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    • 7. 发明授权
    • Thin film transistor with source and drain separately formed from amorphus silicon region
    • 源极和漏极的薄膜晶体管分别由非晶硅区域形成
    • US07701007B2
    • 2010-04-20
    • US11393742
    • 2006-03-31
    • Chi-Wen ChenTing-Chang ChangPo-Tsun LiuKuo-Yu HuangJen-Chien Peng
    • Chi-Wen ChenTing-Chang ChangPo-Tsun LiuKuo-Yu HuangJen-Chien Peng
    • H01L27/12
    • H01L29/66765H01L27/124H01L27/1248
    • A Thin Film Transistor comprises a gate electrode formed on a substrate; a gate insulation layer covering the gate electrode; an amorphous silicon (a-Si) region disposed on the gate insulation layer and above the gate electrode; a doped a-Si region formed on the a-Si region; the source and drain metal regions separately formed on the doped a-Si region and above the gate electrode, and isolated from the a-Si region; a passivation layer formed on the gate insulation layer and covering the source, drain and data-line (DL) metal regions; and a conductive layer formed on the passivation layer. The passivation layer has a first, second and third vias for respectively exposing the partial surfaces of the source, drain and DL metal regions. The first, second and third vias are filled with the conductive layer, so that the DL and source metal regions are connected via the conductive layer.
    • 薄膜晶体管包括形成在基板上的栅电极; 覆盖栅电极的栅极绝缘层; 设置在栅极绝缘层上和栅电极上方的非晶硅(a-Si)区; 形成在a-Si区上的掺杂a-Si区; 源极和漏极金属区域分别形成在掺杂的a-Si区域和栅电极上方,并与a-Si区域隔离; 形成在所述栅极绝缘层上并覆盖所述源极,漏极和数据线(DL)金属区域的钝化层; 以及形成在钝化层上的导电层。 钝化层具有用于分别暴露源极,漏极和DL金属区域的部分表面的第一,第二和第三通孔。 第一,第二和第三通孔填充有导电层,使得DL和源极金属区域经由导电层连接。
    • 9. 发明授权
    • Method for forming thin film transistor with lateral crystallization
    • 用横向结晶形成薄膜晶体管的方法
    • US06426246B1
    • 2002-07-30
    • US09789347
    • 2001-02-21
    • Ting-Chang ChangDu-Zen PengChun-Yen Chang
    • Ting-Chang ChangDu-Zen PengChun-Yen Chang
    • H01L2100
    • H01L29/66757H01L29/78675
    • A method for forming thin film transistor with lateral crystallization. The method at least includes the following steps. First of all, an insulation substrate is provided. Then, an amorphous silicon layer is provided on the insulation substrate. The seeds are formed by annealing a portion of the amorphous silicon layer by excimer laser system, and the lateral-growth grain is formed by using the seeds to grow laterally by annealing the amorphous silicon layer, wherein the amorphous silicon layer defines an active region. Then, sequentially a dielectric layer and a polysilicon layer is deposited on the active region, wherein the dielectric layer and the polysilicon layer are gate electrodes, a gate is defined on the substrate, and the polysilicon layer is formed by etching. Next, source and drain regions are formed by implanting numerous ions into amorphous silicon layer by using the gate electrode as a mask.
    • 一种用于形成具有横向结晶的薄膜晶体管的方法。 该方法至少包括以下步骤。 首先,提供绝缘基板。 然后,在绝缘基板上设置非晶硅层。 通过准分子激光系统对非晶硅层的一部分进行退火而形成种子,并且通过使晶种通过使非晶硅层退火而横向生长而形成横向生长晶粒,其中非晶硅层限定有源区。 然后,依次在有源区上沉积介质层和多晶硅层,其中介质层和多晶硅层是栅电极,在衬底上限定栅极,并且通过蚀刻形成多晶硅层。 接下来,通过使用栅电极作为掩模,通过将许多离子注入非晶硅层来形成源区和漏区。