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    • 6. 发明授权
    • Multistage pump and method for assembling the pump
    • 多级泵和组装泵的方法
    • US6123526A
    • 2000-09-26
    • US156585
    • 1998-09-18
    • Chun-Chien ChenMing-Shinn LiouTean-Mu ShenJung-Chen ChienTsung-Hsin Lin
    • Chun-Chien ChenMing-Shinn LiouTean-Mu ShenJung-Chen ChienTsung-Hsin Lin
    • F04C23/00F01C1/30
    • F04C23/001
    • A multistage pump includes a shaft assembly and a housing and spacing plates. The shaft assembly completed by forming shafts and rotors integrally. The spacing plates defining a plurality of successive compression chambers, each chamber is delimited by two symmetrical spacing plates, there has a ring groove associated with the spacing plates, and having an elastic component placed. When the elastic component pressed by the housing, it became leakage and the clearance between the rotors and the spacing plates be easily controlled, by this way, the pump using parts are easy to manufacture, can be machined accurately and which enable highly accurate assembly to be achieved. As to the assembling method, which is characterized by mounting the high pressure end axial bearing seat and the high pressured end plate, then to control the clearance between the high pressure end plate of the bearing seat and the rotors. Furthermore, to install the spacing plates and the housing make the compression chamber formed.
    • 多级泵包括轴组件和壳体和间隔板。 轴组件通过一体形成轴和转子而完成。 间隔板限定多个连续的压缩室,每个室由两个对称的间隔板限定,其中有一个与间隔板相关的环槽,并具有放置的弹性部件。 当由壳体挤压的弹性部件变得泄漏时,转子和间隔板之间的间隙容易控制,这样,泵的使用部件易于制造,可以精确地加工,并且能够高精度地组装 实现。 关于组装方法,其特征在于安装高压端轴向座和高压端板,以控制轴承座的高压端板与转子之间的间隙。 此外,为了安装间隔板和壳体,形成压缩室。
    • 7. 发明申请
    • GAS SHOWER MODULE
    • 气体淋浴模块
    • US20100126418A1
    • 2010-05-27
    • US12369990
    • 2009-02-12
    • Ming-Tung CHIANGJung-Chen ChienJung-Chen HoChih-Yung Huang
    • Ming-Tung CHIANGJung-Chen ChienJung-Chen HoChih-Yung Huang
    • C23C16/54
    • C23C16/45565C23C16/45559C23C16/45561
    • A gas shower module for gas deposition chamber with gas channel is disclosed, which comprises: a distributor with at least one diffusion cell positioned therein along first axial direction and a plurality of inlets respectively connecting to the gas channel and the diffusion cell; and a shower with at least one shower channel positioned therein along second axial direction, gas-inlet passages connected to the diffusion cell and the shower channel, and gas-outlet passages connected to the shower channel and gas deposition chamber; wherein the distributor is connected to the shower so that the diffusion cell will be connected to the shower channel through gas-inlet passages and the first axial direction is not be parallel to the second axial direction.
    • 公开了一种具有气体通道的气体沉积室的气体淋浴组件,其包括:分配器,其具有沿着第一轴向方向定位在其中的至少一个扩散单元和分别连接到气体通道和扩散单元的多个入口; 以及具有沿着第二轴向位于其中的至少一个淋浴通道的淋浴,连接到扩散池和淋浴通道的气体入口通道,以及连接到淋浴通道和气体沉积室的气体出口通道; 其中所述分配器连接到所述淋浴器,使得所述扩散单元将通过气体入口通道连接到所述淋浴通道,并且所述第一轴向方向不平行于所述第二轴向方向。