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1. 发明申请

US20100019108A1 Holding apparatus and pivot structure thereof 审中-公开
标题翻译：保持装置及其枢轴结构
公开(公告)号：US20100019108A1
公开(公告)日：2010-01-28
申请号：US12314132
申请日：2008-12-04
申请人： Chin-Chen Li , Pei-Shan Wu
发明人： Chin-Chen Li , Pei-Shan Wu
IPC分类号： F16M11/20 , A47B96/06
CPC分类号： F16M11/14 , F16M11/041 , F16M2200/024
摘要： The invention provides a holding apparatus. The holding apparatus comprises a loading stand and a positioning pivot pillar. A pivoting part comprising at least one adjusting unit is set on the loading stand. A pivot member comprising a plurality of locking units is set on one end of the positioning pivot pillar. The pivot member is movably pivoted to the pivoting part. When one of the at least one adjusting unit and one of the plurality of locking units are locked due to a rotation occurred between the loading stand and the positioning pivot pillar, the loading stand and the positioning pivot pillar will form a locked state.
摘要翻译：本发明提供一种保持装置。保持装置包括装载架和定位枢轴支柱。包括至少一个调节单元的枢转部件设置在装载台上。包括多个锁定单元的枢转构件设置在定位枢轴支柱的一端上。枢转构件可枢转地枢转到枢转部分。当所述至少一个调节单元中的一个和所述多个锁定单元中的一个由于在所述装载台和所述定位枢轴柱之间发生旋转而被锁定时，所述装载台和所述定位枢轴柱将形成锁定状态。

2. 发明申请

US20110079963A1 VACUUM APPARATUS OF ROTARY MOTION ENTRY 有权
标题翻译：旋转运动入口的真空装置
公开(公告)号：US20110079963A1
公开(公告)日：2011-04-07
申请号：US12615811
申请日：2009-11-10
申请人： Kuan-Chou Chen , Fu-Ching Tung , Chia-Ming Chen , Pei-Shan Wu , Tean-Mu Shen , Jung-Chen Ho
发明人： Kuan-Chou Chen , Fu-Ching Tung , Chia-Ming Chen , Pei-Shan Wu , Tean-Mu Shen , Jung-Chen Ho
IPC分类号： F16C33/10 , F16J15/32
CPC分类号： F16C33/76 , F16C2300/62 , Y10S277/913
摘要： A vacuum apparatus of rotary motion entry is disclosed, which comprises: a shaft sleeve, disposed on a cavity wall of a vacuum system; a rotary shaft, ensheathed by the shaft sleeve; and a transmission set, connected to the rotary shaft for driving the same; wherein, the rotary shaft is disposed passing through a hole formed on the base of the shaft sleeve while there are a first bearing, a second bearing, a sealing ring and a shaft seal being arranged separately inside the hole. Moreover, the shaft seal has a flake-like lip flange formed extending toward the center of the hole, that is capable of being extended away from the vacuum system by the inserting of the rotary shaft into the hole, and thereby, enabling the lip flange to engage with the rotary shaft tightly by the atmospheric pressure and thus isolating the outside world from the vacuum system.
摘要翻译：公开了一种旋转运动进入的真空装置，其包括：设置在真空系统的空腔壁上的轴套; 旋转轴，由轴套套管; 以及与驱动该旋转轴的旋转轴连接的变速器组; 其特征在于，所述旋转轴设置成穿过形成在所述轴套的基部上的孔，同时在所述孔内分开设置有第一轴承，第二轴承，密封环和轴密封件。此外，轴密封件具有形成为朝向孔中心延伸的片状唇缘凸缘，其能够通过将旋转轴插入孔而远离真空系统延伸，从而使得唇缘凸缘与大气压力紧密地与旋转轴啮合，从而将外界与真空系统隔离开来。

3. 发明申请

US20100123381A1 CATHODE DISCHARGE APPARATUS 有权
标题翻译：阴极放电装置
公开(公告)号：US20100123381A1
公开(公告)日：2010-05-20
申请号：US12411797
申请日：2009-03-26
申请人： FU-CHING TUNG , Tean-Mu Shen , Jung-Chen Ho , Pei-Shan Wu , Chia-Ming Chen , Kuan-Chou Chen , Jung-Chen Chien , Muh-Wang Liang
发明人： FU-CHING TUNG , Tean-Mu Shen , Jung-Chen Ho , Pei-Shan Wu , Chia-Ming Chen , Kuan-Chou Chen , Jung-Chen Chien , Muh-Wang Liang
IPC分类号： H01J17/26
CPC分类号： H01J37/32449 , H01J37/3244
摘要： A cathode discharge device is provided. The cathode discharge apparatus includes an anode, a cathode and plural cathode chambers. The cathode is located inside the anode, where the cathode has plural flow channels and at least one flow channel hole, and the plural flow channels are connected to one another through the flow channel hole. The plural cathode chambers are located inside the cathode, wherein each of the cathode chambers has a chamber outlet and a chamber inlet connected with at least one of the flow channels.
摘要翻译：提供阴极放电装置。阴极放电装置包括阳极，阴极和多个阴极室。阴极位于阳极的内部，其中阴极具有多个流动通道和至少一个流动通道孔，并且多个流动通道通过流动通道孔相互连接。多个阴极室位于阴极内，其中每个阴极室具有腔室出口和与至少一个流动通道连接的室入口。

