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1. 发明专利

JP2013014467A Burner for manufacturing synthetic silica glass and device for manufacturing synthetic silica glass using the burner 审中-公开
标题翻译：燃烧器制造合成二氧化硅玻璃和装置制造合成二氧化硅玻璃使用燃烧器
公开(公告)号：JP2013014467A
公开(公告)日：2013-01-24
申请号：JP2011147925
申请日：2011-07-04
申请人： Covalent Materials Tokuyama Corp , コバレントマテリアル徳山株式会社
发明人： ADACHI SADAHIRO , CHIJIMATSU TAKASHI , YAMAKADO MAMORU
IPC分类号： C03B8/04 , F23D14/22 , F23D14/58
CPC分类号： C03B19/1423 , C03B2207/06 , C03B2207/12 , C03B2207/14 , C03B2207/24 , C03B2207/62
摘要： PROBLEM TO BE SOLVED: To provide a burner for manufacturing a synthetic burner which suppresses the reduction in the deposition rate of a silica glass powder and the variation in quality of the synthetic silica glass, by suppressing interference of flames ejected from a nozzle and suppressing the turbulence in flame stream or material stream; and to provide a device for manufacturing synthetic silica glass using the burner.SOLUTION: A plurality of combustion-supporting gas supply nozzles 3C are placed on a curved surface X1 of a virtual cylinder X having the center line of the source nozzle as a center axis Y. The back ends of the combustion-supporting gas supply nozzles 3C are placed in the direction of the bottom face 2X of the virtual cylinder, and the tip ends are placed in the direction of the apex X3 of the virtual cylinder X. Also, the tip ends of the plurality of combustion-supporting gas supply nozzles 3C are placed in positions each rotated to the same direction at a specific angle to the back ends of the combustion-supporting gas supply nozzles 3C.
摘要翻译：要解决的问题：提供一种用于制造合成燃烧器的燃烧器，其抑制石英玻璃粉末的沉积速率的降低和合成石英玻璃的质量变化，通过抑制从喷嘴喷射的火焰的干扰并抑制火焰流或物料流中的湍流; 并提供使用燃烧器制造合成石英玻璃的装置。解决方案：将多个燃烧支持气体供给喷嘴3C放置在具有源喷嘴的中心线的虚拟气缸X的曲面X1上作为中心轴线Y.燃烧负载气体的后端供给喷嘴3C沿着虚拟圆筒的底面2X的方向配置，并且末端沿虚拟圆筒X的顶点X3的方向配置。另外，多个燃烧载气体的前端供给喷嘴3C被放置在与燃烧载体气体供给喷嘴3C的后端以特定角度相同的方向旋转的位置。版权所有（C）2013，JPO＆INPIT

2. 发明专利

JP2009067660A Synthetic silica glass production device, and method for producing synthetic silica glass using the same 有权
标题翻译：合成二氧化硅玻璃生产装置及其制造合成二氧化硅玻璃的方法
公开(公告)号：JP2009067660A
公开(公告)日：2009-04-02
申请号：JP2007240512
申请日：2007-09-18
申请人： Covalent Materials Tokuyama Corp , コバレントマテリアル徳山株式会社
发明人： HAYAKAWA AKI , YAMAKADO MAMORU , ADACHI SADAHIRO , CHIJIMATSU TAKASHI
IPC分类号： C03B20/00 , C03B8/04
CPC分类号： C03B19/1407 , C03B19/1446
摘要： PROBLEM TO BE SOLVED: To provide a synthetic silica glass production device where the sticking of silica glass powder is suppressed over the whole region of an inside wall in a furnace, and synthetic silica glass of high quality can be produced, and to provide a method for producing synthetic silica glass using the same.
SOLUTION: In the synthetic glass production device 1 where an Si-based compound gas, an O
2 gas and an H
2 gas are jetted into a furnace 2 from a burner 4, so as to be burnt, silica glass is deposited on a heat resistant substrate as a target 3, so as to form an ingot, the upper part of the furnace 2 is provided with a nozzle 5 jetting the gases, and the gases are jetted from the nozzle 5, so as to form a gas flow lowering while being circled along the inside wall face in the furnace.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供在炉内的内壁的整个区域上抑制二氧化硅玻璃粉末粘附的合成二氧化硅玻璃制造装置，并且可以生产高质量的合成石英玻璃，并且提供使用其制造合成石英玻璃的方法。解决方案：在合成玻璃制备装置1中，将Si基化合物气体，O SB 2气体和H 2 SB 3气体从炉2中燃烧器4，为了被烧制，将石英玻璃作为靶3沉积在耐热基材上，以形成锭，炉2的上部设有喷射气体的喷嘴5，并且从喷嘴5喷射气体，以便沿着炉内的内壁面盘绕而形成气流降低。版权所有（C）2009，JPO＆INPIT

