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1. 发明授权

US07651879B2 Surface acoustic wave pressure sensors 失效
标题翻译：表面声波压力传感器
公开(公告)号：US07651879B2
公开(公告)日：2010-01-26
申请号：US11164845
申请日：2005-12-07
申请人： Cornel P. Cobianu , Ioan Pavelescu , Viorel V. Avramescu , James D. Cook , Leonard J. McNally
发明人： Cornel P. Cobianu , Ioan Pavelescu , Viorel V. Avramescu , James D. Cook , Leonard J. McNally
IPC分类号： H01L21/00
CPC分类号： G01L9/0025 , Y10T29/49005 , Y10T29/4902 , Y10T29/4908
摘要： Improved SAW pressure sensors and manufacturing methods thereof. A SAW wafer including a number of SAW transducers disposed thereon may be provided. A cover wafer may also be provided, with a glass wall situated between the cover wafer and the SAW wafer. The cover wafer may be secured to the SAW wafer such that the glass wall surrounds the SAW transducers. In some instances, the glass wall may define, at least in part, a separation between the cover wafer and the SAW wafer. One or more contours may also be provided between the cover wafer and the SAW wafer such that at least one of the contours surrounds at least one of the SAW transducers when the cover wafer is disposed over and secured relative to the SAW wafer.
摘要翻译：改进的SAW压力传感器及其制造方法。可以提供包括设置在其上的多个SAW换能器的SAW晶片。还可以提供覆盖晶片，其中玻璃壁位于盖晶片和SAW晶片之间。覆盖晶片可以固定到SAW晶片，使得玻璃壁围绕SAW换能器。在一些情况下，玻璃壁可以至少部分地限定覆盖晶片和SAW晶片之间的间隔。也可以在盖晶片和SAW晶片之间提供一个或多个轮廓，使得当盖晶片相对于SAW晶片设置在上方并且被固定时，轮廓中的至少一个围绕至少一个SAW换能器。

2. 发明授权

US07243547B2 MEMS SAW sensor 有权
标题翻译： MEMS SAW传感器
公开(公告)号：US07243547B2
公开(公告)日：2007-07-17
申请号：US10964519
申请日：2004-10-13
申请人： Cornel P. Cobianu , Ioan Pavelescu , James D. Cook
发明人： Cornel P. Cobianu , Ioan Pavelescu , James D. Cook
IPC分类号： H02N2/00
CPC分类号： G01L9/0025
摘要： Devices and methods for acoustically measuring temperature and pressure are disclosed. An illustrative SAW sensor can include an electrode structure that transmits and receives surface acoustic waves along a SAW delay line, a temperature sensor for measuring temperature along a first direction of the SAW delay line, and a pressure sensor for measuring pressure along a second direction of the SAW delay line. The SAW sensor can include an antenna that wirelessly transmits and receives RF signals to and from an electrical interrogator unit that can be used to power the SAW sensor.
摘要翻译：公开了用于声学测量温度和压力的装置和方法。示意性SAW传感器可以包括沿着SAW延迟线发送和接收表面声波的电极结构，用于沿着SAW延迟线的第一方向测量温度的温度传感器和用于沿着SAW延迟线的第二方向测量压力的压力传感器 SAW延迟线。 SAW传感器可以包括天线，该天线将无线传输和接收来自可以用于为SAW传感器供电的电询问器单元的RF信号。

3. 发明授权

US07000298B2 Method a quartz sensor 有权
标题翻译：方法石英传感器
公开(公告)号：US07000298B2
公开(公告)日：2006-02-21
申请号：US10828142
申请日：2004-04-20
申请人： James D. Cook , Cornel P. Cobianu , Vlad Buiculescu , Ioan Pavelescu , Brian D. Speldrich , James Z. Liu , Brian J. Marsh
发明人： James D. Cook , Cornel P. Cobianu , Vlad Buiculescu , Ioan Pavelescu , Brian D. Speldrich , James Z. Liu , Brian J. Marsh
IPC分类号： H01G7/00 , C23F1/00
CPC分类号： G01L9/0025 , Y10T29/42 , Y10T29/43 , Y10T29/49005 , Y10T29/4913
摘要： A quartz sensor method and system are disclosed in which a plurality of SAW sensing resonators can be mechanically simulated for implementation upon a quartz wafer substrate. The quartz wafer substrate can thereafter be appropriately etched to produce a quartz diaphragm from the quartz wafer substrate. A plurality of SAW sensing resonators (e.g., pressure, reference and/or temperature SAW resonators) can then be located upon the quartz wafer substrate, which is based upon the previously mechanically simulated for implementation upon the substrate to thereby produce a quartz sensor package from the quartz wafer substrate.
摘要翻译：公开了一种石英传感器方法和系统，其中可以机械地模拟多个SAW感测谐振器以在石英晶片衬底上实现。此后可以适当地蚀刻石英晶片衬底，以从石英晶片衬底产生石英膜。然后可以将多个SAW感测谐振器（例如，压力，参考和/或温度的SAW谐振器）定位在石英晶片衬底上，其基于在衬底上的先前机械模拟实现，从而从衬底上产生石英传感器封装，石英晶片基板。

