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1. 发明申请

WO2013151421A3 INTEGRATED OPTICAL AND CHARGED PARTICLE INSPECTION APPARATUS 审中-公开
公开(公告)号：WO2013151421A3
公开(公告)日：2013-10-10
申请号：PCT/NL2013/000019
申请日：2013-04-02
申请人： DELMIC B.V. , HOOGENBOOM, Jacob Pieter , KRUIT, Pieter , LIV, Nalan M. SC , ZONNEVYLLE, Aernout Christiaan
发明人： HOOGENBOOM, Jacob Pieter , KRUIT, Pieter , LIV, Nalan M. SC , ZONNEVYLLE, Aernout Christiaan
IPC分类号： H01J37/22
摘要： The invention relates to an apparatus for inspecting a sample, equipped with a charged particle column for producing a focused beam of charged particles to observe or modify the sample, and an optical microscope to observe a region of interest on the sample as is observed by the charged particle beam or vice versa, the apparatus accommodated with a processing unit adapted and equipped for representing an image as generated with said column and an image as generated with said microscope, the unit further adapted for performing an alignment procedure mutually correlating a region of interest in one of said images wherein the alignment procedure involves detecting a change in the optical image as caused therein by the charged particle beam.

2. 发明公开

EP2834832A2 INTEGRATED OPTICAL AND CHARGED PARTICLE INSPECTION APPARATUS 有权转让
标题翻译： INTEGRIERTE OPTISCHE INSPEKTIONSVORRICHTUNGFÜRGELADENE TEILCHEN
公开(公告)号：EP2834832A2
公开(公告)日：2015-02-11
申请号：EP13728546.6
申请日：2013-04-02
申请人： Delmic B.V. , Hoogenboom, Jacob Pieter , Kruit, Pieter , Liv, Nalan M. Sc , Zonnevylle, Aernout Christian
发明人： HOOGENBOOM, Jacob Pieter , KRUIT, Pieter , LIV, Nalan M. SC , ZONNEVYLLE, Aernout Christian
IPC分类号： H01J37/22
CPC分类号： H01J37/222 , G01C21/32 , G01C21/3484 , H01J37/22 , H01J37/226 , H01J37/228 , H01J37/28 , H01J2237/221 , H01J2237/226 , H01J2237/24475 , H01J2237/2806
摘要： An apparatus for inspecting a sample, is equipped with a charged particle column for producing a focused beam of charged particles to observe or modify the sample, and an optical microscope to observe a region of interest on the sample as is observed by the charged particle beam or vice versa. The apparatus is accommodated with a processing unit adapted and equipped to represent an image as generated with the column and an image as generated with the microscope. The unit is further adapted to perform an alignment procedure mutually correlating a region of interest in one of the images, wherein the alignment procedure involves detecting a change in the optical image as caused by the charged particle beam.
摘要翻译：用于检查样品的装置装备有带电粒子柱，用于产生聚焦的带电粒子束以观察或改变样品，以及光学显微镜以观察样品上的感兴趣区域，如通过带电粒子束或相反亦然。该装置容纳有一个处理单元，该处理单元适于和装备以表示用柱产生的图像和用显微镜产生的图像。该单元还适于执行将图像中的一个图像中的感兴趣区域相互关联的对准过程，其中对准过程涉及检测由带电粒子束引起的光学图像的变化。

3. 发明申请

WO2012008836A4 INSPECTION APPARATUS AND REPLACEABLE DOOR FOR A VACUUM CHAMBER OF SUCH AN INSPECTION APPARATUS AND A METHOD FOR OPERATING AN INSPECTION APPARATUS 审中-公开
公开(公告)号：WO2012008836A4
公开(公告)日：2012-01-19
申请号：PCT/NL2011/050513
申请日：2011-07-14
申请人： DELMIC B.V. , KRUIT, Pieter , HOOGENBOOM, Jacob Pieter , ZONNEVYLLE, Aernout Christiaan
发明人： KRUIT, Pieter , HOOGENBOOM, Jacob Pieter , ZONNEVYLLE, Aernout Christiaan
IPC分类号： H01J37/22 , H01J37/256 , H01J37/28 , G01N21/00 , G01N23/225
摘要： An inspection apparatus is provided comprising in combination at least an optical microscope (2, 3, 4) and an ion- or electron microscope (7, 8) equipped with a source (7) for emitting a primary beam (9) of radiation to a sample (10) in a sample holder. The apparatus may comprise a detector (8) for detection of secondary radiation (11) backscattered from the sample and induced by the primary beam. The optical microscope is equipped with an light collecting device (2) to receive in use luminescence light (12) emitted by the sample and to focus it on a photon-detector (4).

