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1. 发明申请

WO2013049679A2 MULTIPLE DEGREE OF FREEDOM ACTUATOR 审中-公开
标题翻译：多自由度执行机构
公开(公告)号：WO2013049679A2
公开(公告)日：2013-04-04
申请号：PCT/US2012/058068
申请日：2012-09-28
申请人： DIGITALOPTICS CORPORATION MEMS , GUTIERREZ, Roman C. , CALVET, Robert J. , JAIN, Ankur
发明人： GUTIERREZ, Roman C. , CALVET, Robert J. , JAIN, Ankur
IPC分类号： B81B3/00 , G02B7/04 , G03B3/00 , G03B5/00 , H04N5/232
CPC分类号： H02N1/006 , G02B26/0875 , G02B27/646 , G03B3/10 , G03B2205/0015 , G03B2205/0046 , G03B2205/0053 , H04N5/23287
摘要： A multiple degree of freedom actuator can have at least one first MEMS actuator configured to move a platform in translation and at least one second MEMS actuator configured to move the platform in a different direction, e.g., tangentially. The first MEMS actuator(s) can facilitate autofocus and/or zoom, for example. The second MEMS actuator(s) can facilitate optical image stabilization (OIS), for example.
摘要翻译：多自由度致动器可具有至少一个第一MEMS致动器和至少一个第二MEMS致动器，第一MEMS致动器构造成平移平台，第二MEMS致动器构造成例如切向地沿不同方向移动平台。例如，第一MEMS致动器可以促进自动对焦和/或变焦。例如，第二MEMS驱动器可以促进光学图像稳定（OIS）。

2. 发明申请

WO2012067858A1 ACTUATOR MOTION CONTROL FEATURES 审中-公开
标题翻译：执行器运动控制功能
公开(公告)号：WO2012067858A1
公开(公告)日：2012-05-24
申请号：PCT/US2011/059437
申请日：2011-11-04
申请人： DIGITALOPTICS CORPORATION MEMS , GUTIERREZ, Roman C. , CALVET, Robert J. , LIU, Xiaolei , WANG, Guiqin , JAIN, Ankur
发明人： GUTIERREZ, Roman C. , CALVET, Robert J. , LIU, Xiaolei , WANG, Guiqin , JAIN, Ankur
IPC分类号： B81B7/00
CPC分类号： B81B7/00 , B81B7/0016 , B81B2201/047 , Y10T29/49002
摘要： A method for making a motion control feature for an actuator device (400) of a type that has a moveable component (505) coupled to an opposing fixed component (506) for out-of-plane rotational movement relative thereto includes forming first and second flaps (1756A, 1756B) respectively extending from the moveable and fixed components (505, 506) and toward the opposing component and operable to effect one or more of damping movement of the moveable component (505) relative to the fixed component (506) and/or restraining movement of the moveable component (505) relative to the fixed component (506) in a direction substantially perpendicular to the actuator device (400).
摘要翻译：一种制造用于致动器装置（400）的运动控制特征的方法，所述致动器装置（400）具有联接到相对的固定部件（506）的可移动部件（505），用于相对于其相对于所述相对的固定部件（306）进行平面外旋转运动，包括形成第一和第二分别从可移动的和固定的部件（505,506）延伸并朝向相对的部件并且可操作地实现可移动部件（505）相对于固定部件（506）的一个或多个阻尼运动的折翼（1756A，1756B）和 /或在基本上垂直于致动器装置（400）的方向上相对于固定部件（506）抑制可移动部件（505）的移动。

3. 发明申请

WO2012067859A3 MEMS ACTUATOR ALIGNMENT 审中-公开
公开(公告)号：WO2012067859A3
公开(公告)日：2012-05-24
申请号：PCT/US2011/059446
申请日：2011-11-04
申请人： DIGITALOPTICS CORPORATION MEMS , CALVET, Robert J. , GUTIERREZ, Roman C. , WANG, Guiqin
发明人： CALVET, Robert J. , GUTIERREZ, Roman C. , WANG, Guiqin
IPC分类号： G02B7/08
摘要： A method for aligning an actuator device relative to an adjacent component, such as a rear cover of an actuator module or a stationary lens, includes disposing a plurality of radially extending tabs around an outer periphery of the actuator device, disposing a corresponding plurality of pairs of raised mounting features on a front surface of the adjacent component, each pair defining a slot having sidewalls that are complementary in configuration to respective sidewalls of corresponding ones of the tabs, and inserting respective ones of the tabs into corresponding ones of the slots.

