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    • 9. 发明申请
    • High-Voltage Mosfets Having Current Diversion Region in Substrate Near Fieldplate
    • 高压滤波器在底板附近有电流导流区域
    • US20130093010A1
    • 2013-04-18
    • US13271342
    • 2011-10-12
    • Yun-Pei HuangYi-Feng ChangJam-Wem Lee
    • Yun-Pei HuangYi-Feng ChangJam-Wem Lee
    • H01L29/78
    • H01L29/0653H01L29/063H01L29/0696H01L29/1095H01L29/402H01L29/42368H01L29/7816
    • To limit or prevent current crowding, various HV-MOSFET embodiments include a current diversion region disposed near a drain region of an HV-MOSFET and near an upper surface of the semiconductor substrate. In some embodiments, the current diversion region is disposed near a field plate of the HV-MOSFET, wherein the field plate can also help to reduce or “smooth” electric fields near the drain to help limit current crowding. In some embodiments, the current diversion region is a p-doped, n-doped, or intrinsic region that is at a floating voltage potential. This current diversion region can push current deeper into the substrate of the HV-MOSFET (relative to conventional HV-MOSFETs), thereby reducing current crowding during ESD events. By reducing current crowding, the current diversion region makes the HV-MOSFETs disclosed herein more impervious to ESD events and, therefore, more reliable in real-world applications.
    • 为了限制或防止电流拥挤,各种HV-MOSFET实施例包括设置在HV-MOSFET的漏极区附近并且在半导体衬底的上表面附近的电流分流区域。 在一些实施例中,电流引流区域设置在HV-MOSFET的场板附近,其中场板还可以帮助减少或“平滑”漏极附近的电场,以帮助限制电流拥挤。 在一些实施例中,电流分流区域是处于浮置电压电位的p掺杂,n掺杂或本征区域。 该电流分流区可以将电流深度推入HV-MOSFET的衬底(相对于传统HV-MOSFET),从而减少ESD事件期间的电流拥挤。 通过减少电流拥挤,电流分流区域使得本文公开的HV-MOSFET更加不可避免地存在ESD事件,因此在现实世界的应用中更可靠。