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    • 2. 发明公开
    • PROCEDE DE FABRICATION D'UNE CELLULE PHOTOVOLTAÏQUE
    • 程序的制造D'UNE CELLULEPHOTOVOLTAÏQUE
    • EP3213352A1
    • 2017-09-06
    • EP15784720.3
    • 2015-10-26
    • Commissariat à l'Énergie Atomique et aux Énergies Alternatives
    • LANTERNE, AdelineGALL, SamuelLE PERCHEC, JérômePIROT, Marc
    • H01L31/18H01L31/0236
    • H01L31/068H01L31/02363H01L31/1804H01L31/1864Y02E10/547Y02P70/521
    • The invention relates to a method for manufacturing a photovoltaic cell which includes, in series: from a semi-conductive substrate (1) made of crystalline silicon doped according to a first type of doping, and including a first surface (10) and a second surface (11) opposite said first surface (10), texturising (20) the surface of at least the first surface (10) of the substrate (1); forming, on the first texturised surface (10), a first semi-conductive zone (12) doped according to a second type of doping by implantation (21) of first doping elements made up of boron atoms in at least one portion of the substrate (1) and by activation (23) of said first doping elements via laser irradiation (4) of said first surface (10); thermal annealing (22) of the texturised substrate (1) prior to the laser irradiation of the first surface (10), said prior thermal annealing (22) being carried out at a temperature of 600ºC to 950°C, for a time longer than one minute.
    • 本发明涉及一种用于制造光伏电池的方法,该光伏电池的方法包括以下步骤:从由根据第一类掺杂掺杂的晶体硅制成的半导体衬底(1),并包括第一表面(10)和第二表面 与所述第一表面(10)相对的表面(11),纹理化(20)所述衬底(1)的至少所述第一表面(10)的表面; 在所述第一纹理化表面(10)上形成根据第二类型掺杂的第一半导体区(12),所述第一半导体区通过在所述衬底的至少一部分中注入由硼原子构成的第一掺杂元素(21) (1)并通过所述第一表面(10)的激光照射(4)激活(23)所述第一掺杂元素; 在激光照射第一表面(10)之前对纹理化基底(1)进行热退火(22),所述在先热退火(22)在600℃至950℃的温度下进行比 等一下。