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    • 1. 发明申请
    • IMAGE SENSOR DEVICE WITH SILICON MICROSTRUCTURES AND FABRICATION METHOD THEREOF
    • 具有硅微结构的图像传感器装置及其制造方法
    • US20110001038A1
    • 2011-01-06
    • US12497146
    • 2009-07-02
    • Chi-Xiang TsengI-Hsiu ChenChen-Wei LuChun-Hung Lai
    • Chi-Xiang TsengI-Hsiu ChenChen-Wei LuChun-Hung Lai
    • H01L27/142H01L21/77
    • H01L27/14625H01L27/14621H01L27/14627H01L27/14685
    • An image sensor device is disclosed. The image sensor device includes a semiconductor substrate having a first pixel region and a second pixel region. A first photo-conversion device is disposed within the first pixel region of the semiconductor substrate to receive a first light source. A second photo-conversion device is disposed within the second pixel region of the semiconductor substrate to receive a second light source different from the first light source. The surface of the semiconductor substrate corresponding to the first photo-conversion device and the second photo-conversion device has a first microstructure and a second microstructure, respectively, permitting a reflectivity of the first pixel region with respect to the first light source to be lower than a reflectivity of the second pixel region with respect to the first light source. The invention also discloses a fabrication method of the image sensor device.
    • 公开了一种图像传感器装置。 图像传感器装置包括具有第一像素区域和第二像素区域的半导体衬底。 第一光转换装置设置在半导体衬底的第一像素区域内以接收第一光源。 第二光转换装置设置在半导体衬底的第二像素区域内,以接收与第一光源不同的第二光源。 对应于第一光转换装置和第二光转换装置的半导体基板的表面分别具有允许第一像素区域相对于第一光源的反射率较低的第一微结构和第二微结构 而不是第二像素区域相对于第一光源的反射率。 本发明还公开了一种图像传感器装置的制造方法。
    • 2. 发明授权
    • Image sensor device with silicon microstructures and fabrication method thereof
    • 具有硅微结构的图像传感器装置及其制造方法
    • US08227736B2
    • 2012-07-24
    • US12497146
    • 2009-07-02
    • Chi-Xiang TsengI-Hsiu ChenChen-Wei LuChun-Hung Lai
    • Chi-Xiang TsengI-Hsiu ChenChen-Wei LuChun-Hung Lai
    • H01L21/00
    • H01L27/14625H01L27/14621H01L27/14627H01L27/14685
    • An image sensor device is disclosed. The image sensor device includes a semiconductor substrate having a first pixel region and a second pixel region. A first photo-conversion device is disposed within the first pixel region of the semiconductor substrate to receive a first light source. A second photo-conversion device is disposed within the second pixel region of the semiconductor substrate to receive a second light source different from the first light source. The surface of the semiconductor substrate corresponding to the first photo-conversion device and the second photo-conversion device has a first microstructure and a second microstructure, respectively, permitting a reflectivity of the first pixel region with respect to the first light source to be lower than a reflectivity of the second pixel region with respect to the first light source. The invention also discloses a fabrication method of the image sensor device.
    • 公开了一种图像传感器装置。 图像传感器装置包括具有第一像素区域和第二像素区域的半导体衬底。 第一光转换装置设置在半导体衬底的第一像素区域内以接收第一光源。 第二光转换装置设置在半导体衬底的第二像素区域内,以接收与第一光源不同的第二光源。 对应于第一光转换装置和第二光转换装置的半导体基板的表面分别具有允许第一像素区域相对于第一光源的反射率较低的第一微结构和第二微结构 而不是第二像素区域相对于第一光源的反射率。 本发明还公开了一种图像传感器装置的制造方法。