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1. 发明专利

DE10131697A1 Pressure sensor has conductive elevations that are arranged in between opposing surfaces of shaft and sensor chip, thereby connecting sensor chip to guides 未知
公开(公告)号：DE10131697A1
公开(公告)日：2002-01-10
申请号：DE10131697
申请日：2001-06-29
申请人： DENSO CORP
发明人： NIDAN AKIRA , TAKI TAKAFUMI , HARA HIDEAKI , MASUDA MICHIHIRO , BAN KANAME , TANAKA KAZUO , MURAKAMI YOSHIFUMI
IPC分类号： G01L9/04 , G01L9/00 , H01L29/84
摘要： Guides (2) extend away from the surface (1a) of a shaft (1). Conductive elevations (8) are formed on the surface (4a) of a sensor chip (4) having a diaphragm (5) that generates an electrical signal corresponding to a physical value. The surfaces (1a,4a) are opposite each other, with the elevations arranged in between such that the sensor chip is connected to the guides through the elevations.

2. 发明专利

GB2335279B Leakage inspection method and apparatus 未知
公开(公告)号：GB2335279B
公开(公告)日：2002-01-09
申请号：GB9821930
申请日：1998-10-09
申请人： DENSO CORP
发明人： HARA HIDEAKI , IRIYAMA SHOJI
IPC分类号： G01F1/00 , G01M3/04 , G01M3/24 , G01M3/02

3. 发明专利

GB2335279A Leakage inspection method and apparatus 未知
公开(公告)号：GB2335279A
公开(公告)日：1999-09-15
申请号：GB9821930
申请日：1998-10-09
申请人： DENSO CORP
发明人： HARA HIDEAKI , IRIYAMA SHOJI
IPC分类号： G01F1/00 , G01M3/04 , G01M3/24 , G01M3/02
摘要： A leakage inspection method and apparatus having a pressure wave generating means, including an air supply source 3, a regulator 4, and a solenoid valve 5. A pressure wave of a fluid is applied to a normal flow path 1c of an measurement object 1 by the pressure wave generating means to detect internal leakage by measuring, by means of a microphone 9, a difference between the transfer time during which the pressure wave passes through the normal flow path 1c and the transfer time during which the pressure wave passes through the leakage flow path 1e. Accordingly, the internal leakage of the fluid, flowing in the leakage flow path 1e by passing the normal flow path 1c of an equipment having a partition and the normal flow path 1c separated by the partition, is detected, if any. Other embodiments using sound or flowrate of an inspection fluid (eg. air) are described.

4. 发明专利

DE19738722A1 Fuel injection quantity measuring device of internal combustion engine 未知
公开(公告)号：DE19738722A1
公开(公告)日：1999-03-11
申请号：DE19738722
申请日：1997-09-04
申请人： DENSO CORP
发明人： HARA HIDEAKI
IPC分类号： G01F22/02 , F02D41/38 , F02D41/40 , F02M65/00 , G01F1/34 , G01F17/00 , G01F13/00 , G01F9/00
摘要： The device includes a measurement control unit to determine quantity of fuel injected based on pressure variation (PC) in a pressurised container (1) before fuel injection. A pressure variation detector is provided for detecting pressure variation in the container. A volume variation unit (8) with diaphragm (15) is connected to container by which volume is changed by three way solenoid valve.

5. 发明专利

GB2335279A8 Leakage inspection method and apparatus 未知
公开(公告)号：GB2335279A8
公开(公告)日：1999-10-07
申请号：GB9821930
申请日：1998-10-09
申请人： DENSO CORP
发明人： HARA HIDEAKI , IRIYAMA SHOJI
IPC分类号： G01F1/00 , G01M3/04 , G01M3/24 , G01M3/02

6. 发明专利

JP2002082009A PRESSURE SENSOR 失效
公开(公告)号：JP2002082009A
公开(公告)日：2002-03-22
申请号：JP2001010682
申请日：2001-01-18
申请人： DENSO CORP
发明人： TAKI TAKAFUMI , NIDAN AKIRA , HARA HIDEAKI , MASUDA MICHIHIRO , BAN KANAME , TANAKA KAZUO , MURAKAMI YOSHIFUMI
IPC分类号： G01L9/04 , G01L9/00 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To provide an adequately miniaturizable structure in a pressure sensor in which a stem having a lead for taking a signal on one surface side and a sensor chip having a diaphragm for detecting pressure on one surface side are provided, and the sensor chip is mounted on one side of the stem with the sensor chip electrically connected to the lead. SOLUTION: A conductive bump 8 is formed on one surface 4a of the sensor chip 4, and the bump 8 is electrically connected to the lead 2 by thermo compression bonding or the like while the surface 4a of the sensor chip 4 is faced to one surface 1a of the stem 1.

7. 发明专利

JP2001091395A METHOD AND DEVICE FOR MEASURING LEAKAGE 失效
公开(公告)号：JP2001091395A
公开(公告)日：2001-04-06
申请号：JP26347099
申请日：1999-09-17
申请人： DENSO CORP
发明人： HARA HIDEAKI
IPC分类号： F02M65/00 , G01M3/04
摘要： PROBLEM TO BE SOLVED: To provide a method and device for quickly, accurately, and reliably measuring leakage that can start detecting the amount of leakage immediately after an object to be measured is mounted by avoiding such a situation that the oil level in a glass capillary rapidly rises due to change in capacity for starting the detection, and for obtaining the stabilization of the shape of the oil level, it is necessary to wait a long time when the object to be measured is mounted to a measurement tool. SOLUTION: A capacity variable mechanism is provided for preventing the rising of an oil level caused by change in capacity when an object to be measured is mounted. The capacity is controlled so that the oil surface is continuously set to fixed height, thus preventing the oil surface from rising when the object to be measured is mounted, eliminating the need for time for stabilizing an oil level shape, and starting the detection of the amount of leakage immediately after the object to be measured is mounted.

