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1. 发明授权

US07610117B2 System and method for flow monitoring and control 有权
标题翻译：流量监控系统及方法
公开(公告)号：US07610117B2
公开(公告)日：2009-10-27
申请号：US11229912
申请日：2005-09-19
申请人： Craig L. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
发明人： Craig L. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
IPC分类号： G06F19/00
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/7761
摘要： One embodiment of the present invention can include a flow control device comprising an inlet, an outlet, a pressure loss element between the inlet and outlet, a pressure sensor located upstream from the constriction configured to measure a first pressure of a fluid flowing through the flow control device, a pressure sensor located downstream from the constriction, configured to measure a second pressure of the fluid flowing through the flow control device; and a controller coupled to the first pressure sensor and the second pressure sensor to generate a valve drive signal. The controller can generate a valve control signal based on a differential between the first pressure and the second pressure during a first mode of operation. The controller can also generate a valve control signal based on a measured pressure at a particular pressure sensor during a second mode of operation. The mode of operation can automatically switch.
摘要翻译：本发明的一个实施例可以包括流量控制装置，其包括入口，出口，在入口和出口之间的压力损失元件，位于收缩部上游的压力传感器，其被配置成测量流过流动的流体的第一压力控制装置，位于收缩部下游的压力传感器，被配置为测量流过所述流量控制装置的流体的第二压力; 以及耦合到第一压力传感器和第二压力传感器以产生阀驱动信号的控制器。控制器可以在第一操作模式期间基于第一压力和第二压力之间的差值产生阀控制信号。控制器还可以在第二操作模式期间基于特定压力传感器处的测量压力产生阀门控制信号。操作模式可以自动切换。

2. 发明授权

US08015995B2 System and method for flow monitoring and control 有权
标题翻译：流量监控系统及方法
公开(公告)号：US08015995B2
公开(公告)日：2011-09-13
申请号：US12777019
申请日：2010-05-10
申请人： Craig L. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
发明人： Craig L. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
IPC分类号： G05D7/06
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/0379 , Y10T137/7761 , Y10T137/8326
摘要： One embodiment of the present invention can include a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.
摘要翻译：本发明的一个实施例可以包括流量控制装置，其包括入口，与入口流体连通的出口，压力传感器，其可以是或可以不是流体控制装置的唯一压力传感器，以及控制器到压力传感器。控制器可以被配置为基于在单个压力传感器处的测量压力产生阀控制信号。

3. 发明授权

US07740024B2 System and method for flow monitoring and control 有权
标题翻译：流量监控系统及方法
公开(公告)号：US07740024B2
公开(公告)日：2010-06-22
申请号：US11054467
申请日：2005-02-09
申请人： Craig L. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
发明人： Craig L. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
IPC分类号： G05D7/06
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/0379 , Y10T137/7761 , Y10T137/8326
摘要： One embodiment of the present invention can include a flow control device a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.
摘要翻译：本发明的一个实施例可以包括流量控制装置，流量控制装置，其包括入口，与入口流体连通的出口，压力传感器，其可以是或可以不是流体控制装置的唯一压力传感器，以及耦合到所述压力传感器的控制器。控制器可以被配置为基于在单个压力传感器处的测量压力产生阀控制信号。

4. 发明申请

US20100236643A1 System and Method for Flow Monitoring and Control 有权
标题翻译：流量监控系统与方法
公开(公告)号：US20100236643A1
公开(公告)日：2010-09-23
申请号：US12777019
申请日：2010-05-10
申请人： Craig L. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
发明人： Craig L. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
IPC分类号： F16K31/12
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/0379 , Y10T137/7761 , Y10T137/8326
摘要： One embodiment of the present invention can include a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.
摘要翻译：本发明的一个实施例可以包括流量控制装置，其包括入口，与入口流体连通的出口，压力传感器，其可以是或可以不是流体控制装置的唯一压力传感器，以及控制器到压力传感器。控制器可以被配置为基于在单个压力传感器处的测量压力产生阀控制信号。

5. 发明授权

US06973375B2 System and method for flow monitoring and control 有权
公开(公告)号：US06973375B2
公开(公告)日：2005-12-06
申请号：US10777300
申请日：2004-02-12
申请人： Craig L.. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
发明人： Craig L.. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
IPC分类号： G05D7/06 , G06F19/00
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/7761
摘要： One embodiment of the present invention can include a flow control device comprising an inlet, an outlet, a pressure loss element between the inlet and outlet, a pressure sensor located upstream from the constriction configured to measure a first pressure of a fluid flowing through the flow control device, a pressure sensor located downstream from the constriction, configured to measure a second pressure of the fluid flowing through the flow control device; and a controller coupled to the first pressure sensor and the second pressure sensor to generate a valve drive signal. The controller can generate a valve control signal based on a differential between the first pressure and the second pressure during a first mode of operation. The controller can also generate a valve control signal based on a measured pressure at a particular pressure sensor during a second mode of operation. The mode of operation can automatically switch.