4. 发明申请

WO2013049688A2 MEMS-BASED OPTICAL IMAGE STABILIZATION 审中-公开
标题翻译：基于MEMS的光学图像稳定
公开(公告)号：WO2013049688A2
公开(公告)日：2013-04-04
申请号：PCT/US2012/058082
申请日：2012-09-28
申请人： DIGITALOPTICS CORPORATION MEMS , GUTIERREZ, Roman C. , CALVET, Robert J. , LIU, Xiaolei , LEANG, Pat K. , MENDEZ, Jose A. , ZAHARIA, Corneliu , DRIMBAREAN, Alexandru F. , BIGIOI, Petronel Gheorghe
发明人： GUTIERREZ, Roman C. , CALVET, Robert J. , LIU, Xiaolei , LEANG, Pat K. , MENDEZ, Jose A. , ZAHARIA, Corneliu , DRIMBAREAN, Alexandru F. , BIGIOI, Petronel Gheorghe
IPC分类号： H04R3/00
CPC分类号： G03B5/00 , G02B26/0841 , G02B27/646 , G03B2205/0015 , G03B2205/0053 , H04N5/23258 , H04N5/23287
摘要： In one example, a camera is provided that includes: a plurality of MEMS electrostatic comb actuators, each actuator operable to exert a force on at least one lens; and an optical image stabilization (OIS) algorithm module operable to command the plurality of actuators to actuate the at least one lens responsive to motion of the camera.
摘要翻译：在一个示例中，提供了一种照相机，其包括：多个MEMS静电梳状致动器，每个致动器可操作以在至少一个透镜上施加力; 以及光学图像稳定（OIS）算法模块，其可操作以响应于相机的运动来命令所述多个致动器致动所述至少一个透镜。

5. 发明申请

WO2012067852A1 MEMS ACTUATOR DEVICE 审中-公开
标题翻译： MEMS致动器装置
公开(公告)号：WO2012067852A1
公开(公告)日：2012-05-24
申请号：PCT/US2011/059414
申请日：2011-11-04
申请人： DIGITALOPTICS CORPORATION MEMS , GUTIERREZ, Roman C. , CALVET, Robert J.
发明人： GUTIERREZ, Roman C. , CALVET, Robert J.
IPC分类号： H02N1/00 , G02B26/08
CPC分类号： H02N1/002 , G02B7/102 , G02B13/0085
摘要： A method for making an actuator device includes providing a wafer comprising a layer of an electrically conductive material and forming a plurality of rotationally symmetrical dies (400) in the electrically conductive material, each die (400) including a plurality of radial tabs (404) and complementarily sized radial recesses (504) arranged in alternating fashion and at equal angular increments around the circumfery of the die (400). To maximize the use of available wafer space, the dies (400) are arranged in a pattern on the wafer in which each die (400) is rotated relative to adjacent dies (400) through an angle of 360 degrees divided by twice the number of tabs (404) or recesses (504) on the die and, except for dies (400) located at an outer periphery of the wafer, each die (400) is disposed in edge-to-edge near abutment with an adjacent die (400) and each tab (404) of each die (400) is nested within a complementary recess (504) of an adjacent die (400).
摘要翻译：一种用于制造致动器装置的方法包括：提供包括导电材料层的晶片并在导电材料中形成多个旋转对称的模具（400），每个模具（400）包括多个径向突片（404）以及互补尺寸的径向凹槽（504），其以交替的方式并且围绕模具（400）的圆周以相等的角度增量布置。为了最大限度地利用可用的晶片空间，模具（400）以晶片的形式布置在晶片上，其中每个模具（400）相对于相邻的模具（400）以360度的角度相对于相对的模具芯片上的突出部（404）或凹部（504），并且除了位于晶片的外周的模具（400）之外，每个模具（400）与邻近的模具（400）邻接地邻接设置）并且每个管芯（400）的每个突片（404）嵌套在相邻管芯（400）的互补凹部（504）内。