3. 发明专利

JP2009132549A Synthetic quartz glass production device 审中-公开
标题翻译：合成石墨玻璃生产设备
公开(公告)号：JP2009132549A
公开(公告)日：2009-06-18
申请号：JP2007309142
申请日：2007-11-29
申请人： Covalent Materials Tokuyama Corp , コバレントマテリアル徳山株式会社
发明人： YAMAKADO MAMORU , CHIJIMATSU TAKASHI , HAYAKAWA AKI , ADACHI SADAHIRO
IPC分类号： C03B8/04 , C03B20/00
CPC分类号： C03B19/1446
摘要： PROBLEM TO BE SOLVED: To provide a synthetic quartz glass production device which performs stable exhaust, then, stabilize the atmosphere in a synthesis furnace (in an ingot synthesis part), also suppresses the sticking of quartz glass powder to an exhaust pipe and further, performs the exhaust of a plurality of synthesis furnaces (ingot synthesis parts) by a single exhaust device.
SOLUTION: The synthetic quartz glass production device comprises: the ingot synthesis part 3 with a burner and a target disposed therein; the exhaust part 5 provided below the ingot synthesis part 3 and exhausting gas to the outside; a differential pressure sensor 14 provided at the exhaust part 5 and measuring the pressure in the furnace and the pressure at the outside of the furnace; an exhaust pipe 10 connected to an exhaust port formed at the exhaust part; an open air introduction pipe 11 connected to the exhaust pipe; and a turning valve 12 controlling the opening degree of the open air introduction pipe, wherein the opening degree of the turning valve 12 is controlled in such a manner that the differential pressure in the differential pressure sensor 14 is made constant, and the distribution to the exhaust amount from the exhaust part 5 and to the introduction amount of the open air from the open air introduction pipe 11 is made variable without changing the total exhaust amount.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题为了提供一种稳定排气的合成石英玻璃制造装置，在合成炉（锭合成部）中使气氛稳定化的同时，还抑制石英玻璃粉末向排气管的粘附并且还通过单个排气装置进行多个合成炉（锭合成部）的排气。合成石英玻璃生产装置包括：铸锭合成部分3，其中放置有燃烧器和靶; 设置在锭合成部3的下方的排气部5向外部排出气体; 设置在排气部5并测量炉内的压力和炉外的压力的差压传感器14; 连接到形成在排气部的排气口的排气管10; 连接到排气管的露天导入管11; 以及控制开放空气引入管的开度的转向阀12，其中转向阀12的开度被控制成使得差压传感器14中的压差恒定，并且分配给使来自排气部5的排气量和从露天导入管11的开放空气的引入量变化而不改变总排气量。版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2012041231A Synthetic silica glass manufacturing apparatus 有权
标题翻译：合成二氧化硅玻璃制造设备
公开(公告)号：JP2012041231A
公开(公告)日：2012-03-01
申请号：JP2010183851
申请日：2010-08-19
申请人： Covalent Materials Tokuyama Corp , コバレントマテリアル徳山株式会社
发明人： CHIJIMATSU TAKASHI , YAMAKADO MAMORU , ADACHI SADAHIRO , OTA MIKIO
IPC分类号： C03B8/04 , C01B33/12
CPC分类号： C03B19/1407 , C03B19/1423
摘要： PROBLEM TO BE SOLVED: To provide a synthetic silica glass manufacturing apparatus which manufactures synthetic silica glass suppressed in a striae and an inner defect by forming a flame from a burner for synthesizing silica glass and a different flame to suppress a floating fine particle to attach to a synthesizing surface of ingot (a fused silica attached surface).SOLUTION: The burner 4 for synthesizing silica glass includes a burner inner cylinder tube 4a for leading out at least a raw material gas and a burner outer cylinder tube 4b for leading out at least a combustible or combustion-supporting gas. A first flame flow F1 which goes downward along the outer peripheral surface of the burner inner cylinder is formed by gas leading out from the burner outer cylinder tube 4b. The furnace comprises a refractory cylinder side wall part 10 and a refractory ceiling part 11 which blockades the upper part of the side wall part. A plurality of gas leading out holes 12 are formed at the ceiling part 11 and a second flame flow F2 which goes downward in the perpendicular direction from the gas leading out hole 12 are formed by leading out the gas from the gas leading out holes 12.
摘要翻译：解决的问题：提供一种合成石英玻璃制造装置，其通过从用于合成石英玻璃的燃烧器和不同的火焰形成火焰来抑制条纹和内部缺陷来制造合成二氧化硅玻璃以抑制漂浮的细颗粒附着于锭的合成面（熔融二氧化硅附着面）。解决方案：用于合成石英玻璃的燃烧器4包括用于至少引出原料气体的燃烧器内筒管4a和用于引出至少可燃或燃烧气体的燃烧器外筒管4b。沿着燃烧器内筒的外周面向下方的第一火焰流F1由从燃烧器外筒管4b导出的气体形成。该炉包括耐火缸侧壁部10和阻挡侧壁部的上部的耐火顶部11。在天花板部11形成有多个气体导出孔12，从气体导出孔12导出气体而形成从气体导出孔12向垂直方向下降的第二火焰流F2。版权所有（C）2012，JPO＆INPIT