4. 发明授权

US07784344B2 Integrated MEMS 3D multi-sensor 有权
标题翻译：集成MEMS三维多传感器
公开(公告)号：US07784344B2
公开(公告)日：2010-08-31
申请号：US11947603
申请日：2007-11-29
申请人： Ioan Pavelescu , Ion Georgescu , Dana Elena Guran , Cornel P. Cobianu
发明人： Ioan Pavelescu , Ion Georgescu , Dana Elena Guran , Cornel P. Cobianu
IPC分类号： G01P15/125 , G01P15/08
CPC分类号： G01P15/125 , G01D21/02 , G01P15/18 , G01P2015/082
摘要： Apparatus, methods, and systems for sensing acceleration and magnetic fields in all three axes from a first capacitive bridge sensor having a first proof mass; and a second capacitive bridge sensor having a second proof mass located within the first proof mass. The second proof mass is coupled to the first proof mass by springs that permit movement in the second axis. Sensing of the remaining axis of interest may be done by a third and fourth capacitive bridge configured similar to that of the first and second capacitive bridge sensors. The third and fourth capacitive bridge sensors may be oriented 90 degrees off of the first and second capacitive bridge. An alternative is to locate a third capacitive bridge within the second proof mass.
摘要翻译：用于感测来自具有第一检测质量的第一电容桥式传感器的所有三个轴上的加速度和磁场的装置，方法和系统; 以及第二电容桥式传感器，其具有位于所述第一检验质量块内的第二检验质量块。第二检测质量体通过允许在第二轴线上移动的弹簧联接到第一检验质量块。感兴趣的剩余轴可以通过配置成类似于第一和第二电容桥式传感器的第三和第四电容性桥接来实现。第三和第四电容桥式传感器可以取向于第一和第二电容桥90度。另一种选择是在第二个检测质量块内定位第三个电容桥。

5. 发明申请

US20090139330A1 INTEGRATED MEMS 3D MULTI-SENSOR 有权
标题翻译：集成MEMS 3D多传感器
公开(公告)号：US20090139330A1
公开(公告)日：2009-06-04
申请号：US11947603
申请日：2007-11-29
申请人： Ioan Pavelescu , Ion Georgescu , Dana Elena Guran , Cornel P. Cobianu
发明人： Ioan Pavelescu , Ion Georgescu , Dana Elena Guran , Cornel P. Cobianu
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01D21/02 , G01P15/18 , G01P2015/082
摘要： Apparatus, methods, and systems for sensing acceleration and magnetic fields in all three axes from a first capacitive bridge sensor having a first proof mass; and a second capacitive bridge sensor having a second proof mass located within the first proof mass. The second proof mass is coupled to the first proof mass by springs that permit movement in the second axis. The of sense the remaining axis of interest may be done by a third and fourth capacitive bridge configured similar to that of the first and second capacitive bridge sensors. The third and fourth capacitive bridge sensors may be oriented 90 degrees off of the first and second capacitive bridge. An alternative is to locate a third capacitive bridge within the second proof mass.
摘要翻译：用于感测来自具有第一检测质量的第一电容桥式传感器的所有三个轴上的加速度和磁场的装置，方法和系统; 以及第二电容桥式传感器，其具有位于所述第一检验质量块内的第二检验质量块。第二检测质量体通过允许在第二轴线上移动的弹簧联接到第一检验质量块。感测的剩余轴可以由配置为类似于第一和第二电容桥式传感器的第三和第四电容性桥接来实现。第三和第四电容桥式传感器可以取向于第一和第二电容桥90度。另一种选择是在第二个检测质量块内定位第三个电容桥。

