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    • 4. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
    • 半导体器件及其制造方法
    • US20110266542A1
    • 2011-11-03
    • US13094933
    • 2011-04-27
    • Min Ki RYUSang Hee ParkChi Sun HwangKyoung Ik Cho
    • Min Ki RYUSang Hee ParkChi Sun HwangKyoung Ik Cho
    • H01L29/04H01L21/336
    • H01L27/124H01L27/1225H01L29/78648
    • Provided are a semiconductor device including a dual gate transistor and a method of fabricating the same. The semiconductor device includes a lower gate electrode, an upper gate electrode on the lower gate electrode, a contact plug interposed between the lower gate electrode and the upper gate electrode, and connecting the lower gate electrode to the upper gate electrode, and a functional electrode spaced apart from the upper gate electrode and formed at the same height as the upper gate electrode. The dual gate transistor exhibiting high field effect mobility is applied to the semiconductor device, so that characteristics of the semiconductor device can be improved. In particular, since no additional mask or deposition process is necessary, a large-area high-definition semiconductor device can be mass-produced with neither an increase in process cost nor a decrease in yield.
    • 提供一种包括双栅晶体管的半导体器件及其制造方法。 半导体器件包括下栅极电极,下栅电极上的上栅电极,插入在下栅电极和上栅电极之间的接触插塞,并将下栅电极连接到上栅电极,功能电极 与上栅电极间隔开并形成与上栅电极相同的高度。 表现出高场效应迁移率的双栅极晶体管被施加到半导体器件,从而可以提高半导体器件的特性。 特别是,由于不需要附加的掩模或沉积工艺,所以大面积的高分辨率半导体器件既可以增加工艺成本也不会降低产量。