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1. 发明申请

US20110118855A1 SCALABLE MOTION CONTROL SYSTEM 有权
标题翻译：可调节运动控制系统
公开(公告)号：US20110118855A1
公开(公告)日：2011-05-19
申请号：US13011970
申请日：2011-01-24
申请人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
发明人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
IPC分类号： G05B13/04
CPC分类号： G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要： A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
摘要翻译：控制系统包括具有主控制器的集群架构，包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分，以及包括由主控制器控制的集群控制器的分布式控制部分。集群控制器控制一个或多个第二个遥控器的活动。第一和第二遥控器中的每一个被用于驱动一个或多个轴。

2. 发明授权

US07904182B2 Scalable motion control system 有权
标题翻译：可扩展运动控制系统
公开(公告)号：US07904182B2
公开(公告)日：2011-03-08
申请号：US11178615
申请日：2005-07-11
申请人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
发明人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
IPC分类号： G05B15/00 , G05B19/418 , G05B19/18 , G06F19/00 , G06K9/00 , B05C11/00
CPC分类号： G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要： A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
摘要翻译：控制系统包括具有主控制器的集群架构，包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分，以及包括由主控制器控制的集群控制器的分布式控制部分。集群控制器控制一个或多个第二个遥控器的活动。第一和第二遥控器中的每一个被用于驱动一个或多个轴。

3. 发明授权

US07522267B2 Substrate transport apparatus with automated alignment 有权
标题翻译：带自动对准的基板输送装置
公开(公告)号：US07522267B2
公开(公告)日：2009-04-21
申请号：US11485146
申请日：2006-07-11
申请人： Christopher Hofmeister , Martin Hosek , Stuart Beale
发明人： Christopher Hofmeister , Martin Hosek , Stuart Beale
IPC分类号： G03B27/58 , G03B27/62
CPC分类号： H01L21/681 , H01L21/67259 , H01L21/68 , H01L21/68707
摘要： A substrate processing apparatus is provided with a substrate transport apparatus. The transport apparatus is used for automating alignment of the processing apparatus. In one aspect, a through-beam sensor on the transport apparatus is used to level parts of the processing apparatus. In another aspect, a through-beam sensor on the transport apparatus is used to determine the locations and angular orientations of substrate stations within a plane. In another aspect, the transport apparatus teaches itself the accurate location of a substrate aligner by repeatedly placing the substrate on the aligner, recording positional data, constructing a cost function, and determining the location of the aligner by minimizing the cost function using a numerical technique.
摘要翻译：基板处理装置具有基板输送装置。运送装置用于使处理装置的对准自动化。在一个方面，传送装置上的通过光束传感器用于对处理装置的部分进行平坦化。在另一方面，传送装置上的通过束传感器用于确定在平面内的衬底台的位置和角取向。另一方面，运输设备通过将衬底重新放置在对准器上来记录衬底对准器的准确位置，记录位置数据，构建成本函数，以及通过使用数字技术最小化成本函数来确定对准器的位置。

4. 发明授权

US09020617B2 Scalable motion control system 有权
标题翻译：可扩展运动控制系统
公开(公告)号：US09020617B2
公开(公告)日：2015-04-28
申请号：US13011970
申请日：2011-01-24
申请人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
发明人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
IPC分类号： G05B15/00 , G05B13/02 , G05B19/18 , G05B19/418 , G05B19/414
CPC分类号： G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要： A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
摘要翻译：控制系统包括具有主控制器的集群架构，包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分，以及包括由主控制器控制的集群控制器的分布式控制部分。集群控制器控制一个或多个第二个遥控器的活动。第一和第二遥控器中的每一个被用于驱动一个或多个轴。

5. 发明申请

US20070065144A1 Substrate transport apparatus with automated alignment 有权
标题翻译：带自动对准的基板输送装置
公开(公告)号：US20070065144A1
公开(公告)日：2007-03-22
申请号：US11485146
申请日：2006-07-11
申请人： Christopher Hofmeister , Martin Hosek , Stuart Beale
发明人： Christopher Hofmeister , Martin Hosek , Stuart Beale
IPC分类号： G03D5/00
CPC分类号： H01L21/681 , H01L21/67259 , H01L21/68 , H01L21/68707
摘要： A substrate processing apparatus is provided with a substrate transport apparatus. The transport apparatus is used for automating alignment of the processing apparatus. In one aspect, a through-beam sensor on the transport apparatus is used to level parts of the processing apparatus. In another aspect, a through-beam sensor on the transport apparatus is used to determine the locations and angular orientations of substrate stations within a plane. In another aspect, the transport apparatus teaches itself the accurate location of a substrate aligner by repeatedly placing the substrate on the aligner, recording positional data, constructing a cost function, and determining the location of the aligner by minimizing the cost function using a numerical technique.
摘要翻译：基板处理装置具有基板输送装置。运送装置用于使处理装置的对准自动化。在一个方面，传送装置上的通过光束传感器用于对处理装置的部分进行平坦化。在另一方面，传送装置上的通过束传感器用于确定在平面内的衬底台的位置和角取向。另一方面，运输设备通过将衬底重新放置在对准器上来记录衬底对准器的准确位置，记录位置数据，构建成本函数，以及通过使用数字技术最小化成本函数来确定对准器的位置。

6. 发明申请

US20070010898A1 Scalable motion control system 有权
标题翻译：可扩展运动控制系统
公开(公告)号：US20070010898A1
公开(公告)日：2007-01-11
申请号：US11178615
申请日：2005-07-11
申请人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
发明人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
IPC分类号： G05B19/18
CPC分类号： G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要： A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
摘要翻译：控制系统包括具有主控制器的集群架构，包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分，以及包括由主控制器控制的集群控制器的分布式控制部分。集群控制器控制一个或多个第二个遥控器的活动。第一和第二遥控器中的每一个被用于驱动一个或多个轴。

