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1. 发明授权

US08289613B2 Electromechanical device with optical function separated from mechanical and electrical function 失效
标题翻译：具有光学功能的机电装置与机电功能分离
公开(公告)号：US08289613B2
公开(公告)日：2012-10-16
申请号：US13086113
申请日：2011-04-13
申请人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
发明人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , B81B3/0051 , B81B2201/047 , G02B26/023 , G02B26/08 , G02F1/01 , G02F1/0128 , G02F1/133621 , G02F1/29 , G09G3/3466 , G09G3/3696 , Y10T29/42
摘要： A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.
摘要翻译：微机电（MEMS）装置包括衬底，在衬底上方的可移动元件以及可移动元件上方的致动电极。可移动元件包括可变形层和反射元件。可变形层与反射元件间隔开。

2. 发明申请

US20110188109A1 ELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 失效
标题翻译：具有从机械和电气功能分离的光学功能的机电装置
公开(公告)号：US20110188109A1
公开(公告)日：2011-08-04
申请号：US13086113
申请日：2011-04-13
申请人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
发明人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , B81B3/0051 , B81B2201/047 , G02B26/023 , G02B26/08 , G02F1/01 , G02F1/0128 , G02F1/133621 , G02F1/29 , G09G3/3466 , G09G3/3696 , Y10T29/42
摘要： A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.
摘要翻译：微机电（MEMS）装置包括衬底，在衬底上方的可移动元件以及可移动元件上方的致动电极。可移动元件包括可变形层和反射元件。可变形层与反射元件间隔开。

3. 发明授权

US07944599B2 Electromechanical device with optical function separated from mechanical and electrical function 有权
标题翻译：具有光学功能的机电装置与机电功能分离
公开(公告)号：US07944599B2
公开(公告)日：2011-05-17
申请号：US11772777
申请日：2007-07-02
申请人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
发明人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , B81B3/0051 , B81B2201/047 , G02B26/023 , G02B26/08 , G02F1/01 , G02F1/0128 , G02F1/133621 , G02F1/29 , G09G3/3466 , G09G3/3696 , Y10T29/42
摘要： A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.
摘要翻译：微机电（MEMS）装置包括衬底，在衬底上方的可移动元件以及可移动元件上方的致动电极。可移动元件包括可变形层和反射元件。可变形层与反射元件间隔开。

4. 发明申请

US20080013145A1 MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 有权
标题翻译：具有从机械和电气功能分离的光学功能的微电子器件
公开(公告)号：US20080013145A1
公开(公告)日：2008-01-17
申请号：US11772777
申请日：2007-07-02
申请人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
发明人： Clarence Chui , William Cummings , Brian Gally , Lior Kogut , Ming-Hau Tung , Yeh-Jiun Tung , Chih-Wei Chiang , Denis Endisch
IPC分类号： B81B7/02 , B81C5/00
CPC分类号： G02B26/001 , B81B3/0051 , B81B2201/047 , G02B26/023 , G02B26/08 , G02F1/01 , G02F1/0128 , G02F1/133621 , G02F1/29 , G09G3/3466 , G09G3/3696 , Y10T29/42
摘要： A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.
摘要翻译：微机电（MEMS）装置包括衬底，在衬底上方的可移动元件以及可移动元件上方的致动电极。可移动元件包括可变形层和反射元件。可变形层与反射元件间隔开。

5. 发明申请

US20070121118A1 White interferometric modulators and methods for forming the same 有权
标题翻译：白色干涉式调制剂及其形成方法
公开(公告)号：US20070121118A1
公开(公告)日：2007-05-31
申请号：US11698521
申请日：2007-01-25
申请人： Brian Gally , William Cummings , Ming-Hau Tung , Lior Kogut , Marc Mignard
发明人： Brian Gally , William Cummings , Ming-Hau Tung , Lior Kogut , Marc Mignard
IPC分类号： G01B9/02
CPC分类号： G02B26/001 , G09G3/346
摘要： An iterferometric modulator array is configured to reflect a broad band spectrum of optical wavelengths by arranging a reflector and a partially transparent substrate in a non-parallel relationship.
摘要翻译：干涉式调制器阵列被配置为通过将反射器和部分透明的衬底布置成非平行关系来反射光波长的宽带光谱。

6. 发明申请

US20060024880A1 System and method for micro-electromechanical operation of an interferometric modulator 有权
公开(公告)号：US20060024880A1
公开(公告)日：2006-02-02
申请号：US11189690
申请日：2005-07-26
申请人： Clarence Chui , William Cummings , Brian Gally , Ming-Hau Tung
发明人： Clarence Chui , William Cummings , Brian Gally , Ming-Hau Tung
IPC分类号： H01L21/8238
CPC分类号： B81B3/001 , B81B2201/042 , G02B26/001
摘要： An interferometric modulator is formed by a stationary layer and a mirror facing the stationary layer. The mirror is movable between the undriven and driven positions. Landing pads, bumps or spring clips are formed on at least one of the stationary layer and the mirror. The landing pads, bumps or spring clips can prevent the stationary layer and the mirror from contacting each other when the mirror is in the driven position. The spring clips exert force on the mirror toward the undriven position when the mirror is in the driven position and in contact with the spring clips.

