the top surfaces of the chamber layer and the sacrificial layer and having multiple nozzles. An etching mask is prepared on the bottom surface of the substrate. The etching mask has at least one linear etching pattern configured to define a portion of the substrate in which an ink feed hole is to be formed. The substrate is etched through the linear etching pattern until the sacrificial layer is exposed and a through hole is formed. The through hole defines the portion of the substrate in which the ink feed hole is to be formed. The sacrificial layer and the portion of the substrate surrounded by the through hole are removed to form the ink feed hole.
    • 制造喷墨打印头的方法包括在基板上形成具有多个墨室的腔层。 牺牲层被形成并被配置成填充与腔室层上的墨水室相关联的空间。 喷嘴层形成在腔室层和牺牲层的顶表面上并且具有多个喷嘴。 在基板的底表面上制备蚀刻掩模。 蚀刻掩模具有至少一个线性蚀刻图案,其被配置为限定要在其中形成供墨孔的基板的一部分。 通过线性蚀刻图案蚀刻衬底,直到牺牲层被暴露并形成通孔。 通孔限定要在其中形成供墨孔的基板部分。 牺牲层和由通孔包围的基板的部分被去除以形成供墨孔。