4. 发明申请

WO2015178774A1 METHOD FOR POSITIONING A FOCAL PLANE OF A LIGHT IMAGING DEVICE AND APPARATUS ARRANGED FOR APPLYING SAID METHOD 审中-公开
标题翻译：用于定位成像装置的焦平面的方法和适用于方法的装置
公开(公告)号：WO2015178774A1
公开(公告)日：2015-11-26
申请号：PCT/NL2015/050368
申请日：2015-05-22
申请人： DELMIC B.V.
发明人： NARVAEZ, Angela Carolina , LIV HAMARAT, Nalan , KRUIT, Pieter , HOOGENBOOM, Jacob Pieter
IPC分类号： G02B21/00 , G02B21/24 , G02B21/26 , H01J37/02 , H01J37/22
CPC分类号： G02B21/0004 , G02B21/002 , G02B21/241 , G02B21/26 , H01J37/023 , H01J37/228 , H01J2237/216
摘要： The invention relates to a method for positioning a focal plane of a light imaging device at a surface of a substrate, wherein the substrate emits light when irradiated with charged particles. The method comprises the steps of: i. irradiating the substrate with a beam of charged particles having a set charged particle beam energy; ii. moving the focal plane of the light imaging device at least in a direction towards or away from the substrate and measuring an intensity of the emitted light as a function of the position of said focal plane with respect to the substrate; and iii. setting the focal plane at a focal position with respect to the substrate, said focal position being determined using the measured dependence of the intensity of the light signal as a function of the position. Preferably the method steps are subsequently repeated using a reduced charged particle beam energy.
摘要翻译：本发明涉及一种用于将光成像装置的焦平面定位在基板的表面上的方法，其中当用带电粒子照射时基板发光。该方法包括以下步骤：i。用具有设定的带电粒子束能量的带电粒子束照射基板; II。至少在朝向或远离衬底的方向上移动光成像装置的焦平面，并且测量作为所述焦平面相对于衬底的位置的函数的发射光的强度; 和iii。将焦平面设置在相对于基底的焦点位置处，所述焦点位置是使用所测量的光信号的强度的依赖性作为位置的函数来确定的。优选地，随后使用减少的带电粒子束能量来重复该方法步骤。

5. 发明申请

WO2016013930A1 METHOD FOR INSPECTING A SAMPLE USING AN ASSEMBLY COMPRISING A SCANNING ELECTRON MICROSCOPE AND A LIGHT MICROSCOPE 审中-公开
标题翻译：使用包含扫描电子显微镜和轻微显微镜的组件检查样品的方法
公开(公告)号：WO2016013930A1
公开(公告)日：2016-01-28
申请号：PCT/NL2015/050528
申请日：2015-07-20
申请人： DELMIC B.V.
发明人： HOOGENBOOM, Jacob Pieter , LIV HAMARAT, Nalan , KRUIT, Pieter
IPC分类号： H01J37/22
CPC分类号： H01J37/228 , G01N21/6458 , G01N23/2251 , G01N2223/408 , G02B21/244 , G02B21/34 , G02B21/365 , G02B21/368 , H01J37/20 , H01J37/21 , H01J37/28 , H01J2237/2003 , H01J2237/2826
摘要： The invention relates to a method for inspecting a sample with an assembly comprising a scanning electron microscope (SEM) and a light microscope (LM). The assembly comprises a sample holder for holding the sample. The sample holder is arranged for inspecting the sample with both the SEM and the LM, preferably at the same time. The method comprising the steps of: capturing a LM image of the sample in its position for imaging with the SEM; determining a position and dimensions of a region of interest in or on the sample using the LM image; determining values to which the SEM parameters need to be set to image the sample at a desired resolution; and capturing a SEM image of the region of interest, preferably using the first electron beam exposure of said region of interest.
摘要翻译：本发明涉及一种用包含扫描电子显微镜（SEM）和光学显微镜（LM）的组件检查样品的方法。组件包括用于保持样品的样品保持器。样品架设置为用SEM和LM两者同时检查样品。该方法包括以下步骤：将样本的LM图像捕获在其用于用SEM成像的位置; 使用LM图像确定样本中或样本上的感兴趣区域的位置和尺寸; 确定需要设置SEM参数以便以所需分辨率成像样品的值; 并且优选地使用所述感兴趣区域的第一电子束曝光来捕获感兴趣区域的SEM图像。