7. 发明授权

US08752449B2 Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism 有权
标题翻译：具有利用机械开关机构的多个可动臂的基板输送装置
公开(公告)号：US08752449B2
公开(公告)日：2014-06-17
申请号：US12117415
申请日：2008-05-08
申请人： Christopher Hofmeister , Alexander G. Krupyshev , Krysztof A. Majczak , Martin Hosek , Jay Krishnasamy
发明人： Christopher Hofmeister , Alexander G. Krupyshev , Krysztof A. Majczak , Martin Hosek , Jay Krishnasamy
IPC分类号： B25J17/00 , B25J17/02
CPC分类号： B25J11/0095 , B25J9/106 , B25J9/126 , H01L21/67742 , H01L21/68707 , Y10S414/141 , Y10S901/15 , Y10S901/21 , Y10S901/23 , Y10S901/27 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.
摘要翻译：一种基板输送装置，包括框架，连接到框架并且包括至少一个可独立控制的马达的驱动部分，连接到框架的至少两个基板输送臂，并且包括布置成用于支撑和输送基板的臂连杆，以及机械运动开关耦合到所述至少一个可独立控制的电动机和所述至少两个衬底传送臂，用于实现所述至少两个衬底传送臂中的一个的延伸和缩回，同时所述至少两个衬底传送臂中的另一个保持基本上缩回组态。

8. 发明授权

US08283813B2 Robot drive with magnetic spindle bearings 有权
标题翻译：带磁性主轴轴承的机器人驱动
公开(公告)号：US08283813B2
公开(公告)日：2012-10-09
申请号：US12163996
申请日：2008-06-27
申请人： Ulysses Gilchrist , Martin Hosek , Jairo Terra Moura , Jay Krishnasamy , Christopher Hofmeister
发明人： Ulysses Gilchrist , Martin Hosek , Jairo Terra Moura , Jay Krishnasamy , Christopher Hofmeister
IPC分类号： H02K7/09
CPC分类号： H02K7/09 , H02K29/03 , Y10S901/15 , Y10S901/23 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.
摘要翻译：一种用于基板输送臂的驱动部分，包括框架，至少一个定子，其安装在框架内，该定子包括第一马达部分和至少一个定子轴承部分和同轴主轴，所述至少一个定子轴承部分和基本上不被所述至少一个定子其中所述同轴心轴的每个驱动轴包括转子，所述转子包括第二电动机部分和至少一个转子轴承部分，所述至少一个转子轴承部分构造成与所述至少一个定子轴承部分相接合，其中所述第一电动机部分被配置为接合所述第二马达部分绕所述心轴绕预定轴线进行旋转，并且所述至少一个定子支承部分构造成通过与所述至少一个相互作用的至少一个相互作用来实现连接到所述同轴心轴的基底输送臂端部执行器的至少调平转子轴承部分。

9. 发明申请

US20090033316A1 SENSOR FOR POSITION AND GAP MEASUREMENT 有权
标题翻译：传感器用于位置和差距测量
公开(公告)号：US20090033316A1
公开(公告)日：2009-02-05
申请号：US12163802
申请日：2008-06-27
申请人： Martin Hosek , Christopher Hofmeister
发明人： Martin Hosek , Christopher Hofmeister
IPC分类号： G01B7/00
CPC分类号： G01D5/2086
摘要： An apparatus including a controller, a transport in communication with the controller having a movable portion and a transport path and a multi-dimensional position measurement device in communication with the controller, the multi-dimensional position measurement device including a plurality of transformers and at least one element attached to the movable portion, wherein the multi-dimensional position measurement device is configured so that a circuit is completed in at least one plurality of transformers as the at least one element passes proximate to the at least one of the plurality of transformers and the controller is configured to calculate a multi-dimensional position of the movable object based on an output of the at least one of the plurality of transformers, wherein the multi-dimensional position includes at least a gap between the movable portion and the plurality of transformers.
摘要翻译：一种装置，包括控制器，与具有可移动部分和传送路径的控制器通信的传输和与控制器通信的多维位置测量装置，所述多维位置测量装置包括多个变压器，并且至少一个元件附接到可移动部分，其中所述多维位置测量装置被配置为使得当至少一个元件通过所述多个变压器中的至少一个变压器时至少一个多个变压器中完成电路，并且控制器被配置为基于多个变压器中的至少一个的输出来计算可移动物体的多维位置，其中多维位置至少包括可移动部分和多个变压器之间的间隙。

10. 发明申请

US20120223597A1 MULTIPLE DIMENSION POSITION SENSOR 有权
标题翻译：多尺寸位置传感器
公开(公告)号：US20120223597A1
公开(公告)日：2012-09-06
申请号：US13412392
申请日：2012-03-05
申请人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
发明人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
IPC分类号： H02K41/02
CPC分类号： G01B7/003
摘要： An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement.
摘要翻译：一种装置，包括控制器，与具有可移动部分和传送路径的控制器通信的工件传送装置，以及多维位置测量装置，其包括至少一个固定在可移动部分上的场产生压板和至少一个定位的传感器组沿着传送路径并与控制器通信，场产生压板被配置为用于位置测量并推动可移动部分，所述至少一个传感器组中的每个传感器被配置为沿着对应于一个传感器的单个轴提供一个输出信号基于所述至少一个传感器组中的至少一个传感器的一个输出信号，所述多个传感器组中的所述多个传感器组中的所述多个传感器组中的至少一个传感器的一个输出信号被配置为计算所述可移动部分的多维位置，包括平面位置和间隙测量的三维位置。

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