7. 发明申请

US20070249078A1 Non-planar surface structures and process for microelectromechanical systems 审中-公开
标题翻译：微机电系统的非平面表面结构和工艺
公开(公告)号：US20070249078A1
公开(公告)日：2007-10-25
申请号：US11406776
申请日：2006-04-19
申请人： Ming-Hau Tung , Sriram Akella , William Cummings , Lior Kogut
发明人： Ming-Hau Tung , Sriram Akella , William Cummings , Lior Kogut
IPC分类号： H01L21/00
CPC分类号： B81B3/0008 , G02B26/001
摘要： Methods of making MEMS devices including interferometric modulators involve depositing various layers, including stationary layers, movable layers and sacrificial layers, on a substrate. Apertures are formed in one or more of the various layers so as to form a non-planar surface on the movable and/or the stationary layers. Other layers may be formed over the formed apertures. Removal of the sacrificial layer from between the resulting non-planar movable and/or stationary layers results in a released MEMS device having reduced contact area and/or a larger surface separation between the movable and stationary layers when the MEMS device is actuated. The reduced contact area results in lower adhesion forces and reduced stiction during actuation of the MEMS device. These methods may be used to manufacture released and unreleased interferometric modulators.
摘要翻译：制造包括干涉式调制器的MEMS器件的方法包括在衬底上沉积包括固定层，可移动层和牺牲层的各种层。在一个或多个不同层中形成孔径，以便在可移动和/或固定层上形成非平面表面。可以在所形成的孔上形成其它层。从所得到的非平面可移动和/或固定层之间去除牺牲层导致当MEMS器件致动时，可释放的MEMS器件具有减小的接触面积和/或可移动层和固定层之间较大的表面间隔。减小的接触面积导致MEMS器件的致动期间较低的粘附力和降低的静摩擦力。这些方法可用于制造释放和未释放的干涉式调制器。

8. 发明申请

US20050179977A1 Spatial light modulator with integrated optical compensation structure 有权
标题翻译：具有集成光学补偿结构的空间光调制器
公开(公告)号：US20050179977A1
公开(公告)日：2005-08-18
申请号：US11036965
申请日：2005-01-14
申请人： Clarence Chui , Jeffrey Sampsell , William Cummings , Ming-Hau Tung
发明人： Clarence Chui , Jeffrey Sampsell , William Cummings , Ming-Hau Tung
IPC分类号： G02B26/00 , G02F1/1335 , G02F1/136
CPC分类号： G02F1/21 , G02B26/001 , G02F1/1335 , G02F2001/13356
摘要： A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.
摘要翻译：空间光调制器包括集成的光学补偿结构，例如，布置在基板和多个可单独寻址的光调制元件之间的光学补偿结构，或位于光调制元件的相对侧上的光学补偿结构基质。可单独寻址的光调制元件被配置为调制透射通过或从透明基板反射的光。制造这种空间光调制器的方法包括在衬底上制造光学补偿结构，并在光学补偿结构上制造多个单独可寻址的光调制元件。光学补偿结构可以是无源光学补偿结构。光学补偿结构可以包括补充前照明光源，漫射器，黑色掩模，衍射光学元件，滤色器，抗反射层，散射光的结构，微透镜阵列和全息图中的一个或多个电影。

9. 发明申请

US20080112039A1 SPATIAL LIGHT MODULATOR WITH INTEGRATED OPTICAL COMPENSATION STRUCTURE 失效
公开(公告)号：US20080112039A1
公开(公告)日：2008-05-15
申请号：US12014657
申请日：2008-01-15
申请人： Clarence Chui , Jeffrey Sampsell , William Cummings , Ming-Hau Tung
发明人： Clarence Chui , Jeffrey Sampsell , William Cummings , Ming-Hau Tung
IPC分类号： G02B26/00
CPC分类号： G02F1/21 , G02B26/001 , G02F1/1335 , G02F2001/13356
摘要： A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.

10. 发明申请

US20070170568A1 Packaging for an interferometric modulator 有权
标题翻译：用于干涉式调制器的包装
公开(公告)号：US20070170568A1
公开(公告)日：2007-07-26
申请号：US11653088
申请日：2007-01-12
申请人： Lauren Palmateer , Brian Gally , William Cummings , Manish Kothari , Clarence Chui
发明人： Lauren Palmateer , Brian Gally , William Cummings , Manish Kothari , Clarence Chui
IPC分类号： H01L23/02
CPC分类号： G02B26/001
摘要： A package is made of a transparent substrate having an interferometric modulator and a back plate. A non-hermetic seal joins the back plate to the substrate to form a package, and a desiccant resides inside the package. A method of packaging an interferometric modulator includes providing a transparent substrate and manufacturing an interferometric modulator array on a backside of the substrate. A back plate is provided and a desiccant is applied to the back plate. The back plate is sealed to the backside of the substrate with a back seal in ambient conditions, thereby forming a package.
摘要翻译：封装由具有干涉式调制器和背板的透明基板制成。非气密密封件将背板连接到基板以形成包装，并且干燥剂驻留在包装内。封装干涉式调制器的方法包括提供透明衬底并在衬底的背面制造干涉式调制器阵列。设置背板，并将干燥剂施加到背板上。背板在环境条件下用背密封件密封到基板的背面，由此形成封装。

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