5. 发明专利

JP2008247628A Method of manufacturing glass substrate 有权
标题翻译：制造玻璃基板的方法
公开(公告)号：JP2008247628A
公开(公告)日：2008-10-16
申请号：JP2007087738
申请日：2007-03-29
申请人： Covalent Materials Tokuyama Corp , コバレントマテリアル徳山株式会社
发明人： NAKAJIMA TOSHIO , SUMIYA MASAYUKI , TAKAHASHI HIROKI , ADACHI SADAHIRO , MATSUDA YUJI
IPC分类号： C03B11/00 , C03B20/00
CPC分类号： C03B11/08 , C03B11/005 , C03B40/02 , C03B2215/07 , C03B2215/44
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a glass substrate by which a large sized glass base material is manufactured.
SOLUTION: In the method of manufacturing the glass substrate by housing a heated preform glass gob on a lower mold of a mold on which a graphite sheet is lined and pressing the preform glass gob by an upper mold, the graphite sheet having 0.4-1.2 g/cm
3 density is formed by stacking a plurality of rectangular graphite sheets with an overlap margin of ≥10 mm and ≤1/3 of the width at least in one side and applying pressure of 20-100 g/cm
2 .
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：提供制造大尺寸玻璃基材的玻璃基板的制造方法。解决方案：在通过将加热的预制玻璃料滴放置在其上衬有石墨片的模具的下模具上并通过上模压制预制玻璃料滴的方法来制造玻璃基板的方法中，石墨片材具有0.4 通过将至少在一侧的宽度为≥10mm和≤1/ 3的重叠边界的多个长方形石墨片层叠并施加压力20来形成-1.2g / cm 3 -100g / cm 2 SP / 2。版权所有（C）2009，JPO＆INPIT