6. 发明授权

US07401525B2 Micro-machined pressure sensor with polymer diaphragm 有权
标题翻译：具有聚合物隔膜的微加工压力传感器
公开(公告)号：US07401525B2
公开(公告)日：2008-07-22
申请号：US10907176
申请日：2005-03-23
申请人： Cornel P. Cobianu , Mihai Gologanu , Ioan Pavelescu , Bogdan Catalin Serban
发明人： Cornel P. Cobianu , Mihai Gologanu , Ioan Pavelescu , Bogdan Catalin Serban
IPC分类号： G01L9/00 , H01L51/40
CPC分类号： G01L1/18 , G01L1/2287 , G01L9/0052
摘要： A piezoresistive pressure and/or strain sensor micro-machined primarily from plastic and/or glass. In one illustrative embodiment, the piezoresistive pressure sensor is formed on a polymer substrate. A first selectively implanted region is provided in the polymer substrate to create a piezoresistive region in the polymer substrate. A second selectively implanted region is then provided in at least part of the first selectively implanted region to modulate the electrical conductivity of the first selectively implanted region. The illustrative sensor may be selectively implanted with, for example, nitrogen to create the piezoresistive region, and boron to modulate the electrical conductivity of the piezoresistive region. Phosphorus or any other suitable material may also be used to modulate the electrical conductivity of the piezoresistive region, as desired. The piezoresistive pressure/strain sensor may be formed from a single substrate, or two or more substrates, and the resulting pressure/strain sensor may be mounted in a plastic package, if desired.
摘要翻译：主要由塑料和/或玻璃微加工的压阻压力和/或应变传感器。在一个说明性实施例中，压阻式压力传感器形成在聚合物基板上。在聚合物衬底中提供第一选择性注入区域，以在聚合物衬底中产生压阻区域。然后在第一选择性注入区域的至少一部分中提供第二选择注入区域，以调制第一选择性注入区域的电导率。说明性传感器可以选择性地植入例如氮气以产生压阻区域和硼以调节压阻区域的导电性。根据需要，磷或任何其它合适的材料也可用于调节压阻区域的导电性。压阻压力/应变传感器可以由单个基板或两个或更多个基板形成，并且如果需要，所得到的压力/应变传感器可以安装在塑料封装中。

7. 发明授权

US07198981B2 Vacuum sealed surface acoustic wave pressure sensor 有权
标题翻译：真空密封声表面波压力传感器
公开(公告)号：US07198981B2
公开(公告)日：2007-04-03
申请号：US10971140
申请日：2004-10-21
申请人： Viorel V. Avramescu , Cornel P. Cobianu , Ioan Pavelescu
发明人： Viorel V. Avramescu , Cornel P. Cobianu , Ioan Pavelescu
IPC分类号： H01L21/44 , H01L21/48 , H01L21/50
CPC分类号： G01L9/0025 , H01L2224/48091 , H01L2224/48247 , H01L2924/15151 , H01L2924/181 , H01L2924/1815 , Y10T29/49 , Y10T29/49007 , H01L2924/00014 , H01L2924/00012
摘要： A vacuum sealed SAW pressure sensor is disclosed herein, which includes a sensing element configured as a SAW device (e.g., SAW resonator or SAW delay line) supported by a thin diaphragm. The substrate material can be implemented as a quartz wafer (i.e., a “base” wafer). The SAW device can be configured on one side of the wafer and the diaphragm etched on the opposite side. A quartz micromachined pressure sensor can thus be realized, which operates based on a variation of the surface wave velocity of a SAW device situated on the thin diaphragm. The SAW sensor is generally sealed in a vacuum and diaphragm sustains the sensor, thereby implementing a sensor on a wafer scale while allowing for a cost reduction per chip.
摘要翻译：本文公开了一种真空密封的SAW压力传感器，其包括被配置为由薄隔膜支撑的SAW器件（例如，SAW谐振器或SAW延迟线）的感测元件。衬底材料可以实现为石英晶片（即，“基底”晶片）。 SAW器件可以配置在晶片的一侧，并且隔膜在相对侧蚀刻。因此可以实现基于位于薄隔膜上的SAW器件的表面波速度的变化而操作的石英微加工压力传感器。 SAW传感器通常在真空中密封并且隔膜维持传感器，从而在晶片秤上实现传感器，同时允许每个芯片的成本降低。