6. 发明申请

WO2012067850A1 MOUNTING FLEXURE CONTACTS 审中-公开
标题翻译：安装弯曲接头
公开(公告)号：WO2012067850A1
公开(公告)日：2012-05-24
申请号：PCT/US2011/059387
申请日：2011-11-04
申请人： DIGITALOPTICS CORPORATION MEMS , GUTIERREZ, Roman C. , JAIN, Ankur
发明人： GUTIERREZ, Roman C. , JAIN, Ankur
IPC分类号： B81B7/00
CPC分类号： H02N2/005 , B81B7/0006 , B81B2201/033 , B81B2203/0154 , B81B2207/07
摘要： A device may comprise a flexure formed of a first semiconductor material. A first trench may be formed in the flexure. The first trench may separate the first semiconductor material into a first portion and a second portion thereof. An oxide layer may be formed in the first trench. The oxide layer may extend over a top portion of the first semiconductor material. A second semiconductor material may be formed on the oxide layer. The first trench and the oxide layer may cooperate to electrically isolate the first portion and the second portion from one another.
摘要翻译：装置可以包括由第一半导体材料形成的挠曲。可以在弯曲部中形成第一沟槽。第一沟槽可以将第一半导体材料分离成第一部分和第二部分。可以在第一沟槽中形成氧化物层。氧化物层可以在第一半导体材料的顶部部分上延伸。可以在氧化物层上形成第二半导体材料。第一沟槽和氧化物层可以协作以将第一部分和第二部分彼此电隔离。

7. 发明申请

WO2012067856A1 LINEARLY DEPLOYED ACTUATORS 审中-公开
标题翻译：线性部署执行器
公开(公告)号：WO2012067856A1
公开(公告)日：2012-05-24
申请号：PCT/US2011/059427
申请日：2011-11-04
申请人： DIGITALOPTICS CORPORATION MEMS , GUTIERREZ, Roman C.
发明人： GUTIERREZ, Roman C.
IPC分类号： G02B7/10 , G02B26/08 , B81B3/00 , B81C1/00 , H02N1/00
CPC分类号： H02N11/006 , B81B3/0035 , B81B3/0051 , G02B6/3584 , G02B7/102 , G02B26/0841 , G03B3/00 , G03B2205/0084 , H02K41/02 , H02N1/008 , Y10T29/49826 , Y10T29/49863 , Y10T74/18072
摘要： A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to the outer frame, a moveable frame disposed parallel to the fixed frame, a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, and an actuator incorporating a plurality of inter-digitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced at a selected distance apart from the fixed frame and fixing the moveable frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.
摘要翻译：制造致动器的方法包括形成导电材料的基本上平面的致动器装置，所述装置包括外框架，附接到外框架的固定框架，平行于固定框架设置的可移动框架，运动控制挠曲联接器可移动框架到外框架，用于相对于外框架和固定框架的共面，直线移动;以及致动器，其结合有多个数字化的齿，其固定部分附接到固定框架和移动部分将可移动框架移动到展开位置，该展开位置与固定框架平行并间隔开选定的距离，并将可移动框架固定在展开位置，用于基本上直线，垂直运动相对到固定框架。