6. 发明专利

JP2009215086A Manufacturing apparatus of synthetic silica glass and manufacturing process of synthetic silica glass using the apparatus 审中-公开
标题翻译：合成二氧化硅玻璃的制造装置及使用装置的合成二氧化硅玻璃的制造工艺
公开(公告)号：JP2009215086A
公开(公告)日：2009-09-24
申请号：JP2008057205
申请日：2008-03-07
申请人： Covalent Materials Tokuyama Corp , コバレントマテリアル徳山株式会社
发明人： ADACHI SADAHIRO , CHIJIMATSU TAKASHI , YAMAKADO MAMORU
IPC分类号： C03B8/04 , C03B20/00
CPC分类号： C03B19/1423 , C03B2207/06 , C03B2207/12 , C03B2207/14
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing apparatus of a synthetic silica glass which is capable of manufacturing a synthetic silica glass having no striae and defects in it and a manufacturing process of the synthetic silica glass using the manufacturing apparatus.
SOLUTION: A burner 7 has an outer pipe 7a and an inner pipe 7b which are concentrically arranged and blow out a combustion gas, a plurality of first combustion-supporting gas nozzles 7c which are arranged between the outer pipe 7a and the inner pipe 7b and blow out a combustion-supporting gas, a source nozzle 7e which is arranged in the central part of the inner pipe 7b and blows out a material gas, and a plurality of second combustion-supporting gas nozzles 7f which are arranged between the inner pipe 7b and the source nozzle 7e and blows out a combustion-supporting gas. The combustion gas jetted from the inner pipe 7b and the second combustion-supporting gas jetted from the second combustion-supporting gas nozzles 7f forms a flame stream directed toward a target 4. The combustion gas jetted from the outer pipe 7a and the first combustion-supporting gas jetted from the first combustion-supporting gas nozzles 7c forms a radial flame stream directed toward the inner wall of a furnace 2.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：提供能够制造没有条纹和缺陷的合成石英玻璃的合成石英玻璃的制造装置和使用该制造装置的合成石英玻璃的制造方法。解决方案：燃烧器7具有同心排列并吹出燃烧气体的外管7a和内管7b，多个第一燃烧支撑气体喷嘴7c，其布置在外管7a和内管7之间管7b并吹出燃气支撑气体，排出在内管7b的中心部分并吹出原料气体的源嘴7e，以及多个第二燃烧支持气体喷嘴7f，内管7b和源喷嘴7e吹出燃烧载气。从内管7b喷射的燃烧气体和从第二燃烧支持气体喷嘴7f喷射的第二燃烧载体形成朝向目标4的火焰流。从外管7a和第一燃烧支撑气体喷嘴7f喷射的燃烧气体，从第一燃烧支持气体喷嘴7c喷射的支撑气体形成朝向炉子2的内壁的径向火焰流。版权所有（C）2009，JPO＆INPIT

7. 发明专利

JP2008137871A Apparatus and method for manufacturing synthetic silica glass 有权
标题翻译：用于制造合成二氧化硅玻璃的装置和方法
公开(公告)号：JP2008137871A
公开(公告)日：2008-06-19
申请号：JP2006328125
申请日：2006-12-05
申请人： Covalent Materials Tokuyama Corp , Toshiba Ceramics Co Ltd , コバレントマテリアル徳山株式会社 , 東芝セラミックス株式会社
发明人： YAMAKADO MAMORU , CHIJIMATSU TAKASHI , HAYAKAWA AKI , ADACHI SADAHIRO , NAKAJIMA TOSHIO , IWAI SEIJI
IPC分类号： C03B8/04 , C03B20/00
CPC分类号： C03B19/1407 , C03B19/1446
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing synthetic silica glass with which high quality synthetic silica glass can be manufactured.
SOLUTION: The apparatus for manufacturing the synthetic silica glass is equipped with: an exhaust chamber which communicates with a furnace body having a target, a burner or the like therein and is provided at a lower part of the furnace body; an exhaust flow passage provided so as to communicate with the exhaust chamber; an exhaust device provided so as to communicate with the exhaust flow passage; a pressure detection means for detecting the pressure in the exhaust chamber and atmospheric pressure; and an outside air intake mechanism which is provided in the exhaust flow passage and is capable of controlling the amount of outside air taken into the exhaust flow passage. The intake amount of outside air of the outside air intake mechanism is controlled by the differential pressure between the pressure in the exhaust chamber and atmospheric pressure, detected by the pressure detection means.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种可以制造高品质合成石英玻璃的合成石英玻璃的制造装置。＆lt; P＆gt;解决方案：合成石英玻璃的制造装置具备：排气室，其与炉体，燃烧器等连通，设置在炉体的下部; 排气流路，设置成与排气室连通; 设置成与排气流路连通的排气装置; 用于检测排气室中的压力和大气压力的压力检测装置; 以及外部进气机构，其设置在所述排气流路中，并且能够控制进入所述排气流路的外部空气量。外部空气吸入机构的外部空气的吸入量由压力检测单元检测到的排气室内的压力与大气压之间的差压来控制。版权所有（C）2008，JPO＆INPIT