6. 发明申请

WO2014042538A1 INTEGRATED OPTICAL AND CHARGED PARTICLE INSPECTION APPARATUS 审中-公开
标题翻译：集成光学和充电颗粒检测装置
公开(公告)号：WO2014042538A1
公开(公告)日：2014-03-20
申请号：PCT/NL2013/050669
申请日：2013-09-16
申请人： DELMIC B.V.
发明人： HOOGENBOOM, Jacob Pieter , ZONNEVYLLE, Aernout Christiaan , KRUIT, Pieter , NARVÁEZ-GONZÁLEZ, Angela Carolina
IPC分类号： H01J37/22
CPC分类号： H01J37/023 , H01J37/222 , H01J37/228 , H01J37/28 , H01J2237/221 , H01J2237/2482 , H01J2237/2801 , H01J2237/2808
摘要： The present invention relates to a method for mutually aligning a scanning electron microscope SEM and a light microscope LM by creating a change (61) in the detected light signal of the light microscope LM by illuminating a substrate with an electron beam, correlating the position of the electron beam in the coordinate system of the scanning electron microscope SEM to the position of the observed change in the detected light signal in the coordinate system of the light microscope LM, and relatively shifting the scanning electron microscope SEM and the light microscope LM with respect to one another to a desired relative position of the coordinate systems (60, 62).
摘要翻译：本发明涉及通过用电子束照射基板来在光显微镜LM的检测光信号中产生变化（61）来相互对准扫描电子显微镜SEM和光学显微镜LM的方法，扫描电子显微镜SEM的坐标系中的电子束到光显微镜LM的坐标系中检测到的光信号的观察位置的位置，并相对移动扫描电子显微镜SEM和光学显微镜LM，相对于彼此相对于坐标系（60,62）的期望的相对位置。

7. 发明申请

WO2015119502A1 METHOD AND APPARATUS FOR DETERMINING A DENSITY OF FLUORESCENT MARKERS IN A SAMPLE 审中-公开
标题翻译：用于确定样品中荧光标记物密度的方法和装置
公开(公告)号：WO2015119502A1
公开(公告)日：2015-08-13
申请号：PCT/NL2015/050080
申请日：2015-02-06
申请人： DELMIC B.V.
发明人： HOOGENBOOM, Jacob Pieter , KRUIT, Pieter
IPC分类号： G01N21/64 , G01N23/225
CPC分类号： G01N21/6456 , G01N21/6428 , G01N2021/6441 , G01N2201/105 , H01J37/228
摘要： The invention provides a method of determining a measure of a density of markers in a sample, and an apparatus arranged for performing said method. In particular said method comprising the steps of: irradiating an illumination region of the sample with light, wherein the markers present in the illumination region of the sample emit fluorescence light in response to the irradiation with light, detecting an intensity of the fluorescence light from a detection region of the sample, comprising at least a part of said the illumination region, irradiating an area within said detection region of the sample with a focused charged particle beam to deposit a dose of charged particles in said area, and determining a measure of the density of markers in said area using a change of the detected intensity of the fluorescence light as a function of the deposited dose of charged particles in said area.
摘要翻译：本发明提供了一种确定样品中标记物密度的测量方法以及用于执行所述方法的装置。特别地，所述方法包括以下步骤：用光照射样品的照射区域，其中存在于样品的照射区域中的标记响应于光的照射而发射荧光，检测来自荧光的荧光的强度所述样品的检测区域包括所述照明区域的至少一部分，用聚焦的带电粒子束照射所述样品的所述检测区域内的区域，以将所述带电粒子的剂量沉积在所述区域中，并且确定使用所检测的荧光强度的变化作为所述区域中带电粒子的沉积剂量的函数的所述区域中的标记物的密度。

