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    • 5. 发明授权
    • Method of delivering source reagent vapor mixtures for chemical vapor
deposition using interiorly partitioned injector
    • 使用内部分隔的注射器输送用于化学气相沉积的源试剂蒸汽混合物的方法
    • US6010748A
    • 2000-01-04
    • US17384
    • 1998-02-03
    • Peter C. Van BuskirkJames A. FairDavid E. Kotecki
    • Peter C. Van BuskirkJames A. FairDavid E. Kotecki
    • C23C16/44C23C16/455C23C16/40
    • C23C16/45565C23C16/455
    • A showerhead disperser device for mixing plural vapor streams, comprising: a housing including front and rear walls in spaced apart relation to one another, and a side wall therebetween, defining within the housing an interior volume; the front wall having a multiplicity of vapor mixture discharge openings therein, for discharging mixed vapor from the interior volume of the housing exteriorly thereof, flow passages joined to the housing for introducing into the interior volume of the housing respective fluids to be mixed therein; and at least one baffle plate mounted in the interior volume of the housing, intermediate the front and rear walls of the housing, the baffle plate having an edge in spaced relation to the side wall to form an annular flow passage therebetween and the baffle plate having at least one of the respective fluids directed thereagainst upon introduction to the interior volume of the housing, for distribution thereof in the interior volume of the housing. The baffled showerhead disperser is usefully employed to enable formation of CVD thin films of highly uniform composition and thickness.
    • 一种用于混合多个蒸汽流的喷头分散装置,包括:壳体,其包括彼此间隔开的前壁和后壁以及其间的侧壁,在所述壳体内限定内部容积; 所述前壁在其中具有多个蒸汽混合物排出口,用于从其外部的所述壳体的内部容积排出混合蒸气,流动通道连接到所述壳体,以将待混合的各种流体引入到所述壳体的内部容积中; 以及安装在所述壳体的内部容积中的至少一个挡板,位于所述壳体的前壁和后壁之间,所述挡板具有与所述侧壁间隔开的边缘,以在其间形成环形流动通道,并且所述挡板具有 各个流体中的至少一个在引入壳体的内部空间时被引导到其上,以将其分配在壳体的内部空间中。 挡板式喷头分散机有利地用于形成高度均匀组成和厚度的CVD薄膜。