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    • 7. 发明授权
    • Method for fabricating an integrated nozzle plate and multi-level micro-fluidic devices fabricated
    • 制造集成喷嘴板和多层微流体装置的方法
    • US06951622B2
    • 2005-10-04
    • US10215143
    • 2002-08-08
    • Chen-Kuei ChungChun-Jun Lin
    • Chen-Kuei ChungChun-Jun Lin
    • B41J2/16
    • B41J2/1643B41J2/1603B41J2/1628B41J2/1629B41J2/1631B41J2/1645Y10T29/49401
    • A method for fabricating a multi-level micro-fluidic device for an micro-fluidic injection head equipped with symmetrical heaters. The method incorporates two thick photoresist deposition processes, a light-absorbing layer deposited in-between and a nickel-containing material electroplating process. The first thick photoresist deposition process is carried out to form a primary ink chamber in fluid communication with a funnel-shaped manifold and an injector orifice. The light-absorbing layer is deposited to prevent overheating of the first photoresist layer during a subsequent metal seed layer sputtering process. The second thick photoresist deposition process forms a mold for forming an injector passageway that leads to the injector orifice. The nickel-containing material electroplating process provides an orifice plate on top of the injection head through which an injector passageway that leads to the injector orifice is provided for injecting ink droplets.
    • 一种用于制造具有对称加热器的微流体注射头的多级微流体装置的方法。 该方法包括两个厚的光致抗蚀剂沉积工艺,沉积在其间的光吸收层和含镍材料电镀工艺。 执行第一厚的光致抗蚀剂沉积工艺以形成与漏斗形歧管和喷射器孔口流体连通的初级墨水室。 沉积光吸收层以防止在随后的金属晶种层溅射工艺期间第一光致抗蚀剂层的过热。 第二厚的光致抗蚀剂沉积工艺形成用于形成通向喷射孔的喷射器通道的模具。 含镍材料电镀工艺在注射头的顶部提供孔板,通过该孔板提供通向喷射器孔口的喷射器通道用于喷射墨滴。