6. 发明申请

US20080185044A1 SYSTEM AND METHOD OF CHEMICAL DILUTION AND DISPENSE 审中-公开
标题翻译：化学沉淀和溶解的系统与方法
公开(公告)号：US20080185044A1
公开(公告)日：2008-08-07
申请号：US12024689
申请日：2008-02-01
申请人： Michael Clarke , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Joseph E. Smith , Rosario Mollica
发明人： Michael Clarke , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Joseph E. Smith , Rosario Mollica
IPC分类号： B67D5/56 , G05D11/13 , B01F15/04
CPC分类号： B01F5/0685 , B01F3/088 , G05D11/132 , Y10T137/0329
摘要： Embodiments disclosed herein provide a pump or a multiple-pump system that can mix chemicals without dilution tanks and can dispense the mixture of chemicals in a precise and highly controllable manner, particularly useful in semiconductor manufacturing processes. In some embodiments, one or more piston pumps of similar displacement are used to mix and dispense the chemical directly. A first valve is opened to a first chemical source. A piston is moved in a first direction to a selected position in a chamber to draw the first chemical into the chamber. The first valve is closed and a second valve is opened to a second chemical source. The piston is moved in the first direction to a second position in the chamber to draw in the second chemical and mix the chemicals. The second valve is closed and the piston is moved to dispense the fluids through a dispense port.
摘要翻译：本文公开的实施例提供了一种泵或多泵系统，其可以混合没有稀释罐的化学品，并且可以精确和高度可控的方式分配化学品的混合物，特别适用于半导体制造过程。在一些实施例中，使用类似位移的一个或多个活塞泵来直接混合和分配化学品。第一阀打开到第一化学源。活塞在第一方向上移动到室中的选定位置以将第一化学品吸入室中。第一阀关闭，第二阀打开到第二化学源。活塞沿第一方向移动到腔室中的第二位置以吸入第二化学品并混合化学品。关闭第二个阀门并移动活塞以通过分配口分配流体。

7. 发明申请

US20070290382A1 Systems and methods for managing heat transfer in a fluid handling device 审中-公开
标题翻译：用于管理流体处理装置中的热传递的系统和方法
公开(公告)号：US20070290382A1
公开(公告)日：2007-12-20
申请号：US11452754
申请日：2006-06-14
申请人： Marc Laverdiere , Iraj Gashgaee , Craig L. Brodeur , Robert F. McLoughlin
发明人： Marc Laverdiere , Iraj Gashgaee , Craig L. Brodeur , Robert F. McLoughlin
IPC分类号： F28F1/00
CPC分类号： F28F27/00 , F28F2270/00 , G05D7/0635
摘要： Systems and methods for reducing temperature variations induced by fluid handling equipment in process fluids by separating heat-producing portions of the control equipment from portions of the equipment which handle or are in close proximity to a fluid flow path. In one embodiment, the fluid handling components are contained in a first enclosure, while the heat-generating components are contained in a second enclosure. An air gap is maintained between the two enclosures to provide thermal isolation of the fluid handling components from the heat-generating components. In one embodiment, the air gap is maintained by connecting the two enclosures using insulating spacers. Interconnects between components in the two enclosures may be routed through an insulating tube that is sealed at each end to prevent heat transfer through the tube.
摘要翻译：用于通过将控制设备的发热部分与处理或紧邻流体流动路径的设备的部分分离来减少流体处理设备在过程流体中引起的温度变化的系统和方法。在一个实施例中，流体处理部件容纳在第一外壳中，而发热部件容纳在第二外壳中。在两个外壳之间保持气隙，以提供流体处理部件与发热部件的热隔离。在一个实施例中，通过使用绝缘间隔件连接两个外壳来保持气隙。两个外壳中的组件之间的互连可以通过绝缘管路，绝缘管在每一端密封，以防止通过管的热传递。

