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1. 发明专利

JP2010271187A Cantilever for shape measurement, and method for manufacturing the same 审中-公开
标题翻译：用于形状测量的CANTILEVER及其制造方法
公开(公告)号：JP2010271187A
公开(公告)日：2010-12-02
申请号：JP2009123343
申请日：2009-05-21
申请人： Denso Corp , 株式会社デンソー
发明人： HARA HIDEAKI , NAKAE YOSHIKAZU , MIURA SHINJI , MATSUI TAKASHI
IPC分类号： G01Q70/10 , G01B5/28 , G01Q20/04
摘要： PROBLEM TO BE SOLVED: To provide a cantilever for shape measurement, and a method for manufacturing the cantilever, for manufacturing separately an Si chip part where a piezo resistance element is formed and Si lever part provided with a stylus.
SOLUTION: This method includes (1) a manufacturing process of the lever 3, (2) a manufacturing process of the Si chip 2, and (3) a bonding process of the Si chip 2 and the lever 3. (1) In the manufacturing process of the lever 3, the lever 3 is formed to have a shape corresponding to a measuring spot from a silicon substrate 10, and a stylus 9 on the lever 3 tip is formed in a body. (2) In the manufacturing process of the Si chip 2, the Si chip 2 is formed by subjecting a silicon wafer acquired by the preceding process to each process such as etching, oxidation, diffusion, CVD or ion implantation. (3) In the bonding process of the Si chip 2 and the lever 3, FIB is irradiated in a CVD gas atmosphere to the outer periphery of an abutting surface between the Si chip 2 and the lever 3 to thereby grow and deposit a tungsten film, and the Si chip 2 and the lever 3 are bonded in a body.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了提供用于形状测量的悬臂和用于制造悬臂的方法，用于单独制造形成压电电阻元件的Si芯片部分和设置有触笔的Si杠杆部分。解决方案：该方法包括（1）杠杆3的制造过程，（2）Si芯片2的制造工艺，（3）Si芯片2和杠杆3的接合工艺。（1 ）在杠杆3的制造过程中，杠杆3形成为具有与硅基板10对应的测量点的形状，并且在主体3上形成有杆3的触针9。（2）在Si芯片2的制造工序中，通过对通过前述工序获取的硅晶片进行蚀刻，氧化，扩散，CVD或离子注入等各个工序来形成Si芯片2。（3）在Si芯片2和杠杆3的接合工序中，将FIB以CVD气体气氛照射到Si芯片2和杠杆3之间的抵接面的外周，从而生长并沉积钨膜，并且Si芯片2和杠杆3结合在一体内。版权所有（C）2011，JPO＆INPIT

2. 发明专利

JP2010074269A Human body communication wireless voice output device 有权
标题翻译：人体通信无线语音输出设备
公开(公告)号：JP2010074269A
公开(公告)日：2010-04-02
申请号：JP2008236682
申请日：2008-09-16
申请人： Denso Corp , 株式会社デンソー
发明人： INOKAWA KAZUYA , YAMAMOTO KYO , HACHISUGA KEISUKE , MATSUI TAKASHI , MORISHITA TOSHIYUKI
IPC分类号： H04R1/10 , H04B13/00
摘要： PROBLEM TO BE SOLVED: To provide a human body communication wireless voice output device which can stably output an audible voice based on a voice signal transmitted using a human body as a transmission medium.
SOLUTION: A headphone device 20 is provided with an input electrode unit 20a for receiving the voice signal transmitted from an music player through the human body, and a headphone unit 2 which converts and outputs the voice signal received through the input electrode unit 20a to the audible voice. Among them, the input electrode unit 20a is installed on a face which contacts a groove part of at concha root in a mounting state on an ear hook unit 5 projected from a housing 3 (a dome unit 7) which contains the headphone unit 2. Therefore, contact of the input electrode unit 20a and the human body becomes stable since the weight of the headphone unit 2 presses in a gravity direction together with the housing 3 at a connection part of the ear hook unit 5 with the dome unit 7, and the input electrode 20a is strongly pressed to the groove part at the concha root.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：解决的问题：提供一种能够基于使用人体传输的语音信号作为传输介质稳定地输出可听话音的人体通信无线语音输出装置。耳机装置20设置有用于接收通过人体从音乐播放器发送的语音信号的输入电极单元20a和耳机单元2，其转换并输出通过输入电极单元接收的声音信号 20a到可听见的声音。其中，输入电极单元20a安装在从包含耳机单元2的壳体3（穹顶单元7）突出的耳钩单元5上的安装状态下接触外耳根部的槽部的面上。因此，由于耳挂单元2的重量与耳罩单元5的连接部分与圆顶单元7一起在壳体3的重力方向上按压，所以输入电极单元20a和人体的接触变得稳定，输入电极20a在外耳根部被强力地压向槽部。版权所有（C）2010，JPO＆INPIT

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