8. 发明专利

JP2009242151A Method of manufacturing quartz glass substrate 有权
标题翻译：制造石英玻璃基板的方法
公开(公告)号：JP2009242151A
公开(公告)日：2009-10-22
申请号：JP2008089369
申请日：2008-03-31
申请人： Covalent Materials Corp , Covalent Materials Tokuyama Corp , コバレントマテリアル徳山株式会社 , コバレントマテリアル株式会社
发明人： NAKAJIMA TOSHIO , KUNIDA TAKESHI , ADACHI SADAHIRO
IPC分类号： C03B23/203 , C03B20/00 , C03C3/06
CPC分类号： C03B23/203
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a quartz glass substrate by which quartz glass plates are joined to each other with uniform thickness, the incorporation of bubbles in the joint part is suppressed and sagging of the joint part is suppressed. SOLUTION: The method of manufacturing the quartz glass substrate includes a step of: forming a projecting curved surface formed by a parabola which passes two points of the upper and lower surfaces of the quartz glass plate material which is in a range of 0.25D and 0.75D from the end surface chip part when the thickness of the quartz glass plate material is expressed by D and one point of the end surface chip part within ±10% of D based on the center of the thickness direction of the quartz glass plate material with respect to a cross section shape of a joining end surface of the quartz glass plate material A, B; a step of: supporting the each quartz glass plate material to be joined in the horizontal state and facing the end surfaces A1, B1 to be joined each other; a step of: fusing the joint end surfaces by applying flame to the joining end surfaces while swinging a plurality of burner nozzles provided along the longitudinal direction of the joining end surface with a prescribed pitch in the upper and lower side of the quartz glass plate material; and a step of: pressing the joining end surfaces to each other to be fused. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种石英玻璃基板的制造方法，石英玻璃基板通过石英玻璃基板以相同的厚度彼此接合，抑制了在接合部中的气泡的结合，并且抑制了接合部的下垂。解决方案：制造石英玻璃基板的方法包括以下步骤：形成通过抛物线形成的突出弯曲表面，其通过石英玻璃板材料的上表面和下表面的两个点，其范围为0.25 D和0.75D，当石英玻璃板材料的厚度由D表示时，端面芯片部分的一个点在D的±10％内，基于石英玻璃的厚度方向的中心相对于石英玻璃板材A，B的接合端面的截面形状的板材; 一个步骤：将水平状态的每一个待接合的石英玻璃板材料相对于彼此接合的端面A1，B1相对; 其特征在于，在所述石英玻璃板材的上侧和下侧以规定的间距使沿着所述接合端面的长度方向设置的多个燃烧嘴旋转，向所述接合端面施加火焰， ; 以及将所述接合端面彼此挤压以熔合的步骤。版权所有（C）2010，JPO＆INPIT

9. 发明专利

JP2008247629A Apparatus and method for manufacturing synthetic silica glass 有权
标题翻译：用于制造合成二氧化硅玻璃的装置和方法
公开(公告)号：JP2008247629A
公开(公告)日：2008-10-16
申请号：JP2007087746
申请日：2007-03-29
申请人： Covalent Materials Tokuyama Corp , コバレントマテリアル徳山株式会社
发明人： CHIJIMATSU TAKASHI , YAMAKADO MAMORU , ADACHI SADAHIRO , NAKAJIMA TOSHIO
IPC分类号： C03B8/04 , C03B20/00
CPC分类号： C03B19/1423 , C03B2207/12 , Y02P40/57
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing silica glass by which a silica glass ingot without defects and an improved yield are obtained. SOLUTION: The apparatus for manufacturing a synthetic silica glass has a burner whose center is arranged on the target rotating center and is equipped with a cylindrical burner outer pipe from which a combustible gas jets out, a plurality of source nozzles arranged at even intervals on the circumference whose center is the center of the burner outer pipe, a plurality of support gas nozzles arranged at even intervals on the circumference whose center is the center of the source nozzles, and a plurality of support gas nozzles arranged at even intervals on the circumferences of the circle and concentric circles on which the source nozzles are arranged. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：提供一种制造石英玻璃的装置，通过该装置获得无缺陷的二氧化硅玻璃锭和提高的收率。解决方案：合成石英玻璃的制造装置具有燃烧器，该燃烧器的中心配置在目标旋转中心，并配备有可燃气体喷出的圆筒形燃烧器外管，多个源喷嘴均匀排列其中心为燃烧器外管中心的圆周上的间隔，多个在中心为源嘴的中心的圆周上以均匀间隔布置的支撑气体喷嘴，以及多个支撑气体喷嘴，圆周和周围排列有源嘴的同心圆。版权所有（C）2009，JPO＆INPIT

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