8. 发明申请

WO2013049671A1 CASCADED ELECTROSTATIC ACTUATOR 审中-公开
标题翻译：嵌入式静电执行器
公开(公告)号：WO2013049671A1
公开(公告)日：2013-04-04
申请号：PCT/US2012/058057
申请日：2012-09-28
申请人： DIGITALOPTICS CORPORATION MEMS , GUTIERREZ, Roman C.
发明人： GUTIERREZ, Roman C.
IPC分类号： H02N1/00
CPC分类号： H02N1/008 , B81C1/00166 , G03B3/10 , G03B9/00 , G03B9/08 , H01L41/04 , H02N1/006
摘要： A cascaded electrostatic actuator can be formed from a substantially planar substrate. The cascaded electrostatic actuator can be formed in a plane of the substrate. Various embodiments are described. For example, a motion of the cascaded electrostatic actuator can be substantially within the plane of the substrate. As a further example, the cascaded electrostatic actuator can have a plurality of first electrodes and a plurality of second electrodes proximate the plurality of first electrodes. A gap can be formed between the first electrodes and the second electrodes. The gap can be substantially orthogonal with respect to the plane of the substrate.
摘要翻译：级联的静电致动器可以由基本平坦的基板形成。级联静电致动器可以形成在基板的平面中。描述各种实施例。例如，级联静电致动器的运动可以基本上在衬底的平面内。作为另一示例，级联静电致动器可以具有多个第一电极和靠近多个第一电极的多个第二电极。可以在第一电极和第二电极之间形成间隙。间隙可以相对于基底的平面基本正交。

9. 发明申请

WO2012067855A1 ROTATIONAL COMB DRIVE Z-STAGE 审中-公开
公开(公告)号：WO2012067855A1
公开(公告)日：2012-05-24
申请号：PCT/US2011/059420
申请日：2011-11-04
申请人： DIGITALOPTICS CORPORATION MEMS , GUTIERREZ, Roman C.
发明人： GUTIERREZ, Roman C.
IPC分类号： G03B13/00 , G03B17/00
CPC分类号： G03B3/10 , G02B7/08 , G03B2205/0061
摘要： An actuator (400) device comprising an outer frame, a platform (520), and a plurality of actuators (550) configured to move the platform (520) with respect to the outer frame. Each of the actuators may have a movable frame (505) and a fixed frame (517). A motion control mechanism may be configured to permit movement of the platform (520) in a desired direction with respect to the outer frame (506) and inhibit rotation of the platform (520) with respect to the outer frame (506).
摘要翻译：一种包括外框架，平台（520）和多个致动器（550）的致动器（400）装置，其配置成相对于外框架移动平台（520）。每个致动器可以具有可移动框架（505）和固定框架（517）。运动控制机构可以被配置为允许平台（520）相对于外框架（506）在期望的方向上移动，并且禁止平台（520）相对于外框架（506）的旋转。

10. 发明申请

WO2013049695A1 SURFACE MOUNT MEMS ACTUATOR 审中-公开
标题翻译：表面安装MEMS致动器
公开(公告)号：WO2013049695A1
公开(公告)日：2013-04-04
申请号：PCT/US2012/058089
申请日：2012-09-28
申请人： DIGITALOPTICS CORPORATION MEMS , GUTIERREZ, Roman C.
发明人： GUTIERREZ, Roman C.
IPC分类号： B81B7/00 , B81C3/00
CPC分类号： H05K1/181 , B81B7/0054 , B81B2201/038 , B81B2201/047 , B81B2203/0163 , B81B2203/053 , B81B2203/055 , B81B2207/07 , B81C3/008
摘要： A silicon MEMS device having at least one solder contact formed thereupon for being mounted and electrically connected to a circuit board via the solder contact(s). The MEMS device may have flexures, the solder contacts being formed upon each flexure. The MEMS device may also be an actuator having an arm configured to move when the actuator is actuated.
摘要翻译：一种硅MEMS器件，其具有形成在其上的至少一个焊接接头，用于经由焊料接触件安装并电连接到电路板。 MEMS器件可以具有挠曲，在每次挠曲时形成焊接触头。 MEMS器件还可以是具有构造成在致动器致动时移动的臂的致动器。

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