8. 发明申请

WO2016114656A1 SAMPLE HOLDER FOR USE IN BOTH A LIGHT OPTICAL MICROSCOPE AND A CHARGED PARTICLE MICROSCOPE 审中-公开
标题翻译：用于双光源微型显微镜和充电颗粒显微镜的样品架
公开(公告)号：WO2016114656A1
公开(公告)日：2016-07-21
申请号：PCT/NL2016/050022
申请日：2016-01-12
申请人： DELMIC B.V.
发明人： HOOGENBOOM, Jacob Pieter , MOERLAND, Robert Jan
IPC分类号： H01J37/20 , H01J37/22
CPC分类号： H01J37/20 , G02B21/34 , H01J37/22 , H01J2237/28
摘要： The invention relates to a sample holder for holding a sample, or to a sample arranged on said sample holder, for inspecting said sample with both a light optical microscope and a charged particle microscope. The sample holder comprises a substrate (51) having a first side which is provided with a conductive layer (53), wherein said substrate and said conductive layer are at least substantially optically transparent. Also the sample is arranged at the first side of the substrate, in particular at a side of the conductive layer facing away from the substrate. Between the conductive layer and the sample a spacing layer (60) of a predetermined thickness is provided. Said spacing layer is substantially electrically insulating and at least substantially optically transparent.
摘要翻译：本发明涉及一种用于保持样品的样品架或布置在所述样品架上的样品，用光学显微镜和带电粒子显微镜来检查所述样品。样品保持器包括具有第一侧面的基底（51），该第一侧面设置有导电层（53），其中所述基底和所述导电层至少基本上是光学透明的。此外，样品布置在衬底的第一侧，特别是在导电层背离衬底的一侧。在导电层和样品之间提供预定厚度的间隔层（60）。所述间隔层基本上是电绝缘的，至少基本上是光学上透明的。

9. 发明申请

WO2014112877A1 OPTICAL AND INTEGRATED INSPECTION APPARATUS AND METHOD 审中-公开
标题翻译：光学和一体化检测装置和方法
公开(公告)号：WO2014112877A1
公开(公告)日：2014-07-24
申请号：PCT/NL2014/050024
申请日：2014-01-20
申请人： DELMIC B.V.
发明人： HOOGENBOOM, Jacob Pieter , HARING, Martijn Theo
IPC分类号： H01J37/22 , H01J37/30 , H01J37/304 , G02B21/36
CPC分类号： H01J37/22 , G02B21/367 , H01J37/228 , H01J37/3005 , H01J37/3045 , H01J2237/225 , H01J2237/2482
摘要： The invention relates to an apparatus and method for inspecting a sample, provided with an optical microscope to observe a region of interest on a sample and a charged particle system generating a focused charged particle beam to observe or modify the same or parts of the same region of interest, the apparatus provided with a control unit for electronically controlling said systems, adapted for recording two or more spectrally separated images of the region of interest on the sample, the control unit adapted for acquiring processing and representing the images as detected with said optical and said charged particle microscope systems, the unit further adapted for performing a registration procedure mutually correlating a region of interest in the optical images, wherein the apparatus is adapted for using a detection of a change in the optical images as caused therein by the charged particle beam for correlating said images.
摘要翻译：本发明涉及一种用于检查样品的装置和方法，该样品提供有光学显微镜以观察样品上的感兴趣区域和产生聚焦带电粒子束的带电粒子系统以观察或修改相同或相同区域的相同或部分所述设备具有用于电子地控制所述系统的控制单元，适用于在所述样本上记录所述感兴趣区域的两个或更多个频谱分离的图像，所述控制单元适于获取处理并表示所述图像，和所述带电粒子显微镜系统，所述单元还适于执行将所述光学图像中的感兴趣区域相互关联的登记过程，其中所述装置适于使用由所述带电粒子在其中引起的光学图像的变化的检测用于使所述图像相关联。

10. 发明申请

WO2014007624A1 INTEGRATED LIGHT OPTICAL AND CHARGED PARTICLE BEAM INSPECTION APPARATUS 审中-公开
标题翻译：一体化光源和充电颗粒光束检测装置
公开(公告)号：WO2014007624A1
公开(公告)日：2014-01-09
申请号：PCT/NL2013/050492
申请日：2013-07-04
申请人： DELMIC B.V.
发明人： HOOGENBOOM, Jacob Pieter , ZONNEVYLLE, Aernout Christiaan
IPC分类号： G02B21/00 , G02B21/33 , H01J37/22
CPC分类号： G02B21/0004 , G02B21/0088 , G02B21/33 , H01J37/228 , H01J37/28 , H01J2237/18 , H01J2237/2002 , H01J2237/2003 , H01J2237/2608
摘要： The invention relates to an apparatus for inspecting a sample, said apparatus equipped with a charged particle column for producing a focused beam of charged particles to observe or modify the sample, an optical microscope to observe the sample through a microscope slide, a vacuum chamber that contains the microscope slide and at least the objective lens of the optical microscope, wherein a liquid is included between the objective lens of the microscope and the microscope slide, directly in between objective lens and slide.
摘要翻译：本发明涉及一种用于检查样品的装置，所述装置装备有带电粒子柱，用于产生聚焦束的带电粒子以观察或修改样品，光学显微镜以通过显微镜载玻片观察样品，真空室包含显微镜幻灯片和至少光学显微镜的物镜，其中在显微镜的物镜和显微镜载玻片之间直接包括物镜和幻灯片之间的液体。

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