8. 发明申请

US20110194373A1 METHOD FOR CONTROLLED MIXING OF FLUIDS VIA TEMPERATURE 审中-公开
标题翻译：通过温度控制流体混合的方法
公开(公告)号：US20110194373A1
公开(公告)日：2011-08-11
申请号：US13092581
申请日：2011-04-22
申请人： J. Karl Niermeyer , Robert F. McLoughlin , Joseph E. Smith
发明人： J. Karl Niermeyer , Robert F. McLoughlin , Joseph E. Smith
IPC分类号： B01F15/06
CPC分类号： B01F15/0416 , B01F2215/0096 , G05D11/135 , G05D11/16 , G05D23/1393 , H01L21/67075 , Y10T137/0329
摘要： Embodiments of the invention provide a method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. In general, two streams of fluid of varying temperature are supplied to a mixer. The flow rate of each of the input fluids can be regulated to produce a mixed fluid at a desired flow rate and temperature. As an example, mass flow controllers can regulate the flow rates of a hot and cold stream of de-ionized water to produce a stream of de-ionized water at a desired flow rate and temperature.
摘要翻译：本发明的实施例提供了一种用于混合流体的连续流动生产的方法。混合流体可以包括不同流体的混合物或具有不同输入特性如温度的相同流体的混合物。通常，将两种不同温度的流体流供应到混合器。可以调节每个输入流体的流速以产生所需流速和温度的混合流体。例如，质量流量控制器可以调节去离子水的热和冷流的流速，以产生所需流速和温度的去离子水流。

9. 发明授权

US07494265B2 System and method for controlled mixing of fluids via temperature 失效
标题翻译：通过温度控制流体混合的系统和方法
公开(公告)号：US07494265B2
公开(公告)日：2009-02-24
申请号：US11386427
申请日：2006-03-22
申请人： J. Karl Niermeyer , Robert F. McLoughlin , Joseph E. Smith
发明人： J. Karl Niermeyer , Robert F. McLoughlin , Joseph E. Smith
IPC分类号： B01F15/04
CPC分类号： B01F15/0416 , B01F2215/0096 , G05D11/135 , G05D11/16 , G05D23/1393 , H01L21/67075 , Y10T137/0329
摘要： Embodiments of the present invention provide a system and method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. In general, two streams of fluid of varying temperature are supplied to a mixer. The flow rate of each of the input fluids can be regulated to produce a mixed fluid at a desired flow rate and temperature. As an example, mass flow controllers can regulate the flow rates of a hot and cold stream of de-ionized water to produce a stream of de-ionized water at a desired flow rate and temperature.
摘要翻译：本发明的实施例提供了用于混合流体的连续流动生产的系统和方法。混合流体可以包括不同流体的混合物或具有不同输入特性如温度的相同流体的混合物。通常，将两种不同温度的流体流供应到混合器。可以调节每个输入流体的流速以产生所需流速和温度的混合流体。例如，质量流量控制器可以调节去离子水的热和冷流的流速，以产生所需流速和温度的去离子水流。

10. 发明申请

US20090116334A1 METHOD FOR CONTROLLED MIXING OF FLUIDS VIA TEMPERATURE 失效
标题翻译：通过温度控制流体混合的方法
公开(公告)号：US20090116334A1
公开(公告)日：2009-05-07
申请号：US12350688
申请日：2009-01-08
申请人： J. Karl Niermeyer , Robert F. McLoughlin , Joseph E. Smith
发明人： J. Karl Niermeyer , Robert F. McLoughlin , Joseph E. Smith
IPC分类号： B01F15/06
CPC分类号： B01F15/0416 , B01F2215/0096 , G05D11/135 , G05D11/16 , G05D23/1393 , H01L21/67075 , Y10T137/0329
摘要： Embodiments of the present invention provide a method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. In general, two streams of fluid of varying temperature are supplied to a mixer. The flow rate of each of the input fluids can be regulated to produce a mixed fluid at a desired flow rate and temperature. As an example, mass flow controllers can regulate the flow rates of a hot and cold stream of de-ionized water to produce a stream of de-ionized water at a desired flow rate and temperature.
摘要翻译：本发明的实施例提供了一种用于混合流体的连续流动生产的方法。混合流体可以包括不同流体的混合物或具有不同输入特性如温度的相同流体的混合物。通常，将两种不同温度的流体流供应到混合器。可以调节每个输入流体的流速以产生所需流速和温度的混合流体。例如，质量流量控制器可以调节去离子水的热和冷流的流速，以产生所需流速和温度的去离子水流。

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