8. 发明申请

US20090150029A1 CAPACITIVE INTEGRATED MEMS MULTI-SENSOR 审中-公开
标题翻译：电容式集成MEMS多传感器
公开(公告)号：US20090150029A1
公开(公告)日：2009-06-11
申请号：US11942592
申请日：2007-11-19
申请人： Ioan Pavelescu , Ion Georgescu , Cornel P. Cobianu , Dana Elena Guran
发明人： Ioan Pavelescu , Ion Georgescu , Cornel P. Cobianu , Dana Elena Guran
IPC分类号： B60R21/00 , G01P15/125 , G01P15/08 , G01P21/00
CPC分类号： G01P15/08 , G01D5/24 , G01P15/125
摘要： Apparatus, methods, and systems for incorporating and reading a plurality of bridge sensors is disclosed. The bridge sensors may be capacitive bridge sensors located on the same substrate with a digital processor and signal processing circuits to read the outputs of the sensors. The bridge sensors are accessed by a switch network coupled to the plurality of bridge sensors to selectively provide an output from at least one of the plurality of bridge sensors. The switch network may be a multiplexer, which provides a periodically oscillating voltage to the sensors, to energize the sensors. The multiplexer may also provide output from the energized sensor to the digital processor.
摘要翻译：公开了用于并入和读取多个桥式传感器的装置，方法和系统。桥式传感器可以是位于同一基板上的电容式桥式传感器，其具有数字处理器和用于读取传感器的输出的信号处理电路。桥式传感器由耦合到多个桥式传感器的开关网络访问，以选择性地提供来自多个桥式传感器中的至少一个的输出。开关网络可以是多路复用器，其向传感器提供周期性的振荡电压，以使传感器通电。多路复用器还可以将通电传感器的输出提供给数字处理器。

9. 发明授权

US07391325B2 Multifunctional multichip system for wireless sensing 有权
标题翻译：多功能多芯片无线传感系统
公开(公告)号：US07391325B2
公开(公告)日：2008-06-24
申请号：US11331722
申请日：2006-01-13
申请人： Cornel P. Cobianu , Ion Georgescu , James D. Cook , Viorel V. Avramescu
发明人： Cornel P. Cobianu , Ion Georgescu , James D. Cook , Viorel V. Avramescu
IPC分类号： G08B13/14
CPC分类号： G06K19/0723 , G06K19/0716
摘要： A multifunctional multichip system can operate in a passive mode by using at least one antenna to receive electromagnetic energy and using that energy to perform system functions. The system includes a sensor, an impedance matching circuit and an RFID module. The sensor produces a sensor signal containing a measurement. The RFID can produce an identification signal containing identification information. Alternatively, the RFID chip can be used in an addressing mode wherein the system only produces a signal in response to an addressing signal containing addressing information. The addressing signal is received from the electromagnetic field. In either mode, the sensor signal is coupled from the antenna into the electromagnetic field from which a receiver can obtain it. The signal can contain the identification information as well as the measurement. A matching network minimizes the effects of impedance mismatches between the system elements.
摘要翻译：多功能多芯片系统可以通过使用至少一个天线来接收电磁能并使用该能量来执行系统功能，以无源模式操作。该系统包括传感器，阻抗匹配电路和RFID模块。传感器产生包含测量值的传感器信号。 RFID可以产生包含识别信息的识别信号。或者，RFID芯片可以以寻址模式使用，其中系统仅响应于包含寻址信息的寻址信号产生信号。从电磁场接收寻址信号。在任一模式中，传感器信号从天线耦合到电磁场中，接收器可从该电磁场获得它。该信号可以包含识别信息以及测量。匹配网络可以最大限度地减少系统元件之间阻抗失配的影响。

10. 发明申请

US20110138878A1 CARBON DIOXIDE SENSOR WITH FUNTIONALIZED RESONATING BEAMS 有权
标题翻译：二氧化碳传感器，具有功能化的共振物质
公开(公告)号：US20110138878A1
公开(公告)日：2011-06-16
申请号：US12962170
申请日：2010-12-07
申请人： Bogdan Catalin Serban , Cornel P. Cobianu , Mihai N. Mihaila , Viorel Georgel Dumitru
发明人： Bogdan Catalin Serban , Cornel P. Cobianu , Mihai N. Mihaila , Viorel Georgel Dumitru
IPC分类号： G01N29/036
CPC分类号： G01N33/004 , G01N29/022 , G01N29/036 , G01N2291/021 , G01N2291/0256 , G01N2291/02809 , G01N2291/0427 , Y02A50/244
摘要： A carbon dioxide sensor comprising a first beam that includes a functionalized surface and a second beam that includes a functionalized surface such that reduced-drift differential sensing of carbon dioxide may be performed by monitoring changes in the resonant frequency of the first beam relative to the resonant frequency of second beam.
摘要翻译：一种二氧化碳传感器，包括包括官能化表面的第一光束和包括官能化表面的第二光束，使得可以通过监测第一光束相对于谐振的谐振频率的变化来执行二氧化碳的减小漂移差分感测第二光束的频率。

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