8. 发明专利

JPH09243432A MEASURING APPARATUS FOR INJECTION AMOUNT 失效
公开(公告)号：JPH09243432A
公开(公告)日：1997-09-19
申请号：JP5045196
申请日：1996-03-07
申请人： DENSO CORP
发明人： HARA HIDEAKI
IPC分类号： G01F22/02 , F02D41/38 , F02D41/40 , F02M65/00 , G01F1/34 , G01F17/00
摘要： PROBLEM TO BE SOLVED: To provide a measuring apparatus for a fuel injection amount in an internal combustion engine wherein the apparatus by itself measures the fuel injection amount rapidly without being influenced by effects of volume elasticity which varies depending on a temperature. SOLUTION: A measurement and control means 14 for measuring an injection amount at the time of fuel injection from a ratio of a pressure change ΔPP in a pressure vessel 6 at the time of fuel injection to a pressure change ΔPC before the fuel injection is provided. The pressure ΔPC change occurs by a constant volume ΔV in a constant volume variable device 8 disappearing due to displacement of a diaphragm in the constant volume variable device 8 connected to the pressure vessel 6 with a three-way solenoid valve 11 turning ON, while an injection amount Δq is obtained from (ΔPp /ΔPc ).ΔV. By this measurement method, a pilot injection amount can be separately measured independently from main injection even in an internal combustion engine where pilot injection and main injection occur.

9. 发明专利

JP2004108888A Inspection device 有权
公开(公告)号：JP2004108888A
公开(公告)日：2004-04-08
申请号：JP2002270400
申请日：2002-09-17
申请人： Denso Corp , 株式会社デンソー
发明人： HIRASE KIYOSHI , HARA HIDEAKI
IPC分类号： G01L27/00
摘要： PROBLEM TO BE SOLVED: To provide an inspection device for a semiconductor type pressure sensor capable of reducing procedures and labor of an inspection work, shortening an inspection time and reducing manufacturing and operation cost by simplifying the inspection device.
SOLUTION: The inspection device is provided with a pressurization vessel allowing to be sealingly closed and opened and storing an article to be inspected; a probe installed in the pressurization vessel making an electric contact conduction with the article to be inspected; a retaining part installed in the pressurization vessel and retaining the article to be inspected; a pressurization part for pressurizing the inside of the pressurization vessel; a measuring part for simultaneously measuring a position of the probe and the article to be inspected in the pressurization vessel; an operation processing part for processing a signal obtained through the probe; and a position adjustment mechanism having a function for adjusting a relative position relationship of the probe and the retaining part. The article to be inspected can be measured and inspected at two different pressures in the pressurization vessel.
COPYRIGHT: (C)2004,JPO

10. 发明专利

JP2010271187A Cantilever for shape measurement, and method for manufacturing the same 审中-公开
标题翻译：用于形状测量的CANTILEVER及其制造方法
公开(公告)号：JP2010271187A
公开(公告)日：2010-12-02
申请号：JP2009123343
申请日：2009-05-21
申请人： Denso Corp , 株式会社デンソー
发明人： HARA HIDEAKI , NAKAE YOSHIKAZU , MIURA SHINJI , MATSUI TAKASHI
IPC分类号： G01Q70/10 , G01B5/28 , G01Q20/04
摘要： PROBLEM TO BE SOLVED: To provide a cantilever for shape measurement, and a method for manufacturing the cantilever, for manufacturing separately an Si chip part where a piezo resistance element is formed and Si lever part provided with a stylus.
SOLUTION: This method includes (1) a manufacturing process of the lever 3, (2) a manufacturing process of the Si chip 2, and (3) a bonding process of the Si chip 2 and the lever 3. (1) In the manufacturing process of the lever 3, the lever 3 is formed to have a shape corresponding to a measuring spot from a silicon substrate 10, and a stylus 9 on the lever 3 tip is formed in a body. (2) In the manufacturing process of the Si chip 2, the Si chip 2 is formed by subjecting a silicon wafer acquired by the preceding process to each process such as etching, oxidation, diffusion, CVD or ion implantation. (3) In the bonding process of the Si chip 2 and the lever 3, FIB is irradiated in a CVD gas atmosphere to the outer periphery of an abutting surface between the Si chip 2 and the lever 3 to thereby grow and deposit a tungsten film, and the Si chip 2 and the lever 3 are bonded in a body.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了提供用于形状测量的悬臂和用于制造悬臂的方法，用于单独制造形成压电电阻元件的Si芯片部分和设置有触笔的Si杠杆部分。解决方案：该方法包括（1）杠杆3的制造过程，（2）Si芯片2的制造工艺，（3）Si芯片2和杠杆3的接合工艺。（1 ）在杠杆3的制造过程中，杠杆3形成为具有与硅基板10对应的测量点的形状，并且在主体3上形成有杆3的触针9。（2）在Si芯片2的制造工序中，通过对通过前述工序获取的硅晶片进行蚀刻，氧化，扩散，CVD或离子注入等各个工序来形成Si芯片2。（3）在Si芯片2和杠杆3的接合工序中，将FIB以CVD气体气氛照射到Si芯片2和杠杆3之间的抵接面的外周，从而生长并沉积钨膜，并且Si芯片2和杠杆3结合在一体内。版权所有（C）2011，JPO＆INPIT

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