4. 发明授权

US08198793B2 Cathode discharge apparatus 有权
标题翻译：阴极放电装置
公开(公告)号：US08198793B2
公开(公告)日：2012-06-12
申请号：US12411797
申请日：2009-03-26
申请人： Fu-Ching Tung , Tean-Mu Shen , Jung-Chen Ho , Pei-Shan Wu , Chia-Ming Chen , Kuan-Chou Chen , Jung-Chen Chien , Muh-Wang Liang
发明人： Fu-Ching Tung , Tean-Mu Shen , Jung-Chen Ho , Pei-Shan Wu , Chia-Ming Chen , Kuan-Chou Chen , Jung-Chen Chien , Muh-Wang Liang
IPC分类号： H01J17/26
CPC分类号： H01J37/32449 , H01J37/3244
摘要： A cathode discharge device is provided. The cathode discharge apparatus includes an anode, a cathode and plural cathode chambers. The cathode is located inside the anode, where the cathode has plural flow channels and at least one flow channel hole, and the plural flow channels are connected to one another through the flow channel hole. The plural cathode chambers are located inside the cathode, wherein each of the cathode chambers has a chamber outlet and a chamber inlet connected with at least one of the flow channels.
摘要翻译：提供阴极放电装置。阴极放电装置包括阳极，阴极和多个阴极室。阴极位于阳极的内部，其中阴极具有多个流动通道和至少一个流动通道孔，并且多个流动通道通过流动通道孔相互连接。多个阴极室位于阴极内，其中每个阴极室具有腔室出口和与至少一个流动通道连接的室入口。

5. 发明申请

US20120132366A1 PLASMA PROCESSING APPARATUS 审中-公开
标题翻译：等离子体加工设备
公开(公告)号：US20120132366A1
公开(公告)日：2012-05-31
申请号：US13157878
申请日：2011-06-10
申请人： Pei-Shan Wu , Fu-Ching Tung , Jung-Chen Ho , Tean-Mu Shen , Chia-Ming Chen
发明人： Pei-Shan Wu , Fu-Ching Tung , Jung-Chen Ho , Tean-Mu Shen , Chia-Ming Chen
IPC分类号： C23F1/08 , C23C16/50 , C23C16/455
CPC分类号： H01J37/3244 , C23C16/45565 , C23C16/45574 , C23C16/45578 , C23C16/50 , C23C16/513 , H01J37/32357
摘要： A plasma processing apparatus is disclosed, which includes: a cathode module comprising a plurality of first channels which generate plasma; an anode having a chamber which contains the cathode and having at least one plasma outlet corresponding to the first channels; an electrode connected to a high-frequency electrical power and the cathode; and a plurality of second channels penetrating through the anode; wherein each first channel and each second channel are disposed alternately. A first gas is introduced into the first channels ionized under high frequency electrical power. In the first channels, the free electrons collided brings high density of plasma. The generated plasma is expelled through the plasma outlet to form a plasma diffusion region. A second gas is introduced into the plasma diffusion region through the second channels to take part in the reaction of plasma.
摘要翻译：公开了一种等离子体处理装置，其包括：阴极模块，包括产生等离子体的多个第一通道; 阳极，其具有容纳阴极并具有至少一个对应于第一通道的等离子体出口的室; 连接到高频电源的电极和阴极; 和穿过阳极的多个第二通道; 其中每个第一通道和每个第二通道交替设置。将第一气体引入到在高频电力下离子化的第一通道。在第一个通道中，自由电子碰撞带来了高密度的等离子体。产生的等离子体通过等离子体出口排出以形成等离子体扩散区域。通过第二通道将第二气体引入等离子体扩散区域以参与等离子体的反应。

6. 发明授权

US08146923B2 Vacuum apparatus of rotary motion entry 有权
标题翻译：旋转运动进入真空装置
公开(公告)号：US08146923B2
公开(公告)日：2012-04-03
申请号：US12615811
申请日：2009-11-10
申请人： Kuan-Chou Chen , Fu-Ching Tung , Chia-Ming Chen , Pei-Shan Wu , Tean-Mu Shen , Jung-Chen Ho
发明人： Kuan-Chou Chen , Fu-Ching Tung , Chia-Ming Chen , Pei-Shan Wu , Tean-Mu Shen , Jung-Chen Ho
IPC分类号： F16J15/54
CPC分类号： F16C33/76 , F16C2300/62 , Y10S277/913
摘要： A vacuum apparatus of rotary motion entry is disclosed, which comprises: a shaft sleeve, disposed on a cavity wall of a vacuum system; a rotary shaft, ensheathed by the shaft sleeve; and a transmission set, connected to the rotary shaft for driving the same; wherein, the rotary shaft is disposed passing through a hole formed on the base of the shaft sleeve while there are a first bearing, a second bearing, a sealing ring and a shaft seal being arranged separately inside the hole. Moreover, the shaft seal has a flake-like lip flange formed extending toward the center of the hole, that is capable of being extended away from the vacuum system by the inserting of the rotary shaft into the hole, and thereby, enabling the lip flange to engage with the rotary shaft tightly by the atmospheric pressure and thus isolating the outside world from the vacuum system.
摘要翻译：公开了一种旋转运动进入的真空装置，其包括：设置在真空系统的空腔壁上的轴套; 旋转轴，由轴套套管; 以及与驱动该旋转轴的旋转轴连接的变速器组; 其特征在于，所述旋转轴设置成穿过形成在所述轴套的基部上的孔，同时在所述孔内分开设置有第一轴承，第二轴承，密封环和轴密封件。此外，轴密封件具有形成为朝向孔中心延伸的片状唇缘凸缘，其能够通过将旋转轴插入孔而远离真空系统延伸，从而使得唇缘凸缘与大气压力紧密地与旋转轴啮合，从而将外界与真空系统隔离开来。

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